having low tensile stress between layers

Industry

CPC
B81C1/00365

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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C1/00Manufacture or treatment of devices or systems in or on a substrate

Current Industry

B81C1/00365having low tensile stress between layers

Industries

Patents Grantslast 30 patents

Information Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
- Patent number 11,174,160
- Issue date Nov 16, 2021
- International Business Machines Corporation
- Anthony K. Stamper
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical system (MEMS) structures and design struct...
- Patent number 11,167,980
- Issue date Nov 9, 2021
- International Business Machines Corporation
- Michael T. Brigham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity mems and related structures, methods of manufacture a...
- Patent number 11,111,138
- Issue date Sep 7, 2021
- International Business Machines Corporation
- Anthony K. Stamper
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
- Patent number 11,111,139
- Issue date Sep 7, 2021
- International Business Machines Corporation
- Christopher V. Jahnes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
- Patent number 11,104,572
- Issue date Aug 31, 2021
- International Business Machines Corporation
- Christopher V. Jahnes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
- Patent number 11,021,364
- Issue date Jun 1, 2021
- International Business Machines Corporation
- Russell T. Herrin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
- Patent number 10,906,803
- Issue date Feb 2, 2021
- International Business Machines Corporation
- Russell T. Herrin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
- Patent number 10,766,765
- Issue date Sep 8, 2020
- International Business Machines Corporation
- Christopher V. Jahnes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
- Patent number 10,640,364
- Issue date May 5, 2020
- International Business Machines Corporation
- Christopher V. Jahnes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
- Patent number 10,640,365
- Issue date May 5, 2020
- International Business Machines Corporation
- Christopher V. Jahnes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
- Patent number 10,618,802
- Issue date Apr 14, 2020
- International Business Machines Corporation
- Anthony K. Stamper
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
- Patent number 10,618,803
- Issue date Apr 14, 2020
- International Business Machines Corporation
- Christopher V. Jahnes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Actuator, liquid discharge head, liquid discharge device, and liqui...
- Patent number 10,596,581
- Issue date Mar 24, 2020
- Ricoh Company, Ltd.
- Satoshi Mizukami
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical system (MEMS) structures and design struct...
- Patent number 10,589,991
- Issue date Mar 17, 2020
- International Business Machines Corporation
- Michael T. Brigham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical system (MEMS) structures and design struct...
- Patent number 10,589,992
- Issue date Mar 17, 2020
- International Business Machines Corporation
- Michael T. Brigham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
- Patent number 10,584,026
- Issue date Mar 10, 2020
- International Business Machines Corporation
- Christopher V. Jahnes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical system (MEMS) structures and design struct...
- Patent number 10,549,987
- Issue date Feb 4, 2020
- International Business Machines Corporation
- Michael T. Brigham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
- Patent number 10,414,646
- Issue date Sep 17, 2019
- International Business Machines Corporation
- Russell T. Herrin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
- Patent number 10,315,913
- Issue date Jun 11, 2019
- International Business Machines Corporation
- Christopher V. Jahnes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
- Patent number 10,308,501
- Issue date Jun 4, 2019
- International Business Machines Corporation
- Christopher V. Jahnes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Stress isolation features for stacked dies
- Patent number 10,287,161
- Issue date May 14, 2019
- Analog Devices, Inc.
- Xiaojie Xue
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
- Patent number 10,246,319
- Issue date Apr 2, 2019
- International Business Machines Corporation
- Christopher V. Jahnes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
- Patent number 10,214,416
- Issue date Feb 26, 2019
- International Business Machines Corporation
- Christopher V. Jahnes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
- Patent number 10,173,889
- Issue date Jan 8, 2019
- GLOBALFOUNDRIES Inc.
- Russell T. Herrin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
- Patent number 10,093,537
- Issue date Oct 9, 2018
- International Business Machines Corporation
- Russell T. Herrin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
- Patent number 10,081,540
- Issue date Sep 25, 2018
- International Business Machines Corporation
- Anthony K. Stamper
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
- Patent number 10,011,480
- Issue date Jul 3, 2018
- International Business Machines Corporation
- Christopher V. Jahnes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
- Patent number 10,005,661
- Issue date Jun 26, 2018
- International Business Machines Corporation
- Anthony K. Stamper
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-Electro-Mechanical System (MEMS) structures and design struct...
- Patent number 9,981,842
- Issue date May 29, 2018
- International Business Machines Corporation
- Michael T. Brigham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for forming micro-electro-mechanical system (MEMS) beam stru...
- Patent number 9,969,613
- Issue date May 15, 2018
- International Business Machines Corporation
- Michael T. Brigham
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MONOCRYSTALLINE NICKEL-TITANIUM FILMS ON SINGLE CRYSTAL SILICON SUB...
- Publication number 20230052052
- Publication date Feb 16, 2023
- Jagannathan Rajagopalan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Hybrid Metal and Carbon or Glassy Carbon MEMS u-ECOG Electrode and...
- Publication number 20210122627
- Publication date Apr 29, 2021
- San Diego State University Research Foundation
- Samuel Kassegne
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
- Publication number 20200024127
- Publication date Jan 23, 2020
- International Business Machines Corporation
- Christopher V. JAHNES
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
- Publication number 20200017355
- Publication date Jan 16, 2020
- International Business Machines Corporation
- Anthony K. Stamper
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
- Publication number 20200017356
- Publication date Jan 16, 2020
- International Business Machines Corporation
- Christopher V. JAHNES
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
- Publication number 20190315619
- Publication date Oct 17, 2019
- International Business Machines Corporation
- Russell T. HERRIN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
- Publication number 20190248644
- Publication date Aug 15, 2019
- International Business Machines Corporation
- Christopher V. JAHNES
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
- Publication number 20190233277
- Publication date Aug 1, 2019
- International Business Machines Corporation
- Christopher V. JAHNES
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
- Publication number 20190169017
- Publication date Jun 6, 2019
- International Business Machines Corporation
- Christopher V. JAHNES
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
- Publication number 20190152767
- Publication date May 23, 2019
- International Business Machines Corporation
- Christopher V. JAHNES
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
- Publication number 20180346318
- Publication date Dec 6, 2018
- International Business Machines Corporation
- Anthony K. Stamper
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
- Publication number 20180319652
- Publication date Nov 8, 2018
- International Business Machines Corporation
- Russell T. HERRIN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
- Publication number 20180257931
- Publication date Sep 13, 2018
- International Business Machines Corporation
- Christopher V. JAHNES
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) STRUCTURES AND DESIGN STRUCT...
- Publication number 20180201503
- Publication date Jul 19, 2018
- International Business Machines Corporation
- Michael T. Brigham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) STRUCTURES AND DESIGN STRUCT...
- Publication number 20180201502
- Publication date Jul 19, 2018
- International Business Machines Corporation
- Michael T. Brigham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) STRUCTURES AND DESIGN STRUCT...
- Publication number 20180179052
- Publication date Jun 28, 2018
- International Business Machines Corporation
- Michael T. Brigham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
- Publication number 20180072568
- Publication date Mar 15, 2018
- International Business Machines Corporation
- Anthony K. Stamper
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
- Publication number 20180072566
- Publication date Mar 15, 2018
- International Business Machines Corporation
- Christopher V. JAHNES
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
- Publication number 20180072567
- Publication date Mar 15, 2018
- International Business Machines Corporation
- Christopher V. JAHNES
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
- Publication number 20180057357
- Publication date Mar 1, 2018
- International Business Machines Corporation
- Russell T. HERRIN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
- Publication number 20180050903
- Publication date Feb 22, 2018
- International Business Machines Corporation
- Russell T. HERRIN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
- Publication number 20180009658
- Publication date Jan 11, 2018
- International Business Machines Corporation
- Christopher V. JAHNES
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
STRESS ISOLATION FEATURES FOR STACKED DIES
- Publication number 20170022051
- Publication date Jan 26, 2017
- Analog Devices, Inc.
- Xiaojie Xue
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
- Publication number 20160325986
- Publication date Nov 10, 2016
- International Business Machines Corporation
- Anthony K. Stamper
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DEVICE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20160289060
- Publication date Oct 6, 2016
- Kabushiki Kaisha Toshiba
- Akira FUJIMOTO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) STRUCTURES AND DESIGN STRUCT...
- Publication number 20160264410
- Publication date Sep 15, 2016
- International Business Machines Corporation
- Michael T. Brigham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SUBSTRATE STRUCTURE AND METHOD FOR MANUFACTURING SAME
- Publication number 20140048910
- Publication date Feb 20, 2014
- MEMSEN ELECTRONICS INC
- Lianjun Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
BORON DOPED SHELL FOR MEMS DEVICE
- Publication number 20090026559
- Publication date Jan 29, 2009
- Honeywell International Inc.
- James F. Detry
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Low compressive TiNx, materials and methods of making the same
- Publication number 20070015304
- Publication date Jan 18, 2007
- Jonathan Doan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Substrate for stressed systems and method of making same
- Publication number 20060216849
- Publication date Sep 28, 2006
- S.O.I.TEC SILICON ON INSULATOR TECHNOLOGIES S.A.
- Fabrice Letertre
- B81 - MICRO-STRUCTURAL TECHNOLOGY

having low tensile stress between layers

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Planar cavity MEMS and related structures, methods of manufacture a...

Micro-electro-mechanical system (MEMS) structures and design struct...

Planar cavity mems and related structures, methods of manufacture a...

Planar cavity MEMS and related structures, methods of manufacture a...

Planar cavity MEMS and related structures, methods of manufacture a...

Planar cavity MEMS and related structures, methods of manufacture a...

Planar cavity MEMS and related structures, methods of manufacture a...

Planar cavity MEMS and related structures, methods of manufacture a...

Planar cavity MEMS and related structures, methods of manufacture a...

Planar cavity MEMS and related structures, methods of manufacture a...

Planar cavity MEMS and related structures, methods of manufacture a...

Planar cavity MEMS and related structures, methods of manufacture a...

Actuator, liquid discharge head, liquid discharge device, and liqui...

Micro-electro-mechanical system (MEMS) structures and design struct...

Micro-electro-mechanical system (MEMS) structures and design struct...

Planar cavity MEMS and related structures, methods of manufacture a...

Micro-electro-mechanical system (MEMS) structures and design struct...

Planar cavity MEMS and related structures, methods of manufacture a...

Planar cavity MEMS and related structures, methods of manufacture a...

Planar cavity MEMS and related structures, methods of manufacture a...

Stress isolation features for stacked dies

Planar cavity MEMS and related structures, methods of manufacture a...

Planar cavity MEMS and related structures, methods of manufacture a...

Planar cavity MEMS and related structures, methods of manufacture a...

Planar cavity MEMS and related structures, methods of manufacture a...

Planar cavity MEMS and related structures, methods of manufacture a...

Planar cavity MEMS and related structures, methods of manufacture a...

Planar cavity MEMS and related structures, methods of manufacture a...

Micro-Electro-Mechanical System (MEMS) structures and design struct...

Method for forming micro-electro-mechanical system (MEMS) beam stru...

Patents Applicationslast 30 patents

MONOCRYSTALLINE NICKEL-TITANIUM FILMS ON SINGLE CRYSTAL SILICON SUB...

Hybrid Metal and Carbon or Glassy Carbon MEMS u-ECOG Electrode and...

PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...

PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...

PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...

PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...

PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...

PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...

PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...

PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...

PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...

PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...

PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...

MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) STRUCTURES AND DESIGN STRUCT...

MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) STRUCTURES AND DESIGN STRUCT...

MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) STRUCTURES AND DESIGN STRUCT...

PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...

PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...

PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...

PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...

PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...

PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...

STRESS ISOLATION FEATURES FOR STACKED DIES

PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...

DEVICE AND METHOD OF MANUFACTURING THE SAME

MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) STRUCTURES AND DESIGN STRUCT...

SUBSTRATE STRUCTURE AND METHOD FOR MANUFACTURING SAME

BORON DOPED SHELL FOR MEMS DEVICE

Low compressive TiNx, materials and methods of making the same

Substrate for stressed systems and method of making same