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PARTICLE REMOVAL METHOD
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Publication number 20240085808
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Publication date Mar 14, 2024
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Taiwan Semiconductor Manufacturing Company, Ltd.
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Chih-Yuan YAO
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B08 - CLEANING
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MASK POD BOX AND MASK TRANSFER DEVICE
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Publication number 20240036481
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Publication date Feb 1, 2024
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CHANGXIN MEMORY TECHNOLOGIES, INC.
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RETICLE CARRIER AND ASSOCIATED METHODS
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Publication number 20230280664
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Publication date Sep 7, 2023
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Taiwan Semiconductor Manufacturing Company, Ltd.
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Yen-Hsun CHEN
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H01 - BASIC ELECTRIC ELEMENTS
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RETICLE ENCLOSURE FOR LITHOGRAPHY SYSTEMS
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Publication number 20230236498
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Publication date Jul 27, 2023
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Taiwan Semiconductor Manufacturing Company, Ltd.
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Chih-Tsung SHIH
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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SYSTEM AND METHOD OF DISCHARGING AN EUV MASK
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Publication number 20230060598
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Publication date Mar 2, 2023
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Yi-Zhen CHEN
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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RETICLE CARRIER AND ASSOCIATED METHODS
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Publication number 20230062852
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Publication date Mar 2, 2023
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Taiwan Semiconductor Manufacturing Company Limited
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Yen-Hsun CHEN
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H01 - BASIC ELECTRIC ELEMENTS
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