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Photography
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PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES
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Photomechanical
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G03F7/7075
Handling workpieces outside exposure position
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Patents Grants
last 30 patents
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Patent Grant
Transport system having a magnetically levitated transportation stage
Patent number
11,953,836
Issue date
Apr 9, 2024
Massachusetts Institute of Technology
Lei Zhou
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Temperature control device and temperature control method
Patent number
11,874,609
Issue date
Jan 16, 2024
CHANGXIN MEMORY TECHNOLOGIES, INC.
Enhao Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Object positioner, method for correcting the shape of an object, li...
Patent number
11,860,554
Issue date
Jan 2, 2024
ASML Netherlands B.V.
Mark Johannes Hermanus Frencken
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
System for a semiconductor fabrication facility and method for oper...
Patent number
11,854,846
Issue date
Dec 26, 2023
Taiwan Semiconductor Manufacturing Company Ltd.
Fu-Hsien Li
B66 - HOISTING LIFTING HAULING
Information
Patent Grant
Multiphase linear motor, multiphase planar motor, stage, lithograph...
Patent number
11,837,931
Issue date
Dec 5, 2023
ASML Netherlands B.V.
Maarten Hartger Kimman
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Exposure apparatus and method of manufacturing article
Patent number
11,762,299
Issue date
Sep 19, 2023
Canon Kabushiki Kaisha
Keiji Emoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Control method of driving apparatus, driving apparatus, lithography...
Patent number
11,754,932
Issue date
Sep 12, 2023
Canon Kabushiki Kaisha
Hayato Hoshino
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate stage, substrate processing system using the same, and me...
Patent number
11,747,741
Issue date
Sep 5, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Yu-Huan Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure machine
Patent number
11,662,667
Issue date
May 30, 2023
CHANGXIN MEMORY TECHNOLOGIES, INC.
Bo Liu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Fast high power pulsed light source system for high speed metrology...
Patent number
11,573,498
Issue date
Feb 7, 2023
Mitutoyo Corporation
Paul Gerard Gladnick
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Actuator, linear motor and lithographic apparatus
Patent number
11,539,280
Issue date
Dec 27, 2022
ASML Netherlands B.V.
Niels Cornelis Petrus Johannes Geerts
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Substrate processing apparatus, substrate processing method, and st...
Patent number
11,520,233
Issue date
Dec 6, 2022
Tokyo Electron Limited
Keiichi Tanaka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Carrier system, exposure apparatus, carrier method, exposure method...
Patent number
11,511,438
Issue date
Nov 29, 2022
Nikon Corporation
Hideaki Hara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Piezoelectric actuator, actuator system, substrate support, and lit...
Patent number
11,467,504
Issue date
Oct 11, 2022
ASML Netherlands B.V.
Bas Jansen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Positioning system and a method for positioning a substage or a sta...
Patent number
11,460,786
Issue date
Oct 4, 2022
ASML Netherlands B.V.
Yang-Shan Huang
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Reticle retaining system
Patent number
11,442,370
Issue date
Sep 13, 2022
Gudeng Precision Industrial Co., Ltd.
Chia-Ho Chuang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Movable body apparatus, moving method, exposure apparatus, exposure...
Patent number
11,402,762
Issue date
Aug 2, 2022
Nikon Corporation
Yasuo Aoki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Magnetically-levitated transporter
Patent number
11,393,706
Issue date
Jul 19, 2022
Massachusetts Institute of Technology
Lei Zhou
B60 - VEHICLES IN GENERAL
Information
Patent Grant
System for a semiconductor fabrication facility and method for oper...
Patent number
11,380,566
Issue date
Jul 5, 2022
Taiwan Semiconductor Manufacturing Company Ltd.
Fu-Hsien Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Stage driving apparatus, lithography apparatus, and method of manuf...
Patent number
11,381,196
Issue date
Jul 5, 2022
Canon Kabushiki Kaisha
Takayasu Matsui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate transfer device, transfer method and photolithography app...
Patent number
11,367,636
Issue date
Jun 21, 2022
SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
Fulong Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Transport system having a magnetically levitated transportation stage
Patent number
11,360,400
Issue date
Jun 14, 2022
Massachusetts Institute of Technology
David L. Trumper
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Detection apparatus, exposure apparatus, and article manufacturing...
Patent number
11,333,986
Issue date
May 17, 2022
Canon Kabushiki Kaisha
Kazuki Ota
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Actuator device for aligning an element, projection exposure appara...
Patent number
11,320,749
Issue date
May 3, 2022
Carl Zeiss SMT GmbH
Boaz Pnini
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus for containing a substrate and method of manufacturing th...
Patent number
11,314,176
Issue date
Apr 26, 2022
Gudeng Precision Industrial Co., Ltd.
Chia-Ho Chuang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus
Patent number
11,287,750
Issue date
Mar 29, 2022
CHANGXIN MEMORY TECHNOLOGIES, INC.
Shuping Li
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Tubular linear actuator, patterning device masking device and litho...
Patent number
11,262,663
Issue date
Mar 1, 2022
ASML Netherlands B.V.
Peter Michel Silvester Maria Heijmans
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Vibration isolation system and lithographic apparatus
Patent number
11,249,403
Issue date
Feb 15, 2022
ASML Netherlands B.V.
Franciscus Maria Joannes Linssen
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Grant
Lithographic apparatus, an operating method and device manufacturin...
Patent number
11,243,477
Issue date
Feb 8, 2022
ASML Netherlands B.V.
Gudrun Ghilaine Agnes De Gersem
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate carrying device, and photoresist coating development device
Patent number
11,237,488
Issue date
Feb 1, 2022
MIANYANG BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
Guofeng Jia
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
MASK EXPOSURE SYSTEM AND MASK EXPOSURE METHOD
Publication number
20240152062
Publication date
May 9, 2024
Samsung Electronics Co., Ltd.
Sukjong Bae
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE APPARATUS, CONTROL METHOD, AND DEVICE MANUFACTURING METHOD
Publication number
20240126178
Publication date
Apr 18, 2024
Nikon Corporation
Masaki KATO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
STAGE APPARATUS, PATTERN FORMING APPARATUS, AND METHOD FOR MANUFACT...
Publication number
20240085806
Publication date
Mar 14, 2024
Canon Kabushiki Kaisha
YUICHI OZAWA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Transport System Having a Magnetically Levitated Transportation Stage
Publication number
20240085809
Publication date
Mar 14, 2024
Massachusetts Institute of Technology
Lei ZHOU
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Application
ACTIVE LINEAR MOTOR PARASITIC FORCE COMPENSATION
Publication number
20240045345
Publication date
Feb 8, 2024
Applied Materials, Inc.
Ulrich MUELLER
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Application
SUBSTRATE TREATMENT SYSTEM AND SUBSTRATE TREATMENT METHOD
Publication number
20240036482
Publication date
Feb 1, 2024
TOKYO ELECTRON LIMITED
Masashi TSUCHIYAMA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
GRIPPER AND LITHOGRAPHIC APPARATUS COMPRISING THE GRIPPER
Publication number
20240019790
Publication date
Jan 18, 2024
ASML NETHERLANDS B.V.
Paul VAN DONGEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EXPOSURE APPARATUS AND METHOD OF MANUFACTURING ARTICLE
Publication number
20230393486
Publication date
Dec 7, 2023
Canon Kabushiki Kaisha
Keiji Emoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
CONTROL METHOD OF DRIVING APPARATUS, DRIVING APPARATUS, LITHOGRAPHY...
Publication number
20230375946
Publication date
Nov 23, 2023
Canon Kabushiki Kaisha
Hayato Hoshino
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE STAGE AND SUBSTRATE PROCESSING SYSTEM USING THE SAME
Publication number
20230359133
Publication date
Nov 9, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Yu-Huan CHEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MULTIPLE SUBSTRATE HANDLING SYSTEM AND METHOD
Publication number
20230260815
Publication date
Aug 17, 2023
Applied Materials, Inc.
Hsiu-jen WANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUPPORT FOR AN OPTICAL ELEMENT
Publication number
20230236516
Publication date
Jul 27, 2023
Carl Zeiss SMT GMBH
Toralf Gruner
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MAGNET ASSEMBLY, COIL ASSEMBLY, PLANAR MOTOR, POSITIONING DEVICE AN...
Publication number
20230208269
Publication date
Jun 29, 2023
ASML NETHERLANDS B.V.
Gudrun Ghilaine Agnes DE GERSEM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONTROL APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING...
Publication number
20230119136
Publication date
Apr 20, 2023
Canon Kabushiki Kaisha
YUICHIRO MORIKUNI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
AN ACTUATOR DEVICE FOR USE IN A POSITIONING SYSTEM AS WELL AS SUCH...
Publication number
20230107002
Publication date
Apr 6, 2023
VDL Enabling Technologies Group B.V.
Johannes Hubertus Antonius VAN DE RIJDT
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EXPOSURE MACHINE
Publication number
20230064171
Publication date
Mar 2, 2023
CHANGXIN MEMORY TECHNOLOGIES, INC.
Bo LIU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
WAFER PROCESSING APPARATUS AND WAFER TRANSFER METHOD
Publication number
20230057774
Publication date
Feb 23, 2023
CHANGXIN MEMORY TECHNOLOGIES, INC.
Xueyu LIANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE TABLE AND METHOD OF HANDLING A SUBSTRATE
Publication number
20230048723
Publication date
Feb 16, 2023
ASML NETHERLANDS B.V.
Nicolaas TEN KATE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE APPARATUS AND METHOD OF MANUFACTURING ARTICLE
Publication number
20230013155
Publication date
Jan 19, 2023
Canon Kabushiki Kaisha
Keiji Emoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
CONTROL METHOD OF DRIVING APPARATUS, DRIVING APPARATUS, LITHOGRAPHY...
Publication number
20230011753
Publication date
Jan 12, 2023
Canon Kabushiki Kaisha
Hayato Hoshino
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PHOTOMASK CLAMPING DEVICE
Publication number
20220334494
Publication date
Oct 20, 2022
CHANGXIN MEMORY TECHNOLOGIES, INC
Qingqing ZHAO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SYSTEM FOR A SEMICONDUCTOR FABRICATION FACILITY AND METHOD FOR OPER...
Publication number
20220328331
Publication date
Oct 13, 2022
Taiwan Semiconductor Manufacturing company Ltd.
FU-HSIEN LI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ACTUATOR ASSEMBLIES COMPRISING PIEZO ACTUATORS OR ELECTROSTRICTIVE...
Publication number
20220326627
Publication date
Oct 13, 2022
ASML NETHERLANDS B.V.
Hans BUTLER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE TRANSPORT DEVICE AND SUBSTRATE TRANSPORT METHOD
Publication number
20220301912
Publication date
Sep 22, 2022
SCREEN Holdings Co., Ltd.
Joji KUWAHARA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
STAGE DEVICE, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD
Publication number
20220283518
Publication date
Sep 8, 2022
Canon Kabushiki Kaisha
Satoshi Iwatani
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE STAGE, SUBSTRATE PROCESSING SYSTEM USING THE SAME, AND ME...
Publication number
20220283517
Publication date
Sep 8, 2022
Taiwan Semiconductor Manufacturing Company, Ltd.
Yu-Huan CHEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OBJECT POSITIONER, METHOD FOR CORRECTING THE SHAPE OF AN OBJECT, LI...
Publication number
20220214626
Publication date
Jul 7, 2022
ASML NETHERLANDS B.V.
Mark Johannes Hermanus FRENCKEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Transport System Having a Magnetically Levitated Transportation Stage
Publication number
20220187720
Publication date
Jun 16, 2022
Massachusetts Institute of Technology
Lei ZHOU
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Application
APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING SUBSTRATE
Publication number
20220137516
Publication date
May 5, 2022
SEMES CO., LTD.
Ho Shin KANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LITHOGRAPHIC APPARATUS
Publication number
20220100104
Publication date
Mar 31, 2022
CHANGXIN MEMORY TECHNOLOGIES, INC
Shuping LI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY