Lithographic techniques

Industry

CPC
B81C2201/0156

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C2201/00Manufacture or treatment of micro-structural devices or systems

Current Industry

B81C2201/0156Lithographic techniques

Industries

Please log in for detailed analytics

Patents Grantslast 30 patents

Information Patent Grant
Micro-electro-mechanical system (MEMS) vibration sensor and fabrica...
- Patent number 12,172,886
- Issue date Dec 24, 2024
- UPBEAT TECHNOLOGY CO., LTD
- Hsien-Lung Ho
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
On-chip integrated silicon carbide pressure and temperature sensors
- Patent number 12,044,585
- Issue date Jul 23, 2024
- United States Government Administrator of NASA
- Robert S. Okojie
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Manufacturing method of miniature fluid actuator
- Patent number 11,905,168
- Issue date Feb 20, 2024
- Microjet Technology Co., Ltd.
- Hao-Jan Mou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
High-density soft-matter electronics
- Patent number 11,903,139
- Issue date Feb 13, 2024
- Carnegie Mellon University
- Carmel Majidi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for manufacturing an optical microelectromechanical device...
- Patent number 11,787,685
- Issue date Oct 17, 2023
- STMicroelectronics S.r.l.
- Luca Seghizzi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Atomic-scale e-beam sculptor
- Patent number 11,518,674
- Issue date Dec 6, 2022
- UT-Battelle, LLC
- Sergei V. Kalinin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical system silicon on insulator pressure senso...
- Patent number 11,401,156
- Issue date Aug 2, 2022
- Southeast University
- Xiaodong Huang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device package and method of manufacturing the same
- Patent number 11,101,189
- Issue date Aug 24, 2021
- Advanced Semiconductor Engineering, Inc.
- Ming Yen Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
High-density soft-matter electronics
- Patent number 10,945,339
- Issue date Mar 9, 2021
- Carnegie Mellon University
- Carmel Majidi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device package and method of manufacturing the same
- Patent number 10,689,248
- Issue date Jun 23, 2020
- Advanced Semiconductor Engineering, Inc.
- Ming Yen Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of forming semiconductor device
- Patent number 10,562,762
- Issue date Feb 18, 2020
- United Microelectronics Corp.
- Feng-Yi Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods of making crosslinked copolymer films from inimer-containin...
- Patent number 10,465,087
- Issue date Nov 5, 2019
- Wisconsin Alumni Research Foundation
- Padma Gopalan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Inimer-containing random copolymers and crosslinked copolymer films...
- Patent number 10,106,699
- Issue date Oct 23, 2018
- Wisconsin Alumni Research Foundation
- Padma Gopalan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Component of a biosensor and process for production
- Patent number 9,364,807
- Issue date Jun 14, 2016
- Boehringer Ingelheim microParts GmbH
- Christian Schoen
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
PROCESS FOR MANUFACTURING AN OPTICAL MICROELECTROMECHANICAL DEVICE...
- Publication number 20240043263
- Publication date Feb 8, 2024
- STMicroelectronics S.r.l
- Luca SEGHIZZI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL SYSTEM (MEMS) MICROPHONE AND FABRICATION MET...
- Publication number 20230406692
- Publication date Dec 21, 2023
- UNITED MICROELECTRONICS CORP.
- Jung-Hao Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL ELEMENT AND A METHOD FOR MANUFACTURING IT
- Publication number 20230406698
- Publication date Dec 21, 2023
- Murata Manufacturing Co., Ltd.
- Altti TORKKELI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS STRUCTURE INCLUDING A BURIED CAVITY WITH ANTISTICTION PROTUBER...
- Publication number 20230348258
- Publication date Nov 2, 2023
- STMicroelectronics S.r.l.
- Mikel AZPEITIA URQUIA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COMPACT ENHANCED SENSITIVITY TEMPERATURE SENSOR USING AN ENCAPSULAT...
- Publication number 20230219804
- Publication date Jul 13, 2023
- KING FAHD UNIVERSITY OF PETROLEUM AND MINERALS
- Xuecui ZOU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CHARGE TRANSFER CIRCUITRY FOR MEMS DEVICES
- Publication number 20230061174
- Publication date Mar 2, 2023
- Obsidian Sensors, Inc.
- John HONG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) VIBRATION SENSOR AND FABRICA...
- Publication number 20220371881
- Publication date Nov 24, 2022
- UPBEAT TECHNOLOGY Co., Ltd
- Hsien-Lung HO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM SILICON ON INSULATOR PRESSURE SENSO...
- Publication number 20220033247
- Publication date Feb 3, 2022
- SOUTHEAST UNIVERSITY
- Xiaodong Huang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESS FOR MANUFACTURING AN OPTICAL MICROELECTROMECHANICAL DEVICE...
- Publication number 20210188620
- Publication date Jun 24, 2021
- STMicroelectronics S.r.l
- Luca SEGHIZZI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE PACKAGE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20200283288
- Publication date Sep 10, 2020
- Advanced Semiconductor Engineering, Inc.
- Ming Yen LEE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ATOMIC-SCALE E-BEAM SCULPTOR
- Publication number 20200247667
- Publication date Aug 6, 2020
- UT-Battelle, LLC
- Sergei V. Kalinin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF FORMING SEMICONDUCTOR DEVICE
- Publication number 20190100430
- Publication date Apr 4, 2019
- UNITED MICROELECTRONICS CORP.
- Feng-Yi Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE PACKAGE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20180265347
- Publication date Sep 20, 2018
- Advanced Semiconductor Engineering, Inc.
- Ming Yen LEE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COMPONENT OF A BIOSENSOR AND PROCESS FOR PRODUCTION
- Publication number 20130126022
- Publication date May 23, 2013
- Boehringer Ingelheim microParts GmbH
- Christian Schoen
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Lithographic techniques

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Micro-electro-mechanical system (MEMS) vibration sensor and fabrica...

On-chip integrated silicon carbide pressure and temperature sensors

Manufacturing method of miniature fluid actuator

High-density soft-matter electronics

Process for manufacturing an optical microelectromechanical device...

Atomic-scale e-beam sculptor

Micro-electro-mechanical system silicon on insulator pressure senso...

Semiconductor device package and method of manufacturing the same

High-density soft-matter electronics

Semiconductor device package and method of manufacturing the same

Method of forming semiconductor device

Methods of making crosslinked copolymer films from inimer-containin...

Inimer-containing random copolymers and crosslinked copolymer films...

Component of a biosensor and process for production

Patents Applicationslast 30 patents

PROCESS FOR MANUFACTURING AN OPTICAL MICROELECTROMECHANICAL DEVICE...

MICROELECTROMECHANICAL SYSTEM (MEMS) MICROPHONE AND FABRICATION MET...

MICROELECTROMECHANICAL ELEMENT AND A METHOD FOR MANUFACTURING IT

MEMS STRUCTURE INCLUDING A BURIED CAVITY WITH ANTISTICTION PROTUBER...

COMPACT ENHANCED SENSITIVITY TEMPERATURE SENSOR USING AN ENCAPSULAT...

CHARGE TRANSFER CIRCUITRY FOR MEMS DEVICES

MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) VIBRATION SENSOR AND FABRICA...

MICRO-ELECTRO-MECHANICAL SYSTEM SILICON ON INSULATOR PRESSURE SENSO...

PROCESS FOR MANUFACTURING AN OPTICAL MICROELECTROMECHANICAL DEVICE...

SEMICONDUCTOR DEVICE PACKAGE AND METHOD OF MANUFACTURING THE SAME

ATOMIC-SCALE E-BEAM SCULPTOR

METHOD OF FORMING SEMICONDUCTOR DEVICE

SEMICONDUCTOR DEVICE PACKAGE AND METHOD OF MANUFACTURING THE SAME

COMPONENT OF A BIOSENSOR AND PROCESS FOR PRODUCTION