Large workpieces

Industry

CPC
G03F7/70791

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Parent Industries

GPHYSICS G03Photography G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES G03F7/00Photomechanical

Current Industry

G03F7/70791Large workpieces

Industries

Patents Grantslast 30 patents

Information Patent Grant
Method for fast loading substrates in a flat panel tool
- Patent number 12,061,422
- Issue date Aug 13, 2024
- Applied Materials, Inc.
- Benjamin M. Johnston
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, flat panel display manufacturing method, and de...
- Patent number 11,392,048
- Issue date Jul 19, 2022
- Nikon Corporation
- Akinori Shirato
- G01 - MEASURING TESTING
Information Patent Grant
Pattern drawing device, pattern drawing method, and method for manu...
- Patent number 11,143,862
- Issue date Oct 12, 2021
- Nikon Corporation
- Yoshiaki Kito
- G02 - OPTICS
Information Patent Grant
Exposure apparatus, manufacturing method of flat-panel display, dev...
- Patent number 11,126,094
- Issue date Sep 21, 2021
- Nikon Corporation
- Yasuo Aoki
- G01 - MEASURING TESTING
Information Patent Grant
Pattern drawing device, pattern drawing method, and method for manu...
- Patent number 11,112,598
- Issue date Sep 7, 2021
- Nikon Corporation
- Yoshiaki Kito
- G02 - OPTICS
Information Patent Grant
Substrate processing apparatus, processing apparatus, and method fo...
- Patent number 11,073,767
- Issue date Jul 27, 2021
- Nikon Corporation
- Masaki Kato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Film mask, method for manufacturing same, and method for forming pa...
- Patent number 11,029,596
- Issue date Jun 8, 2021
- LG Chem, Ltd.
- Ji Young Hwang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film mask, method for manufacturing same, and method for forming pa...
- Patent number 10,969,677
- Issue date Apr 6, 2021
- LG Chem, Ltd.
- Ji Young Hwang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing pattern for electronic devices, and fiber-...
- Patent number 10,915,024
- Issue date Feb 9, 2021
- Korea Institute of Science and Technology
- Sunbin Hwang
- B32 - LAYERED PRODUCTS
Information Patent Grant
Method for fast loading substrates in a flat panel tool
- Patent number 10,901,328
- Issue date Jan 26, 2021
- Applied Materials, Inc.
- Benjamin M. Johnston
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mask and fabrication method thereof, display panel and touch panel
- Patent number 10,859,920
- Issue date Dec 8, 2020
- BOE Technology Group Co., Ltd.
- Liqing Liao
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Exposure apparatus, exposure method, manufacturing method of flat-p...
- Patent number 10,802,407
- Issue date Oct 13, 2020
- Nikon Corporation
- Yasuo Aoki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, processing apparatus, and method fo...
- Patent number 10,691,027
- Issue date Jun 23, 2020
- Nikon Corporation
- Masaki Kato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Movable body apparatus, pattern forming apparatus and pattern formi...
- Patent number 10,627,725
- Issue date Apr 21, 2020
- Nikon Corporation
- Yasuo Aoki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, processing apparatus, and method fo...
- Patent number 10,591,827
- Issue date Mar 17, 2020
- Nikon Corporation
- Masaki Kato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pattern manufacturing apparatus, pattern manufacturing method, and...
- Patent number 10,539,885
- Issue date Jan 21, 2020
- Kantatsu Co., Ltd.
- Eiji Oshima
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate processing apparatus, processing apparatus, and method fo...
- Patent number 10,527,945
- Issue date Jan 7, 2020
- Nikon Corporation
- Masaki Kato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Movable body apparatus, exposure apparatus and device manufacturing...
- Patent number 10,514,616
- Issue date Dec 24, 2019
- Nikon Corporation
- Yasuo Aoki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Bearing device and exposure apparatus
- Patent number 10,423,079
- Issue date Sep 24, 2019
- BOE Technology Group Co., Ltd.
- Qichao Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Movable body apparatus, pattern forming apparatus and pattern formi...
- Patent number 10,228,625
- Issue date Mar 12, 2019
- Nikon Corporation
- Yasuo Aoki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, processing apparatus, and method fo...
- Patent number 10,156,795
- Issue date Dec 18, 2018
- Nikon Corporation
- Masaki Kato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Catadioptric projection objective comprising deflection mirrors and...
- Patent number 10,120,176
- Issue date Nov 6, 2018
- Carl Zeiss SMT GmbH
- Thomas Schicketanz
- G02 - OPTICS
Information Patent Grant
Maskless lithography for web based processing
- Patent number 10,073,350
- Issue date Sep 11, 2018
- Applied Materials, Inc.
- Christopher Dennis Bencher
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus, processing apparatus, and method fo...
- Patent number 10,007,190
- Issue date Jun 26, 2018
- Nikon Corporation
- Masaki Kato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Movable body apparatus, exposure apparatus and device manufacturing...
- Patent number 9,977,345
- Issue date May 22, 2018
- Nikon Corporation
- Yasuo Aoki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Roll to roll light exposure system
- Patent number 9,835,951
- Issue date Dec 5, 2017
- Samsung Display Co., Ltd.
- Jae Hyuk Chang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reticle shape regulation device and method, and exposure apparatus...
- Patent number 9,760,025
- Issue date Sep 12, 2017
- SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Xinxin Wang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, and device manufacturing method
- Patent number 9,726,981
- Issue date Aug 8, 2017
- Canon Kabushiki Kaisha
- Ryo Sasaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical apparatus and manufacturing method using the same
- Patent number 9,690,200
- Issue date Jun 27, 2017
- Samsung Electronics Co., Ltd.
- Sangjoon Hong
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical flow sensing application in agricultural vehicles
- Patent number 9,675,000
- Issue date Jun 13, 2017
- Raven Industries, Inc.
- Edwin Ernest Wilson
- B60 - VEHICLES IN GENERAL

Patents Applicationslast 30 patents

Information Patent Application
SYSTEMS AND METHODS FOR THERMALLY STABLE MOUNTING OF OPTICAL COLUMNS
- Publication number 20240329548
- Publication date Oct 3, 2024
- ASML NETHERLANDS B.V.
- Jasper WINTERS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
POST-OVERLAY COMPENSATION ON LARGE-FIELD PACKAGING
- Publication number 20240302752
- Publication date Sep 12, 2024
- ONTO INNOVATION INC.
- Yin-Yi John Chang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PHOTOMASK AND METHOD OF MANUFACTURING DISPLAY PANEL USING THE SAME
- Publication number 20240045339
- Publication date Feb 8, 2024
- SAMSUNG DISPLAY CO., LTD.
- Soon-Hwan So
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LOW INTENSITY PHOTOMASK AND SYSTEM, METHOD AND PROGRAM PRODUCT FOR...
- Publication number 20230305384
- Publication date Sep 28, 2023
- PHOTRONICS, INC.
- Christopher Progler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MACHINE MEASUREMENT METROLOGY FRAME FOR A LITHOGRAPHY SYSTEM
- Publication number 20230221658
- Publication date Jul 13, 2023
- Applied Materials, Inc.
- Ulrich MUELLER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR FAST LOADING SUBSTRATES IN A FLAT PANEL TOOL
- Publication number 20210149308
- Publication date May 20, 2021
- Applied Materials, Inc.
- Benjamin M. JOHNSTON
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, MANUFACTURING METHOD OF FLAT-P...
- Publication number 20210026253
- Publication date Jan 28, 2021
- Nikon Corporation
- Yasuo AOKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, PROCESSING APPARATUS, AND METHOD FO...
- Publication number 20200310253
- Publication date Oct 1, 2020
- Nikon Corporation
- Masaki Kato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MOVABLE BODY APPARATUS, PATTERN FORMING APPARATUS AND PATTERN FORMI...
- Publication number 20200225589
- Publication date Jul 16, 2020
- Nikon Corporation
- Yasuo AOKI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, MANUFACTURING METHOD OF FLAT-PANEL DISPLAY, DEV...
- Publication number 20200183291
- Publication date Jun 11, 2020
- Nikon Corporation
- Yasuo AOKI
- G01 - MEASURING TESTING
Information Patent Application
LITHOGRAPHY APPARATUS COMPRISING A PLURALITY OF INDIVIDUALLY CONTRO...
- Publication number 20200166852
- Publication date May 28, 2020
- Carl Zeiss SMT GMBH
- Stefan Richter
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD FOR FAST LOADING SUBSTRATES IN A FLAT PANEL TOOL
- Publication number 20200103760
- Publication date Apr 2, 2020
- Applied Materials, Inc.
- Benjamin M. JOHNSTON
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MOVABLE BODY APPARATUS, EXPOSURE APPARATUS AND DEVICE MANUFACTURING...
- Publication number 20200096878
- Publication date Mar 26, 2020
- Nikon Corporation
- Yasuo AOKI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, PROCESSING APPARATUS, AND METHOD FO...
- Publication number 20200089129
- Publication date Mar 19, 2020
- Nikon Corporation
- Masaki Kato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, PROCESSING APPARATUS, AND METHOD FO...
- Publication number 20190332018
- Publication date Oct 31, 2019
- Nikon Corporation
- Masaki Kato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MOVABLE BODY APPARATUS, PATTERN FORMING APPARATUS AND PATTERN FORMI...
- Publication number 20190155176
- Publication date May 23, 2019
- Nikon Corporation
- Yasuo AOKI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PATTERN DRAWING DEVICE, PATTERN DRAWING METHOD, AND METHOD FOR MANU...
- Publication number 20190113741
- Publication date Apr 18, 2019
- Nikon Corporation
- Yoshiaki KITO
- G02 - OPTICS
Information Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE COMPRISING DEFLECTION MIRRORS AND...
- Publication number 20190056576
- Publication date Feb 21, 2019
- Carl Zeiss SMT GmbH
- Thomas Schicketanz
- G02 - OPTICS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, PROCESSING APPARATUS, AND METHOD FO...
- Publication number 20190025713
- Publication date Jan 24, 2019
- Nikon Corporation
- Masaki Kato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, PROCESSING APPARATUS, AND METHOD FO...
- Publication number 20180267413
- Publication date Sep 20, 2018
- NIKON CORPORATION
- Masaki Kato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MOVABLE BODY APPARATUS, EXPOSURE APPARATUS AND DEVICE MANUFACTURING...
- Publication number 20180239264
- Publication date Aug 23, 2018
- Nikon Corporation
- Yasuo AOKI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PATTERN MANUFACTURING APPARATUS, PATTERN MANUFACTURING METHOD, AND...
- Publication number 20180088471
- Publication date Mar 29, 2018
- KANTATSU CO., LTD
- Eiji OSHIMA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
LITHOGRAPHY APPARATUS COMPRISING A PLURALITY OF INDIVIDUALLY CONTRO...
- Publication number 20170255110
- Publication date Sep 7, 2017
- Carl Zeiss SMT GMBH
- Stefan Richter
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, PROCESSING APPARATUS, AND METHOD FO...
- Publication number 20170168400
- Publication date Jun 15, 2017
- Nikon Corporation
- Masaki Kato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE HOLDING APPARATUS AND METHOD
- Publication number 20140293257
- Publication date Oct 2, 2014
- Sung Hune Yoo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Optical Imaging Writer System
- Publication number 20140192336
- Publication date Jul 10, 2014
- PINEBROOK IMAGING, INC.
- Jang Fung CHEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Pixel Blending For Multiple Charged-Particle Beam Lithography
- Publication number 20140192334
- Publication date Jul 10, 2014
- PINEBROOK IMAGING, INC.
- Jang Fung CHEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ALIGNMENT CORRECTION METHOD FOR SUBSTRATE TO BE EXPOSED, AND EXPOSU...
- Publication number 20140146299
- Publication date May 29, 2014
- V TECHNOLOGY CO., LTD.
- Yoshiaki NOMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MOVABLE BODY APPARATUS, EXPOSURE APPARATUS AND DEVICE MANUFACTURING...
- Publication number 20140125961
- Publication date May 8, 2014
- Nikon Corporation
- Yasuo AOKI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ROLL-TO-ROLL DIGITAL PHOTOLITHOGRAPHY
- Publication number 20130286367
- Publication date Oct 31, 2013
- Michael A. Haase
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Large workpieces

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method for fast loading substrates in a flat panel tool

Exposure apparatus, flat panel display manufacturing method, and de...

Pattern drawing device, pattern drawing method, and method for manu...

Exposure apparatus, manufacturing method of flat-panel display, dev...

Pattern drawing device, pattern drawing method, and method for manu...

Substrate processing apparatus, processing apparatus, and method fo...

Film mask, method for manufacturing same, and method for forming pa...

Film mask, method for manufacturing same, and method for forming pa...

Method for manufacturing pattern for electronic devices, and fiber-...

Method for fast loading substrates in a flat panel tool

Mask and fabrication method thereof, display panel and touch panel

Exposure apparatus, exposure method, manufacturing method of flat-p...

Substrate processing apparatus, processing apparatus, and method fo...

Movable body apparatus, pattern forming apparatus and pattern formi...

Substrate processing apparatus, processing apparatus, and method fo...

Pattern manufacturing apparatus, pattern manufacturing method, and...

Substrate processing apparatus, processing apparatus, and method fo...

Movable body apparatus, exposure apparatus and device manufacturing...

Bearing device and exposure apparatus

Movable body apparatus, pattern forming apparatus and pattern formi...

Substrate processing apparatus, processing apparatus, and method fo...

Catadioptric projection objective comprising deflection mirrors and...

Maskless lithography for web based processing

Substrate processing apparatus, processing apparatus, and method fo...

Movable body apparatus, exposure apparatus and device manufacturing...

Roll to roll light exposure system

Reticle shape regulation device and method, and exposure apparatus...

Exposure apparatus, exposure method, and device manufacturing method

Optical apparatus and manufacturing method using the same

Optical flow sensing application in agricultural vehicles

Patents Applicationslast 30 patents

SYSTEMS AND METHODS FOR THERMALLY STABLE MOUNTING OF OPTICAL COLUMNS

POST-OVERLAY COMPENSATION ON LARGE-FIELD PACKAGING

PHOTOMASK AND METHOD OF MANUFACTURING DISPLAY PANEL USING THE SAME

LOW INTENSITY PHOTOMASK AND SYSTEM, METHOD AND PROGRAM PRODUCT FOR...

MACHINE MEASUREMENT METROLOGY FRAME FOR A LITHOGRAPHY SYSTEM

METHOD FOR FAST LOADING SUBSTRATES IN A FLAT PANEL TOOL

EXPOSURE APPARATUS, EXPOSURE METHOD, MANUFACTURING METHOD OF FLAT-P...

SUBSTRATE PROCESSING APPARATUS, PROCESSING APPARATUS, AND METHOD FO...

MOVABLE BODY APPARATUS, PATTERN FORMING APPARATUS AND PATTERN FORMI...

EXPOSURE APPARATUS, MANUFACTURING METHOD OF FLAT-PANEL DISPLAY, DEV...

LITHOGRAPHY APPARATUS COMPRISING A PLURALITY OF INDIVIDUALLY CONTRO...

METHOD FOR FAST LOADING SUBSTRATES IN A FLAT PANEL TOOL

MOVABLE BODY APPARATUS, EXPOSURE APPARATUS AND DEVICE MANUFACTURING...

SUBSTRATE PROCESSING APPARATUS, PROCESSING APPARATUS, AND METHOD FO...

SUBSTRATE PROCESSING APPARATUS, PROCESSING APPARATUS, AND METHOD FO...

MOVABLE BODY APPARATUS, PATTERN FORMING APPARATUS AND PATTERN FORMI...

PATTERN DRAWING DEVICE, PATTERN DRAWING METHOD, AND METHOD FOR MANU...

CATADIOPTRIC PROJECTION OBJECTIVE COMPRISING DEFLECTION MIRRORS AND...

SUBSTRATE PROCESSING APPARATUS, PROCESSING APPARATUS, AND METHOD FO...

SUBSTRATE PROCESSING APPARATUS, PROCESSING APPARATUS, AND METHOD FO...

MOVABLE BODY APPARATUS, EXPOSURE APPARATUS AND DEVICE MANUFACTURING...

PATTERN MANUFACTURING APPARATUS, PATTERN MANUFACTURING METHOD, AND...

LITHOGRAPHY APPARATUS COMPRISING A PLURALITY OF INDIVIDUALLY CONTRO...

SUBSTRATE PROCESSING APPARATUS, PROCESSING APPARATUS, AND METHOD FO...

SUBSTRATE HOLDING APPARATUS AND METHOD

Optical Imaging Writer System

Pixel Blending For Multiple Charged-Particle Beam Lithography

ALIGNMENT CORRECTION METHOD FOR SUBSTRATE TO BE EXPOSED, AND EXPOSU...

MOVABLE BODY APPARATUS, EXPOSURE APPARATUS AND DEVICE MANUFACTURING...

ROLL-TO-ROLL DIGITAL PHOTOLITHOGRAPHY