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CPC
H01J2237/20257
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Parent Industries
H
ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2237/00
Discharge tubes exposing object to beam
Current Industry
H01J2237/20257
Magnetic coupling
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Patents Grants
last 30 patents
Information
Patent Grant
Ion milling device
Patent number
11,004,652
Issue date
May 11, 2021
HITACHI HIGH-TECH CORPORATION
Asako Kaneko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Magnetic bearing, a rotary stage, and a reflective electron beam li...
Patent number
8,836,190
Issue date
Sep 16, 2014
Koninklijke Philips N.V.
Sahin Funda
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Grant
Moving module of a wafer ion-implanting machine
Patent number
7,956,333
Issue date
Jun 7, 2011
Inotera Memories, Inc.
Ting-Wei Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for ion implantation including contactless cooling and be...
Patent number
5,338,940
Issue date
Aug 16, 1994
Nissin-High Voltage Co., Ltd.
Kunihiko Takeyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Device for positioning objects within a sealed chamber
Patent number
5,139,383
Issue date
Aug 18, 1992
Huntington Mechanical Laboratories, Inc.
Alexander Polyak
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
STAGE DEVICE, CHARGED PARTICLE BEAM APPARATUS, AND VACUUM APPARATUS
Publication number
20230260740
Publication date
Aug 17, 2023
HITACHI HIGH-TECH CORPORATION
Motohiro TAKAHASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Ion Milling Device
Publication number
20200357602
Publication date
Nov 12, 2020
Hitachi High-Technologies Corporation
Asako KANEKO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MAGNETIC BEARING, A ROTARY STAGE, AND A REFLECTIVE ELECTRON BEAM LI...
Publication number
20120038233
Publication date
Feb 16, 2012
Koninklijke Philips Electronics N.V.
Sahin Funda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Moving module of a wafer ion-implanting machine
Publication number
20100218720
Publication date
Sep 2, 2010
Ting-Wei Lin
H01 - BASIC ELECTRIC ELEMENTS