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C23C14/0094

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

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C23C14/0094in transition mode

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Patents Grantslast 30 patents

Information Patent Grant
Al-rich AlTin-based films
- Patent number 11,965,234
- Issue date Apr 23, 2024
- OERLIKON SURFACE SOLUTIONS AG, PFAFFIKON
- Denis Kurapov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Rare-earth oxide based coatings based on ion assisted deposition
- Patent number 11,424,136
- Issue date Aug 23, 2022
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reactive sputtering with HIPIMS
- Patent number 11,380,530
- Issue date Jul 5, 2022
- EVATEC AG
- Juergen Weichart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Rare-earth oxide based coatings based on ion assisted deposition
- Patent number 10,930,526
- Issue date Feb 23, 2021
- Applied Materials, Inc.
- Jennifer Y. Sun
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Halftone phase shift photomask blank, making method, and halftone p...
- Patent number 10,859,904
- Issue date Dec 8, 2020
- Shin-Etsu Chemical Co., Ltd.
- Takuro Kosaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reactive sputtering with HIPIMs
- Patent number 10,784,092
- Issue date Sep 22, 2020
- EVATEC AG
- Juergen Weichart
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Halftone phase shift photomask blank, making method, and halftone p...
- Patent number 10,670,957
- Issue date Jun 2, 2020
- Shin-Etsu Chemical Co., Ltd.
- Takuro Kosaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thin film forming method
- Patent number 10,494,709
- Issue date Dec 3, 2019
- Murata Manufacturing Co., Ltd.
- Munehito Chatani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reactive sputtering process
- Patent number 10,458,015
- Issue date Oct 29, 2019
- OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON
- Siegfried Krassnitzer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for producing a multilayer coating and device for carrying o...
- Patent number 10,418,231
- Issue date Sep 17, 2019
- Leybold Optics GmbH
- Michael Scherer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for depositing a layer using a magnetron sputtering device
- Patent number 10,407,767
- Issue date Sep 10, 2019
- Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
- Hagen Bartzsch
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for depositing a piezoelectric film containing AIN, and a pi...
- Patent number 9,994,950
- Issue date Jun 12, 2018
- Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
- Hagen Bartzsch
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion assisted deposition for rare-earth oxide based coatings
- Patent number 9,869,012
- Issue date Jan 16, 2018
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Closed loop control
- Patent number 9,758,855
- Issue date Sep 12, 2017
- Applied Materials, Inc.
- Thomas Deppisch
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Bonded alumina coating for stainless steel
- Patent number 9,757,498
- Issue date Sep 12, 2017
- International Business Machines Corporation
- Robert G. Biskeborn
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
High-rate reactive sputtering of dielectric stoichiometric films
- Patent number 9,637,814
- Issue date May 2, 2017
- University of West Bohemia in Pilsen
- Rafal Bugyi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Bonded alumina coating for stainless steel
- Patent number 9,303,307
- Issue date Apr 5, 2016
- International Business Machines Corporation
- Robert G. Biskeborn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for producing a multilayer coating and device for carrying o...
- Patent number 8,956,511
- Issue date Feb 17, 2015
- Leybold Optics GmbH
- Michael Scherer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for sputtering a tensile silicon nitride film
- Patent number 8,936,702
- Issue date Jan 20, 2015
- Micron Technology, Inc.
- Allen McTeer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing semiconductor memory element and sputterin...
- Patent number 8,278,212
- Issue date Oct 2, 2012
- Canon Anelva Corporation
- Eisaku Watanabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for the deposition of an anti-reflection film on a substrate
- Patent number 8,263,489
- Issue date Sep 11, 2012
- OC Oerlikon Balzers AG
- Oliver Rattunde
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reactive sputtering method and device
- Patent number 8,163,140
- Issue date Apr 24, 2012
- Kobe Steel, Ltd.
- Yoshimitsu Ikari
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for producing silicon oxide film and method for producing op...
- Patent number 7,842,168
- Issue date Nov 30, 2010
- Asahi Glass Company, Limited
- Toru Ikeda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Stable high rate reactive sputtering
- Patent number 6,537,428
- Issue date Mar 25, 2003
- Veeco Instruments, Inc.
- Wei Xiong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Capping layer for improved silicide formation in narrow semiconduct...
- Patent number 6,388,327
- Issue date May 14, 2002
- International Business Machines Corporation
- Kenneth J. Giewont
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for producing piezoelectric films with rotating magnetron sp...
- Patent number 6,342,134
- Issue date Jan 29, 2002
- Agere Systems Guardian Corp.
- Bradley Paul Barber
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming thin film on substrate by reactive DC sputtering
- Patent number 5,607,559
- Issue date Mar 4, 1997
- Central Glass Company Limited
- Masayuki Yamada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for reactive sputter coating at least one article
- Patent number 5,423,970
- Issue date Jun 13, 1995
- Balzers Aktiengesellschaft
- Eduard Kugler
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for reactive sputter coating at least one article
- Patent number 5,292,417
- Issue date Mar 8, 1994
- Balzers Aktiengesellschaft
- Eduard Kugler
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Al-RICH AlTiN-BASED FILMS
- Publication number 20240043985
- Publication date Feb 8, 2024
- OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON
- Denis KURAPOV
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
OPTICAL FILM, SPUTTERING TARGET, AND METHOD OF PRODUCING OPTICAL FILM
- Publication number 20220316049
- Publication date Oct 6, 2022
- Sumitomo Metal Mining Co., Ltd.
- Hideharu OKAMI
- G02 - OPTICS
Information Patent Application
RARE-EARTH OXIDE BASED COATINGS BASED ON ION ASSISTED DEPOSITION
- Publication number 20210118703
- Publication date Apr 22, 2021
- Applied Materials, Inc.
- Jennifer Y. Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Al-RICH AlTiN-BASED FILMS
- Publication number 20210108306
- Publication date Apr 15, 2021
- OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON
- Denis KURAPOV
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REACTIVE SPUTTERING WITH HIPIMS
- Publication number 20200388474
- Publication date Dec 10, 2020
- Evatec AG
- Juergen Weichart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HALFTONE PHASE SHIFT PHOTOMASK BLANK, MAKING METHOD, AND HALFTONE P...
- Publication number 20200249561
- Publication date Aug 6, 2020
- Shin-Etsu Chemical Co., Ltd.
- Takuro KOSAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTERING APPARATUS AND METHOD FOR MANUFACTURING FILM
- Publication number 20190153582
- Publication date May 23, 2019
- Canon Kabushiki Kaisha
- Soya Todo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RARE-EARTH OXIDE BASED COATINGS BASED ON ION ASSISTED DEPOSITION
- Publication number 20180100228
- Publication date Apr 12, 2018
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HALFTONE PHASE SHIFT PHOTOMASK BLANK, MAKING METHOD, AND HALFTONE P...
- Publication number 20180088456
- Publication date Mar 29, 2018
- Shin-Etsu Chemical Co., Ltd.
- Takuro KOSAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR DEPOSITING A LAYER USING A MAGNETRON SPUTTERING DEVICE
- Publication number 20180066356
- Publication date Mar 8, 2018
- Fraunhofer Gesellschaft zur Forderung der angewandten Forschung e.V.
- Hagen Bartzsch
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND DEVICE FOR PRODUCING UNIFORM FILMS ON MOVING SUBSTRATES...
- Publication number 20160254127
- Publication date Sep 1, 2016
- Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
- Michael VERGÖHL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THIN FILM FORMING METHOD
- Publication number 20160083832
- Publication date Mar 24, 2016
- Murata Manufacturing Co., Ltd.
- Munehito CHATANI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH-RATE REACTIVE SPUTTERING OF DIELECTRIC STOICHIOMETRIC FILMS
- Publication number 20150354052
- Publication date Dec 10, 2015
- University of West Bohemia in Pilsen
- Rafal Bugyi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REACTIVE SPUTTERING PROCESS
- Publication number 20140311892
- Publication date Oct 23, 2014
- Siegfried Krassnitzer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REACTIVE SPUTTERING WITH MULTIPLE SPUTTER SOURCES
- Publication number 20120031749
- Publication date Feb 9, 2012
- OC OERLIKON BALZERS AG
- Martin Dubs
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR MEMORY ELEMENT AND SPUTTERIN...
- Publication number 20110312178
- Publication date Dec 22, 2011
- Canon ANELVA Corporation
- Eisaku Watanabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS FOR THE DEPOSITION OF AN ANTI-REFLECTION FILM ON A SUBSTRATE
- Publication number 20110177649
- Publication date Jul 21, 2011
- OC OERLIKON BALZERS AG
- Oliver Rattunde
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REACTIVE SPUTTERING WITH HIPIMS
- Publication number 20090173622
- Publication date Jul 9, 2009
- OC OERLIKON BALZERS AG
- Juergen Weichart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
System and method for sputtering a tensile silicon nitride film
- Publication number 20070212893
- Publication date Sep 13, 2007
- Allen McTeer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for producing a multilayer coating and device for carrying o...
- Publication number 20060151312
- Publication date Jul 13, 2006
- Michael Scherer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for producing silicon oxide film and method for producing op...
- Publication number 20060032739
- Publication date Feb 16, 2006
- ASAHI GLASS COMPANY, LIMITED
- Toru Ikeda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Reactive sputtering method and device
- Publication number 20050205413
- Publication date Sep 22, 2005
- Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel Ltd.)
- Yoshimitsu Ikari
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for depositing a metal barrier layer
- Publication number 20030042133
- Publication date Mar 6, 2003
- Jae-Wook Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

in transition mode

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Al-rich AlTin-based films

Rare-earth oxide based coatings based on ion assisted deposition

Reactive sputtering with HIPIMS

Rare-earth oxide based coatings based on ion assisted deposition

Halftone phase shift photomask blank, making method, and halftone p...

Reactive sputtering with HIPIMs

Halftone phase shift photomask blank, making method, and halftone p...

Thin film forming method

Reactive sputtering process

Method for producing a multilayer coating and device for carrying o...

Method for depositing a layer using a magnetron sputtering device

Method for depositing a piezoelectric film containing AIN, and a pi...

Ion assisted deposition for rare-earth oxide based coatings

Closed loop control

Bonded alumina coating for stainless steel

High-rate reactive sputtering of dielectric stoichiometric films

Bonded alumina coating for stainless steel

Method for producing a multilayer coating and device for carrying o...

System and method for sputtering a tensile silicon nitride film

Method for manufacturing semiconductor memory element and sputterin...

Process for the deposition of an anti-reflection film on a substrate

Reactive sputtering method and device

Method for producing silicon oxide film and method for producing op...

Stable high rate reactive sputtering

Capping layer for improved silicide formation in narrow semiconduct...

Method for producing piezoelectric films with rotating magnetron sp...

Method of forming thin film on substrate by reactive DC sputtering

Apparatus for reactive sputter coating at least one article

Method for reactive sputter coating at least one article

Patents Applicationslast 30 patents

Al-RICH AlTiN-BASED FILMS

OPTICAL FILM, SPUTTERING TARGET, AND METHOD OF PRODUCING OPTICAL FILM

RARE-EARTH OXIDE BASED COATINGS BASED ON ION ASSISTED DEPOSITION

Al-RICH AlTiN-BASED FILMS

REACTIVE SPUTTERING WITH HIPIMS

HALFTONE PHASE SHIFT PHOTOMASK BLANK, MAKING METHOD, AND HALFTONE P...

SPUTTERING APPARATUS AND METHOD FOR MANUFACTURING FILM

RARE-EARTH OXIDE BASED COATINGS BASED ON ION ASSISTED DEPOSITION

HALFTONE PHASE SHIFT PHOTOMASK BLANK, MAKING METHOD, AND HALFTONE P...

METHOD FOR DEPOSITING A LAYER USING A MAGNETRON SPUTTERING DEVICE

METHOD AND DEVICE FOR PRODUCING UNIFORM FILMS ON MOVING SUBSTRATES...

THIN FILM FORMING METHOD

HIGH-RATE REACTIVE SPUTTERING OF DIELECTRIC STOICHIOMETRIC FILMS

REACTIVE SPUTTERING PROCESS

REACTIVE SPUTTERING WITH MULTIPLE SPUTTER SOURCES

METHOD FOR MANUFACTURING SEMICONDUCTOR MEMORY ELEMENT AND SPUTTERIN...

PROCESS FOR THE DEPOSITION OF AN ANTI-REFLECTION FILM ON A SUBSTRATE

REACTIVE SPUTTERING WITH HIPIMS

System and method for sputtering a tensile silicon nitride film

Method for producing a multilayer coating and device for carrying o...

Method for producing silicon oxide film and method for producing op...

Reactive sputtering method and device

Method for depositing a metal barrier layer