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PHYSICS
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Photography
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PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES
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Photomechanical
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G03F7/70733
Handling masks and workpieces
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Patents Grants
last 30 patents
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Patent Grant
Substrate holder, lithographic apparatus, device manufacturing meth...
Patent number
11,960,213
Issue date
Apr 16, 2024
ASML Netherlands B.V.
Raymond Wilhelmus Louis Lafarre
B22 - CASTING POWDER METALLURGY
Information
Patent Grant
Creating inductors, resistors, capacitors and other structures in p...
Patent number
11,864,327
Issue date
Jan 2, 2024
International Business Machines Corporation
Gerald Bartley
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Installation with distribution mask for vapor deposition of a coati...
Patent number
11,821,072
Issue date
Nov 21, 2023
BNL Eurolens
Vicente Estevez Rodriguez
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Cleaning method, method for forming semiconductor structure and sys...
Patent number
11,809,076
Issue date
Nov 7, 2023
Taiwan Semiconductor Manufacturing Company Ltd.
Wu-Hung Ko
B08 - CLEANING
Information
Patent Grant
Pellicle design for mask
Patent number
11,762,282
Issue date
Sep 19, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Yun-Yue Lin
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate holder and method of manufacturing a substrate holder
Patent number
11,754,929
Issue date
Sep 12, 2023
ASML Netherlands B.V.
Raymond Wilhelmus Louis Lafarre
B22 - CASTING POWDER METALLURGY
Information
Patent Grant
Substrate transport apparatus, substrate processing apparatus, and...
Patent number
11,710,654
Issue date
Jul 25, 2023
Semes Co., Ltd.
Ki Won Han
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Conveyance apparatus, lithography apparatus, and article manufactur...
Patent number
11,698,584
Issue date
Jul 11, 2023
Canon Kabushiki Kaisha
Osamu Yasunobe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Photolithography device and method for monitoring position of a lig...
Patent number
11,669,015
Issue date
Jun 6, 2023
CHANGXIN MEMORY TECHNOLOGIES, INC.
Xueyu Liang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure machine
Patent number
11,662,667
Issue date
May 30, 2023
CHANGXIN MEMORY TECHNOLOGIES, INC.
Bo Liu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, method for unloading a substrate and method...
Patent number
11,664,264
Issue date
May 30, 2023
ASML Netherlands B.V.
Andre Bernardus Jeunink
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Grant
Apparatus for the exposure of plate-shaped workpieces with high thr...
Patent number
11,656,556
Issue date
May 23, 2023
Laser Imaging Systems GmbH
Steffen Ruecker
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method to achieve tilted patterning with a through resist thickness...
Patent number
11,644,757
Issue date
May 9, 2023
Intel Corporation
Changhua Liu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Substrate holder, lithographic apparatus, device manufacturing meth...
Patent number
11,628,498
Issue date
Apr 18, 2023
ASML Netherlands B.V.
Raymond Wilhelmus Louis Lafarre
B22 - CASTING POWDER METALLURGY
Information
Patent Grant
Method of manufacturing display apparatus
Patent number
11,618,940
Issue date
Apr 4, 2023
Samsung Display Co., Ltd.
Kyubum Kim
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Method of manufacturing display apparatus
Patent number
11,597,994
Issue date
Mar 7, 2023
Samsung Display Co., Ltd.
Kyubum Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate holder, a lithographic apparatus and method of manufactur...
Patent number
11,579,533
Issue date
Feb 14, 2023
ASML Netherlands B.V.
Günes Nakiboglu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Reticle pod conversion plate for interfacing with a tool
Patent number
11,569,108
Issue date
Jan 31, 2023
GLOBALFOUNDRIES U.S. Inc.
Michael Raga-Barone
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus for lithographically forming wafer identification marks a...
Patent number
11,562,968
Issue date
Jan 24, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Hu-Wei Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate support, lithographic apparatus and loading method
Patent number
11,556,063
Issue date
Jan 17, 2023
ASML Netherlands B.V.
Johannes Onvlee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of manufacturing semiconductor device
Patent number
11,543,755
Issue date
Jan 3, 2023
Canon Kabushiki Kaisha
Takehiro Toyoda
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Pellicle design for mask application
Patent number
11,454,881
Issue date
Sep 27, 2022
Taiwan Semiconductor Manufacturing Co., Ltd
Yun-Yue Lin
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Extraction body for lithographic apparatus
Patent number
11,385,547
Issue date
Jul 12, 2022
ASML Netherlands B.V.
Gijs Kramer
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate holder and method of manufacturing a substrate holder
Patent number
11,376,663
Issue date
Jul 5, 2022
ASML Netherlands B.V.
Raymond Wilhelmus Louis Lafarre
B22 - CASTING POWDER METALLURGY
Information
Patent Grant
Cleaning method, method for forming semiconductor structure and sys...
Patent number
11,347,143
Issue date
May 31, 2022
Taiwan Semiconductor Manufacturing Company Ltd.
Wu-Hung Ko
B08 - CLEANING
Information
Patent Grant
Substrate treating apparatus and substrate transporting method
Patent number
11,348,812
Issue date
May 31, 2022
SCREEN Holdings Co., Ltd.
Joji Kuwahara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate treating system and substrate transporting method
Patent number
11,339,011
Issue date
May 24, 2022
SCREEN Holdings Co., Ltd.
Joji Kuwahara
B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information
Patent Grant
Apparatus for containing a substrate and method of manufacturing th...
Patent number
11,314,176
Issue date
Apr 26, 2022
Gudeng Precision Industrial Co., Ltd.
Chia-Ho Chuang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate carrier apparatus and substrate carrying method
Patent number
11,302,543
Issue date
Apr 12, 2022
SCREEN Holdings Co., Ltd.
Joji Kuwahara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Particle removal from wafer table and photomask
Patent number
11,269,261
Issue date
Mar 8, 2022
Taiwan Semiconductor Manufacturing Co., Ltd
Min-Cheng Wu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
PRINTING PLATE EXPOSURE METHOD AND APPARATUS WITH REDUCED THERMAL P...
Publication number
20240118624
Publication date
Apr 11, 2024
ESKO-GRAPHICS IMAGING GMBH
Jörg Wolterink
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING A SUBSTRATE
Publication number
20240118607
Publication date
Apr 11, 2024
SEMES CO.,LTD
Hyun YOON
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method and Apparatus for In-Situ Dry Development
Publication number
20240096622
Publication date
Mar 21, 2024
TOKYO ELECTRON LIMITED
Steven Grzeskowiak
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE HOLDER AND METHOD OF MANUFACTURING A SUBSTRATE HOLDER
Publication number
20240027915
Publication date
Jan 25, 2024
ASML NETHERLANDS B.V.
Raymond Wilhelmus Louis Lafarre
B22 - CASTING POWDER METALLURGY
Information
Patent Application
ROLL-TO-ROLL BASED 3D PRINTING THROUGH COMPUTED AXIAL LITHOGRAPHY
Publication number
20240012330
Publication date
Jan 11, 2024
The Regents of the University of California
Joseph Toombs
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PELLICLE DESIGN FOR MASK APPLICATION
Publication number
20230367205
Publication date
Nov 16, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Yun-Yue LIN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
CLEANING METHOD, METHOD FOR FORMING SEMICONDUCTOR STRUCTURE AND SYS...
Publication number
20230367206
Publication date
Nov 16, 2023
Taiwan Semiconductor Manufacturing company Ltd.
WU-HUNG KO
B08 - CLEANING
Information
Patent Application
LITHOGRAPHIC APPARATUS, METHOD FOR UNLOADING A SUBSTRATE AND METHOD...
Publication number
20230260820
Publication date
Aug 17, 2023
ASML NETHERLANDS B.V.
Andre Bernardus JEUNINK
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Application
SUBSTRATE HOLDER, LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METH...
Publication number
20230251579
Publication date
Aug 10, 2023
ASML NETHERLANDS B.V.
Raymond Wilhelmus Louis Lafarre
B22 - CASTING POWDER METALLURGY
Information
Patent Application
METHOD TO ACHIEVE TILTED PATTERNING WITH A THROUGH RESIST THICKNESS...
Publication number
20230236517
Publication date
Jul 27, 2023
Intel Corporation
Changhua LIU
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PHOTO MASK STAGE UNIT AND PHOTO MASK STOCKER INCLUDING THE SAME
Publication number
20230205098
Publication date
Jun 29, 2023
SEMES CO., LTD.
Yun Ho Choi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
CARRIER, APPARATUS FOR MANUFACTURING DISPLAY APPARATUS AND INCLUDIN...
Publication number
20230193450
Publication date
Jun 22, 2023
SAMSUNG DISPLAY CO., LTD.
Kyubum Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20230152716
Publication date
May 18, 2023
TOKYO ELECTRON LIMITED
Kenichirou Matsuyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE SUPPORT, LITHOGRAPHIC APPARATUS AND LOADING METHOD
Publication number
20230134837
Publication date
May 4, 2023
ASML NETHERLANDS B.V.
Johannes ONVLEE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUCTION CLAMP, OBJECT HANDLER, STAGE APPARATUS AND LITHOGRAPHIC APP...
Publication number
20230121922
Publication date
Apr 20, 2023
ASML NETHERLANDS B.V.
Gijs KRAMER
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Application
EXPOSURE MACHINE
Publication number
20230064171
Publication date
Mar 2, 2023
CHANGXIN MEMORY TECHNOLOGIES, INC.
Bo LIU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PHOTOMASK AND PHOTOMASK FIXING DEVICE
Publication number
20230021136
Publication date
Jan 19, 2023
Changxin Memory Technologies, Inc.
KUAN-TING CHOU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND ELECTROSTATIC CLAMP DESIGNS
Publication number
20230008474
Publication date
Jan 12, 2023
ASML Holding N.V.
Victor Antonio PEREZ-FALCON
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Application
Pellicle Design for Mask
Publication number
20220357649
Publication date
Nov 10, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Yun-Yue LIN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE HANDLING SYSTEM OF A LITHOGRAPHY APPARATUS AND METHOD THE...
Publication number
20220342322
Publication date
Oct 27, 2022
ASML NETHERLANDS B.V.
Marcus Adrianus Van De Kerkhof
B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information
Patent Application
SUBSTRATE HOLDER AND METHOD OF MANUFACTURING A SUBSTRATE HOLDER
Publication number
20220331862
Publication date
Oct 20, 2022
ASML Netherlands B.V.
Raymond Wilhelmus Louis LAFARRE
B22 - CASTING POWDER METALLURGY
Information
Patent Application
PHOTOLITHOGRAPHY DEVICE AND METHOD FOR MONITORING POSITION OF A LIG...
Publication number
20220308458
Publication date
Sep 29, 2022
CHANGXIN MEMORY TECHNOLOGIES, INC.
Xueyu LIANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CLEANING METHOD, METHOD FOR FORMING SEMICONDUCTOR STRUCTURE AND SYS...
Publication number
20220291580
Publication date
Sep 15, 2022
Taiwan Semiconductor Manufacturing company Ltd.
WU-HUNG KO
B08 - CLEANING
Information
Patent Application
SUBSTRATE TRANSPORTATION HAND, SUBSTRATE TRANSPORTATION SYSTEM, STO...
Publication number
20220223461
Publication date
Jul 14, 2022
Canon Kabushiki Kaisha
Osamu Yasunobe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE HOLDER, LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METH...
Publication number
20220152703
Publication date
May 19, 2022
ASML NETHERLANDS B.V.
Raymond Wilhelmus Louis Lafarre
B22 - CASTING POWDER METALLURGY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND A METHOD OF OPERATING THE APPARATUS
Publication number
20220082948
Publication date
Mar 17, 2022
ASML NETHERLANDS B.V.
Christian Gerardus Norbertus Hendricus Marie CLOIN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
APPARATUS AND METHOD FOR CLEANING A SUPPORT STRUCTURE IN A LIGHOGRA...
Publication number
20220066332
Publication date
Mar 3, 2022
ASML Holding N.V.
Keane Michael LEVY
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
APPARATUS FOR THE EXPOSURE OF PLATE-SHAPED WORKPIECES WITH HIGH THR...
Publication number
20220057721
Publication date
Feb 24, 2022
Laser Imaging Systems GmbH
Steffen RUECKER
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
SUBSTRATE TRANSPORT APPARATUS, SUBSTRATE PROCESSING APPARATUS, AND...
Publication number
20220051926
Publication date
Feb 17, 2022
SEMES CO., LTD.
Ki Won HAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD, APPARATUS AND COMPUTER PROGRAM FOR ANALYZING AND/OR PROCESS...
Publication number
20220050389
Publication date
Feb 17, 2022
Carl Zeiss SMT GMBH
Oliver Jäckel
H01 - BASIC ELECTRIC ELEMENTS