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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C2201/00Manufacture or treatment of micro-structural devices or systems

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B81C2201/01in or on a substrate

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Photothermal conversion element, method of manufacturing the same,...
- Patent number 12,319,566
- Issue date Jun 3, 2025
- University Public Corporation Osaka
- Takuya Iida
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Sublimation in forming a semiconductor
- Patent number 12,322,585
- Issue date Jun 3, 2025
- Micron Technology, Inc.
- Matthew S. Thorum
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Gas sensor and manufacturing method thereof
- Patent number 12,313,611
- Issue date May 27, 2025
- Electronics and Telecommunications Research Institute
- Seungeon Moon
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Signal processing circuit for triple-membrane MEMS device
- Patent number 12,304,808
- Issue date May 20, 2025
- Infineon Technologies AG
- Marc Fueldner
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Membrane support for dual backplate transducers
- Patent number 12,297,102
- Issue date May 13, 2025
- Infineon Technologies AG
- Wolfgang Klein
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Stretchable substrate and method of manufacturing the same
- Patent number 12,297,101
- Issue date May 13, 2025
- Korea Institute of Science and Technology
- Seungjun Chung
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS display device with an etch-stop-layer
- Patent number 12,298,493
- Issue date May 13, 2025
- IGNITE, Inc.
- Fusao Ishii
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical systems device
- Patent number 12,294,832
- Issue date May 6, 2025
- DENSO CORPORATION
- Yuki Ohara
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Capacitive micromachined ultrasonic transducer with contoured elect...
- Patent number 12,285,780
- Issue date Apr 29, 2025
- The Board of Trustees of the Leland Stanford Junior University
- Bo Ma
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing a micro-fluid probe
- Patent number 12,286,344
- Issue date Apr 29, 2025
- CYTOSURGE AG
- Edin Sarajlic
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical microphone with membrane trench reinforcemen...
- Patent number 12,269,734
- Issue date Apr 8, 2025
- TDK Corporation
- Pirmin Rombach
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Bottom electrode via structures for micromachined ultrasonic transd...
- Patent number 12,269,061
- Issue date Apr 8, 2025
- BFLY OPERATIONS, INC.
- Lingyun Miao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electrical contacts using an array of micromachined flexures
- Patent number 12,272,912
- Issue date Apr 8, 2025
- Atomic Machines, Inc.
- Fabian Goericke
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing mirror device
- Patent number 12,264,065
- Issue date Apr 1, 2025
- Hamamatsu Photonics K.K.
- Daiki Suzuki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Anti-stiction bottom cavity surface for micromachined ultrasonic tr...
- Patent number 12,263,506
- Issue date Apr 1, 2025
- BFLY OPERATIONS, INC.
- Lingyun Miao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacture and assembly of XY flexure mechanism assembly
- Patent number 12,258,263
- Issue date Mar 25, 2025
- The Regents of the University of Michigan
- Shorya Awtar
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Bonding process for forming semiconductor device structure
- Patent number 12,258,265
- Issue date Mar 25, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-Hang Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and system for fabricating a MEMS device
- Patent number 12,258,266
- Issue date Mar 25, 2025
- Invensense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Multi-level microelectromechanical system structure with non-photod...
- Patent number 12,252,396
- Issue date Mar 18, 2025
- Texas Instruments Incorporated
- Christopher Murray Beard
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS capacitance microphone and manufacturing method thereof
- Patent number 12,250,519
- Issue date Mar 11, 2025
- Qsensing Microelectronics Co., Ltd
- Chien-Hsing Huang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods and systems for transmission and detection of free radicals
- Patent number 12,247,920
- Issue date Mar 11, 2025
- Wisconsin Alumni Research Foundation
- J. Leon Shohet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing a sequencing unit for sequencing a biochemical...
- Patent number 12,240,752
- Issue date Mar 4, 2025
- Robert Bosch GmbH
- Franz Laermer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electromechanical device having a soft magnetic material elec...
- Patent number 12,240,753
- Issue date Mar 4, 2025
- International Business Machines Corporation
- William J. Gallagher
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Top notch slit profile for MEMS device
- Patent number 12,238,478
- Issue date Feb 25, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ting-Jung Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for sealing cavities using membranes
- Patent number 12,234,144
- Issue date Feb 25, 2025
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Thierry Salvetat
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micropatterning method, micropatterning apparatus and micropatterni...
- Patent number 12,235,583
- Issue date Feb 25, 2025
- Seoul National University R&DB Foundation
- Seung Hwan Ko
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microfluidic film and method for fabricating the microfluidic film
- Patent number 12,220,696
- Issue date Feb 11, 2025
- UNIST(ULSAN NATIONAL INSTITUTE OF SCIENCE AND TECHNOLOGY)
- Taesung Kim
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Directed self-assembly
- Patent number 12,216,400
- Issue date Feb 4, 2025
- Tokyo Electron Limited
- Lior Huli
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
CMUT-on-CMOS ultrasonic transducer by bonding active wafers and man...
- Patent number 12,208,416
- Issue date Jan 28, 2025
- Zhejiang Xiansheng Technology Co., Ltd.
- Feng Yin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Arched membrane structure for MEMS device
- Patent number 12,209,013
- Issue date Jan 28, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Jhao-Yi Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MEMS MICROMIRROR FOR ALLEVIATING OPTICAL PATH BLOCKAGE, AND PREPARA...
- Publication number 20250180889
- Publication date Jun 5, 2025
- Xi'an Zhisensor Technologies Co.,Ltd.
- Xiumin SONG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL COMPONENT WITH A METAL STANDOFF
- Publication number 20250178887
- Publication date Jun 5, 2025
- Murata Manufacturing Co., Ltd.
- Marcus RINKIÖ
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MULTI-LEVEL MICROELECTROMECHANICAL SYSTEM STRUCTURE WITH NON-PHOTOD...
- Publication number 20250178890
- Publication date Jun 5, 2025
- TEXAS INSTRUMENTS INCORPORATED
- Christopher Murray BEARD
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS transducer having a carrier layer and at least two piezoelectr...
- Publication number 20250171295
- Publication date May 29, 2025
- USound GmbH
- Andrea Rusconi Clerici Beltrami
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PRODUCING A MICROELECTROMECHANICAL COMPONENT, AND MICROE...
- Publication number 20250171298
- Publication date May 29, 2025
- ROBERT BOSCH GmbH
- Andreas Winden
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING A PACKAGING STRUCTURE
- Publication number 20250171299
- Publication date May 29, 2025
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Audrey BERTHELOT
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ELECTRIC FIELD SENSOR USING RESONANT TORSIONAL SHUTTER AND MET...
- Publication number 20250171296
- Publication date May 29, 2025
- Industry-Academic Cooperation Foundation, Yonsei University
- Jongbaeg KIM
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROPATTERNING METHOD, MICROPATTERNING APPARATUS AND MICROPATTERNI...
- Publication number 20250164885
- Publication date May 22, 2025
- Seoul National University R&DB Foundation
- Seung Hwan KO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS OF FABRICATING MICRO ELECTRO-MECHANICAL SYSTEMS STRUCTURES
- Publication number 20250162860
- Publication date May 22, 2025
- The University of British Columbia
- Chang Ge
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS OF FORMING NANOSTRUCTURES UTILIZING SELF-ASSEMBLED NUCLEIC...
- Publication number 20250166993
- Publication date May 22, 2025
- Micron Technology, Inc.
- Gurtej S. Sandhu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE
- Publication number 20250145456
- Publication date May 8, 2025
- InvenSense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL DEVICE WITH MOVABLE MASS AND STOPPING STRUCT...
- Publication number 20250145451
- Publication date May 8, 2025
- STMicroelectronics International N.V.
- Gabriele GATTERE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL DEVICE HAVING CONTACT PADS THAT ARE PROTEC...
- Publication number 20250145453
- Publication date May 8, 2025
- STMicroelectronics International N.V.
- Lorenzo CORSO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
BLACK SILICON-BASED NANOPATTERNED ELECTRODES
- Publication number 20250134407
- Publication date May 1, 2025
- Ecate LLC
- Alessandro MAGGI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Membrane Device Fabrication
- Publication number 20250136437
- Publication date May 1, 2025
- X-FAB Global Services GmbH
- Yves Dufour
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR FORMING A BORE FOR A CAVITY ARRANGED WITHIN A SEMICONDUC...
- Publication number 20250136440
- Publication date May 1, 2025
- ROBERT BOSCH GmbH
- Johannes CLASSEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Ultrasonic sensor and manufacturing method thereof
- Publication number 20250128288
- Publication date Apr 24, 2025
- Qisda Corporation
- Fu-Sheng Jiang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS RESONATOR
- Publication number 20250128937
- Publication date Apr 24, 2025
- SiTime Corporation
- Charles I. Grosjean
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROSCALE FLEXIBLE STRAIN SENSOR
- Publication number 20250122073
- Publication date Apr 17, 2025
- Carnegie Mellon University
- Jay Reddy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method For Manufacturing Vibration Device
- Publication number 20250109014
- Publication date Apr 3, 2025
- SEIKO EPSON CORPORATION
- Yusuke MATSUZAWA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS STRUCTURES WITH GAPS
- Publication number 20250109012
- Publication date Apr 3, 2025
- Murata Manufacturing Co., Ltd.
- Mikko PARTANEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PRODUCTION METHOD FOR A MICROMECHANICAL SENSOR COMPONENT AND CORRES...
- Publication number 20250109016
- Publication date Apr 3, 2025
- ROBERT BOSCH GmbH
- Richard Fix
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL COMPONENT WITH GAP-CONTROL STRUCTURE AND A M...
- Publication number 20250109015
- Publication date Apr 3, 2025
- Murata Manufacturing Co., Ltd.
- Jeanette LINDROOS
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROBE AND METHOD OF FABRICATING ULTRASONIC TRANSDUCER UNIT
- Publication number 20250100869
- Publication date Mar 27, 2025
- Qisda Corporation
- Fu-Sheng Jiang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND SYSTEM FOR PROVIDING A RELIABLE ISOLATION STACK IN CAPAC...
- Publication number 20250100014
- Publication date Mar 27, 2025
- GE Precision Healthcare LLC
- Rupak Bardhan Roy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DEVICE FOR NANOSCALE THERMAL MEASUREMENTS AND ASSOCIATED METHOD FOR...
- Publication number 20250093212
- Publication date Mar 20, 2025
- Centre National de la Recherche Scientifique
- Olivier BOURGEOIS
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SANDWICH STRUCTURES FOR MICROELECTROMECHANICAL SYSTEM MICRO-MIRRORS
- Publication number 20250091858
- Publication date Mar 20, 2025
- INFINEON TECHNOLOGIES AG
- Theresa LUTZ
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COMPOUND SENSOR AND MANUFACTURING METHOD
- Publication number 20250091860
- Publication date Mar 20, 2025
- Panasonic Intellectual Property Management Co., Ltd.
- Hiroki SAKAMOTO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PRESSURE SENSOR AND METHOD FOR MANUFACTURING SAME, AND ELECTRONIC D...
- Publication number 20250085175
- Publication date Mar 13, 2025
- Beijing BOE Technology Development Co., Ltd.
- Kui LIANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESS FOR MANUFACTURING MICROELECTROMECHANICAL DEVICES WITH REDUC...
- Publication number 20250083951
- Publication date Mar 13, 2025
- STMicroelectronics International N.V.
- Andrea NOMELLINI
- B81 - MICRO-STRUCTURAL TECHNOLOGY

in or on a substrate

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Photothermal conversion element, method of manufacturing the same,...

Sublimation in forming a semiconductor

Gas sensor and manufacturing method thereof

Signal processing circuit for triple-membrane MEMS device

Membrane support for dual backplate transducers

Stretchable substrate and method of manufacturing the same

MEMS display device with an etch-stop-layer

Microelectromechanical systems device

Capacitive micromachined ultrasonic transducer with contoured elect...

Method of manufacturing a micro-fluid probe

Microelectromechanical microphone with membrane trench reinforcemen...

Bottom electrode via structures for micromachined ultrasonic transd...

Electrical contacts using an array of micromachined flexures

Method for manufacturing mirror device

Anti-stiction bottom cavity surface for micromachined ultrasonic tr...

Method of manufacture and assembly of XY flexure mechanism assembly

Bonding process for forming semiconductor device structure

Method and system for fabricating a MEMS device

Multi-level microelectromechanical system structure with non-photod...

MEMS capacitance microphone and manufacturing method thereof

Methods and systems for transmission and detection of free radicals

Method for producing a sequencing unit for sequencing a biochemical...

Micro-electromechanical device having a soft magnetic material elec...

Top notch slit profile for MEMS device

Method for sealing cavities using membranes

Micropatterning method, micropatterning apparatus and micropatterni...

Microfluidic film and method for fabricating the microfluidic film

Directed self-assembly

CMUT-on-CMOS ultrasonic transducer by bonding active wafers and man...

Arched membrane structure for MEMS device

Patents Applicationslast 30 patents

MEMS MICROMIRROR FOR ALLEVIATING OPTICAL PATH BLOCKAGE, AND PREPARA...

MICROELECTROMECHANICAL COMPONENT WITH A METAL STANDOFF

MULTI-LEVEL MICROELECTROMECHANICAL SYSTEM STRUCTURE WITH NON-PHOTOD...

MEMS transducer having a carrier layer and at least two piezoelectr...

METHOD FOR PRODUCING A MICROELECTROMECHANICAL COMPONENT, AND MICROE...

METHOD FOR MANUFACTURING A PACKAGING STRUCTURE

MEMS ELECTRIC FIELD SENSOR USING RESONANT TORSIONAL SHUTTER AND MET...

MICROPATTERNING METHOD, MICROPATTERNING APPARATUS AND MICROPATTERNI...

METHODS OF FABRICATING MICRO ELECTRO-MECHANICAL SYSTEMS STRUCTURES

METHODS OF FORMING NANOSTRUCTURES UTILIZING SELF-ASSEMBLED NUCLEIC...

METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE

MICROELECTROMECHANICAL DEVICE WITH MOVABLE MASS AND STOPPING STRUCT...

MICRO-ELECTRO-MECHANICAL DEVICE HAVING CONTACT PADS THAT ARE PROTEC...

BLACK SILICON-BASED NANOPATTERNED ELECTRODES

Membrane Device Fabrication

METHOD FOR FORMING A BORE FOR A CAVITY ARRANGED WITHIN A SEMICONDUC...

Ultrasonic sensor and manufacturing method thereof

MEMS RESONATOR

MICROSCALE FLEXIBLE STRAIN SENSOR

Method For Manufacturing Vibration Device

MEMS STRUCTURES WITH GAPS

PRODUCTION METHOD FOR A MICROMECHANICAL SENSOR COMPONENT AND CORRES...

MICROELECTROMECHANICAL COMPONENT WITH GAP-CONTROL STRUCTURE AND A M...

PROBE AND METHOD OF FABRICATING ULTRASONIC TRANSDUCER UNIT

METHOD AND SYSTEM FOR PROVIDING A RELIABLE ISOLATION STACK IN CAPAC...

DEVICE FOR NANOSCALE THERMAL MEASUREMENTS AND ASSOCIATED METHOD FOR...

SANDWICH STRUCTURES FOR MICROELECTROMECHANICAL SYSTEM MICRO-MIRRORS

COMPOUND SENSOR AND MANUFACTURING METHOD

PRESSURE SENSOR AND METHOD FOR MANUFACTURING SAME, AND ELECTRONIC D...

PROCESS FOR MANUFACTURING MICROELECTROMECHANICAL DEVICES WITH REDUC...