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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C2203/00Forming micro-structural systems

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Patents Grantslast 30 patents

Information Patent Grant
Monolithic post complementary metal-oxide-semiconductor integration...
- Patent number 12,168,603
- Issue date Dec 17, 2024
- MERIDIAN INNOVATION PTE LTD
- Wan Chia Ang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
CMOS cap for MEMS devices
- Patent number 11,990,498
- Issue date May 21, 2024
- MERIDIAN INNOVATION PTE LTD
- Wan Chia Ang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
CMOS thermal fluid flow sensing device employing a flow sensor and...
- Patent number 11,035,709
- Issue date Jun 15, 2021
- Cambridge Enterprise Limited
- Andrea De Luca
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a thermoelectric-based infrared detector h...
- Patent number 10,937,824
- Issue date Mar 2, 2021
- MERIDIAN INNOVATION PTE LTD
- Piotr Kropelnicki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Systems and methods for genome mapping
- Patent number 10,866,229
- Issue date Dec 15, 2020
- Massachusetts Institute of Technology
- Huaiyu Meng
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Integrating MEMS structures with interconnects and vias
- Patent number 10,457,548
- Issue date Oct 29, 2019
- Intel Corporation
- Kevin Lai Lin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Hybrid CMOS-MEMS devices adapted for high-temperature operation and...
- Patent number 10,214,415
- Issue date Feb 26, 2019
- National Technology & Engineering Solutions of Sandia, LLC
- Benjamin Griffin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Two-port SRAM connection structure
- Patent number 10,163,495
- Issue date Dec 25, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jhon Jhy Liaw
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of fabricating integrated structure for MEMS device and semi...
- Patent number 9,988,264
- Issue date Jun 5, 2018
- United Microelectronics Corp.
- Bang-Chiang Lan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device structure with a capping structure
- Patent number 9,938,138
- Issue date Apr 10, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Wen Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for MEMS structure with dual-level structural layer and acou...
- Patent number 9,802,815
- Issue date Oct 31, 2017
- Invensense, Inc.
- Michael Julian Daneman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Two-port SRAM connection structure
- Patent number 9,672,903
- Issue date Jun 6, 2017
- Taiwan Semicondutor Manufacturing Co., Ltd.
- Jhon Jhy Liaw
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device with a capping substrate
- Patent number 9,511,997
- Issue date Dec 6, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Wen Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS devices utilizing a thick metal layer of an interconnect metal...
- Patent number 9,493,340
- Issue date Nov 15, 2016
- Intel Corporation
- Rashed Mahameed
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromachine and method for manufacturing the same
- Patent number 9,487,390
- Issue date Nov 8, 2016
- Semiconductor Energy Laboratory Co., Ltd.
- Mayumi Yamaguchi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor pressure sensor and fabrication method thereof
- Patent number 9,395,258
- Issue date Jul 19, 2016
- Mitsubishi Electric Corporation
- Kimitoshi Sato
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device with a capping substrate
- Patent number 9,254,998
- Issue date Feb 9, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Wen Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Stress-controlled formation of TiN hard mask
- Patent number 9,218,970
- Issue date Dec 22, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Rueijer Lin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Thin-film transistors incorporated into three dimensional MEMS stru...
- Patent number 9,202,821
- Issue date Dec 1, 2015
- Pixtronix, Inc.
- Patrick F. Brinkley
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electronic device, method for producing the same, and oscillator
- Patent number 9,190,954
- Issue date Nov 17, 2015
- Seiko Epson Corporation
- Takahiko Yoshizawa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Lateral etch stop for NEMS release etch for high density NEMS/CMOS...
- Patent number 9,162,877
- Issue date Oct 20, 2015
- GlobalFoundries U.S. 2 LLC
- Josephine B. Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fabricating polysilicon MOS devices and passive ESD devices
- Patent number 9,087,808
- Issue date Jul 21, 2015
- International Business Machines Corporation
- John J. Ellis-Monaghan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Lateral etch stop for NEMS release etch for high density NEMS/CMOS...
- Patent number 9,000,556
- Issue date Apr 7, 2015
- International Business Machines Corporation
- Josephine B. Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electromechanical system devices
- Patent number 8,993,394
- Issue date Mar 31, 2015
- Infineon Technologies AG
- Karlheinz Mueller
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromachine and method for manufacturing the same
- Patent number 8,884,384
- Issue date Nov 11, 2014
- Semiconductor Energy Laboratory Co., Ltd.
- Mayumi Yamaguchi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated structure for MEMS device and semiconductor device and m...
- Patent number 8,872,287
- Issue date Oct 28, 2014
- United Microelectronics Corp.
- Bang-Chiang Lan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of forming a die having an IC region adjacent a MEMS region
- Patent number 8,853,802
- Issue date Oct 7, 2014
- STMicroelectronics, Inc.
- Venkatesh Mohanakrishnaswamy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro electro mechanical device and manufacturing method thereof
- Patent number 8,759,887
- Issue date Jun 24, 2014
- Semiconductor Energy Laboratory Co., Ltd.
- Mayumi Yamaguchi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device
- Patent number 8,735,948
- Issue date May 27, 2014
- Rohm Co., Ltd.
- Goro Nakatani
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Embedded MEMS sensors and related methods
- Patent number 8,592,877
- Issue date Nov 26, 2013
- Arizona Board of Regents, a body corporate of the State of Arizona, acting fo...
- Narendra V. Lakamraju
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
A SINGLE MEMBRANE FLOW-PRESSURE SENSING DEVICE
- Publication number 20200049539
- Publication date Feb 13, 2020
- CAMBRIDGE ENTERPRISE LIMITED
- Andrea DE LUCA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Two-Port SRAM Connection Structure
- Publication number 20180061487
- Publication date Mar 1, 2018
- Taiwan Semiconductor Manufacturing Co., LTD
- Jhon Jhy Liaw
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Device Structure with a Capping Structure
- Publication number 20170158494
- Publication date Jun 8, 2017
- Chun-Wen Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MEMS STRUCTURE WITH DUAL-LEVEL STRUCTURAL LAYER AND ACOU...
- Publication number 20160083247
- Publication date Mar 24, 2016
- InvenSense, Inc.
- Michael Julian Daneman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FABRICATING POLYSILICON MOS DEVICES AND PASSIVE ESD DEVICES
- Publication number 20140339607
- Publication date Nov 20, 2014
- John J. Ellis-Monaghan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR PRESSURE SENSOR AND FABRICATION METHOD THEREOF
- Publication number 20140319585
- Publication date Oct 30, 2014
- Mitsubishi Electric Corporation
- Kimitoshi SATO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF FORMING THE SAME
- Publication number 20140319693
- Publication date Oct 30, 2014
- United Microelectronics Corp.
- Meng-Jia Lin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTRONIC DEVICE, METHOD FOR PRODUCING THE SAME, AND OSCILLATOR
- Publication number 20140292430
- Publication date Oct 2, 2014
- SEIKO EPSON CORPORATION
- Takahiko YOSHIZAWA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Stress-Controlled Formation of Tin Hard Mask
- Publication number 20140273470
- Publication date Sep 18, 2014
- Rueijer Lin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE STRUCTURE WITH A CAPPING STRUCTURE
- Publication number 20140264475
- Publication date Sep 18, 2014
- Rueijer Lin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Device with a Capping Substrate
- Publication number 20140252508
- Publication date Sep 11, 2014
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Wen Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MEMS STRUCTURE WITH DUAL-LEVEL STRUCTURAL LAYER AND ACOU...
- Publication number 20140239353
- Publication date Aug 28, 2014
- InvenSense, Inc.
- Michael Julian Daneman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FABRICATING POLYSILICON MOS DEVICES AND PASSIVE ESD DEVICES
- Publication number 20140183753
- Publication date Jul 3, 2014
- International Business Machines Corporation
- John J. Ellis-Monaghan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20140077372
- Publication date Mar 20, 2014
- Dongbu HiTek Co., Ltd.
- Sung Wook Joo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micro-Electromechanical System Devices
- Publication number 20130330870
- Publication date Dec 12, 2013
- INFINEON TECHNOLOGIES AG
- Karlheinz Mueller
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO ELECTRO MECHANICAL DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20130307030
- Publication date Nov 21, 2013
- Semiconductor Energy Laboratory Co., Ltd.
- Mayumi Yamaguchi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMACHINE AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20130285059
- Publication date Oct 31, 2013
- Mayumi Yamaguchi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INTEGRATED MEMS DEVICE
- Publication number 20130161702
- Publication date Jun 27, 2013
- Kun-Lung Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LATERAL ETCH STOP FOR NEMS RELEASE ETCH FOR HIGH DENSITY NEMS/CMOS...
- Publication number 20130087882
- Publication date Apr 11, 2013
- International Business Machines Corporation
- Josephine B. Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
EMBEDDED MEMS SENSORS AND RELATED METHODS
- Publication number 20120256237
- Publication date Oct 11, 2012
- State University
- Narendra V. Lakamraju
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF FORMING A DIE HAVING AN IC REGION ADJACENT A MEMS REGION
- Publication number 20120235254
- Publication date Sep 20, 2012
- STMICROELECTRONICS ASIA PACIFIC PTE, LTD.
- Venkatesh Mohanakrishnaswamy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO ELECTRONIC MECHANICAL SYSTEM STRUCTURE
- Publication number 20120153469
- Publication date Jun 21, 2012
- MAXCHIP ELECTRONICS CORP.
- Tsai-Chiang Nieh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL COMPONENT
- Publication number 20120133003
- Publication date May 31, 2012
- Jochen REINMUTH
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO ELECTRO MECHANICAL DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20120080727
- Publication date Apr 5, 2012
- SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Mayumi Yamaguchi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micro-Electromechanical System Devices
- Publication number 20120061734
- Publication date Mar 15, 2012
- INFINEON TECHNOLOGIES AG
- Karl-Heinz Mueller
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMACHINE AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20110297940
- Publication date Dec 8, 2011
- SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Mayumi Yamaguchi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SOLID-STATE IMAGE PICKUP APPARATUS, METHOD FOR MANUFACTURING SAME,...
- Publication number 20110284976
- Publication date Nov 24, 2011
- SONY CORPORATION
- Kazunobu Ota
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Integrated Circuit and Fabricating Method thereof
- Publication number 20110241137
- Publication date Oct 6, 2011
- United Microelectronics Corporation
- Chien-Hsin HUANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL SYSTEM (MEMS) DEVICE AND METHODS FOR FABRICA...
- Publication number 20110175177
- Publication date Jul 21, 2011
- RICHWAVE TECHNOLOGY CORP.
- Tsyr-Shyang Liou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO ELECTRONIC MECHANICAL SYSTEM STRUCTURE AND MANUFACTURING METH...
- Publication number 20110169106
- Publication date Jul 14, 2011
- MAXCHIP ELECTRONICS CORP.
- Tsai-Chiang Nieh
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Monolithic post complementary metal-oxide-semiconductor integration...

CMOS cap for MEMS devices

CMOS thermal fluid flow sensing device employing a flow sensor and...

Method for manufacturing a thermoelectric-based infrared detector h...

Systems and methods for genome mapping

Integrating MEMS structures with interconnects and vias

Hybrid CMOS-MEMS devices adapted for high-temperature operation and...

Two-port SRAM connection structure

Method of fabricating integrated structure for MEMS device and semi...

MEMS device structure with a capping structure

Method for MEMS structure with dual-level structural layer and acou...

Two-port SRAM connection structure

MEMS device with a capping substrate

MEMS devices utilizing a thick metal layer of an interconnect metal...

Micromachine and method for manufacturing the same

Semiconductor pressure sensor and fabrication method thereof

MEMS device with a capping substrate

Stress-controlled formation of TiN hard mask

Thin-film transistors incorporated into three dimensional MEMS stru...

Electronic device, method for producing the same, and oscillator

Lateral etch stop for NEMS release etch for high density NEMS/CMOS...

Fabricating polysilicon MOS devices and passive ESD devices

Lateral etch stop for NEMS release etch for high density NEMS/CMOS...

Micro-electromechanical system devices

Micromachine and method for manufacturing the same

Integrated structure for MEMS device and semiconductor device and m...

Method of forming a die having an IC region adjacent a MEMS region

Micro electro mechanical device and manufacturing method thereof

Semiconductor device

Embedded MEMS sensors and related methods

Patents Applicationslast 30 patents

A SINGLE MEMBRANE FLOW-PRESSURE SENSING DEVICE

Two-Port SRAM Connection Structure

MEMS Device Structure with a Capping Structure

METHOD FOR MEMS STRUCTURE WITH DUAL-LEVEL STRUCTURAL LAYER AND ACOU...

FABRICATING POLYSILICON MOS DEVICES AND PASSIVE ESD DEVICES

SEMICONDUCTOR PRESSURE SENSOR AND FABRICATION METHOD THEREOF

SEMICONDUCTOR DEVICE AND METHOD OF FORMING THE SAME

ELECTRONIC DEVICE, METHOD FOR PRODUCING THE SAME, AND OSCILLATOR

Stress-Controlled Formation of Tin Hard Mask

MEMS DEVICE STRUCTURE WITH A CAPPING STRUCTURE

MEMS Device with a Capping Substrate

METHOD FOR MEMS STRUCTURE WITH DUAL-LEVEL STRUCTURAL LAYER AND ACOU...

FABRICATING POLYSILICON MOS DEVICES AND PASSIVE ESD DEVICES

SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME

Micro-Electromechanical System Devices

MICRO ELECTRO MECHANICAL DEVICE AND MANUFACTURING METHOD THEREOF

MICROMACHINE AND METHOD FOR MANUFACTURING THE SAME

INTEGRATED MEMS DEVICE

LATERAL ETCH STOP FOR NEMS RELEASE ETCH FOR HIGH DENSITY NEMS/CMOS...

EMBEDDED MEMS SENSORS AND RELATED METHODS

METHOD OF FORMING A DIE HAVING AN IC REGION ADJACENT A MEMS REGION

MICRO ELECTRONIC MECHANICAL SYSTEM STRUCTURE

MICROMECHANICAL COMPONENT

MICRO ELECTRO MECHANICAL DEVICE AND MANUFACTURING METHOD THEREOF

Micro-Electromechanical System Devices

MICROMACHINE AND METHOD FOR MANUFACTURING THE SAME

SOLID-STATE IMAGE PICKUP APPARATUS, METHOD FOR MANUFACTURING SAME,...

Integrated Circuit and Fabricating Method thereof

MICROELECTROMECHANICAL SYSTEM (MEMS) DEVICE AND METHODS FOR FABRICA...

MICRO ELECTRONIC MECHANICAL SYSTEM STRUCTURE AND MANUFACTURING METH...