Ion sources Ion guns

Industry

CPC
H01J37/08

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge

Current Industry

H01J37/08Ion sources Ion guns

Industries

Patents Grantslast 30 patents

Information Patent Grant
Ion milling device
- Patent number 12,230,471
- Issue date Feb 18, 2025
- HITACHI HIGH-TECH CORPORATION
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam source, substrate process apparatus including the same, an...
- Patent number 12,224,163
- Issue date Feb 11, 2025
- Samsung Electronics Co., Ltd.
- SeungWan Yoo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charge carrier generation source
- Patent number 12,211,663
- Issue date Jan 28, 2025
- SCIA SYSTEMS GMBH
- Enrico Loos
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and device for preparing a microscopic sample from a volume...
- Patent number 12,198,895
- Issue date Jan 14, 2025
- Carl Zeiss Microscopy GmbH
- Fabian Perez Willard
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Repeller assembly for mounting into an arc chamber of an ion implan...
- Patent number 12,198,890
- Issue date Jan 14, 2025
- Plansee USA LLC
- Nam Ngo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Controller and control techniques for linear accelerator and ion im...
- Patent number 12,193,140
- Issue date Jan 7, 2025
- Applied Materials, Inc.
- Keith E. Kowal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam chamber fluid delivery apparatus and method and ion beam e...
- Patent number 12,176,177
- Issue date Dec 24, 2024
- Techinsights Inc.
- Christopher Pawlowicz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Single beam plasma source
- Patent number 12,165,829
- Issue date Dec 10, 2024
- Board of Trustees of Michigan State University
- Qi Hua Fan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Molten liquid transport for tunable vaporization in ion sources
- Patent number 12,154,754
- Issue date Nov 26, 2024
- Applied Materials, Inc.
- Craig R. Chaney
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device to control uniformity of extracted ion beam
- Patent number 12,154,753
- Issue date Nov 26, 2024
- Applied Materials, Inc.
- Jay T. Scheuer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Toroidal motion enhanced ion source
- Patent number 12,154,755
- Issue date Nov 26, 2024
- Applied Materials, Inc.
- June Young Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hydraulic feed system for an ion source
- Patent number 12,154,763
- Issue date Nov 26, 2024
- Axcelis Technologies, Inc.
- Neil J. Bassom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for monitoring faults, anomalies, and other cha...
- Patent number 12,142,452
- Issue date Nov 12, 2024
- Advanced Energy Industries, Inc.
- Daniel Carter
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device and method for implanting particles into a substrate
- Patent number 12,125,670
- Issue date Oct 22, 2024
- MI2-FACTORY GMBH
- Constantin Csato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam source, surface processing apparatus and surf...
- Patent number 12,125,664
- Issue date Oct 22, 2024
- Oxford Instruments Nanotechnology Tools Limited
- David Pearson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation system
- Patent number 12,125,665
- Issue date Oct 22, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Kai-Yun Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam processing apparatus, electrode assembly, and method of cl...
- Patent number 12,119,203
- Issue date Oct 15, 2024
- Canon Anelva Corporation
- Yasushi Yasumatsu
- B08 - CLEANING
Information Patent Grant
Vaporizer, ion source and method for generating aluminum-containing...
- Patent number 12,112,915
- Issue date Oct 8, 2024
- NISSIN ION EQUIPMENT CO., LTD.
- Sami K. Hahto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Refillable ion chamber with automated purging system
- Patent number 12,106,929
- Issue date Oct 1, 2024
- Varian Medical Systems, Inc.
- Amir Shojaei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanned angled etching apparatus and techniques providing separate...
- Patent number 12,106,936
- Issue date Oct 1, 2024
- Applied Materials, Inc.
- Peter F. Kurunczi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High power ion beam generator systems and methods
- Patent number 12,101,870
- Issue date Sep 24, 2024
- SHINE Technologies, LLC
- Arne Kobernik
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hybrid ion source for aluminum ion generation using a target holder...
- Patent number 12,094,681
- Issue date Sep 17, 2024
- Applied Materials, Inc.
- Graham Wright
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High power ion beam generator systems and methods
- Patent number 12,075,555
- Issue date Aug 27, 2024
- SHINE Technologies, LLC
- Arne Kobernik
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion gun and ion milling machine
- Patent number 12,051,560
- Issue date Jul 30, 2024
- HITACHI HIGH-TECH CORPORATION
- Kengo Asai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fluorine based molecular co-gas when running dimethylaluminum chlor...
- Patent number 12,051,561
- Issue date Jul 30, 2024
- Axcelis Technologies, Inc.
- Neil K. Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Shield for filament in an ion source
- Patent number 12,046,443
- Issue date Jul 23, 2024
- Applied Materials, Inc.
- Klaus Becker
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion gun
- Patent number 12,040,153
- Issue date Jul 16, 2024
- ULVAC, Inc.
- Takumi Yuze
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hybrid ion source for aluminum ion generation using organoaluminium...
- Patent number 12,040,154
- Issue date Jul 16, 2024
- Applied Materials, Inc.
- Graham Wright
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching apparatus and etching method
- Patent number 12,020,892
- Issue date Jun 25, 2024
- Kioxia Corporation
- Yusuke Goki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion milling device
- Patent number 12,020,893
- Issue date Jun 25, 2024
- HITACHI HIGH-TECH CORPORATION
- Kengo Asai
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
COOLED SPUTTERING TARGET FOR ION SOURCE
- Publication number 20250054722
- Publication date Feb 13, 2025
- Applied Materials, Inc.
- Ori NOKED
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS
- Publication number 20250046564
- Publication date Feb 6, 2025
- Korea Research Institute of Standards and Science
- Takashi OGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION GENERATORS OF ION IMPLANTERS WITH MOVABLE REPELLER
- Publication number 20250046561
- Publication date Feb 6, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ying-Chieh Meng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM PROCESSING APPARATUS, ELECTRODE ASSEMBLY, AND METHOD OF CL...
- Publication number 20250014861
- Publication date Jan 9, 2025
- Canon ANELVA Corporation
- Yasushi Yasumatsu
- B08 - CLEANING
Information Patent Application
FOCUS STACKING APPLICATIONS FOR SAMPLE PREPARATION
- Publication number 20250005714
- Publication date Jan 2, 2025
- FEI Company
- Matej Dolník
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MAGNETIC ROTATION DEVICE FOR HIGH VACUUM APPLICATIONS SUCH AS ION A...
- Publication number 20240429019
- Publication date Dec 26, 2024
- SHINE Technologies, LLC
- Daniel Martin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED GAS BOX AND ION SOURCE
- Publication number 20240420920
- Publication date Dec 19, 2024
- Applied Materials, Inc.
- William H. Leavitt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTER AND ION IMPLANTATION METHOD
- Publication number 20240404787
- Publication date Dec 5, 2024
- NISSIN ION EQUIPMENT CO., LTD.
- Yuya HIRAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED SYNCHRONOUS SYSTEM FOR GRIDDED ION SOURCES
- Publication number 20240387142
- Publication date Nov 21, 2024
- VEECO INSTRUMENTS INC.
- Mohammad SAGHAYEZHIAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VOLTAGE CONTROL FOR ETCHING SYSTEMS
- Publication number 20240387139
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chansyun David YANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION SYSTEM
- Publication number 20240379321
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Kai-Yun Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FASTENER FOR SECURING FACEPLATE TO ION SOURCE
- Publication number 20240379319
- Publication date Nov 14, 2024
- Applied Materials, Inc.
- John Alexander Walder
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION SYSTEM AND RELATED METHODS
- Publication number 20240379320
- Publication date Nov 14, 2024
- Entegris, Inc.
- Ying Tang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Heated Plasma Flood Gun Sweeper
- Publication number 20240371602
- Publication date Nov 7, 2024
- Applied Materials, Inc.
- Frank Sinclair
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH POWER ION BEAM GENERATOR SYSTEMS AND METHODS
- Publication number 20240357728
- Publication date Oct 24, 2024
- SHINE Technologies, LLC
- Arne KOBERNIK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FOCUSED ION BEAM DEVICE
- Publication number 20240355574
- Publication date Oct 24, 2024
- HITACHI HIGH-TECH SCIENCE CORPORATION
- Koji NAGAHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID METAL ION SOURCE DEVICE FOR USING BISMUTH AND ALLOY OF BISMUTH
- Publication number 20240331967
- Publication date Oct 3, 2024
- KOREA BASIC SCIENCE INSTITUTE
- Myoung Choul Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REPELLER FOR ION GENERATING APPARATUS, ION GENERATING APPARATUS AND...
- Publication number 20240290570
- Publication date Aug 29, 2024
- Samsung Electronics Co., LTD
- Kyoungchul YOO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM EXTRACTION ELECTRODE, ION SOURCE AND EXTRACTION ELECTRODE...
- Publication number 20240290576
- Publication date Aug 29, 2024
- NISSIN ION EQUIPMENT CO., LTD.
- Yuya HIRAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FOCUSED ION BEAM APPARATUS AND CONTROL METHOD THEREOF
- Publication number 20240282548
- Publication date Aug 22, 2024
- Samsung Electronics Co., Ltd.
- Yeoseon Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSULATOR FOR AN ION IMPLANTATION SOURCE
- Publication number 20240274405
- Publication date Aug 15, 2024
- TAIWAN SEMICONDUCTOR MANUFACTURING COMAPNY, LTD.
- Tsung-Min LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF OPERATING AN ION BEAM SOURCE, ION BEAM SOURCE AND COMPUTE...
- Publication number 20240266139
- Publication date Aug 8, 2024
- CARL ZEISS MICROSCOPY GMBH
- Ramu Pradip
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION GENERATION DEVICE AND ION IMPLANTER
- Publication number 20240266140
- Publication date Aug 8, 2024
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Sho KAWATSU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion Milling Apparatus
- Publication number 20240258062
- Publication date Aug 1, 2024
- HITACHI HIGH-TECH CORPORATION
- Shota AIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION SOURCE HEAD AND ION SOURCE HEAD CURVED LINER, DEFLECTOR, OR REP...
- Publication number 20240249906
- Publication date Jul 25, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Po-Tang TSENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Structure for Particle Acceleration And Charged Particle Beam Appar...
- Publication number 20240242918
- Publication date Jul 18, 2024
- Hitachi High-Tech Corporation
- RYO SUGIYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion source structure of ion implanter and its operation method
- Publication number 20240234079
- Publication date Jul 11, 2024
- United Semiconductor (Xiamen) Co., Ltd.
- Wen Shuo Cui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND DEVICE FOR PREPARING A MICROSCOPIC SAMPLE FROM A VOLUME...
- Publication number 20240234086
- Publication date Jul 11, 2024
- CARL ZEISS MICROSCOPY GMBH
- Fabian Perez Willard
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Grid Structures Of Ion Beam Etching (IBE) Systems
- Publication number 20240222071
- Publication date Jul 4, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chansyun David YANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM DEVICE AND EMITTER TIP MILLING METHOD
- Publication number 20240203682
- Publication date Jun 20, 2024
- HITACHI HIGH-TECH CORPORATION
- Shinichi MATSUBARA
- H01 - BASIC ELECTRIC ELEMENTS

Ion sources Ion guns

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Ion milling device

Ion beam source, substrate process apparatus including the same, an...

Charge carrier generation source

Method and device for preparing a microscopic sample from a volume...

Repeller assembly for mounting into an arc chamber of an ion implan...

Controller and control techniques for linear accelerator and ion im...

Ion beam chamber fluid delivery apparatus and method and ion beam e...

Single beam plasma source

Molten liquid transport for tunable vaporization in ion sources

Device to control uniformity of extracted ion beam

Toroidal motion enhanced ion source

Hydraulic feed system for an ion source

Systems and methods for monitoring faults, anomalies, and other cha...

Device and method for implanting particles into a substrate

Charged particle beam source, surface processing apparatus and surf...

Ion implantation system

Ion beam processing apparatus, electrode assembly, and method of cl...

Vaporizer, ion source and method for generating aluminum-containing...

Refillable ion chamber with automated purging system

Scanned angled etching apparatus and techniques providing separate...

High power ion beam generator systems and methods

Hybrid ion source for aluminum ion generation using a target holder...

High power ion beam generator systems and methods

Ion gun and ion milling machine

Fluorine based molecular co-gas when running dimethylaluminum chlor...

Shield for filament in an ion source

Ion gun

Hybrid ion source for aluminum ion generation using organoaluminium...

Etching apparatus and etching method

Ion milling device

Patents Applicationslast 30 patents

COOLED SPUTTERING TARGET FOR ION SOURCE

CHARGED PARTICLE BEAM APPARATUS

ION GENERATORS OF ION IMPLANTERS WITH MOVABLE REPELLER

ION BEAM PROCESSING APPARATUS, ELECTRODE ASSEMBLY, AND METHOD OF CL...

FOCUS STACKING APPLICATIONS FOR SAMPLE PREPARATION

MAGNETIC ROTATION DEVICE FOR HIGH VACUUM APPLICATIONS SUCH AS ION A...

INTEGRATED GAS BOX AND ION SOURCE

ION IMPLANTER AND ION IMPLANTATION METHOD

INTEGRATED SYNCHRONOUS SYSTEM FOR GRIDDED ION SOURCES

VOLTAGE CONTROL FOR ETCHING SYSTEMS

ION IMPLANTATION SYSTEM

FASTENER FOR SECURING FACEPLATE TO ION SOURCE

ION IMPLANTATION SYSTEM AND RELATED METHODS

Heated Plasma Flood Gun Sweeper

HIGH POWER ION BEAM GENERATOR SYSTEMS AND METHODS

FOCUSED ION BEAM DEVICE

LIQUID METAL ION SOURCE DEVICE FOR USING BISMUTH AND ALLOY OF BISMUTH

REPELLER FOR ION GENERATING APPARATUS, ION GENERATING APPARATUS AND...

ION BEAM EXTRACTION ELECTRODE, ION SOURCE AND EXTRACTION ELECTRODE...

FOCUSED ION BEAM APPARATUS AND CONTROL METHOD THEREOF

INSULATOR FOR AN ION IMPLANTATION SOURCE

METHOD OF OPERATING AN ION BEAM SOURCE, ION BEAM SOURCE AND COMPUTE...

ION GENERATION DEVICE AND ION IMPLANTER

Ion Milling Apparatus

ION SOURCE HEAD AND ION SOURCE HEAD CURVED LINER, DEFLECTOR, OR REP...

Structure for Particle Acceleration And Charged Particle Beam Appar...

Ion source structure of ion implanter and its operation method

METHOD AND DEVICE FOR PREPARING A MICROSCOPIC SAMPLE FROM A VOLUME...

Grid Structures Of Ion Beam Etching (IBE) Systems

ION BEAM DEVICE AND EMITTER TIP MILLING METHOD