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IMMERSION LITHOGRAPHIC SYSTEM
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Publication number 20240152058
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Publication date May 9, 2024
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Samsung Electronics Co., Ltd.
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Wonki LEE
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Publication number 20230400775
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Publication date Dec 14, 2023
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Taiwan Semiconductor Manufacturing Company, Ltd.
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Yung-Yao LEE
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H01 - BASIC ELECTRIC ELEMENTS
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METHOD OF OPERATING SEMICONDUCTOR APPARATUS
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Publication number 20230152710
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Publication date May 18, 2023
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Shih-Ming Chang
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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SUBSTRATE SUPPORT AND SUBSTRATE TABLE
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Publication number 20230075771
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Publication date Mar 9, 2023
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ASML NETHERLANDS B.V.
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Coen Hubertus Matheus BALTIS
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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WAFER STAGE AND METHOD OF USING
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Publication number 20220291592
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Publication date Sep 15, 2022
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Taiwan Semiconductor Manufacturing Company, Ltd.
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Yung-Yao LEE
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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IMMERSION EXPOSURE TOOL
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Publication number 20220236646
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Publication date Jul 28, 2022
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Taiwan Semiconductor Manufacturing Company Limited
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Yung-Yao LEE
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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