Handling masks and workpieces

Industry

CPC
G03F7/70733

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Parent Industries

GPHYSICS G03Photography G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES G03F7/00Photomechanical

Current Industry

G03F7/70733Handling masks and workpieces

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Pellicle design for mask application
- Patent number 12,253,797
- Issue date Mar 18, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yun-Yue Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Systems for cleaning a portion of a lithography apparatus
- Patent number 12,235,595
- Issue date Feb 25, 2025
- ASML Holding N.V.
- Daniel Paul Rodak
- B08 - CLEANING
Information Patent Grant
Suction clamp, object handler, stage apparatus and lithographic app...
- Patent number 12,197,141
- Issue date Jan 14, 2025
- ASML Netherlands B.V.
- Gijs Kramer
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Cleaning method, method for forming semiconductor structure and sys...
- Patent number 12,153,341
- Issue date Nov 26, 2024
- Taiwan Semiconductor Manufacturing Company Ltd.
- Wu-Hung Ko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Imprint apparatus with movable stages
- Patent number 12,147,167
- Issue date Nov 19, 2024
- ASML Netherlands B.V.
- Junichi Kanehara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Vacuum apparatus
- Patent number 12,142,512
- Issue date Nov 12, 2024
- NuFlare Technology, Inc.
- Yoshiaki Shinohara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for cleaning a support structure in a lithogra...
- Patent number 12,117,737
- Issue date Oct 15, 2024
- ASML Holding N.V.
- Keane Michael Levy
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for containing a reticle in a pod
- Patent number 12,094,743
- Issue date Sep 17, 2024
- Gudeng Precision Industrial Co., Ltd.
- Ming-Chien Chiu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and a method of operating the apparatus
- Patent number 12,072,635
- Issue date Aug 27, 2024
- ASML Netherlands B.V.
- Christian Gerardus Norbertus Hendricus Marie Cloin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Fluid handling system and lithographic apparatus
- Patent number 12,072,636
- Issue date Aug 27, 2024
- ASML Netherlands B.V.
- Theodorus Wilhelmus Polet
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate support, lithographic apparatus and loading method
- Patent number 12,032,301
- Issue date Jul 9, 2024
- ASML Netherlands B.V.
- Johannes Onvlee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate holder, lithographic apparatus, device manufacturing meth...
- Patent number 11,960,213
- Issue date Apr 16, 2024
- ASML Netherlands B.V.
- Raymond Wilhelmus Louis Lafarre
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Creating inductors, resistors, capacitors and other structures in p...
- Patent number 11,864,327
- Issue date Jan 2, 2024
- International Business Machines Corporation
- Gerald Bartley
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Installation with distribution mask for vapor deposition of a coati...
- Patent number 11,821,072
- Issue date Nov 21, 2023
- BNL Eurolens
- Vicente Estevez Rodriguez
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cleaning method, method for forming semiconductor structure and sys...
- Patent number 11,809,076
- Issue date Nov 7, 2023
- Taiwan Semiconductor Manufacturing Company Ltd.
- Wu-Hung Ko
- B08 - CLEANING
Information Patent Grant
Pellicle design for mask
- Patent number 11,762,282
- Issue date Sep 19, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yun-Yue Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate holder and method of manufacturing a substrate holder
- Patent number 11,754,929
- Issue date Sep 12, 2023
- ASML Netherlands B.V.
- Raymond Wilhelmus Louis Lafarre
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Substrate transport apparatus, substrate processing apparatus, and...
- Patent number 11,710,654
- Issue date Jul 25, 2023
- Semes Co., Ltd.
- Ki Won Han
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Conveyance apparatus, lithography apparatus, and article manufactur...
- Patent number 11,698,584
- Issue date Jul 11, 2023
- Canon Kabushiki Kaisha
- Osamu Yasunobe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Photolithography device and method for monitoring position of a lig...
- Patent number 11,669,015
- Issue date Jun 6, 2023
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Xueyu Liang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure machine
- Patent number 11,662,667
- Issue date May 30, 2023
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Bo Liu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, method for unloading a substrate and method...
- Patent number 11,664,264
- Issue date May 30, 2023
- ASML Netherlands B.V.
- Andre Bernardus Jeunink
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Apparatus for the exposure of plate-shaped workpieces with high thr...
- Patent number 11,656,556
- Issue date May 23, 2023
- Laser Imaging Systems GmbH
- Steffen Ruecker
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method to achieve tilted patterning with a through resist thickness...
- Patent number 11,644,757
- Issue date May 9, 2023
- Intel Corporation
- Changhua Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Substrate holder, lithographic apparatus, device manufacturing meth...
- Patent number 11,628,498
- Issue date Apr 18, 2023
- ASML Netherlands B.V.
- Raymond Wilhelmus Louis Lafarre
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Method of manufacturing display apparatus
- Patent number 11,618,940
- Issue date Apr 4, 2023
- Samsung Display Co., Ltd.
- Kyubum Kim
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Method of manufacturing display apparatus
- Patent number 11,597,994
- Issue date Mar 7, 2023
- Samsung Display Co., Ltd.
- Kyubum Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate holder, a lithographic apparatus and method of manufactur...
- Patent number 11,579,533
- Issue date Feb 14, 2023
- ASML Netherlands B.V.
- Günes Nakiboglu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reticle pod conversion plate for interfacing with a tool
- Patent number 11,569,108
- Issue date Jan 31, 2023
- GLOBALFOUNDRIES U.S. Inc.
- Michael Raga-Barone
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for lithographically forming wafer identification marks a...
- Patent number 11,562,968
- Issue date Jan 24, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Hu-Wei Lin
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MASK INSPECTION DEVICE FOR PHOTOMASKS OF EUV LITHOGRAPHY AND CARRIE...
- Publication number 20250044680
- Publication date Feb 6, 2025
- Carl Zeiss SMT GMBH
- Markus Koch
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Imprint Apparatus with Movable Stages
- Publication number 20250028259
- Publication date Jan 23, 2025
- ASML NETHERLANDS B.V.
- Junichi KANEHARA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS FOR TREATING SUBSTRATE
- Publication number 20240427250
- Publication date Dec 26, 2024
- SEMES CO., LTD.
- Jae Ho LEE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE CHUCK, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING M...
- Publication number 20240419087
- Publication date Dec 19, 2024
- Canon Kabushiki Kaisha
- KOHEI IMOTO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS FOR AND METHOD OF LITHOGRAPHY SUPPORT CLEANING
- Publication number 20240419089
- Publication date Dec 19, 2024
- ASML Holding N.V.
- Keane Michael LEVY
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND ART...
- Publication number 20240393702
- Publication date Nov 28, 2024
- Canon Kabushiki Kaisha
- RYOTA MAKINO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING METHOD, METHOD FOR FORMING SEMICONDUCTOR STRUCTURE AND SYS...
- Publication number 20240385512
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing company Ltd.
- WU-HUNG KO
- B08 - CLEANING
Information Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD
- Publication number 20240385524
- Publication date Nov 21, 2024
- SEMES CO., LTD.
- Hee Man AHN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMPRINTING APPARATUS
- Publication number 20240361685
- Publication date Oct 31, 2024
- Koninklijke Philips N.V.
- Didier Mathijs Maria Justina Petit
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MEASUREMENT APPARATUS AND METHOD FOR INSPECTING PHOTOMASKS INTENDED...
- Publication number 20240353757
- Publication date Oct 24, 2024
- Christian Roedel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMPRINTING APPARATUS
- Publication number 20240329521
- Publication date Oct 3, 2024
- Koninklijke Philips N.V.
- Didier Mathijs Maria Justina Petit
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMPRINTING APPARATUS
- Publication number 20240329520
- Publication date Oct 3, 2024
- Koninklijke Philips N.V.
- Didier Mathijs Maria Justina Petit
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMPRINTING APPARATUS
- Publication number 20240319585
- Publication date Sep 26, 2024
- Koninklijke Philips N.V.
- Marcus Antonius Verschuuren
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS
- Publication number 20240264541
- Publication date Aug 8, 2024
- CONTEMPORARY AMPEREX TECHNOLOGY CO., LIMITED
- Xiaosong LIU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MASK CASE, MASK HANDLING AUTOMATION APPARATUS AND OPERATING METHOD...
- Publication number 20240264522
- Publication date Aug 8, 2024
- Samsung Electronics Co., Ltd.
- Yun Song JEONG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE HOLDER, LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METH...
- Publication number 20240264533
- Publication date Aug 8, 2024
- ASML NETHERLANDS B.V.
- Raymond Wilhelmus Louis Lafarre
- B22 - CASTING POWDER METALLURGY
Information Patent Application
FLUID HANDLING SYSTEM AND LITHOGRAPHIC APPARATUS
- Publication number 20240192607
- Publication date Jun 13, 2024
- ASML NETHERLANDS B.V.
- Theodorus Wilhelmus POLET
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of Conductive Material Deposition
- Publication number 20240178003
- Publication date May 30, 2024
- TOKYO ELECTRON LIMITED
- Hirokazu Aizawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PRINTING PLATE EXPOSURE METHOD AND APPARATUS WITH REDUCED THERMAL P...
- Publication number 20240118624
- Publication date Apr 11, 2024
- ESKO-GRAPHICS IMAGING GMBH
- Jörg Wolterink
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING A SUBSTRATE
- Publication number 20240118607
- Publication date Apr 11, 2024
- SEMES CO.,LTD
- Hyun YOON
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and Apparatus for In-Situ Dry Development
- Publication number 20240096622
- Publication date Mar 21, 2024
- TOKYO ELECTRON LIMITED
- Steven Grzeskowiak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE HOLDER AND METHOD OF MANUFACTURING A SUBSTRATE HOLDER
- Publication number 20240027915
- Publication date Jan 25, 2024
- ASML NETHERLANDS B.V.
- Raymond Wilhelmus Louis Lafarre
- B22 - CASTING POWDER METALLURGY
Information Patent Application
ROLL-TO-ROLL BASED 3D PRINTING THROUGH COMPUTED AXIAL LITHOGRAPHY
- Publication number 20240012330
- Publication date Jan 11, 2024
- The Regents of the University of California
- Joseph Toombs
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PELLICLE DESIGN FOR MASK APPLICATION
- Publication number 20230367205
- Publication date Nov 16, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yun-Yue LIN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CLEANING METHOD, METHOD FOR FORMING SEMICONDUCTOR STRUCTURE AND SYS...
- Publication number 20230367206
- Publication date Nov 16, 2023
- Taiwan Semiconductor Manufacturing company Ltd.
- WU-HUNG KO
- B08 - CLEANING
Information Patent Application
LITHOGRAPHIC APPARATUS, METHOD FOR UNLOADING A SUBSTRATE AND METHOD...
- Publication number 20230260820
- Publication date Aug 17, 2023
- ASML NETHERLANDS B.V.
- Andre Bernardus JEUNINK
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE HOLDER, LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METH...
- Publication number 20230251579
- Publication date Aug 10, 2023
- ASML NETHERLANDS B.V.
- Raymond Wilhelmus Louis Lafarre
- B22 - CASTING POWDER METALLURGY
Information Patent Application
METHOD TO ACHIEVE TILTED PATTERNING WITH A THROUGH RESIST THICKNESS...
- Publication number 20230236517
- Publication date Jul 27, 2023
- Intel Corporation
- Changhua LIU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PHOTO MASK STAGE UNIT AND PHOTO MASK STOCKER INCLUDING THE SAME
- Publication number 20230205098
- Publication date Jun 29, 2023
- SEMES CO., LTD.
- Yun Ho Choi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CARRIER, APPARATUS FOR MANUFACTURING DISPLAY APPARATUS AND INCLUDIN...
- Publication number 20230193450
- Publication date Jun 22, 2023
- SAMSUNG DISPLAY CO., LTD.
- Kyubum Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Handling masks and workpieces

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Pellicle design for mask application

Systems for cleaning a portion of a lithography apparatus

Suction clamp, object handler, stage apparatus and lithographic app...

Cleaning method, method for forming semiconductor structure and sys...

Imprint apparatus with movable stages

Vacuum apparatus

Apparatus and method for cleaning a support structure in a lithogra...

Method for containing a reticle in a pod

Lithographic apparatus and a method of operating the apparatus

Fluid handling system and lithographic apparatus

Substrate support, lithographic apparatus and loading method

Substrate holder, lithographic apparatus, device manufacturing meth...

Creating inductors, resistors, capacitors and other structures in p...

Installation with distribution mask for vapor deposition of a coati...

Cleaning method, method for forming semiconductor structure and sys...

Pellicle design for mask

Substrate holder and method of manufacturing a substrate holder

Substrate transport apparatus, substrate processing apparatus, and...

Conveyance apparatus, lithography apparatus, and article manufactur...

Photolithography device and method for monitoring position of a lig...

Exposure machine

Lithographic apparatus, method for unloading a substrate and method...

Apparatus for the exposure of plate-shaped workpieces with high thr...

Method to achieve tilted patterning with a through resist thickness...

Substrate holder, lithographic apparatus, device manufacturing meth...

Method of manufacturing display apparatus

Method of manufacturing display apparatus

Substrate holder, a lithographic apparatus and method of manufactur...

Reticle pod conversion plate for interfacing with a tool

Apparatus for lithographically forming wafer identification marks a...

Patents Applicationslast 30 patents

MASK INSPECTION DEVICE FOR PHOTOMASKS OF EUV LITHOGRAPHY AND CARRIE...

Imprint Apparatus with Movable Stages

APPARATUS FOR TREATING SUBSTRATE

SUBSTRATE CHUCK, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING M...

APPARATUS FOR AND METHOD OF LITHOGRAPHY SUPPORT CLEANING

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND ART...

CLEANING METHOD, METHOD FOR FORMING SEMICONDUCTOR STRUCTURE AND SYS...

SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD

IMPRINTING APPARATUS

MEASUREMENT APPARATUS AND METHOD FOR INSPECTING PHOTOMASKS INTENDED...

IMPRINTING APPARATUS

IMPRINTING APPARATUS

IMPRINTING APPARATUS

EXPOSURE APPARATUS

MASK CASE, MASK HANDLING AUTOMATION APPARATUS AND OPERATING METHOD...

SUBSTRATE HOLDER, LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METH...

FLUID HANDLING SYSTEM AND LITHOGRAPHIC APPARATUS

Method of Conductive Material Deposition

PRINTING PLATE EXPOSURE METHOD AND APPARATUS WITH REDUCED THERMAL P...

APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING A SUBSTRATE

Method and Apparatus for In-Situ Dry Development

SUBSTRATE HOLDER AND METHOD OF MANUFACTURING A SUBSTRATE HOLDER

ROLL-TO-ROLL BASED 3D PRINTING THROUGH COMPUTED AXIAL LITHOGRAPHY

PELLICLE DESIGN FOR MASK APPLICATION

CLEANING METHOD, METHOD FOR FORMING SEMICONDUCTOR STRUCTURE AND SYS...

LITHOGRAPHIC APPARATUS, METHOD FOR UNLOADING A SUBSTRATE AND METHOD...

SUBSTRATE HOLDER, LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METH...

METHOD TO ACHIEVE TILTED PATTERNING WITH A THROUGH RESIST THICKNESS...

PHOTO MASK STAGE UNIT AND PHOTO MASK STOCKER INCLUDING THE SAME

CARRIER, APPARATUS FOR MANUFACTURING DISPLAY APPARATUS AND INCLUDIN...