Introduction of auxiliary energy into the plasma

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CPC
C23C14/354

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

Current Industry

C23C14/354Introduction of auxiliary energy into the plasma

Industries

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Patents Grantslast 30 patents

Information Patent Grant
PVD system and collimator
- Patent number 11,952,656
- Issue date Apr 9, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Kuan-Lin Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for performing sputtering process
- Patent number 11,851,750
- Issue date Dec 26, 2023
- Tokyo Electron Limited
- Masato Shinada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Magnetically enhanced high density plasma-chemical vapor deposition...
- Patent number 11,821,068
- Issue date Nov 21, 2023
- IonQuest Corp.
- Bassam Hanna Abraham
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering a layer on a substrate using a high-energy density plasm...
- Patent number 11,823,859
- Issue date Nov 21, 2023
- IonQuest Corp.
- Bassam Hanna Abraham
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
EM source for enhanced plasma control
- Patent number 11,692,262
- Issue date Jul 4, 2023
- Applied Materials, Inc.
- Alexander Jansen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for reducing tungsten resistivity
- Patent number 11,655,534
- Issue date May 23, 2023
- Applied Materials, Inc.
- Wenting Hou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrically and magnetically enhanced ionized physical vapor depos...
- Patent number 11,482,404
- Issue date Oct 25, 2022
- IonQuest Corp.
- Bassam Hanna Abraham
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for reducing tungsten resistivity
- Patent number 11,447,857
- Issue date Sep 20, 2022
- Applied Materials, Inc.
- Wenting Hou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Magnetically enhanced low temperature-high density plasma-chemical...
- Patent number 11,306,391
- Issue date Apr 19, 2022
- IonQuest Corp.
- Bassam Hanna Abraham
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Magnetically enhanced high density plasma-chemical vapor deposition...
- Patent number 11,286,555
- Issue date Mar 29, 2022
- IonQuest Corp.
- Bassam Hanna Abraham
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrically and magnetically enhanced ionized physical vapor depos...
- Patent number 11,255,012
- Issue date Feb 22, 2022
- IonQuest Corp.
- Bassam Hanna Abraham
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Nuclear fuel claddings, production method thereof and uses of same...
- Patent number 11,170,905
- Issue date Nov 9, 2021
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Jean-Christophe Brachet
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for preparing graphene modified composite planar pH sensor
- Patent number 11,150,211
- Issue date Oct 19, 2021
- JIANGSU UNIVERSITY
- Xiliang Zhang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Magnetically enhanced high density plasma-chemical vapor deposition...
- Patent number 10,957,519
- Issue date Mar 23, 2021
- IonQuest Corp.
- Roman Chistyakov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetically enhanced high density plasma-chemical vapor deposition...
- Patent number 10,913,998
- Issue date Feb 9, 2021
- IonQuestCorp.
- Roman Chistyakov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetically enhanced low temperature-high density plasma-chemical...
- Patent number 10,900,118
- Issue date Jan 26, 2021
- IonQuest Corp.
- Bassam Hanna Abraham
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High density, low stress amorphous carbon film, and process and equ...
- Patent number 10,858,727
- Issue date Dec 8, 2020
- Applied Materials, Inc.
- Jingjing Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
ZnO coating method for rolling body, rolling body with ZnO coating,...
- Patent number 10,495,146
- Issue date Dec 3, 2019
- National Institute for Materials Science
- Masahiro Goto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Capacitive coupled plasma source for sputtering and resputtering
- Patent number 10,480,063
- Issue date Nov 19, 2019
- IonQuest Corp.
- Roman Chistyakov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
RF power compensation to control film stress, density, resistivity,...
- Patent number 10,242,873
- Issue date Mar 26, 2019
- Applied Materials, Inc.
- Adolph Miller Allen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Magnetically enhanced high density plasma-chemical vapor deposition...
- Patent number 10,227,692
- Issue date Mar 12, 2019
- IONQUEST LLC
- Roman Chistyakov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Magnetically enhanced low temperature-high density plasma-chemical...
- Patent number 10,227,691
- Issue date Mar 12, 2019
- IONQUEST LLC
- Bassam Hanna Abraham
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hafnium or zirconium oxide coating
- Patent number 9,983,333
- Issue date May 29, 2018
- Leybold Optics GmbH
- Michael Scherer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Magnetically enhanced high density plasma-chemical vapor deposition...
- Patent number 9,951,414
- Issue date Apr 24, 2018
- IONQUEST LLC
- Roman Chistyakov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering apparatus
- Patent number RE46599
- Issue date Nov 7, 2017
- SPUTTERING COMPONENTS INC.
- Daniel Theodore Crowley
Information Patent Grant
Method of ionized physical vapor desposition sputter coating high a...
- Patent number 9,771,648
- Issue date Sep 26, 2017
- Zond, Inc.
- Roman Chistyakov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Production method for transparent conductive film
- Patent number 9,624,573
- Issue date Apr 18, 2017
- Nitto Denko Corporation
- Kazuaki Sasa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Physical vapor deposition RF plasma shield deposit control
- Patent number 9,605,341
- Issue date Mar 28, 2017
- Applied Materials, Inc.
- Keith A. Miller
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma generation source including belt-type magnet and thin film d...
- Patent number 9,589,772
- Issue date Mar 7, 2017
- Korea Basic Science Institute
- Suk Jae Yoo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Remote arc discharge plasma assisted processes
- Patent number 9,412,569
- Issue date Aug 9, 2016
- Vapor Technologies, Inc.
- Vladimir Gorokhovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
PVD SYSTEM AND COLLIMATOR
- Publication number 20240240306
- Publication date Jul 18, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kuan-Lin Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RESONANT ANTENNA FOR PHYSICAL VAPOR DEPOSITION APPLICATIONS
- Publication number 20240234089
- Publication date Jul 11, 2024
- TOKYO ELECTRON LIMITED
- Barton LANE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RESONANT ANTENNA FOR PHYSICAL VAPOR DEPOSITION APPLICATIONS
- Publication number 20240136151
- Publication date Apr 25, 2024
- TOKYO ELECTRON LIMITED
- Barton LANE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PVD SYSTEM AND COLLIMATOR
- Publication number 20230060047
- Publication date Feb 23, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kuan-Lin Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Electrically and Magnetically Enhanced Ionized Physical Vapor Depos...
- Publication number 20230005724
- Publication date Jan 5, 2023
- IonQuest Corp.
- Bassam Hanna ABRAHAM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR REDUCING TUNGSTEN RESITIVITY
- Publication number 20220341025
- Publication date Oct 27, 2022
- Applied Materials, Inc.
- Wenting HOU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EM SOURCE FOR ENHANCED PLASMA CONTROL
- Publication number 20220341029
- Publication date Oct 27, 2022
- Applied Materials, Inc.
- Alexander Jansen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Magnetically Enhanced High Density Plasma-Chemical Vapor Deposition...
- Publication number 20220195585
- Publication date Jun 23, 2022
- IonQuest Corp.
- Bassam Hanna ABRAHAM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUM SYSTEM AND METHOD TO DEPOSIT A COMPOUND LAYER
- Publication number 20220098724
- Publication date Mar 31, 2022
- Evatec AG
- Kai Wenz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR REDUCING TUNGSTEN RESITIVITY
- Publication number 20220081756
- Publication date Mar 17, 2022
- Applied Materials, Inc.
- Wenting HOU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Magnetically Enhanced High Density Plasma-Chemical Vapor Deposition...
- Publication number 20220042168
- Publication date Feb 10, 2022
- IonQuest Corp.
- Bassam Hanna Abraham
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR PERFORMING SPUTTERING PROCESS
- Publication number 20220025511
- Publication date Jan 27, 2022
- TOKYO ELECTRON LIMITED
- Masato SHINADA
- G02 - OPTICS
Information Patent Application
Magnetically Enhanced High Density Plasma-Chemical Vapor Deposition...
- Publication number 20210317569
- Publication date Oct 14, 2021
- IonQuest Corp.
- Bassam Hanna Abraham
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Magnetically Enhanced High Density Plasma-Chemical Vapor Deposition...
- Publication number 20210115552
- Publication date Apr 22, 2021
- IonQuest Corp.
- Bassam Hanna ABRAHAM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Magnetically Enhanced High Density Plasma-Chemical Vapor Deposition...
- Publication number 20210115553
- Publication date Apr 22, 2021
- IonQuest Corp.
- Bassam Hanna Abraham
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Magnetically Enhanced Low Temperature-High Density Plasma-Chemical...
- Publication number 20210102284
- Publication date Apr 8, 2021
- IonQuest Corp.
- Bassam Hanna ABRAHAM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EM SOURCE FOR ENHANCED PLASMA CONTROL
- Publication number 20210017639
- Publication date Jan 21, 2021
- Applied Materials, Inc.
- Alexander Jansen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH POWER IMPULSE MAGNETRON SPUTTERING PHYSICAL VAPOR DEPOSITION O...
- Publication number 20200048760
- Publication date Feb 13, 2020
- KISHOR KALATHIPARAMBIL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR GENERATING HIGH-CURRENT ELECTRICAL DISCHARGES
- Publication number 20190368030
- Publication date Dec 5, 2019
- Zond, LLC
- Roman Chistyakov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Electrically and Magnetically Enhanced Ionized Physical Vapor Depos...
- Publication number 20190271070
- Publication date Sep 5, 2019
- IonQuest Corp.
- Bassam Hanna ABRAHAM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MAGNETICALLY ENHANCED HIGH DENSITY PLASMA-CHEMICAL VAPOR DEPOSITION...
- Publication number 20190256969
- Publication date Aug 22, 2019
- IonQuest Corp.
- Roman CHISTYAKOV
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MAGNETICALLY ENHANCED LOW TEMPERATURE-HIGH DENSITY PLASMA-CHEMICAL...
- Publication number 20190249293
- Publication date Aug 15, 2019
- IonQuest Corp.
- Bassam Hanna ABRAHAM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INVERTED MAGNETRON FOR PROCESSING OF THIN FILM MATERIALS
- Publication number 20190043701
- Publication date Feb 7, 2019
- HIA, Inc.
- Samuel D. Harkness
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ZnO COATING METHOD FOR ROLLING BODY, ROLLING BODY WITH ZnO COATING,...
- Publication number 20190017549
- Publication date Jan 17, 2019
- National Institute for Materials Science
- Masahiro GOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MAGNETICALLY ENHANCED HIGH DENSITY PLASMA-CHEMICAL VAPOR DEPOSITION...
- Publication number 20180374688
- Publication date Dec 27, 2018
- IonQuest LLC
- Roman Chistyakov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Electrically and Magnetically Enhanced Ionized Physical Vapor Depos...
- Publication number 20180374689
- Publication date Dec 27, 2018
- IonQuest LLC
- Bassam Hanna Abraham
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for Preparing Graphene Modified Composite Planar pH Sensor
- Publication number 20180321174
- Publication date Nov 8, 2018
- Xiliang ZHANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MAGNETICALLY ENHANCED HIGH DENSITY PLASMA-CHEMICAL VAPOR DEPOSITION...
- Publication number 20180195164
- Publication date Jul 12, 2018
- IonQuest LLC
- Roman Chistyakov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH DENSITY, LOW STRESS AMORPHOUS CARBON FILM, AND PROCESS AND EQU...
- Publication number 20180051368
- Publication date Feb 22, 2018
- Applied Materials, Inc.
- Jingjing Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NUCLEAR FUEL CLADDINGS, PRODUCTION METHOD THEREOF AND USES OF SAME...
- Publication number 20170287578
- Publication date Oct 5, 2017
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Jean-Christophe BRACHET
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Introduction of auxiliary energy into the plasma

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

PVD system and collimator

Apparatus and method for performing sputtering process

Magnetically enhanced high density plasma-chemical vapor deposition...

Sputtering a layer on a substrate using a high-energy density plasm...

EM source for enhanced plasma control

Apparatus for reducing tungsten resistivity

Electrically and magnetically enhanced ionized physical vapor depos...

Methods and apparatus for reducing tungsten resistivity

Magnetically enhanced low temperature-high density plasma-chemical...

Magnetically enhanced high density plasma-chemical vapor deposition...

Electrically and magnetically enhanced ionized physical vapor depos...

Nuclear fuel claddings, production method thereof and uses of same...

Method for preparing graphene modified composite planar pH sensor

Magnetically enhanced high density plasma-chemical vapor deposition...

Magnetically enhanced high density plasma-chemical vapor deposition...

Magnetically enhanced low temperature-high density plasma-chemical...

High density, low stress amorphous carbon film, and process and equ...

ZnO coating method for rolling body, rolling body with ZnO coating,...

Capacitive coupled plasma source for sputtering and resputtering

RF power compensation to control film stress, density, resistivity,...

Magnetically enhanced high density plasma-chemical vapor deposition...

Magnetically enhanced low temperature-high density plasma-chemical...

Hafnium or zirconium oxide coating

Magnetically enhanced high density plasma-chemical vapor deposition...

Sputtering apparatus

Method of ionized physical vapor desposition sputter coating high a...

Production method for transparent conductive film

Physical vapor deposition RF plasma shield deposit control

Plasma generation source including belt-type magnet and thin film d...

Remote arc discharge plasma assisted processes

Patents Applicationslast 30 patents

PVD SYSTEM AND COLLIMATOR

RESONANT ANTENNA FOR PHYSICAL VAPOR DEPOSITION APPLICATIONS

RESONANT ANTENNA FOR PHYSICAL VAPOR DEPOSITION APPLICATIONS

PVD SYSTEM AND COLLIMATOR

Electrically and Magnetically Enhanced Ionized Physical Vapor Depos...

APPARATUS FOR REDUCING TUNGSTEN RESITIVITY

EM SOURCE FOR ENHANCED PLASMA CONTROL

Magnetically Enhanced High Density Plasma-Chemical Vapor Deposition...

VACUUM SYSTEM AND METHOD TO DEPOSIT A COMPOUND LAYER

METHODS AND APPARATUS FOR REDUCING TUNGSTEN RESITIVITY

Magnetically Enhanced High Density Plasma-Chemical Vapor Deposition...

APPARATUS AND METHOD FOR PERFORMING SPUTTERING PROCESS

Magnetically Enhanced High Density Plasma-Chemical Vapor Deposition...

Magnetically Enhanced High Density Plasma-Chemical Vapor Deposition...

Magnetically Enhanced High Density Plasma-Chemical Vapor Deposition...

Magnetically Enhanced Low Temperature-High Density Plasma-Chemical...

EM SOURCE FOR ENHANCED PLASMA CONTROL

HIGH POWER IMPULSE MAGNETRON SPUTTERING PHYSICAL VAPOR DEPOSITION O...

APPARATUS FOR GENERATING HIGH-CURRENT ELECTRICAL DISCHARGES

Electrically and Magnetically Enhanced Ionized Physical Vapor Depos...

MAGNETICALLY ENHANCED HIGH DENSITY PLASMA-CHEMICAL VAPOR DEPOSITION...

MAGNETICALLY ENHANCED LOW TEMPERATURE-HIGH DENSITY PLASMA-CHEMICAL...

INVERTED MAGNETRON FOR PROCESSING OF THIN FILM MATERIALS

ZnO COATING METHOD FOR ROLLING BODY, ROLLING BODY WITH ZnO COATING,...

MAGNETICALLY ENHANCED HIGH DENSITY PLASMA-CHEMICAL VAPOR DEPOSITION...

Electrically and Magnetically Enhanced Ionized Physical Vapor Depos...

Method for Preparing Graphene Modified Composite Planar pH Sensor

MAGNETICALLY ENHANCED HIGH DENSITY PLASMA-CHEMICAL VAPOR DEPOSITION...

HIGH DENSITY, LOW STRESS AMORPHOUS CARBON FILM, AND PROCESS AND EQU...

NUCLEAR FUEL CLADDINGS, PRODUCTION METHOD THEREOF AND USES OF SAME...