Number | Name | Date | Kind |
---|---|---|---|
4642163 | Greschner et al. | Feb 1987 | A |
5378341 | Drehman et al. | Jan 1995 | A |
5651865 | Sellers | Jul 1997 | A |
5683558 | Sieck et al. | Nov 1997 | A |
5693197 | Lal et al. | Dec 1997 | A |
5702573 | Biberger et al. | Dec 1997 | A |
5830327 | Kolenkow | Nov 1998 | A |
5935641 | Beam, III et al. | Aug 1999 | A |
6001227 | Pavate et al. | Dec 1999 | A |
Entry |
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Vossen et al., “Thin Film Processes”, pp. 48, Dec. 1978. |