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CPC
H01J2237/20257
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Parent Industries
H
ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2237/00
Discharge tubes exposing object to beam
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H01J2237/20257
Magnetic coupling
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Patents Grants
last 30 patents
Information
Patent Grant
Ion milling device
Patent number
11,004,652
Issue date
May 11, 2021
HITACHI HIGH-TECH CORPORATION
Asako Kaneko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Magnetic bearing, a rotary stage, and a reflective electron beam li...
Patent number
8,836,190
Issue date
Sep 16, 2014
Koninklijke Philips N.V.
Sahin Funda
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Grant
Moving module of a wafer ion-implanting machine
Patent number
7,956,333
Issue date
Jun 7, 2011
Inotera Memories, Inc.
Ting-Wei Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for ion implantation including contactless cooling and be...
Patent number
5,338,940
Issue date
Aug 16, 1994
Nissin-High Voltage Co., Ltd.
Kunihiko Takeyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Device for positioning objects within a sealed chamber
Patent number
5,139,383
Issue date
Aug 18, 1992
Huntington Mechanical Laboratories, Inc.
Alexander Polyak
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
MAGNETIC ROTATION DEVICE FOR HIGH VACUUM APPLICATIONS SUCH AS ION A...
Publication number
20240429019
Publication date
Dec 26, 2024
SHINE Technologies, LLC
Daniel Martin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Sample Holder and Sample Processing Apparatus
Publication number
20240331970
Publication date
Oct 3, 2024
JEOL Ltd.
Jun Watanabe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
STAGE DEVICE, CHARGED PARTICLE BEAM APPARATUS, AND VACUUM APPARATUS
Publication number
20230260740
Publication date
Aug 17, 2023
HITACHI HIGH-TECH CORPORATION
Motohiro TAKAHASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Ion Milling Device
Publication number
20200357602
Publication date
Nov 12, 2020
Hitachi High-Technologies Corporation
Asako KANEKO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MAGNETIC BEARING, A ROTARY STAGE, AND A REFLECTIVE ELECTRON BEAM LI...
Publication number
20120038233
Publication date
Feb 16, 2012
Koninklijke Philips Electronics N.V.
Sahin Funda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Moving module of a wafer ion-implanting machine
Publication number
20100218720
Publication date
Sep 2, 2010
Ting-Wei Lin
H01 - BASIC ELECTRIC ELEMENTS