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Generation remote from the workpiece
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CPC
H01J37/32357
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H
ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00
Discharge tubes with provision for introducing objects or material to be exposed to the discharge
Current Industry
H01J37/32357
Generation remote from the workpiece
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Patents Grants
last 30 patents
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Patent Grant
Substrate processing system including dual ion filter for downstrea...
Patent number
11,967,486
Issue date
Apr 23, 2024
Lam Research Corporation
Andrew Stratton Bravo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus
Patent number
11,961,714
Issue date
Apr 16, 2024
Linco Technology Co., Ltd.
Yi-Yuan Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Processing chamber with multiple plasma units
Patent number
11,955,319
Issue date
Apr 9, 2024
Applied Materials, Inc.
Kazuya Daito
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Deposition method
Patent number
11,952,661
Issue date
Apr 9, 2024
Tokyo Electron Limited
Hitoshi Kato
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Ash rate recovery method in plasma strip chamber
Patent number
11,955,318
Issue date
Apr 9, 2024
Applied Materials, Inc.
Yongkwan Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods and apparatus for processing a substrate
Patent number
11,955,333
Issue date
Apr 9, 2024
Applied Materials, Inc.
Jethro Tannos
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Heater support kit for bevel etch chamber
Patent number
11,948,790
Issue date
Apr 2, 2024
Applied Materials, Inc.
Tuan Anh Nguyen
B08 - CLEANING
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Patent Grant
Lids and lid assembly kits for atomic layer deposition chambers
Patent number
11,932,939
Issue date
Mar 19, 2024
Applied Materials, Inc.
Muhammad M. Rasheed
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Minimizing radical recombination using ALD silicon oxide surface co...
Patent number
11,920,239
Issue date
Mar 5, 2024
Lam Research Corporation
Bhadri N. Varadarajan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Cleaning of sin with CCP plasma or RPS clean
Patent number
11,915,918
Issue date
Feb 27, 2024
Applied Materials, Inc.
Jothilingam Ramalingam
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and device for depositing silicon onto substrates
Patent number
11,901,179
Issue date
Feb 13, 2024
ASM IP Holding B.V.
John Tolle
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods and apparatus for symmetrical hollow cathode electrode and...
Patent number
11,901,161
Issue date
Feb 13, 2024
Applied Materials, Inc.
Tae Seung Cho
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Treatments for controlling deposition defects
Patent number
11,894,228
Issue date
Feb 6, 2024
Applied Materials, Inc.
Sudha S. Rathi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Gas delivery system for a shared gas delivery architecture
Patent number
11,881,416
Issue date
Jan 23, 2024
Applied Materials, Inc.
Arun Chakravarthy Chakravarthy
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing method
Patent number
11,875,998
Issue date
Jan 16, 2024
Wonik IPS Co., Ltd.
Kwang Seon Jin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gas supply apparatus and gas supply method
Patent number
11,866,825
Issue date
Jan 9, 2024
Tokyo Electron Limited
Hiroyuki Hayashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Semiconductor manufacturing apparatus and manufacturing method of s...
Patent number
11,859,286
Issue date
Jan 2, 2024
Kioxia Corporation
Yuya Matsubara
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
System and methods using an inline surface engineering source
Patent number
11,862,433
Issue date
Jan 2, 2024
Varlan Semiconductor Equipment Associates, Inc.
Christopher Hatem
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Remote plasma cleaning of chambers for electronics manufacturing sy...
Patent number
11,854,773
Issue date
Dec 26, 2023
Applied Materials, Inc.
Yuanhong Guo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
DC bias in plasma process
Patent number
11,854,766
Issue date
Dec 26, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Sheng-Liang Pan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing with independent temperature control
Patent number
11,854,770
Issue date
Dec 26, 2023
Applied Materials, Inc.
Wei Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Valve apparatuses and related methods for reactive process gas isol...
Patent number
11,854,839
Issue date
Dec 26, 2023
MKS Instruments, Inc.
Andrew B. Cowe
B08 - CLEANING
Information
Patent Grant
Optical absorption sensor for semiconductor processing
Patent number
11,848,178
Issue date
Dec 19, 2023
Applied Materials, Inc.
Fang Ruan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Doped or undoped silicon carbide deposition and remote hydrogen pla...
Patent number
11,848,199
Issue date
Dec 19, 2023
Lam Research Corporation
Guangbi Yuan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma flood gun for charged particle apparatus
Patent number
11,830,705
Issue date
Nov 28, 2023
Ximan Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etching method and substrate processing system
Patent number
11,784,054
Issue date
Oct 10, 2023
Tokyo Electron Limited
Nobuhiro Takahashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus, material layer deposition apparatus...
Patent number
11,784,026
Issue date
Oct 10, 2023
Samsung Electronics Co., Ltd.
Woongsik Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Reactive cleaning of substrate support
Patent number
11,772,137
Issue date
Oct 3, 2023
Applied Materials, Inc.
Xi Chen
B08 - CLEANING
Information
Patent Grant
Post-discharge plasma coating device for wired substrates
Patent number
11,756,770
Issue date
Sep 12, 2023
Luxembourg Institute of Science and Technology (LIST)
Simon Bulou
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Clean isolation valve for reduced dead volume
Patent number
11,746,417
Issue date
Sep 5, 2023
Applied Materials, Inc.
Ashutosh Agarwal
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
ADDITION OF EXTERNAL ULTRAVIOLET LIGHT FOR IMPROVED PLASMA STRIKE C...
Publication number
20240162011
Publication date
May 16, 2024
Applied Materials, Inc.
Eric Kihara SHONO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTIPROCESS SUBSTRATE TREATMENT FOR ENHANCED SUBSTRATE DOPING
Publication number
20240153774
Publication date
May 9, 2024
Applied Materials, Inc.
Christopher R. Hatem
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
NOZZLE FOR REMOTE PLASMA CLEANING OF PROCESS CHAMBERS
Publication number
20240141482
Publication date
May 2, 2024
LAM RESEARCH CORPORATION
Jeremy Jerome Pool
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
APPARATUS DESIGN FOR FILM REMOVAL FROM THE BEVEL AND EDGE OF THE SU...
Publication number
20240128061
Publication date
Apr 18, 2024
Applied Materials, Inc.
FARZAD HOUSHMAND
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND MET...
Publication number
20240120213
Publication date
Apr 11, 2024
Samsung Electronics Co., Ltd.
Woo Rim LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20240105479
Publication date
Mar 28, 2024
ASM IP HOLDING B.V.
WonKi Jeong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING A SUBSTRATE
Publication number
20240100572
Publication date
Mar 28, 2024
SEMES CO., LTD.
Sung Hun EOM
B08 - CLEANING
Information
Patent Application
GROUP III-V SEMICONDUCTOR DEVICE AND METHOD OF FABRICATION OF SAME...
Publication number
20240105450
Publication date
Mar 28, 2024
TEXAS INSTRUMENTS INCORPORATED
Yoganand Saripalli
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
TARGET PROCESSING DEVICE AND TARGET PROCESSING METHOD
Publication number
20240096601
Publication date
Mar 21, 2024
KIOXIA Corporation
Takeharu MOTOKAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
System And Methods Using An Inline Surface Engineering Source
Publication number
20240096602
Publication date
Mar 21, 2024
Varian Semiconductor Equipment Associates, Inc.
Christopher Hatem
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...
Publication number
20240093372
Publication date
Mar 21, 2024
Kokusai Electric Corporation
Tadashi TAKASAKI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
COMPACT REMOTE PLASMA SOURCE FOR HDP CVD CHAMBERS
Publication number
20240087852
Publication date
Mar 14, 2024
Advanced Refurbishment Technologies LLC d/b/a ARTSemi LLC
Christopher William Lewis
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR DEPOSITING LOW-K DIELECTRIC FILMS
Publication number
20240087880
Publication date
Mar 14, 2024
Applied Materials, Inc.
Shruba Gangopadhyay
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SYSTEMS AND METHODS FOR DEPOSITING LOW-K DIELECTRIC FILMS
Publication number
20240087881
Publication date
Mar 14, 2024
Applied Materials, Inc.
Michael Haverty
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
OPTICAL ABSORPTION SENSOR FOR SEMICONDUCTOR PROCESSING
Publication number
20240079220
Publication date
Mar 7, 2024
Applied Materials, Inc.
Fang Ruan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYNCHRONIZATION OF PLASMA PROCESSING COMPONENTS
Publication number
20240079213
Publication date
Mar 7, 2024
Advanced Energy Industries, Inc.
Gideon Van Zyl
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND DEVICE FOR DEPOSITING SILICON ONTO SUBSTRATES
Publication number
20240079231
Publication date
Mar 7, 2024
ASM IP HOLDING B.V.
John Tolle
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DC Bias in Plasma Process
Publication number
20240071722
Publication date
Feb 29, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Sheng-Liang Pan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DOPED OR UNDOPED SILICON CARBIDE DEPOSITION AND REMOTE HYDROGEN PLA...
Publication number
20240063015
Publication date
Feb 22, 2024
LAM RESEARCH CORPORATION
Guangbi Yuan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
REMOTE PLASMA CLEANING OF CHAMBERS FOR ELECTRONICS MANUFACTURING SY...
Publication number
20240062999
Publication date
Feb 22, 2024
Applied Materials, Inc.
Yuanhong Guo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM AND METHOD OF CLEANING PROCESS CHAMBER COMPONENTS
Publication number
20240055230
Publication date
Feb 15, 2024
Applied Materials, Inc.
Jong Yun KIM
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
TREATMENT METHODS FOR SILICON NANOSHEET SURFACES
Publication number
20240055265
Publication date
Feb 15, 2024
Applied Materials, Inc.
Pradeep SAMPATH KUMAR
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SHARED RPS CLEAN AND BYPASS DELIVERY ARCHITECTURE
Publication number
20240047185
Publication date
Feb 8, 2024
Applied Materials, Inc.
Abhijit A. Kangude
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING METHOD
Publication number
20240047199
Publication date
Feb 8, 2024
ASM IP HOLDING B.V.
SungHa Choi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...
Publication number
20240043993
Publication date
Feb 8, 2024
Kokusai Electric Corporation
Naonori AKAE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ETCHING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20240038501
Publication date
Feb 1, 2024
TOKYO ELECTRON LIMITED
Akira NAKAGAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INTEGRATION OF FULLY ALIGNED VIA THROUGH SELECTIVE DEPOSITION AND R...
Publication number
20240030062
Publication date
Jan 25, 2024
LAM RESEARCH CORPORATION
Dennis M. Hausmann
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Publication number
20240030008
Publication date
Jan 25, 2024
TOKYO ELECTRON LIMITED
Eiki KAMATA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS AND SYSTEMS FOR DRY ETCHING
Publication number
20240006157
Publication date
Jan 4, 2024
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
Chien-Liang Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING INTEGRATED CIRCUIT DEVICE
Publication number
20240003007
Publication date
Jan 4, 2024
Research & Business Foundation Sungkyunkwan University
PYUNG MOON
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...