Grooves not provided for in groups B81C1/00063 - B81C1/00071

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B81C1/00079

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C1/00Manufacture or treatment of devices or systems in or on a substrate

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B81C1/00079Grooves not provided for in groups B81C1/00063 - B81C1/00071

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Patents Grantslast 30 patents

Information Patent Grant
Method for preparing micro-cavity array surface product with inclin...
- Patent number 11,655,144
- Issue date May 23, 2023
- JIANGSU UNIVERSITY
- Jian Li
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device and manufacturing method thereof
- Patent number 11,312,624
- Issue date Apr 26, 2022
- MIRAMEMS SENSING TECHNOLOGY CO., LTD
- Li-Tien Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Cavity forming method for a sensor chip, manufacturing method there...
- Patent number 10,246,323
- Issue date Apr 2, 2019
- Goertek, Inc.
- Mengjin Cai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of forming oriented block copolymer line patterns, block cop...
- Patent number 9,718,094
- Issue date Aug 1, 2017
- UNIST ACADEMY-INDUSTRY
- Thomas P. Russell
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of forming oriented block copolymer line patterns, block cop...
- Patent number 9,156,682
- Issue date Oct 13, 2015
- The University of Massachusetts
- Thomas P. Russell
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MEMS DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20200115226
- Publication date Apr 16, 2020
- MiraMEMS Sensing Technology Co., Ltd.
- LI-TIEN TSENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CAVITY FORMING METHOD FOR A SENSOR CHIP, MANUFACTURING METHOD THERE...
- Publication number 20180086631
- Publication date Mar 29, 2018
- Goertek, Inc.
- Mengjin Cai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF FORMING ORIENTED BLOCK COPOLYMER LINE PATTERNS, BLOCK COP...
- Publication number 20120301677
- Publication date Nov 29, 2012
- Thomas P. Russell
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for microstructuring surfaces of a workpiece and its use
- Publication number 20070075035
- Publication date Apr 5, 2007
- Gernot Repphun
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR