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PERFORMING OPERATIONS TRANSPORTING
B81
Micro-structural technology
B81C
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
B81C2203/00
Forming micro-structural systems
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Patents Grants
last 30 patents
Information
Patent Grant
Method for bonding wafers, and a wafer
Patent number
12,202,725
Issue date
Jan 21, 2025
Murata Manufacturing Co., Ltd.
Konsta Hannula
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for producing a plurality of sensor devices, and sensor device
Patent number
12,195,330
Issue date
Jan 14, 2025
Robert Bosch GmbH
Daniel Haug
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Sensor package and method of producing the sensor package
Patent number
12,180,066
Issue date
Dec 31, 2024
Sciosense B.V.
Willem Frederik Adrianus Besling
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for producing fine structures in the volume of a substrate c...
Patent number
12,172,157
Issue date
Dec 24, 2024
Schott AG
Andreas Ortner
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Enclosed cavity structures
Patent number
12,162,747
Issue date
Dec 10, 2024
X-CELEPRINT LIMITED
Ronald S. Cok
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Laser-assisted material phase-change and expulsion micro-machining...
Patent number
12,077,432
Issue date
Sep 3, 2024
Massachusetts Institute of Technology
Prashant Patil
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Semiconductor integrated device with electrical contacts between st...
Patent number
12,024,422
Issue date
Jul 2, 2024
STMicroelectronics S.r.l.
Enri Duqi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Enclosed cavity structures
Patent number
11,981,559
Issue date
May 14, 2024
X-CELEPRINT LIMITED
Ronald S. Cok
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microfabrication of omni-view peripheral scanning system
Patent number
11,926,523
Issue date
Mar 12, 2024
BEIJING VOYAGER TECHNOLOGY CO., LTD.
Youmin Wang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Enclosed cavity structures
Patent number
11,897,760
Issue date
Feb 13, 2024
X-CELEPRINT LIMITED
Ronald S. Cok
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Sensing module and manufacturing method thereof
Patent number
11,894,473
Issue date
Feb 6, 2024
Ruei Chi Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Enclosed cavity structures
Patent number
11,884,537
Issue date
Jan 30, 2024
X-CELEPRINT LIMITED
Ronald S. Cok
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for producing damper structures on a micromechanical wafer
Patent number
11,873,216
Issue date
Jan 16, 2024
Robert Bosch GmbH
Michael Stumber
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro-electro mechanical system and manufacturing method thereof
Patent number
11,851,321
Issue date
Dec 26, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Ting-Li Yang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor package with built-in vibration isolation, thermal st...
Patent number
11,834,328
Issue date
Dec 5, 2023
Invensense, Inc.
Hamid Eslampour
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Enclosed cavity structures
Patent number
11,834,330
Issue date
Dec 5, 2023
X-CELEPRINT LIMITED
Ronald S. Cok
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectromechanical membrane transducer with active damper
Patent number
11,807,519
Issue date
Nov 7, 2023
STMicroelectronics S.r.l.
Domenico Giusti
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS device with particle filter and method of manufacture
Patent number
11,787,689
Issue date
Oct 17, 2023
TDK Corporation
Wolfgang Pahl
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Substrate assembly and method of bonding substrates
Patent number
11,752,499
Issue date
Sep 12, 2023
Taiwan Green Point Enterprises Co., Ltd.
Sung-Yi Yang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Emitter package for a photoacoustic sensor
Patent number
11,609,180
Issue date
Mar 21, 2023
Infineon Technologies AG
Siyuan Qi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Packaged die and assembling method
Patent number
11,597,647
Issue date
Mar 7, 2023
TDK Corporation
Andreas Barbul
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for producing fine structures in the volume of a substrate c...
Patent number
11,534,754
Issue date
Dec 27, 2022
Schott AG
Andreas Ortner
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Microfluidic cartridge for processing and detecting nucleic acids
Patent number
11,485,968
Issue date
Nov 1, 2022
NeuMoDx Molecular, Inc.
Michael T. Kusner
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS device, liquid ejecting head, liquid ejecting apparatus, manuf...
Patent number
11,390,079
Issue date
Jul 19, 2022
Seiko Epson Corporation
Daisuke Yamada
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Die stack arrangement comprising a die-attach-film tape and method...
Patent number
11,342,298
Issue date
May 24, 2022
Infineon Technologies AG
Matthias Steiert
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Sensor systems and methods for providing sensor systems
Patent number
11,289,444
Issue date
Mar 29, 2022
General Electric Company
David Richard Esler
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Fence structure to prevent stiction in a MEMS motion sensor
Patent number
11,261,083
Issue date
Mar 1, 2022
Taiwan Semiconductor Manufacturing Company, Ltd
Lee-Chuan Tseng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Three-dimensional micro devices and method for their production
Patent number
11,208,321
Issue date
Dec 28, 2021
Leibniz-Institut fuer Festkoerper-und Werkstoffforschung Dresden e.V.
Daniil Karnaushenko
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Substrate assembly and method of bonding substrates
Patent number
11,167,284
Issue date
Nov 9, 2021
Taiwan Green Point Enterprises Co., Ltd.
Sung-Yi Yang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for making three dimensional structures using photolithograp...
Patent number
11,143,959
Issue date
Oct 12, 2021
Mercene Labs AB
Carl Fredrik Carlborg
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
METHOD FOR PRODUCING FINE STRUCTURES IN THE VOLUME OF A SUBSTRATE C...
Publication number
20250050329
Publication date
Feb 13, 2025
SCHOTT AG
Andreas Ortner
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
DIE STACKING WITH CONTROLLED TILT AND ANGULAR ALIGNMENT
Publication number
20240425364
Publication date
Dec 26, 2024
NXP USA, Inc.
Chayathorn Saklang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-ELECTRO MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF
Publication number
20240083742
Publication date
Mar 14, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Ting-Li YANG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
INTEGRATED DICING DIE BONDING SHEET AND METHOD FOR PRODUCING SEMICO...
Publication number
20240087941
Publication date
Mar 14, 2024
Dow Toray Co., Ltd.
Nohno TODA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROELECTROMECHANICAL MEMBRANE TRANSDUCER WITH ACTIVE DAMPER
Publication number
20240034618
Publication date
Feb 1, 2024
STMicroelectronics S.r.l.
Domenico GIUSTI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
A MICROFLUIDIC SENSOR
Publication number
20230404777
Publication date
Dec 21, 2023
CAMBRIDGE ENTERPRISE LIMITED
Sohini KAR-NARAYAN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ENCAPSULATION STRUCTURE, SUBSTRATE, AND ENCAPSULATION METHOD
Publication number
20230365400
Publication date
Nov 16, 2023
Huawei Technologies Co., Ltd
Guoqiang WU
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS with cover drive and method of operating the same
Publication number
20230322546
Publication date
Oct 12, 2023
Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
Sergiu LANGA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ATOMIC-SMOOTH DEVICE WITH MICROSTRUCTURE, AND METHOD FOR PREPARING...
Publication number
20230271825
Publication date
Aug 31, 2023
RESEARCH INSTITUTE OF TSINGHUA UNIVERSITY IN SHENZHEN
Quanshui ZHENG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
STACKED DIE PACKAGE AND METHODS OF FORMING THE SAME
Publication number
20230163103
Publication date
May 25, 2023
Qorvo US, Inc.
Julio C. Costa
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHODS AND APPARATUS FOR ELECTRONIC DEVICE PACKAGING
Publication number
20230126914
Publication date
Apr 27, 2023
TEXAS INSTRUMENTS INCORPORATED
Jane Liu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SENSING MODULE AND MANUFACTURING METHOD THEREOF
Publication number
20230076715
Publication date
Mar 9, 2023
CHIP POSITION SYSTEM CO., LTD.
RUEI CHI CHEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROFABRICATION OF OMNI-VIEW PERIPHERAL SCANNING SYSTEM
Publication number
20230072948
Publication date
Mar 9, 2023
Beijing Voyager Technology Co., Ltd.
Youmin Wang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR MANUFACTURING AN INTEGRATED SYSTEM INCLUDING A CAPACITIV...
Publication number
20230061430
Publication date
Mar 2, 2023
STMicroelectronics S.r.l.
Paolo FERRARI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS MODULE AND METHOD OF MANUFACTURING MEMS MODULE
Publication number
20230016038
Publication date
Jan 19, 2023
Rohm Co., Ltd.
Toru HIGUCHI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR PRODUCING FINE STRUCTURES IN THE VOLUME OF A SUBSTRATE C...
Publication number
20220401953
Publication date
Dec 22, 2022
SCHOTT AG
Andreas Ortner
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
METHOD FOR BONDING WAFERS, AND A WAFER
Publication number
20220289567
Publication date
Sep 15, 2022
Murata Manufacturing Co., Ltd.
Konsta HANNULA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-ELECTRO MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF
Publication number
20220274827
Publication date
Sep 1, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Ting-Li YANG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR PRODUCING A PLURALITY OF SENSOR DEVICES, AND SENSOR DEVICE
Publication number
20220041436
Publication date
Feb 10, 2022
ROBERT BOSCH GmbH
Daniel Haug
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SUBSTRATE ASSEMBLY AND METHOD OF BONDING SUBSTRATES
Publication number
20220040691
Publication date
Feb 10, 2022
TAIWAN GREEN POINT ENTERPRISES CO., LTD.
Sung-Yi YANG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR PRODUCING DAMPER STRUCTURES ON A MICROMECHANICAL WAFER
Publication number
20220024757
Publication date
Jan 27, 2022
ROBERT BOSCH GmbH
Michael Stumber
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Semiconductor Package With Built-In Vibration Isolation, Thermal St...
Publication number
20210403318
Publication date
Dec 30, 2021
InvenSense, Inc.
Hamid Eslampour
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROELECTROMECHANICAL MEMBRANE TRANSDUCER WITH ACTIVE DAMPER
Publication number
20210395075
Publication date
Dec 23, 2021
STMicroelectronics S.r.l.
Domenico GIUSTI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ENCLOSED CAVITY STRUCTURES
Publication number
20210246018
Publication date
Aug 12, 2021
X-CELEPRINT LIMITED
Ronald S. Cok
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ENCLOSED CAVITY STRUCTURES
Publication number
20210246017
Publication date
Aug 12, 2021
X-CELEPRINT LIMITED
Ronald S. Cok
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Sensor Package and Method of Producing the Sensor Package
Publication number
20210229981
Publication date
Jul 29, 2021
Sciosense B.V.
Willem Frederik Adrianus Besling
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
NANO-PATTERNED SURFACES FOR MICROFLUIDIC DEVICES AND METHODS FOR MA...
Publication number
20210213448
Publication date
Jul 15, 2021
Corning Incorporated
Donald Erwin Allen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ENCLOSED CAVITY STRUCTURES
Publication number
20210198100
Publication date
Jul 1, 2021
X-CELEPRINT LIMITED
Ronald S. Cok
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Emitter Package for a Photoacoustic Sensor
Publication number
20210172862
Publication date
Jun 10, 2021
INFINEON TECHNOLOGIES AG
Siyuan Qi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PRESSURE SENSORS AND METHOD FOR FORMING A MEMS PRESSURE SENSOR
Publication number
20210148776
Publication date
May 20, 2021
INFINEON TECHNOLOGIES AG
Markus ECKINGER
B81 - MICRO-STRUCTURAL TECHNOLOGY