involving removal of lid, door, cover

Industry

CPC
H01L21/67772

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67772involving removal of lid, door, cover

Industries

Patents Grantslast 30 patents

Information Patent Grant
Lid opening-and-closing device
- Patent number 11,961,752
- Issue date Apr 16, 2024
- Murata Machinery, Ltd.
- Ryoma Nunome
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for inspecting wafer carriers
- Patent number 11,929,271
- Issue date Mar 12, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Cheng-Kang Hu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing system having a front opening unified pod (FOUP) load lock
- Patent number 11,923,217
- Issue date Mar 5, 2024
- Applied Materials, Inc.
- Jacob Newman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing arrangement and method for adjusting gas flow
- Patent number 11,923,225
- Issue date Mar 5, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Yi-Fam Shiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Interface tool
- Patent number 11,854,851
- Issue date Dec 26, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Jyh-Shiou Hsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Seal mechanisms for load ports
- Patent number 11,842,913
- Issue date Dec 12, 2023
- Applied Materials, Inc.
- Douglas B. Baumgarten
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reticle transportation container
- Patent number 11,837,486
- Issue date Dec 5, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yu-Ching Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Indexable side storage pod apparatus, heated side storage pod appar...
- Patent number 11,823,933
- Issue date Nov 21, 2023
- Applied Materials, Inc.
- Patrick Pannese
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Prevention of contamination of substrates during gas purging
- Patent number 11,810,805
- Issue date Nov 7, 2023
- Applied Materials, Inc.
- Douglas Brian Baumgarten
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems for integrated decomposition and scanning of a semiconducti...
- Patent number 11,804,390
- Issue date Oct 31, 2023
- Elemental Scientific, Inc.
- Tyler Yost
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Side storage pods, electronic device processing systems, and method...
- Patent number 11,791,185
- Issue date Oct 17, 2023
- Applied Materials, Inc.
- Paul B. Reuter
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Apparatus and method for handling wafer carrier doors
- Patent number 11,784,073
- Issue date Oct 10, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tsung-Sheng Kuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems, devices, and methods for air flow optimization including a...
- Patent number 11,735,455
- Issue date Aug 22, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yi-Fam Shiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Drying environments for reducing substrate defects
- Patent number 11,710,648
- Issue date Jul 25, 2023
- Applied Materials, Inc.
- Edwin Velazquez
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems for integrated decomposition and scanning of a semiconducti...
- Patent number 11,705,351
- Issue date Jul 18, 2023
- Elemental Scientific, Inc.
- Tyler Yost
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate storage apparatus, substrate storage method, and recordin...
- Patent number 11,699,608
- Issue date Jul 11, 2023
- Tokyo Electron Limited
- Akihiro Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems for integrated decomposition and scanning of a semiconducti...
- Patent number 11,694,914
- Issue date Jul 4, 2023
- Elemental Scientific, Inc.
- Tyler Yost
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 11,670,527
- Issue date Jun 6, 2023
- Tokyo Electron Limited
- Daisuke Aoki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Placement system for door of wafer pod
- Patent number 11,664,256
- Issue date May 30, 2023
- Dongfeng Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process apparatus with on-the-fly substrate centering
- Patent number 11,664,259
- Issue date May 30, 2023
- BROOKS AUTOMATION US, LLC
- Leigh F. Sharrock
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing system
- Patent number 11,658,054
- Issue date May 23, 2023
- SCREEN Holdings Co., Ltd.
- Noritake Sumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple transport carrier docking device
- Patent number 11,651,984
- Issue date May 16, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-Hung Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Load port apparatus and method of driving the same
- Patent number 11,646,215
- Issue date May 9, 2023
- TDK Corporation
- Tomoshi Abe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Load port operation in electronic device manufacturing apparatus, s...
- Patent number 11,637,029
- Issue date Apr 25, 2023
- Applied Materials, Inc.
- Paul B. Reuter
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Compliance components for semiconductor processing system
- Patent number 11,626,303
- Issue date Apr 11, 2023
- Applied Materials, Inc.
- Viren Kalsekar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing apparatus with erected tube
- Patent number 11,587,812
- Issue date Feb 21, 2023
- Disco Corporation
- Shuzo Mitani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and method of opening/closing lid of...
- Patent number 11,569,112
- Issue date Jan 31, 2023
- Tokyo Electron Limited
- Eiki Endo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,538,700
- Issue date Dec 27, 2022
- Tokyo Electron Limited
- Go Ayabe
- B08 - CLEANING
Information Patent Grant
Substrate housing container
- Patent number 11,538,703
- Issue date Dec 27, 2022
- Achilles Corporation
- Masayuki Nishijima
- G11 - INFORMATION STORAGE
Information Patent Grant
Load port with non-contact sensor
- Patent number 11,532,496
- Issue date Dec 20, 2022
- HIRATA CORPORATION
- Kinya Kagami
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
LOAD PORT
- Publication number 20240145285
- Publication date May 2, 2024
- SINFONIA TECHNOLOGY CO., LTD.
- Tatsuru Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTAINER RELAY UNIT AND LOGISTICS TRANSPORT SYSTEM INCLUDING THE SAME
- Publication number 20240096674
- Publication date Mar 21, 2024
- SEMES CO., LTD.
- Myeong Jin BANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTERFACE TOOL
- Publication number 20240087935
- Publication date Mar 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jyh-Shiou Hsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PREVENTION OF CONTAMINATION OF SUBSTRATES DURING GAS PURGING
- Publication number 20240014056
- Publication date Jan 11, 2024
- Applied Materials, Inc.
- Douglas Brian Baumgarten
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS FOR INTEGRATED DECOMPOSITION AND SCANNING OF A SEMICONDUCTI...
- Publication number 20240006201
- Publication date Jan 4, 2024
- ELEMENTAL SCIENTIFIC, INC.
- Tyler Yost
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20240006200
- Publication date Jan 4, 2024
- Kokusai Electric Corporation
- Hiroshi HIROTANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS FOR INTEGRATED DECOMPOSITION AND SCANNING OF A SEMICONDUCTI...
- Publication number 20230395406
- Publication date Dec 7, 2023
- ELEMENTAL SCIENTIFIC, INC.
- Tyler Yost
- G01 - MEASURING TESTING
Information Patent Application
LOAD PORT AND METHOD OF MOVING STAGE OF LOAD PORT
- Publication number 20230395416
- Publication date Dec 7, 2023
- SINFONIA TECHNOLOGY CO., LTD.
- Tatsuru Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR AIR FLOW OPTIMIZATION IN ENVIRONMENT FOR SE...
- Publication number 20230386877
- Publication date Nov 30, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yi-Fam SHIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS APPARATUS WITH ON-THE-FLY SUBSTRATE CENTERING
- Publication number 20230386879
- Publication date Nov 30, 2023
- BROOKS AUTOMATION US, LLC
- Leigh F. SHARROCK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPLE TRANSPORT CARRIER DOCKING DEVICE
- Publication number 20230335424
- Publication date Oct 19, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Hung HUANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOAD PORT
- Publication number 20230253229
- Publication date Aug 10, 2023
- Rorze Corporation
- Daigo TAMATSUKURI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING SUBSTRATE
- Publication number 20230207366
- Publication date Jun 29, 2023
- SEMES CO., LTD.
- Chang Jun PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOAD PORT ADAPTER
- Publication number 20230163008
- Publication date May 25, 2023
- NIDEC-READ CORPORATION
- Toshihide MATSUKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS FOR INTEGRATED DECOMPOSITION AND SCANNING OF A SEMICONDUCTI...
- Publication number 20230111929
- Publication date Apr 13, 2023
- ELEMENTAL SCIENTIFIC, INC.
- Tyler Yost
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHILLER MAKE-BREAK CONNECTOR FOR SUBSTRATE PROCESSING SYSTEMS
- Publication number 20230116577
- Publication date Apr 13, 2023
- LAM RESEARCH CORPORATION
- Alexander Charles MARCACCI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEAL MECHANISMS FOR LOAD PORTS
- Publication number 20230094114
- Publication date Mar 30, 2023
- Applied Materials, Inc.
- Douglas B. Baumgarten
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER PROCESSING METHOD AND CARRIER
- Publication number 20230079627
- Publication date Mar 16, 2023
- SCIENTECH CORPORATION
- Chuan-Chang FENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SIDE STORAGE PODS, ELECTRONIC DEVICE PROCESSING SYSTEMS, AND METHOD...
- Publication number 20230073921
- Publication date Mar 9, 2023
- Applied Materials, Inc.
- Paul B. Reuter
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
APPARATUS AND METHODS FOR AUTOMATICALLY HANDLING DIE CARRIERS
- Publication number 20230063707
- Publication date Mar 2, 2023
- Taiwan Semiconductor Manufacturing Co., LTD
- Tsung-Sheng Kuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER TRANSPORT CONTAINER
- Publication number 20230060148
- Publication date Mar 2, 2023
- Taiwan Semiconductor Manufacturing Company Limited
- Jyh-Shiou HSU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PURGE CONTROLLING SYSTEM
- Publication number 20230054047
- Publication date Feb 23, 2023
- Brillian Network & Automation Integrated System Co., Ltd.
- CHEN-WEI KU
- F24 - HEATING RANGES VENTILATING
Information Patent Application
ACCOMMODATION CONTAINER AND CHARGING METHOD FOR SUBSTRATE-SHAPED SE...
- Publication number 20230041619
- Publication date Feb 9, 2023
- TOKYO ELECTRON LIMITED
- Yuuji AKIDUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOAD PORT
- Publication number 20230039017
- Publication date Feb 9, 2023
- SINFONIA TECHNOLOGY CO., LTD.
- Tatsuru Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Placement system for door of wafer pod
- Publication number 20230029491
- Publication date Feb 2, 2023
- Shanghai GoNa Semiconductor Technology Co., Ltd.
- Dongfeng Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CASSETTE LID OPENING DEVICE
- Publication number 20230012302
- Publication date Jan 12, 2023
- ASM IP HOLDING B.V.
- Theodorus G.M. Oosterlaken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING SYSTEM HAVING A FRONT OPENING UNIFIED POD (FOUP) LOAD LOCK
- Publication number 20220406630
- Publication date Dec 22, 2022
- Applied Materials, Inc.
- Jacob NEWMAN
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
SUBSTRATE PROCESSING SYSTEMS, APPARATUS, AND METHODS WITH FACTORY I...
- Publication number 20220392789
- Publication date Dec 8, 2022
- Applied Materials, Inc.
- Sushant S. Koshti
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DRYING ENVIRONMENTS FOR REDUCING SUBSTRATE DEFECTS
- Publication number 20220375769
- Publication date Nov 24, 2022
- Applied Materials, Inc.
- Edwin VELAZQUEZ
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING ARRANGEMENT AND METHOD FOR ADJUSTING GAS FLOW
- Publication number 20220310429
- Publication date Sep 29, 2022
- Taiwan Semiconductor Manufacturing Company Limited
- Yi-Fam SHIU
- H01 - BASIC ELECTRIC ELEMENTS

involving removal of lid, door, cover

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Lid opening-and-closing device

Apparatus and method for inspecting wafer carriers

Processing system having a front opening unified pod (FOUP) load lock

Processing arrangement and method for adjusting gas flow

Interface tool

Seal mechanisms for load ports

Reticle transportation container

Indexable side storage pod apparatus, heated side storage pod appar...

Prevention of contamination of substrates during gas purging

Systems for integrated decomposition and scanning of a semiconducti...

Side storage pods, electronic device processing systems, and method...

Apparatus and method for handling wafer carrier doors

Systems, devices, and methods for air flow optimization including a...

Drying environments for reducing substrate defects

Systems for integrated decomposition and scanning of a semiconducti...

Substrate storage apparatus, substrate storage method, and recordin...

Systems for integrated decomposition and scanning of a semiconducti...

Substrate processing apparatus

Placement system for door of wafer pod

Process apparatus with on-the-fly substrate centering

Substrate processing apparatus and substrate processing system

Multiple transport carrier docking device

Load port apparatus and method of driving the same

Load port operation in electronic device manufacturing apparatus, s...

Compliance components for semiconductor processing system

Processing apparatus with erected tube

Substrate processing apparatus and method of opening/closing lid of...

Substrate processing apparatus and substrate processing method

Substrate housing container

Load port with non-contact sensor

Patents Applicationslast 30 patents

LOAD PORT

CONTAINER RELAY UNIT AND LOGISTICS TRANSPORT SYSTEM INCLUDING THE SAME

INTERFACE TOOL

PREVENTION OF CONTAMINATION OF SUBSTRATES DURING GAS PURGING

SYSTEMS FOR INTEGRATED DECOMPOSITION AND SCANNING OF A SEMICONDUCTI...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SYSTEMS FOR INTEGRATED DECOMPOSITION AND SCANNING OF A SEMICONDUCTI...

LOAD PORT AND METHOD OF MOVING STAGE OF LOAD PORT

SYSTEMS AND METHODS FOR AIR FLOW OPTIMIZATION IN ENVIRONMENT FOR SE...

PROCESS APPARATUS WITH ON-THE-FLY SUBSTRATE CENTERING

MULTIPLE TRANSPORT CARRIER DOCKING DEVICE

LOAD PORT

APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING SUBSTRATE

LOAD PORT ADAPTER

SYSTEMS FOR INTEGRATED DECOMPOSITION AND SCANNING OF A SEMICONDUCTI...

CHILLER MAKE-BREAK CONNECTOR FOR SUBSTRATE PROCESSING SYSTEMS

SEAL MECHANISMS FOR LOAD PORTS

WAFER PROCESSING METHOD AND CARRIER

SIDE STORAGE PODS, ELECTRONIC DEVICE PROCESSING SYSTEMS, AND METHOD...

APPARATUS AND METHODS FOR AUTOMATICALLY HANDLING DIE CARRIERS

WAFER TRANSPORT CONTAINER

PURGE CONTROLLING SYSTEM

ACCOMMODATION CONTAINER AND CHARGING METHOD FOR SUBSTRATE-SHAPED SE...

LOAD PORT

Placement system for door of wafer pod

CASSETTE LID OPENING DEVICE

PROCESSING SYSTEM HAVING A FRONT OPENING UNIFIED POD (FOUP) LOAD LOCK

SUBSTRATE PROCESSING SYSTEMS, APPARATUS, AND METHODS WITH FACTORY I...

DRYING ENVIRONMENTS FOR REDUCING SUBSTRATE DEFECTS

PROCESSING ARRANGEMENT AND METHOD FOR ADJUSTING GAS FLOW