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CPC
H01S3/2256

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Parent Industries

HELECTRICITY H01Electric elements H01SDEVICES USING STIMULATED EMISSION H01S3/00Lasers

Current Industry

H01S3/2256KrF

Industries

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Patents Grantslast 30 patents

Information Patent Grant
High voltage pulse generation device, gas laser apparatus, and elec...
- Patent number 12,166,329
- Issue date Dec 10, 2024
- National University Corporation Nagaoka University of Technology
- Weihua Jiang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Copper electrode material
- Patent number 12,132,289
- Issue date Oct 29, 2024
- JX Advanced Metals Corporation
- Masahiro Takahata
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Grant
Electrical pulse compression circuit
- Patent number 11,901,903
- Issue date Feb 13, 2024
- PLEX Corporation
- Malcolm W. McGeoch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrode for a discharge chamber
- Patent number 11,749,520
- Issue date Sep 5, 2023
- Cymer, LLC
- Leyla Ramin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser gas regenerating apparatus and electronic device manufacturin...
- Patent number 11,451,003
- Issue date Sep 20, 2022
- Gigaphoton Inc.
- Hiroaki Tsushima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Arrangement of expanding optical flows for efficient laser extraction
- Patent number 11,165,216
- Issue date Nov 2, 2021
- INNOVEN ENERGY LLC
- Robert O. Hunter
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Electrode for a discharge chamber
- Patent number 11,127,582
- Issue date Sep 21, 2021
- Cymer, LLC
- Leyla Ramin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Online calibration for repetition rate dependent performance variables
- Patent number 11,050,213
- Issue date Jun 29, 2021
- Cymer, LLC
- Joshua Jon Thornes
- G01 - MEASURING TESTING
Information Patent Grant
Line narrowing module
- Patent number 10,916,910
- Issue date Feb 9, 2021
- Gigaphoton Inc.
- Shinichi Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser gas purifying system and laser system
- Patent number 10,892,592
- Issue date Jan 12, 2021
- Gigaphoton Inc.
- Natsushi Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integration of direct compressor with primary laser source and fast...
- Patent number 10,862,260
- Issue date Dec 8, 2020
- INNOVEN ENERGY LLC
- Robert O. Hunter
- G02 - OPTICS
Information Patent Grant
Laser apparatus
- Patent number 10,797,465
- Issue date Oct 6, 2020
- Gigaphoton Inc.
- Hirotaka Miyamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Beam reverser module and optical power amplifier having such a beam...
- Patent number 10,777,958
- Issue date Sep 15, 2020
- Carl Zeiss SMT GmbH
- Michael Schall
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Narrowband laser apparatus and spectral linewidth measuring apparatus
- Patent number 10,741,991
- Issue date Aug 11, 2020
- Gigaphoton Inc.
- Takahito Kumazaki
- G01 - MEASURING TESTING
Information Patent Grant
Online calibration for repetition rate dependent performance variables
- Patent number 10,727,642
- Issue date Jul 28, 2020
- Cymer, LLC
- Joshua Jon Thornes
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for direct compression of laser pulses with large temporal r...
- Patent number 10,170,883
- Issue date Jan 1, 2019
- INNOVEN ENERGY LLC
- Robert O. Hunter
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas laser device and condenser
- Patent number 10,096,966
- Issue date Oct 9, 2018
- Gigaphoton Inc.
- Akira Suwa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas mixture control in a gas discharge light source
- Patent number 10,090,629
- Issue date Oct 2, 2018
- Cymer, LLC
- Rahul Ahlawat
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser system
- Patent number 9,966,721
- Issue date May 8, 2018
- Gigaphoton Inc.
- Kouji Kakizaki
- G02 - OPTICS
Information Patent Grant
Excimer laser apparatus and excimer laser system
- Patent number 9,954,340
- Issue date Apr 24, 2018
- Gigaphoton Inc.
- Tooru Abe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Narrow band laser apparatus
- Patent number 9,882,343
- Issue date Jan 30, 2018
- Gigaphoton Inc.
- Masato Moriya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Beam reverser module and optical power amplifier having such a beam...
- Patent number 9,843,153
- Issue date Dec 12, 2017
- Carl Zeiss SMT GmbH
- Michael Schall
- G02 - OPTICS
Information Patent Grant
System and method for automatic gas optimization in a two-chamber g...
- Patent number 9,831,628
- Issue date Nov 28, 2017
- Cymer, LLC
- Kevin O'Brien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas mixture control in a gas discharge light source
- Patent number 9,819,136
- Issue date Nov 14, 2017
- Cymer, LLC
- Rahul Ahlawat
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for rapid sterilization of a room
- Patent number 9,808,546
- Issue date Nov 7, 2017
- John Taboada
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Method of controlling wavelength of laser beam and laser apparatus
- Patent number 9,647,411
- Issue date May 9, 2017
- Gigaphoton Inc.
- Takashi Matsunaga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Compensation for a disturbance in an optical source
- Patent number 9,634,460
- Issue date Apr 25, 2017
- Cymer, LLC
- Rahul Ahlawat
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser apparatus and method of controlling laser apparatus
- Patent number 9,490,603
- Issue date Nov 8, 2016
- Gigaphoton Inc.
- Hiroaki Tsushima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Excimer laser apparatus and excimer laser system
- Patent number 9,425,576
- Issue date Aug 23, 2016
- Gigaphoton Inc.
- Tooru Abe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser chamber and discharge excitation gas laser apparatus
- Patent number 9,373,926
- Issue date Jun 21, 2016
- Gigaphoton Inc.
- Hiroaki Tsushima
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...

Patents Applicationslast 30 patents

Information Patent Application
Absorbing Optical Switch for High Fluence Laser Pulse
- Publication number 20240396281
- Publication date Nov 28, 2024
- Innoven Energy LLC
- Robert O. Hunter
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ULTRAVIOLET LASER APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD
- Publication number 20230378713
- Publication date Nov 23, 2023
- Gigaphoton Inc.
- Yuki TAMARU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTICAL ISOLATOR, ULTRAVIOLET LASER APPARATUS, AND ELECTRONIC DEVIC...
- Publication number 20230375846
- Publication date Nov 23, 2023
- Gigaphoton Inc.
- Yuki TAMARU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTICAL ISOLATOR, ULTRAVIOLET LASER DEVICE, AND ELECTRONIC DEVICE M...
- Publication number 20230375847
- Publication date Nov 23, 2023
- Gigaphoton Inc.
- Yuki TAMARU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GLASS PROCESSING METHOD
- Publication number 20230219171
- Publication date Jul 13, 2023
- Gigaphoton Inc.
- Yasufumi KAWASUJI
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
ELECTRICAL PULSE COMPRESSION CIRCUIT
- Publication number 20230170886
- Publication date Jun 1, 2023
- PLEX Corporation
- Malcolm W. McGeoch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRODE FOR A DISCHARGE CHAMBER
- Publication number 20210384027
- Publication date Dec 9, 2021
- CYMER, LLC
- Leyla Ramin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER GAS REGENERATING APPARATUS AND ELECTRONIC DEVICE MANUFACTURIN...
- Publication number 20200403371
- Publication date Dec 24, 2020
- Gigaphoton Inc.
- Hiroaki TSUSHIMA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ELECTRODE FOR A DISCHARGE CHAMBER
- Publication number 20200328074
- Publication date Oct 15, 2020
- CYMER, LLC
- Leyla Ramin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ONLINE CALIBRATION FOR REPETITION RATE DEPENDENT PERFORMANCE VARIABLES
- Publication number 20200321746
- Publication date Oct 8, 2020
- CYMER, LLC
- Joshua Jon THORNES
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Arrangement of Expanding Optical Flows for Efficient Laser Extraction
- Publication number 20200028313
- Publication date Jan 23, 2020
- INNOVEN ENERGY LLC
- Robert O. Hunter
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
LASER GAS PURIFYING SYSTEM AND LASER SYSTEM
- Publication number 20180241170
- Publication date Aug 23, 2018
- Gigaphoton Inc.
- Natsushi SUZUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Beam Reverser Module and Optical Power Amplifier Having Such a Beam...
- Publication number 20180102620
- Publication date Apr 12, 2018
- Carl Zeiss SMT GMBH
- Michael Schall
- G02 - OPTICS
Information Patent Application
ONLINE CALIBRATION FOR REPETITION RATE DEPENDENT PERFORMANCE VARIABLES
- Publication number 20180006425
- Publication date Jan 4, 2018
- CYMER, LLC
- Joshua Jon Thornes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and Apparatus for Rapid Sterilization of a Room
- Publication number 20170216467
- Publication date Aug 3, 2017
- John Taboada
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
Method and Apparatus for Rapid Sterilization of Hazmat Suits, Surgi...
- Publication number 20160121008
- Publication date May 5, 2016
- John Taboada
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
LASER DEVICE, AND METHOD OF CONTROLLING ACTUATOR
- Publication number 20150380893
- Publication date Dec 31, 2015
- Gigaphoton Inc.
- Takashi MATSUNAGA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Beam Reverser Module and Optical Power Amplifier Having Such a Beam...
- Publication number 20150340829
- Publication date Nov 26, 2015
- Carl Zeiss SMT GMBH
- Michael Schall
- G02 - OPTICS
Information Patent Application
DIFFRACTION GRATING, LASER APPARATUS, AND MANUFACTURING METHOD FOR...
- Publication number 20150255947
- Publication date Sep 10, 2015
- Canon Kabushiki Kaisha
- Tsuyoshi Kitamura
- G02 - OPTICS
Information Patent Application
LASER CHAMBER AND DISCHARGE EXCITATION GAS LASER APPARATUS
- Publication number 20150249312
- Publication date Sep 3, 2015
- GIGAPHOTON INC.
- Hiroaki TSUSHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER APPARATUS
- Publication number 20150194781
- Publication date Jul 9, 2015
- GIGAPHOTON INC.
- Takeshi ASAYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF CONTROLLING LASER APPARATUS AND LASER APPARATUS
- Publication number 20150188274
- Publication date Jul 2, 2015
- GIGAPHOTON INC.
- Osamu Wakabayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER APPARATUS AND METHOD OF CONTROLLING LASER APPARATUS
- Publication number 20150180192
- Publication date Jun 25, 2015
- GIGAPHOTON INC.
- Hiroaki TSUSHIMA
- G01 - MEASURING TESTING
Information Patent Application
LASER APPARATUS
- Publication number 20130315270
- Publication date Nov 28, 2013
- Gigaphoton Inc.
- Takahito KUMAZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXCIMER LASER DEVICE
- Publication number 20130223468
- Publication date Aug 29, 2013
- Komatsu Ltd.
- Shinji NAGAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXCIMER LASER APPARATUS AND EXCIMER LASER SYSTEM
- Publication number 20130100980
- Publication date Apr 25, 2013
- Gigaphoton Inc.
- Tooru ABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MASTER OSCILLATOR SYSTEM AND LASER APPARATUS
- Publication number 20130064258
- Publication date Mar 14, 2013
- Gigaphoton Inc.
- Junichi FUJIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXCIMER LASER DEVICE
- Publication number 20110164647
- Publication date Jul 7, 2011
- Shinji NAGAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Laser gas injection system
- Publication number 20080205472
- Publication date Aug 28, 2008
- Cymer, Inc.
- Wayne J. Dunstan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Excimer laser device
- Publication number 20080037609
- Publication date Feb 14, 2008
- Shinji NAGAI
- H01 - BASIC ELECTRIC ELEMENTS

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

High voltage pulse generation device, gas laser apparatus, and elec...

Copper electrode material

Electrical pulse compression circuit

Electrode for a discharge chamber

Laser gas regenerating apparatus and electronic device manufacturin...

Arrangement of expanding optical flows for efficient laser extraction

Electrode for a discharge chamber

Online calibration for repetition rate dependent performance variables

Line narrowing module

Laser gas purifying system and laser system

Integration of direct compressor with primary laser source and fast...

Laser apparatus

Beam reverser module and optical power amplifier having such a beam...

Narrowband laser apparatus and spectral linewidth measuring apparatus

Online calibration for repetition rate dependent performance variables

Method for direct compression of laser pulses with large temporal r...

Gas laser device and condenser

Gas mixture control in a gas discharge light source

Laser system

Excimer laser apparatus and excimer laser system

Narrow band laser apparatus

Beam reverser module and optical power amplifier having such a beam...

System and method for automatic gas optimization in a two-chamber g...

Gas mixture control in a gas discharge light source

Method and apparatus for rapid sterilization of a room

Method of controlling wavelength of laser beam and laser apparatus

Compensation for a disturbance in an optical source

Laser apparatus and method of controlling laser apparatus

Excimer laser apparatus and excimer laser system

Laser chamber and discharge excitation gas laser apparatus

Patents Applicationslast 30 patents

Absorbing Optical Switch for High Fluence Laser Pulse

ULTRAVIOLET LASER APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD

OPTICAL ISOLATOR, ULTRAVIOLET LASER APPARATUS, AND ELECTRONIC DEVIC...

OPTICAL ISOLATOR, ULTRAVIOLET LASER DEVICE, AND ELECTRONIC DEVICE M...

GLASS PROCESSING METHOD

ELECTRICAL PULSE COMPRESSION CIRCUIT

ELECTRODE FOR A DISCHARGE CHAMBER

LASER GAS REGENERATING APPARATUS AND ELECTRONIC DEVICE MANUFACTURIN...

ELECTRODE FOR A DISCHARGE CHAMBER

ONLINE CALIBRATION FOR REPETITION RATE DEPENDENT PERFORMANCE VARIABLES

Arrangement of Expanding Optical Flows for Efficient Laser Extraction

LASER GAS PURIFYING SYSTEM AND LASER SYSTEM

Beam Reverser Module and Optical Power Amplifier Having Such a Beam...

ONLINE CALIBRATION FOR REPETITION RATE DEPENDENT PERFORMANCE VARIABLES

Method and Apparatus for Rapid Sterilization of a Room

Method and Apparatus for Rapid Sterilization of Hazmat Suits, Surgi...

LASER DEVICE, AND METHOD OF CONTROLLING ACTUATOR

Beam Reverser Module and Optical Power Amplifier Having Such a Beam...

DIFFRACTION GRATING, LASER APPARATUS, AND MANUFACTURING METHOD FOR...

LASER CHAMBER AND DISCHARGE EXCITATION GAS LASER APPARATUS

LASER APPARATUS

METHOD OF CONTROLLING LASER APPARATUS AND LASER APPARATUS

LASER APPARATUS AND METHOD OF CONTROLLING LASER APPARATUS

LASER APPARATUS

EXCIMER LASER DEVICE

EXCIMER LASER APPARATUS AND EXCIMER LASER SYSTEM

MASTER OSCILLATOR SYSTEM AND LASER APPARATUS

EXCIMER LASER DEVICE

Laser gas injection system

Excimer laser device