Integrating an electronic processing unit with a micromechanical structure

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B81C1/00222

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C1/00Manufacture or treatment of devices or systems in or on a substrate

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B81C1/00222Integrating an electronic processing unit with a micromechanical structure

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Patents Grantslast 30 patents

Information Patent Grant
MEMS device and manufacturing method thereof
- Patent number 11,312,624
- Issue date Apr 26, 2022
- MIRAMEMS SENSING TECHNOLOGY CO., LTD
- Li-Tien Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device including a capacitive pressure sensor and manufacturin...
- Patent number 10,689,251
- Issue date Jun 23, 2020
- STMicroelectronics S.r.l.
- Enri Duqi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device including a capacitive pressure sensor and manufacturin...
- Patent number 10,407,301
- Issue date Sep 10, 2019
- STMicroelectronics S.r.l.
- Enri Duqi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS-CMOS integrated devices, and methods of integration at wafer l...
- Patent number 9,309,109
- Issue date Apr 12, 2016
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chia-Hua Chu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Starting substrate for semiconductor engineering having substrate-t...
- Patent number 9,249,009
- Issue date Feb 2, 2016
- Silex Microsystems AB
- Ulf Erlesand
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
Adaptive MEMS Device, CODEC for Use with the MEMS Device and Method...
- Publication number 20220162061
- Publication date May 26, 2022
- INFINEON TECHNOLOGIES AG
- Darragh Francis Corrigan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20200115226
- Publication date Apr 16, 2020
- MiraMEMS Sensing Technology Co., Ltd.
- LI-TIEN TSENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE INCLUDING A CAPACITIVE PRESSURE SENSOR AND MANUFACTURIN...
- Publication number 20190345028
- Publication date Nov 14, 2019
- STMicroelectronics S.r.l.
- Enri DUQI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE INCLUDING A CAPACITIVE PRESSURE SENSOR AND MANUFACTURIN...
- Publication number 20180282152
- Publication date Oct 4, 2018
- STMicroelectronics S.r.l.
- Enri DUQI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
STARTING SUBSTRATE FOR SEMICONDUCTOR ENGINEERING HAVING SUBSTRATE-T...
- Publication number 20140042498
- Publication date Feb 13, 2014
- Silex Microsystems AB
- Ulf Erlesand
- B81 - MICRO-STRUCTURAL TECHNOLOGY