Low energy electron microscopy [LEEM]

Industry

CPC
H01J2237/2538

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/2538Low energy electron microscopy [LEEM]

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Beam separator device, charged particle beam device and methods of...
- Patent number 9,472,373
- Issue date Oct 18, 2016
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Stefan Lanio
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle beam device and method for operating a particle beam device
- Patent number 9,354,188
- Issue date May 31, 2016
- Carl Zeiss Microscopy GmbH
- Michael Albiez
- G01 - MEASURING TESTING
Information Patent Grant
Mirror energy filter for electron beam apparatus
- Patent number 8,334,508
- Issue date Dec 18, 2012
- Electron Optica, Inc.
- Marian Mankos
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Compact arrangement for dual-beam low energy electron microscope
- Patent number 8,258,474
- Issue date Sep 4, 2012
- Electron Optica, Inc.
- Marian Mankos
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Focusing system and method for a charged particle imaging system
- Patent number 7,696,497
- Issue date Apr 13, 2010
- Applied Materials Israel, Ltd.
- Steven Robert Rogers
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device for high spatial resolution and multip...
- Patent number 7,544,937
- Issue date Jun 9, 2009
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik GmbH
- Juergen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Energy-filtering cathode lens microscopy instrument
- Patent number 7,453,062
- Issue date Nov 18, 2008
- International Business Machines Corporation
- Rudolf M. Tromp
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron microscope and electron beam inspection system
- Patent number 7,394,066
- Issue date Jul 1, 2008
- Hitachi High-Technologies Corporation
- Hisaya Murakoshi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron microscope
- Patent number 7,388,198
- Issue date Jun 17, 2008
- Jeol Ltd.
- Yoshihiro Ohkura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-pixel electron emission die-to-die inspection
- Patent number 7,351,968
- Issue date Apr 1, 2008
- KLA-Tencor Technologies Corporation
- David L. Adler
- G01 - MEASURING TESTING
Information Patent Grant
Aberration-correcting cathode lens microscopy instrument
- Patent number 7,348,566
- Issue date Mar 25, 2008
- International Business Machines Corporation
- Rudolf M. Tromp
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron microscope and a method of imaging objects
- Patent number 7,326,928
- Issue date Feb 5, 2008
- National University of Singapore
- Anjam Khursheed
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for evaluation using electron beam and manufactur...
- Patent number 7,235,799
- Issue date Jun 26, 2007
- Ebara Corporation
- Mamoru Nakasuji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged-particle-beam mapping projection-optical systems and method...
- Patent number 7,183,562
- Issue date Feb 27, 2007
- Nikon Corporation
- Hiroshi Nishimura
- G01 - MEASURING TESTING
Information Patent Grant
Charged-particle-beam mapping projection-optical systems and method...
- Patent number 7,064,339
- Issue date Jun 20, 2006
- Nikon Corporation
- Hiroshi Nishimura
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for tilted particle-beam illumination
- Patent number 7,009,177
- Issue date Mar 7, 2006
- KLA-Tencor Technologies Corporation
- Marian Mankos
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-pixel electron emission die-to-die inspection
- Patent number 6,897,444
- Issue date May 24, 2005
- KLA-Tencor Technologies Corporation
- David L. Adler
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and methods for secondary electron emission microscope wi...
- Patent number 6,803,572
- Issue date Oct 12, 2004
- KLA-Tencor Technologies Corporation
- Lee Veneklasen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged-particle-beam mapping projection-optical systems and method...
- Patent number 6,765,217
- Issue date Jul 20, 2004
- Nikon Corporation
- Hiroshi Nishimura
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for inspection of semiconductor wafers and masks using a...
- Patent number 6,610,980
- Issue date Aug 26, 2003
- KLA-Tencor Corporation
- Lee Veneklasen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and methods for secondary electron emission microscope wi...
- Patent number 6,586,733
- Issue date Jul 1, 2003
- KLA Tencor
- Lee Veneklasen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Precision-controlled slit mechanism for electron microscope
- Patent number 5,640,012
- Issue date Jun 17, 1997
- Gatan, Inc.
- Ondrej L. Krivanek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System for analyzing surfaces of samples
- Patent number 5,619,035
- Issue date Apr 8, 1997
- Biotechnology Research and Development Corporation
- Paul S. Weiss
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Multiple source and detection frequencies in detecting threshold ph...
- Patent number 5,581,193
- Issue date Dec 3, 1996
- Penn State Research Foundation
- Paul S. Weiss
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Small cavity analytical instruments
- Patent number 5,559,328
- Issue date Sep 24, 1996
- Biotechnology Research and Development Corporation
- Paul S. Weiss
- B82 - NANO-TECHNOLOGY
Information Patent Grant
System for analyzing surfaces of samples
- Patent number 5,504,366
- Issue date Apr 2, 1996
- Biotechnology Research and Development Corp.
- Paul S. Weiss
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Reading and writing stored information by means of electrochemistry
- Patent number 5,434,842
- Issue date Jul 18, 1995
- Biotechnology Research and Development Corporation
- Paul S. Weiss
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Multiple source and detection frequencies in detecting threshold ph...
- Patent number 5,397,896
- Issue date Mar 14, 1995
- Penn State Research Foundation and Biotechnology Research and Development Cor...
- Paul; S. Weiss
- B82 - NANO-TECHNOLOGY
Information Patent Grant
System for imaging and detecting threshold phenomena associated wit...
- Patent number 5,281,814
- Issue date Jan 25, 1994
- The Penn State Research Foundation, Penn State Rsrch Foundtn & Biotechnol. Rs...
- Paul S. Weiss
- B82 - NANO-TECHNOLOGY
Information Patent Grant
System for detecting threshold phenomena associated with and/or ato...
- Patent number 5,268,573
- Issue date Dec 7, 1993
- The Penn State Research Foundation
- Paul S. Weiss
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
PARTICLE BEAM DEVICE AND METHOD FOR OPERATING A PARTICLE BEAM DEVICE
- Publication number 20140070097
- Publication date Mar 13, 2014
- CARL ZEISS MICROSCOPY GMBH
- Michael Albiez
- G01 - MEASURING TESTING
Information Patent Application
SPHERICAL ABERRATION CORRECTION DECELERATING LENS, SPHERICAL ABERRA...
- Publication number 20100001202
- Publication date Jan 7, 2010
- Hiroyuki Matsuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron Microscope And Electron Beam Inspection System
- Publication number 20080265161
- Publication date Oct 30, 2008
- Hisaya Murakoshi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Aberration-correcting cathode lens microscopy instrument
- Publication number 20070200070
- Publication date Aug 30, 2007
- International Business Machines Corporation
- Rudolf M. Tromp
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Energy-filtering cathode lens microscopy instrument
- Publication number 20070200062
- Publication date Aug 30, 2007
- International Business Machines Corporation
- Rudolf M. Tromp
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSPECTION INSTRUMENT OF A MAGNETIC SPECIMEN
- Publication number 20070194230
- Publication date Aug 23, 2007
- Teruo KOHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron microscope and electron bean inspection system.
- Publication number 20070181808
- Publication date Aug 9, 2007
- Hisaya Murakoshi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged particle beam device for high spatial resolution and multip...
- Publication number 20060226360
- Publication date Oct 12, 2006
- Juergen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged-particle-beam mapping projection-optical systems and method...
- Publication number 20060192120
- Publication date Aug 31, 2006
- NIKON CORPORATION
- Hiroshi Nishimura
- G01 - MEASURING TESTING
Information Patent Application
Electron microscope and a method of imaging objects
- Publication number 20060151696
- Publication date Jul 13, 2006
- National University of Singapore
- Anjam Khursheed
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and method for evaluation using electron beam and manufactur...
- Publication number 20060060790
- Publication date Mar 23, 2006
- Mamoru Nakasuji
- B82 - NANO-TECHNOLOGY
Information Patent Application
Focusing system and method for a charged particle imaging system
- Publication number 20060060789
- Publication date Mar 23, 2006
- Steven Robert Rogers
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron microscope
- Publication number 20060022137
- Publication date Feb 2, 2006
- JEOL Ltd.
- Yoshihiro Ohkura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Low vacuum scanning electron microscope
- Publication number 20060011834
- Publication date Jan 19, 2006
- Masako Nishimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron microscope and electron beam inspection system
- Publication number 20060011835
- Publication date Jan 19, 2006
- Hisaya Murakoshi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Sample surface inspection method and inspection system
- Publication number 20050194535
- Publication date Sep 8, 2005
- EBARA CORPORATION
- Nobuharu Noji
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Charged-particle-beam mapping projection-optical systems and method...
- Publication number 20040251428
- Publication date Dec 16, 2004
- NIKON CORPORATION
- Hiroshi Nishimura
- G01 - MEASURING TESTING
Information Patent Application
Apparatus and methods for secondary electron emission microscope wi...
- Publication number 20040000642
- Publication date Jan 1, 2004
- Lee Veneklasen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus for inspection of semiconductor wafers and masks using a...
- Publication number 20020070340
- Publication date Jun 13, 2002
- Lee Veneklasen
- H01 - BASIC ELECTRIC ELEMENTS

Low energy electron microscopy [LEEM]

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Beam separator device, charged particle beam device and methods of...

Particle beam device and method for operating a particle beam device

Mirror energy filter for electron beam apparatus

Compact arrangement for dual-beam low energy electron microscope

Focusing system and method for a charged particle imaging system

Charged particle beam device for high spatial resolution and multip...

Energy-filtering cathode lens microscopy instrument

Electron microscope and electron beam inspection system

Electron microscope

Multi-pixel electron emission die-to-die inspection

Aberration-correcting cathode lens microscopy instrument

Electron microscope and a method of imaging objects

System and method for evaluation using electron beam and manufactur...

Charged-particle-beam mapping projection-optical systems and method...

Charged-particle-beam mapping projection-optical systems and method...

Apparatus and method for tilted particle-beam illumination

Multi-pixel electron emission die-to-die inspection

Apparatus and methods for secondary electron emission microscope wi...

Charged-particle-beam mapping projection-optical systems and method...

Apparatus for inspection of semiconductor wafers and masks using a...

Apparatus and methods for secondary electron emission microscope wi...

Precision-controlled slit mechanism for electron microscope

System for analyzing surfaces of samples

Multiple source and detection frequencies in detecting threshold ph...

Small cavity analytical instruments

System for analyzing surfaces of samples

Reading and writing stored information by means of electrochemistry

Multiple source and detection frequencies in detecting threshold ph...

System for imaging and detecting threshold phenomena associated wit...

System for detecting threshold phenomena associated with and/or ato...

Patents Applicationslast 30 patents

PARTICLE BEAM DEVICE AND METHOD FOR OPERATING A PARTICLE BEAM DEVICE

SPHERICAL ABERRATION CORRECTION DECELERATING LENS, SPHERICAL ABERRA...

Electron Microscope And Electron Beam Inspection System

Aberration-correcting cathode lens microscopy instrument

Energy-filtering cathode lens microscopy instrument

INSPECTION INSTRUMENT OF A MAGNETIC SPECIMEN

Electron microscope and electron bean inspection system.

Charged particle beam device for high spatial resolution and multip...

Charged-particle-beam mapping projection-optical systems and method...

Electron microscope and a method of imaging objects

System and method for evaluation using electron beam and manufactur...

Focusing system and method for a charged particle imaging system

Electron microscope

Low vacuum scanning electron microscope

Electron microscope and electron beam inspection system

Sample surface inspection method and inspection system

Charged-particle-beam mapping projection-optical systems and method...

Apparatus and methods for secondary electron emission microscope wi...

Apparatus for inspection of semiconductor wafers and masks using a...