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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C2201/00Manufacture or treatment of micro-structural devices or systems

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B81C2201/01in or on a substrate

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Top notch slit profile for MEMS device
- Patent number 12,238,478
- Issue date Feb 25, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ting-Jung Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for sealing cavities using membranes
- Patent number 12,234,144
- Issue date Feb 25, 2025
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Thierry Salvetat
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micropatterning method, micropatterning apparatus and micropatterni...
- Patent number 12,235,583
- Issue date Feb 25, 2025
- Seoul National University R&DB Foundation
- Seung Hwan Ko
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microfluidic film and method for fabricating the microfluidic film
- Patent number 12,220,696
- Issue date Feb 11, 2025
- UNIST(ULSAN NATIONAL INSTITUTE OF SCIENCE AND TECHNOLOGY)
- Taesung Kim
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Directed self-assembly
- Patent number 12,216,400
- Issue date Feb 4, 2025
- Tokyo Electron Limited
- Lior Huli
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
CMUT-on-CMOS ultrasonic transducer by bonding active wafers and man...
- Patent number 12,208,416
- Issue date Jan 28, 2025
- Zhejiang Xiansheng Technology Co., Ltd.
- Feng Yin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Arched membrane structure for MEMS device
- Patent number 12,209,013
- Issue date Jan 28, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Jhao-Yi Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Inkjet printing process
- Patent number 12,194,751
- Issue date Jan 14, 2025
- LUXEMBOURG INSTITUTE OF SCIENCE AND TECHNOLOGY (LIST)
- Nicolas Godard
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing semiconductor substrate, method for manufa...
- Patent number 12,187,607
- Issue date Jan 7, 2025
- Hamamatsu Photonics K.K.
- Nao Inoue
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical device production method
- Patent number 12,189,114
- Issue date Jan 7, 2025
- Hamamatsu Photonics K.K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for etching gaps of unequal width
- Patent number 12,187,605
- Issue date Jan 7, 2025
- Murata Manufacturing Co., Ltd.
- Petteri Kilpinen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Curved cantilever design to reduce stress in MEMS actuator
- Patent number 12,180,064
- Issue date Dec 31, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ting-Jung Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical system and process of making it
- Patent number 12,180,065
- Issue date Dec 31, 2024
- AAC Acoustic Technologies (Shenzhen) Co., Ltd.
- Euan James Boyd
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and system for fabricating a MEMS device
- Patent number 12,180,069
- Issue date Dec 31, 2024
- Invensense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Anti-stiction enhancement of ruthenium contact
- Patent number 12,172,888
- Issue date Dec 24, 2024
- Qorvo US, Inc.
- James D. Huffman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Patterned structured transfer tape
- Patent number 12,172,417
- Issue date Dec 24, 2024
- 3M Innovative Properties Company
- Martin B. Wolk
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical system (MEMS) vibration sensor and fabrica...
- Patent number 12,172,886
- Issue date Dec 24, 2024
- UPBEAT TECHNOLOGY CO., LTD
- Hsien-Lung Ho
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing fine structures in the volume of a substrate c...
- Patent number 12,172,157
- Issue date Dec 24, 2024
- Schott AG
- Andreas Ortner
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Micro-nano incremental mechanical surface treatment method
- Patent number 12,168,604
- Issue date Dec 17, 2024
- Nanjing University of Aeronautics and Astronautics
- Hongyu Wei
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for producing a base of an analysis cell for analyzing a bi...
- Patent number 12,157,665
- Issue date Dec 3, 2024
- Robert Bosch GmbH
- Franz Laermer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sharp, vertically aligned nanowire electrode arrays, high-yield fab...
- Patent number 12,157,666
- Issue date Dec 3, 2024
- The Regents of the University of California
- Shadi Dayeh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Anti-stiction process for MEMS device
- Patent number 12,157,667
- Issue date Dec 3, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jui-Chun Weng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical component for a sensor device or microphone device
- Patent number 12,151,936
- Issue date Nov 26, 2024
- Robert Bosch GmbH
- Heribert Weber
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
CMUT transducer with motion-stopping structure and CMUT transducer...
- Patent number 12,145,838
- Issue date Nov 19, 2024
- Vermon S.A.
- Cyril Meynier
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Multiple layer electrode transducers
- Patent number 12,139,394
- Issue date Nov 12, 2024
- Soundskrit Inc.
- Wan-Thai Hsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Pressure sensor with high stability
- Patent number 12,139,398
- Issue date Nov 12, 2024
- Invensense, Inc.
- Weng Shen Su
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Conductive bond structure to increase membrane sensitivity in MEMS...
- Patent number 12,139,399
- Issue date Nov 12, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Hung-Hua Lin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microfluidic chip and fabrication method
- Patent number 12,134,097
- Issue date Nov 5, 2024
- Shanghai Tianma Micro-Electronics Co., Ltd.
- Wei Li
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and structure for CMOS-MEMS thin film encapsulation
- Patent number 12,134,555
- Issue date Nov 5, 2024
- Taiwan Semiconductor Manufacturing Company Ltd.
- Yu-Chia Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical systems fabricated by printing-based assembly
- Patent number 12,136,620
- Issue date Nov 5, 2024
- The Board of Trustees of the University of Illinois
- John A. Rogers
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MEMS GRATING AND FABRICATION METHOD
- Publication number 20250066188
- Publication date Feb 27, 2025
- Northwestern Polytechnical University
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PATTERNED STRUCTURED TRANSFER TAPE
- Publication number 20250058543
- Publication date Feb 20, 2025
- 3M Innovative Properties Company
- Martin B. Wolk
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FOUNDRY-COMPATIBLE THROUGH SILICON VIA PROCESS FOR INTEGRATED MICRO...
- Publication number 20250059023
- Publication date Feb 20, 2025
- Vibrant Microsystems Inc.
- Joseph Doll
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PRODUCING FINE STRUCTURES IN THE VOLUME OF A SUBSTRATE C...
- Publication number 20250050329
- Publication date Feb 13, 2025
- SCHOTT AG
- Andreas Ortner
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
PROTECTIVE COATING FOR COPPER SURFACE IN SENSOR
- Publication number 20250042723
- Publication date Feb 6, 2025
- TEXAS INSTRUMENTS INCORPORATED
- Jeffrey S. Solas
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS COMPONENT WITH A MEMBRANE SPRING AND METHOD FOR PRODUCING A ME...
- Publication number 20250042721
- Publication date Feb 6, 2025
- ROBERT BOSCH GmbH
- Stefan Pinter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO SYSTEM AND MANUFACTURING METHOD
- Publication number 20250042725
- Publication date Feb 6, 2025
- AUDIO PIXELS LTD.
- Dmitri LURIE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS AND NEMS STRUCTURES
- Publication number 20250042727
- Publication date Feb 6, 2025
- Obsidian Sensors, Inc.
- John HONG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PROCESSING SILICON SUBSTRATE AND METHOD FOR PROCESSING L...
- Publication number 20250033956
- Publication date Jan 30, 2025
- Canon Kabushiki Kaisha
- Atsunori Terasaki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FORMATION OF ANTIREFLECTIVE SURFACES
- Publication number 20250033955
- Publication date Jan 30, 2025
- Brookhaven Science Associates, LLC
- Charles T. Black
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ANCHOR STRUCTURE
- Publication number 20250033951
- Publication date Jan 30, 2025
- Bishnu Prasanna Gogoi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
APPARATUS FOR MASK-FREE MATERIAL DEPOSITION ON ARBITRARY SUBSTRATE...
- Publication number 20250033141
- Publication date Jan 30, 2025
- THE HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY
- Sen YANG
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
MICROELECTROMECHANICAL DEVICE, MICROELECTROMECHANICAL MICROPHONE AN...
- Publication number 20250030987
- Publication date Jan 23, 2025
- ROBERT BOSCH GmbH
- Jochen Reinmuth
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Array Structures for Gyroscopes with High Resonant Frequencies
- Publication number 20250026629
- Publication date Jan 23, 2025
- NXP USA, Inc.
- Jun Tang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FOUNDRY-COMPATIBLE PROCESS FOR INTEGRATED MICRO-SPEAKER AND MICROPHONE
- Publication number 20250030998
- Publication date Jan 23, 2025
- Vibrant Microsystems Inc.
- Joseph Doll
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ELEMENT AND PIEZOELECTRIC ACOUSTIC DEVICE
- Publication number 20250026631
- Publication date Jan 23, 2025
- Murata Manufacturing Co., Ltd.
- Hiroshi MATSUBARA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE, MANUFACTURING METHOD THEREOF, AND ELECTRONIC APPARATUS
- Publication number 20250019224
- Publication date Jan 16, 2025
- BOE TECHNOLOGY GROUP CO., LTD.
- Jianxing LIU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE AND METHOD FOR PRODUCING MEMS DEVICE
- Publication number 20250019226
- Publication date Jan 16, 2025
- Rohm Co., Ltd.
- Toma FUJITA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
STACKED-DIE MEMS RESONATOR
- Publication number 20250019229
- Publication date Jan 16, 2025
- SiTime Corporation
- Pavan Gupta
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MONOCRYSTALLINE NICKEL-TITANIUM FILMS ON SINGLE CRYSTAL SILICON SUB...
- Publication number 20250019230
- Publication date Jan 16, 2025
- Jagannathan Rajagopalan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM PACKAGE AND FABRICATION METHOD THEREOF
- Publication number 20250011165
- Publication date Jan 9, 2025
- Vanguard International Semiconductor Corporation
- JIA JIE XIA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING SAME
- Publication number 20250011157
- Publication date Jan 9, 2025
- Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
- Frank Senger
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COMMON MODE REJECTION STRUCTURES FOR MEMS DEVICES
- Publication number 20250002331
- Publication date Jan 2, 2025
- NXP USA, Inc.
- Mostafa Soliman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FORMING A PASSIVATION COATING FOR MEMS DEVICES
- Publication number 20250002334
- Publication date Jan 2, 2025
- TEXAS INSTRUMENTS INCORPORATED
- Simon Joshua Jacobs
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DIE STACKING WITH CONTROLLED ANGULAR ALIGNMENT
- Publication number 20240425367
- Publication date Dec 26, 2024
- NXP USA, Inc.
- Chayathorn Saklang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS RESONATOR AND METHOD FOR PRODUCING THE SAME
- Publication number 20240425360
- Publication date Dec 26, 2024
- Rohm Co., Ltd.
- Toma FUJITA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LOW VOLTAGE CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER (CMUT) D...
- Publication number 20240425365
- Publication date Dec 26, 2024
- SENSONICS TRANSDUCERS PRIVATE LIMITED
- Brishbhan Singh PANWAR
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE HAVING AN IMPROVED STRESS DISTRIBUTION AND MANUFACTURIN...
- Publication number 20240425359
- Publication date Dec 26, 2024
- STMicroelectronics S.r.l
- Nicolo' BONI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ATTACHABLE MICROPHONE AND MANUFACTURING METHOD THEREFOR
- Publication number 20240417240
- Publication date Dec 19, 2024
- CENTER FOR ADVANCED SOFT ELECTRONICS
- Kilwon CHO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ADAPTIVE CAVITY THICKNESS CONTROL FOR MICROMACHINED ULTRASONIC TRAN...
- Publication number 20240416385
- Publication date Dec 19, 2024
- BFLY OPERATIONS, INC.
- Lingyun Miao
- B81 - MICRO-STRUCTURAL TECHNOLOGY

in or on a substrate

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Top notch slit profile for MEMS device

Method for sealing cavities using membranes

Micropatterning method, micropatterning apparatus and micropatterni...

Microfluidic film and method for fabricating the microfluidic film

Directed self-assembly

CMUT-on-CMOS ultrasonic transducer by bonding active wafers and man...

Arched membrane structure for MEMS device

Inkjet printing process

Method for manufacturing semiconductor substrate, method for manufa...

Optical device production method

Method for etching gaps of unequal width

Curved cantilever design to reduce stress in MEMS actuator

Microelectromechanical system and process of making it

Method and system for fabricating a MEMS device

Anti-stiction enhancement of ruthenium contact

Patterned structured transfer tape

Micro-electro-mechanical system (MEMS) vibration sensor and fabrica...

Method for producing fine structures in the volume of a substrate c...

Micro-nano incremental mechanical surface treatment method

Process for producing a base of an analysis cell for analyzing a bi...

Sharp, vertically aligned nanowire electrode arrays, high-yield fab...

Anti-stiction process for MEMS device

Micromechanical component for a sensor device or microphone device

CMUT transducer with motion-stopping structure and CMUT transducer...

Multiple layer electrode transducers

Pressure sensor with high stability

Conductive bond structure to increase membrane sensitivity in MEMS...

Microfluidic chip and fabrication method

Method and structure for CMOS-MEMS thin film encapsulation

Optical systems fabricated by printing-based assembly

Patents Applicationslast 30 patents

MEMS GRATING AND FABRICATION METHOD

PATTERNED STRUCTURED TRANSFER TAPE

FOUNDRY-COMPATIBLE THROUGH SILICON VIA PROCESS FOR INTEGRATED MICRO...

METHOD FOR PRODUCING FINE STRUCTURES IN THE VOLUME OF A SUBSTRATE C...

PROTECTIVE COATING FOR COPPER SURFACE IN SENSOR

MEMS COMPONENT WITH A MEMBRANE SPRING AND METHOD FOR PRODUCING A ME...

MICRO SYSTEM AND MANUFACTURING METHOD

MEMS AND NEMS STRUCTURES

METHOD FOR PROCESSING SILICON SUBSTRATE AND METHOD FOR PROCESSING L...

FORMATION OF ANTIREFLECTIVE SURFACES

ANCHOR STRUCTURE

APPARATUS FOR MASK-FREE MATERIAL DEPOSITION ON ARBITRARY SUBSTRATE...

MICROELECTROMECHANICAL DEVICE, MICROELECTROMECHANICAL MICROPHONE AN...

MEMS Array Structures for Gyroscopes with High Resonant Frequencies

FOUNDRY-COMPATIBLE PROCESS FOR INTEGRATED MICRO-SPEAKER AND MICROPHONE

MEMS ELEMENT AND PIEZOELECTRIC ACOUSTIC DEVICE

MEMS DEVICE, MANUFACTURING METHOD THEREOF, AND ELECTRONIC APPARATUS

MEMS DEVICE AND METHOD FOR PRODUCING MEMS DEVICE

STACKED-DIE MEMS RESONATOR

MONOCRYSTALLINE NICKEL-TITANIUM FILMS ON SINGLE CRYSTAL SILICON SUB...

MICRO-ELECTRO-MECHANICAL SYSTEM PACKAGE AND FABRICATION METHOD THEREOF

MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING SAME

COMMON MODE REJECTION STRUCTURES FOR MEMS DEVICES

FORMING A PASSIVATION COATING FOR MEMS DEVICES

DIE STACKING WITH CONTROLLED ANGULAR ALIGNMENT

MEMS RESONATOR AND METHOD FOR PRODUCING THE SAME

LOW VOLTAGE CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER (CMUT) D...

MEMS DEVICE HAVING AN IMPROVED STRESS DISTRIBUTION AND MANUFACTURIN...

ATTACHABLE MICROPHONE AND MANUFACTURING METHOD THEREFOR

ADAPTIVE CAVITY THICKNESS CONTROL FOR MICROMACHINED ULTRASONIC TRAN...