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Introduction of auxiliary energy into the plasma
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CPC
C23C14/354
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Parent Industries
C
CHEMISTRY METALLURGY
C23
Surface treatment
C23C
COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
C23C14/00
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
Current Industry
C23C14/354
Introduction of auxiliary energy into the plasma
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Patents Grants
last 30 patents
Information
Patent Grant
PVD system and collimator
Patent number
11,952,656
Issue date
Apr 9, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Kuan-Lin Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus and method for performing sputtering process
Patent number
11,851,750
Issue date
Dec 26, 2023
Tokyo Electron Limited
Masato Shinada
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Magnetically enhanced high density plasma-chemical vapor deposition...
Patent number
11,821,068
Issue date
Nov 21, 2023
IonQuest Corp.
Bassam Hanna Abraham
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Sputtering a layer on a substrate using a high-energy density plasm...
Patent number
11,823,859
Issue date
Nov 21, 2023
IonQuest Corp.
Bassam Hanna Abraham
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
EM source for enhanced plasma control
Patent number
11,692,262
Issue date
Jul 4, 2023
Applied Materials, Inc.
Alexander Jansen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus for reducing tungsten resistivity
Patent number
11,655,534
Issue date
May 23, 2023
Applied Materials, Inc.
Wenting Hou
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Electrically and magnetically enhanced ionized physical vapor depos...
Patent number
11,482,404
Issue date
Oct 25, 2022
IonQuest Corp.
Bassam Hanna Abraham
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods and apparatus for reducing tungsten resistivity
Patent number
11,447,857
Issue date
Sep 20, 2022
Applied Materials, Inc.
Wenting Hou
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Magnetically enhanced low temperature-high density plasma-chemical...
Patent number
11,306,391
Issue date
Apr 19, 2022
IonQuest Corp.
Bassam Hanna Abraham
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Magnetically enhanced high density plasma-chemical vapor deposition...
Patent number
11,286,555
Issue date
Mar 29, 2022
IonQuest Corp.
Bassam Hanna Abraham
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrically and magnetically enhanced ionized physical vapor depos...
Patent number
11,255,012
Issue date
Feb 22, 2022
IonQuest Corp.
Bassam Hanna Abraham
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Nuclear fuel claddings, production method thereof and uses of same...
Patent number
11,170,905
Issue date
Nov 9, 2021
Commissariat a l'Energie Atomique et Aux Energies Alternatives
Jean-Christophe Brachet
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for preparing graphene modified composite planar pH sensor
Patent number
11,150,211
Issue date
Oct 19, 2021
JIANGSU UNIVERSITY
Xiliang Zhang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Magnetically enhanced high density plasma-chemical vapor deposition...
Patent number
10,957,519
Issue date
Mar 23, 2021
IonQuest Corp.
Roman Chistyakov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Magnetically enhanced high density plasma-chemical vapor deposition...
Patent number
10,913,998
Issue date
Feb 9, 2021
IonQuestCorp.
Roman Chistyakov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Magnetically enhanced low temperature-high density plasma-chemical...
Patent number
10,900,118
Issue date
Jan 26, 2021
IonQuest Corp.
Bassam Hanna Abraham
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High density, low stress amorphous carbon film, and process and equ...
Patent number
10,858,727
Issue date
Dec 8, 2020
Applied Materials, Inc.
Jingjing Liu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
ZnO coating method for rolling body, rolling body with ZnO coating,...
Patent number
10,495,146
Issue date
Dec 3, 2019
National Institute for Materials Science
Masahiro Goto
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Capacitive coupled plasma source for sputtering and resputtering
Patent number
10,480,063
Issue date
Nov 19, 2019
IonQuest Corp.
Roman Chistyakov
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
RF power compensation to control film stress, density, resistivity,...
Patent number
10,242,873
Issue date
Mar 26, 2019
Applied Materials, Inc.
Adolph Miller Allen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Magnetically enhanced high density plasma-chemical vapor deposition...
Patent number
10,227,692
Issue date
Mar 12, 2019
IONQUEST LLC
Roman Chistyakov
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Magnetically enhanced low temperature-high density plasma-chemical...
Patent number
10,227,691
Issue date
Mar 12, 2019
IONQUEST LLC
Bassam Hanna Abraham
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Hafnium or zirconium oxide coating
Patent number
9,983,333
Issue date
May 29, 2018
Leybold Optics GmbH
Michael Scherer
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Magnetically enhanced high density plasma-chemical vapor deposition...
Patent number
9,951,414
Issue date
Apr 24, 2018
IONQUEST LLC
Roman Chistyakov
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Sputtering apparatus
Patent number
RE46599
Issue date
Nov 7, 2017
SPUTTERING COMPONENTS INC.
Daniel Theodore Crowley
Information
Patent Grant
Method of ionized physical vapor desposition sputter coating high a...
Patent number
9,771,648
Issue date
Sep 26, 2017
Zond, Inc.
Roman Chistyakov
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Production method for transparent conductive film
Patent number
9,624,573
Issue date
Apr 18, 2017
Nitto Denko Corporation
Kazuaki Sasa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Physical vapor deposition RF plasma shield deposit control
Patent number
9,605,341
Issue date
Mar 28, 2017
Applied Materials, Inc.
Keith A. Miller
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma generation source including belt-type magnet and thin film d...
Patent number
9,589,772
Issue date
Mar 7, 2017
Korea Basic Science Institute
Suk Jae Yoo
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Remote arc discharge plasma assisted processes
Patent number
9,412,569
Issue date
Aug 9, 2016
Vapor Technologies, Inc.
Vladimir Gorokhovsky
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
RESONANT ANTENNA FOR PHYSICAL VAPOR DEPOSITION APPLICATIONS
Publication number
20240136151
Publication date
Apr 25, 2024
TOKYO ELECTRON LIMITED
Barton LANE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PVD SYSTEM AND COLLIMATOR
Publication number
20230060047
Publication date
Feb 23, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Kuan-Lin Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Electrically and Magnetically Enhanced Ionized Physical Vapor Depos...
Publication number
20230005724
Publication date
Jan 5, 2023
IonQuest Corp.
Bassam Hanna ABRAHAM
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
APPARATUS FOR REDUCING TUNGSTEN RESITIVITY
Publication number
20220341025
Publication date
Oct 27, 2022
Applied Materials, Inc.
Wenting HOU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
EM SOURCE FOR ENHANCED PLASMA CONTROL
Publication number
20220341029
Publication date
Oct 27, 2022
Applied Materials, Inc.
Alexander Jansen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Magnetically Enhanced High Density Plasma-Chemical Vapor Deposition...
Publication number
20220195585
Publication date
Jun 23, 2022
IonQuest Corp.
Bassam Hanna ABRAHAM
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
VACUUM SYSTEM AND METHOD TO DEPOSIT A COMPOUND LAYER
Publication number
20220098724
Publication date
Mar 31, 2022
Evatec AG
Kai Wenz
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS AND APPARATUS FOR REDUCING TUNGSTEN RESITIVITY
Publication number
20220081756
Publication date
Mar 17, 2022
Applied Materials, Inc.
Wenting HOU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Magnetically Enhanced High Density Plasma-Chemical Vapor Deposition...
Publication number
20220042168
Publication date
Feb 10, 2022
IonQuest Corp.
Bassam Hanna Abraham
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
APPARATUS AND METHOD FOR PERFORMING SPUTTERING PROCESS
Publication number
20220025511
Publication date
Jan 27, 2022
TOKYO ELECTRON LIMITED
Masato SHINADA
G02 - OPTICS
Information
Patent Application
Magnetically Enhanced High Density Plasma-Chemical Vapor Deposition...
Publication number
20210317569
Publication date
Oct 14, 2021
IonQuest Corp.
Bassam Hanna Abraham
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Magnetically Enhanced High Density Plasma-Chemical Vapor Deposition...
Publication number
20210115552
Publication date
Apr 22, 2021
IonQuest Corp.
Bassam Hanna ABRAHAM
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Magnetically Enhanced High Density Plasma-Chemical Vapor Deposition...
Publication number
20210115553
Publication date
Apr 22, 2021
IonQuest Corp.
Bassam Hanna Abraham
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Magnetically Enhanced Low Temperature-High Density Plasma-Chemical...
Publication number
20210102284
Publication date
Apr 8, 2021
IonQuest Corp.
Bassam Hanna ABRAHAM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EM SOURCE FOR ENHANCED PLASMA CONTROL
Publication number
20210017639
Publication date
Jan 21, 2021
Applied Materials, Inc.
Alexander Jansen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
HIGH POWER IMPULSE MAGNETRON SPUTTERING PHYSICAL VAPOR DEPOSITION O...
Publication number
20200048760
Publication date
Feb 13, 2020
KISHOR KALATHIPARAMBIL
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
APPARATUS FOR GENERATING HIGH-CURRENT ELECTRICAL DISCHARGES
Publication number
20190368030
Publication date
Dec 5, 2019
Zond, LLC
Roman Chistyakov
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Electrically and Magnetically Enhanced Ionized Physical Vapor Depos...
Publication number
20190271070
Publication date
Sep 5, 2019
IonQuest Corp.
Bassam Hanna ABRAHAM
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MAGNETICALLY ENHANCED HIGH DENSITY PLASMA-CHEMICAL VAPOR DEPOSITION...
Publication number
20190256969
Publication date
Aug 22, 2019
IonQuest Corp.
Roman CHISTYAKOV
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MAGNETICALLY ENHANCED LOW TEMPERATURE-HIGH DENSITY PLASMA-CHEMICAL...
Publication number
20190249293
Publication date
Aug 15, 2019
IonQuest Corp.
Bassam Hanna ABRAHAM
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
INVERTED MAGNETRON FOR PROCESSING OF THIN FILM MATERIALS
Publication number
20190043701
Publication date
Feb 7, 2019
HIA, Inc.
Samuel D. Harkness
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ZnO COATING METHOD FOR ROLLING BODY, ROLLING BODY WITH ZnO COATING,...
Publication number
20190017549
Publication date
Jan 17, 2019
National Institute for Materials Science
Masahiro GOTO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MAGNETICALLY ENHANCED HIGH DENSITY PLASMA-CHEMICAL VAPOR DEPOSITION...
Publication number
20180374688
Publication date
Dec 27, 2018
IonQuest LLC
Roman Chistyakov
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Electrically and Magnetically Enhanced Ionized Physical Vapor Depos...
Publication number
20180374689
Publication date
Dec 27, 2018
IonQuest LLC
Bassam Hanna Abraham
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method for Preparing Graphene Modified Composite Planar pH Sensor
Publication number
20180321174
Publication date
Nov 8, 2018
Xiliang ZHANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MAGNETICALLY ENHANCED HIGH DENSITY PLASMA-CHEMICAL VAPOR DEPOSITION...
Publication number
20180195164
Publication date
Jul 12, 2018
IonQuest LLC
Roman Chistyakov
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
HIGH DENSITY, LOW STRESS AMORPHOUS CARBON FILM, AND PROCESS AND EQU...
Publication number
20180051368
Publication date
Feb 22, 2018
Applied Materials, Inc.
Jingjing Liu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
NUCLEAR FUEL CLADDINGS, PRODUCTION METHOD THEREOF AND USES OF SAME...
Publication number
20170287578
Publication date
Oct 5, 2017
Commissariat A L'Energie Atomique et Aux Energies Alternatives
Jean-Christophe BRACHET
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MAGNETICALLY ENHANCED HIGH DENSITY PLASMA-CHEMICAL VAPOR DEPOSITION...
Publication number
20170175253
Publication date
Jun 22, 2017
IonQuest LLC
Roman Chistyakov
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Capacitive Coupled Plasma Source for Sputtering and Resputtering
Publication number
20170178912
Publication date
Jun 22, 2017
IonQuest LLC
Roman Chistyakov
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...