Gray-scale mask technology

Industry

CPC
B81C2201/0157

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C2201/00Manufacture or treatment of micro-structural devices or systems

Current Industry

B81C2201/0157Gray-scale mask technology

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Isolated protrusion/recession features in microelectromechanical sy...
- Patent number 11,932,529
- Issue date Mar 19, 2024
- Texas Instruments Incorporated
- Patrick Ian Oden
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Pulse train excitation for capacitive micromachined ultrasonic tran...
- Patent number 11,731,164
- Issue date Aug 22, 2023
- The Board of Trustees of the Leland Stanford Junior University
- Bo Ma
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Contoured electrode for capacitive micromachined ultrasonic transducer
- Patent number 11,260,424
- Issue date Mar 1, 2022
- The Board of Trustees of the Leland Stanford Junior University
- Bo Ma
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Localized functionalization of nanotextured surfaces
- Patent number 11,247,896
- Issue date Feb 15, 2022
- UChicago Argonne, LLC
- Martyna Michalska
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for making three dimensional structures using photolithograp...
- Patent number 11,143,959
- Issue date Oct 12, 2021
- Mercene Labs AB
- Carl Fredrik Carlborg
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method to create multilayer microfluidic chips using spin-on carbon...
- Patent number 11,084,032
- Issue date Aug 10, 2021
- International Business Machines Corporation
- Chi-Chun Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Spectrally and temporally engineered processing using photoelectroc...
- Patent number 10,734,237
- Issue date Aug 4, 2020
- The Board of Trustees of the University of Illinois
- Lynford Goddard
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Isolated protrusion/recession features in a micro electro mechanica...
- Patent number 10,589,980
- Issue date Mar 17, 2020
- Texas Instruments Incorporated
- Patrick Ian Oden
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Gradient structures interfacing microfluidics and nanofluidics, met...
- Patent number 10,551,319
- Issue date Feb 4, 2020
- Princeton University
- Han Cao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods and apparatus to control grayscale photolithography
- Patent number 10,466,597
- Issue date Nov 5, 2019
- Texas Instruments Incorporated
- Lucius M. Sherwin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Spectrally and temporally engineered processing using photoelectroc...
- Patent number 10,115,599
- Issue date Oct 30, 2018
- The Board of Trustees of the University of Illinois
- Lynford Goddard
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Gradient structures interfacing microfluidics and nanofluidics, met...
- Patent number 9,733,185
- Issue date Aug 15, 2017
- Princeton University
- Han Cao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods for fabricating three-dimensional nano-scale structures and...
- Patent number 9,177,817
- Issue date Nov 3, 2015
- The Research Foundation for the State University of New York
- John G. Hartley
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for manufacturing a micromechanical structure having a buri...
- Patent number 8,633,553
- Issue date Jan 21, 2014
- STMicroelectronics S.r.l.
- Marco Ferrera
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device with reduced stress in the membrane and manufacturing m...
- Patent number 8,482,088
- Issue date Jul 9, 2013
- Wolfson Microelectronics plc
- Richard Ian Laming
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Gradient structures interfacing microfluidics and nanofluidics
- Patent number 8,333,934
- Issue date Dec 18, 2012
- Princeton University
- Han Cao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fabrication method of topographically modulated microstructures usi...
- Patent number 8,236,480
- Issue date Aug 7, 2012
- The United States of America, as represented by the Secretary of Commere, the...
- Laurie E. Locascio
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Orientation-dependent etching of deposited AlN for structural use a...
- Patent number 7,960,200
- Issue date Jun 14, 2011
- Maxim Integrated Products, Inc.
- Guillaume Bouche
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Effecting dynamic measurement of low mass devices
- Patent number 7,448,273
- Issue date Nov 11, 2008
- Hewlett-Packard Development Company, L.P.
- Thomas W. Ives
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Gradient structures interfacing microfluidics and nanofluidics, met...
- Patent number 7,217,562
- Issue date May 15, 2007
- Princeton University
- Han Cao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of fabricating a suspended micro-structure with a sloped sup...
- Patent number 6,780,570
- Issue date Aug 24, 2004
- Institut National D'Optique
- Hubert Jerominek
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
PULSE TRAIN EXCITATION FOR CAPACITIVE MICROMACHINED ULTRASONIC TRAN...
- Publication number 20240165663
- Publication date May 23, 2024
- The Board of Trustees of the Leland Stanford Junior University
- Bo Ma
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Gradient Structures Interfacing Microfluidics and Nanofluidics, Met...
- Publication number 20230110246
- Publication date Apr 13, 2023
- Princeton University
- Han Cao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CONTOURED ELECTRODE FOR CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER
- Publication number 20210220873
- Publication date Jul 22, 2021
- The Board of Trustees of the Leland Stanford Junior University
- Bo Ma
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ISOLATED PROTRUSION/RECESSION FEATURES IN MICROELECTROMECHANICAL SY...
- Publication number 20200207608
- Publication date Jul 2, 2020
- TEXAS INSTRUMENTS INCORPORATED
- Patrick Ian Oden
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Gradient Structures Interfacing Microfluidics and Nanofluidics, Met...
- Publication number 20200158644
- Publication date May 21, 2020
- Princeton University
- Han Cao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD TO CREATE MULTILAYER MICROFLUIDIC CHIPS USING SPIN-ON CARBON...
- Publication number 20200070151
- Publication date Mar 5, 2020
- International Business Machines Corporation
- Chi-Chun Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS AND APPARATUS TO CONTROL GRAYSCALE PHOTOLITHOGRAPHY
- Publication number 20200064745
- Publication date Feb 27, 2020
- TEXAS INSTRUMENTS INCORPORATED
- Lucius M. Sherwin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LOCALIZED FUNCTIONALIZATION OF NANOTEXTURED SURFACES
- Publication number 20200039819
- Publication date Feb 6, 2020
- UChicago Argonne, LLC
- Martyna Michalska
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MAKING THREE DIMENSIONAL STRUCTURES USING PHOTOLITHOGRAP...
- Publication number 20190227434
- Publication date Jul 25, 2019
- MERCENE LABS AB
- Carl Fredrik CARLBORG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PACKAGE SUBSTRATE INTEGRATED DEVICES
- Publication number 20190169020
- Publication date Jun 6, 2019
- Intel Corporation
- Aleksandar ALEKSOV
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS AND APPARATUS TO CONTROL GRAYSCALE PHOTOLITHOGRAPHY
- Publication number 20190129298
- Publication date May 2, 2019
- TEXAS INSTRUMENTS INCORPORATED
- Lucius M. Sherwin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Isolated Protrusion/Recession Features in a Micro Electro Mechanica...
- Publication number 20180290880
- Publication date Oct 11, 2018
- TEXAS INSTRUMENTS INCORPORATED
- Patrick Ian Oden
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
GRADIENT STRUCTURES INTERFACING MICROFLUIDICS AND NANOFLUIDICS, MET...
- Publication number 20170328835
- Publication date Nov 16, 2017
- Princeton University
- Han Cao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESS FOR MANUFACTURING A MICROMECHANICAL STRUCTURE HAVING A BURI...
- Publication number 20150175410
- Publication date Jun 25, 2015
- STMicroelectronics S.r.l.
- Marco Ferrera
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS FOR FABRICATING THREE-DIMENSIONAL NANO-SCALE STRUCTURES AND...
- Publication number 20140191375
- Publication date Jul 10, 2014
- THE RESEARCH FOUNDATION OF STATE UNIVERSITY OF NEW YORK
- John G. Hartley
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Gradient Structures Interfacing Microfluidics and Nanofluidics, Met...
- Publication number 20140030811
- Publication date Jan 30, 2014
- Princeton University
- Han Cao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESS FOR MANUFACTURING A MICROMECHANICAL STRUCTURE HAVING A BURI...
- Publication number 20120018819
- Publication date Jan 26, 2012
- STMicroelectronics S.r.l.
- Marco Ferrera
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE WITH REDUCED STRESS IN THE MEMBRANE AND MANUFACTURING M...
- Publication number 20100244162
- Publication date Sep 30, 2010
- Richard Ian Laming
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Fabrication Method of Topographically Modulated Microstructures Usi...
- Publication number 20090155728
- Publication date Jun 18, 2009
- Laurie E. Locascio
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Orientation-dependent etching of deposited AIN for structural use a...
- Publication number 20080268575
- Publication date Oct 30, 2008
- Maxim Integrated Products, Inc.
- Guillaume Bouche
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
GRADIENT STRUCTURES INTERFACING MICROFLUIDICS AND NANOFLUIDICS, MET...
- Publication number 20070020772
- Publication date Jan 25, 2007
- Princeton University
- Han Cao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Effecting dynamic measurement of low mass devices
- Publication number 20060104164
- Publication date May 18, 2006
- Thomas W. Ives
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Gradient structures interfacing microfluidics and nanofluidics, met...
- Publication number 20040033515
- Publication date Feb 19, 2004
- Han Cao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method of fabricating a suspended micro-structure with a sloped sup...
- Publication number 20020018964
- Publication date Feb 14, 2002
- Hubert Jerominek
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Gray-scale mask technology

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Isolated protrusion/recession features in microelectromechanical sy...

Pulse train excitation for capacitive micromachined ultrasonic tran...

Contoured electrode for capacitive micromachined ultrasonic transducer

Localized functionalization of nanotextured surfaces

Method for making three dimensional structures using photolithograp...

Method to create multilayer microfluidic chips using spin-on carbon...

Spectrally and temporally engineered processing using photoelectroc...

Isolated protrusion/recession features in a micro electro mechanica...

Gradient structures interfacing microfluidics and nanofluidics, met...

Methods and apparatus to control grayscale photolithography

Spectrally and temporally engineered processing using photoelectroc...

Gradient structures interfacing microfluidics and nanofluidics, met...

Methods for fabricating three-dimensional nano-scale structures and...

Process for manufacturing a micromechanical structure having a buri...

MEMS device with reduced stress in the membrane and manufacturing m...

Gradient structures interfacing microfluidics and nanofluidics

Fabrication method of topographically modulated microstructures usi...

Orientation-dependent etching of deposited AlN for structural use a...

Effecting dynamic measurement of low mass devices

Gradient structures interfacing microfluidics and nanofluidics, met...

Method of fabricating a suspended micro-structure with a sloped sup...

Patents Applicationslast 30 patents

PULSE TRAIN EXCITATION FOR CAPACITIVE MICROMACHINED ULTRASONIC TRAN...

Gradient Structures Interfacing Microfluidics and Nanofluidics, Met...

CONTOURED ELECTRODE FOR CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER

ISOLATED PROTRUSION/RECESSION FEATURES IN MICROELECTROMECHANICAL SY...

Gradient Structures Interfacing Microfluidics and Nanofluidics, Met...

METHOD TO CREATE MULTILAYER MICROFLUIDIC CHIPS USING SPIN-ON CARBON...

METHODS AND APPARATUS TO CONTROL GRAYSCALE PHOTOLITHOGRAPHY

LOCALIZED FUNCTIONALIZATION OF NANOTEXTURED SURFACES

METHOD FOR MAKING THREE DIMENSIONAL STRUCTURES USING PHOTOLITHOGRAP...

PACKAGE SUBSTRATE INTEGRATED DEVICES

METHODS AND APPARATUS TO CONTROL GRAYSCALE PHOTOLITHOGRAPHY

Isolated Protrusion/Recession Features in a Micro Electro Mechanica...

GRADIENT STRUCTURES INTERFACING MICROFLUIDICS AND NANOFLUIDICS, MET...

PROCESS FOR MANUFACTURING A MICROMECHANICAL STRUCTURE HAVING A BURI...

METHODS FOR FABRICATING THREE-DIMENSIONAL NANO-SCALE STRUCTURES AND...

Gradient Structures Interfacing Microfluidics and Nanofluidics, Met...

PROCESS FOR MANUFACTURING A MICROMECHANICAL STRUCTURE HAVING A BURI...

MEMS DEVICE WITH REDUCED STRESS IN THE MEMBRANE AND MANUFACTURING M...

Fabrication Method of Topographically Modulated Microstructures Usi...

Orientation-dependent etching of deposited AIN for structural use a...

GRADIENT STRUCTURES INTERFACING MICROFLUIDICS AND NANOFLUIDICS, MET...

Effecting dynamic measurement of low mass devices

Gradient structures interfacing microfluidics and nanofluidics, met...

Method of fabricating a suspended micro-structure with a sloped sup...