Laser ablative material removal

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CPC
Y10S438/94

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YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS Y10USPC classification Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS Y10S438/00Semiconductor device manufacturing: process

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Y10S438/94Laser ablative material removal

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Patents Grantslast 30 patents

Information Patent Grant
Semiconductor patterning and resulting structures
- Patent number 11,929,254
- Issue date Mar 12, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chun-Ming Lung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Installation with distribution mask for vapor deposition of a coati...
- Patent number 11,821,072
- Issue date Nov 21, 2023
- BNL Eurolens
- Vicente Estevez Rodriguez
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming patterned mask layer
- Patent number 11,699,589
- Issue date Jul 11, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yu-Chen Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor patterning and resulting structures
- Patent number 11,521,856
- Issue date Dec 6, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chun-Ming Lung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Alternating hardmasks for tight-pitch line formation
- Patent number 11,171,002
- Issue date Nov 9, 2021
- Tessera, Inc.
- John C. Arnold
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Femtosecond laser-induced formation of submicrometer spikes on a se...
- Patent number 10,741,399
- Issue date Aug 11, 2020
- President and Fellows of Harvard College
- Eric Mazur
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Alternating hardmasks for tight-pitch line formation
- Patent number 10,580,652
- Issue date Mar 3, 2020
- Tessera, Inc.
- John C. Arnold
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pitch multiplication using self-assembling materials
- Patent number 10,515,801
- Issue date Dec 24, 2019
- Micron Technology, Inc.
- Gurtej Sandhu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Silicon-based visible and near-infrared optoelectric devices
- Patent number 10,374,109
- Issue date Aug 6, 2019
- President and Fellows of Harvard College
- Eric Mazur
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Femtosecond laser-induced formation of submicrometer spikes on a se...
- Patent number 10,361,083
- Issue date Jul 23, 2019
- President and Fellows of Harvard College
- Eric Mazur
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Multi-patterning method and device formed by the method
- Patent number 10,276,376
- Issue date Apr 30, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chia-Ying Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Alternating hardmasks for tight-pitch line formation
- Patent number 10,103,022
- Issue date Oct 16, 2018
- International Business Machines Corporation
- John C. Arnold
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process for the nanostructuring of a block copolymer film using a n...
- Patent number 10,011,675
- Issue date Jul 3, 2018
- Arkema France
- Christophe Navarro
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Self-aligned quadruple patterning process
- Patent number 9,842,737
- Issue date Dec 12, 2017
- International Business Machines Corporation
- Matthew E. Colburn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for modifying spacer profile
- Patent number 9,812,325
- Issue date Nov 7, 2017
- Nihar Mohanty
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Silicon-based visible and near-infrared optoelectric devices
- Patent number 9,793,425
- Issue date Oct 17, 2017
- President and Fellows of Harvard College
- Eric Mazur
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of forming semiconductor device structures including metal...
- Patent number 9,768,021
- Issue date Sep 19, 2017
- Micron Technology, Inc.
- Dan B. Millward
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Methods for manufacturing a spacer with desired profile in an advan...
- Patent number 9,741,566
- Issue date Aug 22, 2017
- Applied Materials, Inc.
- Dai-Wen Tang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Solid-state imaging device
- Patent number 9,583,528
- Issue date Feb 28, 2017
- Sony Corporation
- Noriko Takagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Single spacer process for multiplying pitch by a factor greater tha...
- Patent number 9,478,497
- Issue date Oct 25, 2016
- Micron Technology, Inc.
- David H Wells
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated circuit fabrication
- Patent number 9,412,594
- Issue date Aug 9, 2016
- Micron Technology, Inc.
- Luan C. Tran
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Touch panel
- Patent number 9,335,851
- Issue date May 10, 2016
- TPK Touch Solutios (Xiamen) Inc.
- Yau-Chen Jiang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for manufacturing semiconductor light emitting device
- Patent number 9,306,141
- Issue date Apr 5, 2016
- Kabushiki Kaisha Toshiba
- Hiroshi Hamasaki
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Semiconductor device structures including metal oxide structures
- Patent number 9,276,059
- Issue date Mar 1, 2016
- Micron Technology, Inc.
- Dan B. Millward
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Silicon-based visible and near-infrared optoelectric devices
- Patent number 9,276,143
- Issue date Mar 1, 2016
- President and Fellows of Harvard College
- Eric Mazur
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Solid-state imaging device
- Patent number 9,196,649
- Issue date Nov 24, 2015
- Sony Corporation
- Noriko Takagi
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Integrated circuit fabrication
- Patent number 9,147,608
- Issue date Sep 29, 2015
- Micron Technology, Inc.
- Luan C. Tran
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Femtosecond laser-induced formation of submicrometer spikes on a se...
- Patent number 9,136,146
- Issue date Sep 15, 2015
- President and Fellows of Harvard College
- Eric Mazur
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for manufacturing semiconductor light emitting device
- Patent number 9,105,828
- Issue date Aug 11, 2015
- Kabushiki Kaisha Toshiba
- Hiroshi Hamasaki
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Integrated circuit structure having arrays of small, closely spaced...
- Patent number 9,099,402
- Issue date Aug 4, 2015
- Micron Technology, Inc.
- Mirzafer Abatchev
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

Information Patent Application
Semiconductor Patterning and Resulting Structures
- Publication number 20240177995
- Publication date May 30, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Ming Lung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING PATTERNED MASK LAYER
- Publication number 20230352303
- Publication date Nov 2, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu-Chen CHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor Patterning and Resulting Structures
- Publication number 20230108424
- Publication date Apr 6, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Ming Lung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ALTERNATING HARDMASKS FOR TIGHT-PITCH LINE FORMATION
- Publication number 20200266066
- Publication date Aug 20, 2020
- Tessera, Inc.
- John C. Arnold
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SILICON-BASED VISIBLE AND NEAR-INFRARED OPTOELECTRIC DEVICES
- Publication number 20200028002
- Publication date Jan 23, 2020
- President and Fellows of Harvard College
- Eric Mazur
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ALTERNATING HARDMASKS FOR TIGHT-PITCH LINE FORMATION
- Publication number 20180350600
- Publication date Dec 6, 2018
- International Business Machines Corporation
- John C. Arnold
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Femtosecond Laser-Induced Formation Of Submicrometer Spikes On A Se...
- Publication number 20180182630
- Publication date Jun 28, 2018
- President and Fellows of Harvard College
- Eric Mazur
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Silicon-Based Visible And Near-Infrared Optoelectric Devices
- Publication number 20180083146
- Publication date Mar 22, 2018
- President and Fellows of Harvard College
- Eric Mazur
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS FOR THE NANOSTRUCTURING OF A BLOCK COPOLYMER FILM USING A N...
- Publication number 20170002127
- Publication date Jan 5, 2017
- Arkema France
- Christophe NAVARRO
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR LIGHT EMITTING DEVICE
- Publication number 20140329348
- Publication date Nov 6, 2014
- Hiroshi Hamasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Multi-Region Processing System and Heads
- Publication number 20140311408
- Publication date Oct 23, 2014
- Indranil De
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SPACER PROCESS FOR ON PITCH CONTACTS AND RELATED STRUCTURES
- Publication number 20140299997
- Publication date Oct 9, 2014
- Gurtej Sandhu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PATTERN FORMING METHOD
- Publication number 20140295669
- Publication date Oct 2, 2014
- Kabushiki Kaisha Toshiba
- Ayako KAWANISHI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING POROUS STRUCTURE AND METHOD FOR FORMING PA...
- Publication number 20140284306
- Publication date Sep 25, 2014
- Kabushiki Kaisha Toshiba
- Koji Asakawa
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHODS FOR FABRICATING INTEGRATED CIRCUITS WITH IMPROVED SEMICONDU...
- Publication number 20140227879
- Publication date Aug 14, 2014
- GLOBALFOUNDRIES, Inc.
- Wontae Hwang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR OPTICAL PROXIMITY CORRECTION IN THE DESIGN AND FABRICAT...
- Publication number 20140220786
- Publication date Aug 7, 2014
- GLOBALFOUNDRIES, Inc.
- Todd Lukanc
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHODS FOR FABRICATING ELECTRICALLY-ISOLATED FINFET SEMICONDUCTOR...
- Publication number 20140213033
- Publication date Jul 31, 2014
- GLOBALFOUNDRIES, Inc.
- David P. Brunco
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPACER ASSISTED PITCH DIVISION LITHOGRAPHY
- Publication number 20140191372
- Publication date Jul 10, 2014
- Swaminathan Sivakumar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-PATTERNING METHOD AND DEVICE FORMED BY THE METHOD
- Publication number 20140193974
- Publication date Jul 10, 2014
- Taiwan Semiconductor Manufacturing Co., LTD
- Chia-Ying LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF FORMING CONTACT HOLES
- Publication number 20140193976
- Publication date Jul 10, 2014
- Samsung Electronics Co., Ltd.
- Eun-Sung KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods of Forming A Pattern On A Substrate
- Publication number 20140162459
- Publication date Jun 12, 2014
- Micron Technology, Inc.
- Shane J. Trapp
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE STRUCTURES INCLUDING METAL OXIDE STRUCTURES, A...
- Publication number 20140151843
- Publication date Jun 5, 2014
- Micron Technology, Inc.
- Dan B. Millward
- B82 - NANO-TECHNOLOGY
Information Patent Application
TOUCH Panel
- Publication number 20140116756
- Publication date May 1, 2014
- TPK TOUCH SOLUTIONS (XIAMEN) INC.
- Yau-Chen Jiang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
COMPOSITIONS FOR USE IN SEMICONDUCTOR DEVICES
- Publication number 20140103251
- Publication date Apr 17, 2014
- Micron Technology, Inc.
- Donald L. Yates
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SILICON-BASED VISIBLE AND NEAR-INFRARED OPTOELECTRIC DEVICES
- Publication number 20140099745
- Publication date Apr 10, 2014
- President and Fellows of Harvard College
- Eric Mazur
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR LIGHT EMITTING DEVICE
- Publication number 20140070264
- Publication date Mar 13, 2014
- Kabushiki Kaisha Toshiba
- Hiroshi Hamasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Femtosecond Laser-Induced Formation Of Submicrometer Spikes On A Se...
- Publication number 20140060737
- Publication date Mar 6, 2014
- President and Fellows of Harvard College
- Eric Mazur
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SINGLE SPACER PROCESS FOR MULTIPLYING PITCH BY A FACTOR GREATER THA...
- Publication number 20140038416
- Publication date Feb 6, 2014
- Micron Technology, Inc.
- David H. Wells
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PRIMER AND PATTERN FORMING METHOD FOR LAYER INCLUDING BLOCK COPOLYMER
- Publication number 20140030652
- Publication date Jan 30, 2014
- Riken
- Takahiro Senzaki
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
Thermal annealing process
- Publication number 20140014001
- Publication date Jan 16, 2014
- DOW GLOBAL TECHNOLOGIES LLC
- Phillip Hustad
- B44 - DECORATIVE ARTS

Laser ablative material removal

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Semiconductor patterning and resulting structures

Installation with distribution mask for vapor deposition of a coati...

Method for forming patterned mask layer

Semiconductor patterning and resulting structures

Alternating hardmasks for tight-pitch line formation

Femtosecond laser-induced formation of submicrometer spikes on a se...

Alternating hardmasks for tight-pitch line formation

Pitch multiplication using self-assembling materials

Silicon-based visible and near-infrared optoelectric devices

Femtosecond laser-induced formation of submicrometer spikes on a se...

Multi-patterning method and device formed by the method

Alternating hardmasks for tight-pitch line formation

Process for the nanostructuring of a block copolymer film using a n...

Self-aligned quadruple patterning process

Method for modifying spacer profile

Silicon-based visible and near-infrared optoelectric devices

Methods of forming semiconductor device structures including metal...

Methods for manufacturing a spacer with desired profile in an advan...

Solid-state imaging device

Single spacer process for multiplying pitch by a factor greater tha...

Integrated circuit fabrication

Touch panel

Method for manufacturing semiconductor light emitting device

Semiconductor device structures including metal oxide structures

Silicon-based visible and near-infrared optoelectric devices

Solid-state imaging device

Integrated circuit fabrication

Femtosecond laser-induced formation of submicrometer spikes on a se...

Method for manufacturing semiconductor light emitting device

Integrated circuit structure having arrays of small, closely spaced...

Patents Applicationslast 30 patents

Semiconductor Patterning and Resulting Structures

METHOD FOR FORMING PATTERNED MASK LAYER

Semiconductor Patterning and Resulting Structures

ALTERNATING HARDMASKS FOR TIGHT-PITCH LINE FORMATION

SILICON-BASED VISIBLE AND NEAR-INFRARED OPTOELECTRIC DEVICES

ALTERNATING HARDMASKS FOR TIGHT-PITCH LINE FORMATION

Femtosecond Laser-Induced Formation Of Submicrometer Spikes On A Se...

Silicon-Based Visible And Near-Infrared Optoelectric Devices

PROCESS FOR THE NANOSTRUCTURING OF A BLOCK COPOLYMER FILM USING A N...

METHOD FOR MANUFACTURING SEMICONDUCTOR LIGHT EMITTING DEVICE

Multi-Region Processing System and Heads

SPACER PROCESS FOR ON PITCH CONTACTS AND RELATED STRUCTURES

PATTERN FORMING METHOD

METHOD FOR MANUFACTURING POROUS STRUCTURE AND METHOD FOR FORMING PA...

METHODS FOR FABRICATING INTEGRATED CIRCUITS WITH IMPROVED SEMICONDU...

METHODS FOR OPTICAL PROXIMITY CORRECTION IN THE DESIGN AND FABRICAT...

METHODS FOR FABRICATING ELECTRICALLY-ISOLATED FINFET SEMICONDUCTOR...

SPACER ASSISTED PITCH DIVISION LITHOGRAPHY

MULTI-PATTERNING METHOD AND DEVICE FORMED BY THE METHOD

METHODS OF FORMING CONTACT HOLES

Methods of Forming A Pattern On A Substrate

SEMICONDUCTOR DEVICE STRUCTURES INCLUDING METAL OXIDE STRUCTURES, A...

TOUCH Panel

COMPOSITIONS FOR USE IN SEMICONDUCTOR DEVICES

SILICON-BASED VISIBLE AND NEAR-INFRARED OPTOELECTRIC DEVICES

METHOD FOR MANUFACTURING SEMICONDUCTOR LIGHT EMITTING DEVICE

Femtosecond Laser-Induced Formation Of Submicrometer Spikes On A Se...

SINGLE SPACER PROCESS FOR MULTIPLYING PITCH BY A FACTOR GREATER THA...

PRIMER AND PATTERN FORMING METHOD FOR LAYER INCLUDING BLOCK COPOLYMER

Thermal annealing process