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H01J37/14
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H
ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00
Discharge tubes with provision for introducing objects or material to be exposed to the discharge
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H01J37/14
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Patents Grants
last 30 patents
Information
Patent Grant
Optimized saddle nozzle design for gas injection system
Patent number
12,368,019
Issue date
Jul 22, 2025
Applied Materials Israel Ltd.
Yehuda Zur
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
System and method for uniform ion milling
Patent number
12,362,130
Issue date
Jul 15, 2025
E. A. Fischione Instruments, Inc.
Paul E Fischione
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for inspecting a specimen and charged particle beam device
Patent number
12,362,131
Issue date
Jul 15, 2025
Applied Materials Israel Ltd.
Pieter Kruit
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Particle beam column
Patent number
12,362,129
Issue date
Jul 15, 2025
Carl Zeiss Microscopy GmbH
Erik Essers
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor inspection apparatus and semiconductor inspection met...
Patent number
12,362,139
Issue date
Jul 15, 2025
Samsung Electronics Co., Ltd.
Yujin Cho
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pattern inspection apparatus and pattern inspection method
Patent number
12,354,831
Issue date
Jul 8, 2025
NuFlare Technology, Inc.
Masataka Shiratsuchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multiple landing energy scanning electron microscopy systems and me...
Patent number
12,354,833
Issue date
Jul 8, 2025
ASML Netherlands B.V.
Wei Fang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam apparatus
Patent number
12,354,826
Issue date
Jul 8, 2025
HITACHI HIGH-TECH CORPORATION
Tomonori Nakano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Scanning electron microscope
Patent number
12,347,642
Issue date
Jul 1, 2025
TASMIT, INC.
Naoya Saitoh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron beam apparatus
Patent number
12,347,640
Issue date
Jul 1, 2025
HITACHI HIGH-TECH CORPORATION
Yu Yamazawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multiple charged-particle beam apparatus and methods of operating t...
Patent number
12,347,643
Issue date
Jul 1, 2025
ASML Netherlands B.V.
Weiming Ren
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device, and method for controlling charged pa...
Patent number
12,340,970
Issue date
Jun 24, 2025
HITACHI HIGH-TECH CORPORATION
Shingo Hayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Particle beam system including a multi-beam deflection device and a...
Patent number
12,340,973
Issue date
Jun 24, 2025
Carl Zeiss MultiSEM GmbH
Stefan Schubert
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Low-voltage electron beam control of conductive state at a complex-...
Patent number
12,322,522
Issue date
Jun 3, 2025
University of Pittsburgh of the Commonwealth System of Higher Education
Jeremy Levy
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Electron beam system
Patent number
12,315,694
Issue date
May 27, 2025
Focus-eBeam Technology (Beijing) Co., Ltd.
Shuai Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-electron beam inspection apparatus, multipole array control m...
Patent number
12,308,202
Issue date
May 20, 2025
NuFlare Technology, Inc.
Yuichi Maekawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Optical auto-focus unit and a method for auto-focus
Patent number
12,308,204
Issue date
May 20, 2025
Applied Materials Israel Ltd.
Sissi Lachmi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Objective lens system for fast scanning large FOV
Patent number
12,300,458
Issue date
May 13, 2025
ASML Netherlands B.V.
Shuai Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam system, method of operating a charged particl...
Patent number
12,293,895
Issue date
May 6, 2025
Carl Zeiss SMT GmbH
Eugen Foca
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Particle beam system
Patent number
12,293,896
Issue date
May 6, 2025
Carl Zeiss MultiSEM GmbH
Dirk Zeidler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Particle beam device having a deflection unit
Patent number
12,288,664
Issue date
Apr 29, 2025
Carl Zeiss Microscopy GmbH
Dirk Preikszas
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multiple electron beam image acquisition method, multiple electron...
Patent number
12,288,666
Issue date
Apr 29, 2025
NuFlare Technology, Inc.
Koichi Ishii
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sample display method
Patent number
12,288,665
Issue date
Apr 29, 2025
TESCAN BRNO s.r.o
Jiri Dluhos
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Creating multiple electron beams with a photocathode film
Patent number
12,283,453
Issue date
Apr 22, 2025
KLA Corporation
Xinrong Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Monochromator device and methods of use thereof
Patent number
12,283,455
Issue date
Apr 22, 2025
Cornell University
Duncan Cameron
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method for alignment of secondary beams in multi-beam in...
Patent number
12,278,081
Issue date
Apr 15, 2025
ASML Netherlands B.V.
Qingpo Xi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Scanning electron microscope and objective lens
Patent number
12,261,014
Issue date
Mar 25, 2025
Jeol Ltd.
Motohiro Nakamura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Transmission charged particle microscope with an electron energy lo...
Patent number
12,255,045
Issue date
Mar 18, 2025
FEI Company
Peter Christiaan Tiemeijer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-beam particle beam system and method for operating same
Patent number
12,255,040
Issue date
Mar 18, 2025
Carl Zeiss MultiSEM GmbH
Dirk Zeidler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Microscopy feedback for improved milling accuracy
Patent number
12,249,482
Issue date
Mar 11, 2025
FEI Company
Thomas Gary Miller
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
Publication number
20250232945
Publication date
Jul 17, 2025
ASML NETHERLANDS B.V.
Weiming REN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTIPOLE LENS AND CHARGED PARTICLE BEAM DEVICE
Publication number
20250232944
Publication date
Jul 17, 2025
HITACHI HIGH-TECH CORPORATION
Shun KIZAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Charged Particle Beam System
Publication number
20250232947
Publication date
Jul 17, 2025
Hitachi High-Tech Corporation
Naoto ITO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PARTICLE BEAM SYSTEM
Publication number
20250232951
Publication date
Jul 17, 2025
Carl Zeiss MultiSEM GmbH
Dirk Zeidler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
A MULTI-MODE LOW-VOLTAGE ELECTRON MICROSCOPE
Publication number
20250226173
Publication date
Jul 10, 2025
DELONG INSTRUMENTS A.S.
Tomas Bejdak
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-BEAM PARTICLE MICROSCOPE WITH IMPROVED BEAM TUBE
Publication number
20250218719
Publication date
Jul 3, 2025
Carl Zeiss MultiSEM GmbH
Michael Kelp
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PARTICLE-OPTICAL ARRANGEMENT, IN PARTICULAR MULTI-BEAM PARTICLE MIC...
Publication number
20250210300
Publication date
Jun 26, 2025
Carl Zeiss MultiSEM GmbH
Dirk ZEIDLER
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PARTICLE BEAM TREATMENT APPARATUS, DEFLECTION MAGNET APPARATUS, AND...
Publication number
20250210299
Publication date
Jun 26, 2025
Sumitomo Heavy Industries, Ltd.
Yuta EBARA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TECHNIQUES FOR GUIDE STAR ALIGNMENT OF AN ION IMPLANTER
Publication number
20250201513
Publication date
Jun 19, 2025
Applied Materials, Inc.
Richard Allen SPRENKLE
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Radiation Heating to Clean Deposits from Air Bearing Shaft
Publication number
20250201514
Publication date
Jun 19, 2025
Applied Materials, Inc.
Roger B. Fish
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Natural Frequency Adjuster For Extraction Electrodes
Publication number
20250201508
Publication date
Jun 19, 2025
Applied Materials, Inc.
Adam M. McLaughlin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OPTICAL SYSTEM FOR A PLURALITY OF PRIMARY BEAMLETS, CHARGED PARTICL...
Publication number
20250191874
Publication date
Jun 12, 2025
ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
Pieter Kruit
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SIGNAL ELECTRON BEAM DEFLECTOR FOR AN ELECTRON BEAM APPARATUS, ELEC...
Publication number
20250182998
Publication date
Jun 5, 2025
ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
Pieter Kruit
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CALIBRATION OF AN EXAMINATION SYSTEM
Publication number
20250183001
Publication date
Jun 5, 2025
APPLIED MATERIALS ISRAEL LTD.
Rafael BISTRITZER
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
TRANSMISSION ELECTRON MICROSCOPE WITH VARIABLE EFFECTIVE FOCAL LENGTH
Publication number
20250182997
Publication date
Jun 5, 2025
FEI Company
Bart Buijsse
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OBJECTIVE LENS COVER AND CHARGED PARTICLE BEAM APPARATUS INCLUDING...
Publication number
20250174426
Publication date
May 29, 2025
Korea Research Institute of Standards and Science
Takashi OGAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROMAGNETIC LENS, SCANNING ELECTRON MICROSCOPE, AND MULTI-ELECT...
Publication number
20250174425
Publication date
May 29, 2025
NuFlare Technology, Inc.
Takahiro MURATA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND DEVICE FOR CORRECTING IMAGE ERRORS WHEN SCANNING A CHARG...
Publication number
20250174429
Publication date
May 29, 2025
Carl Zeiss SMT GMBH
Michael Budach
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEFLECTOR FOR A CHARGED PARTICLE BEAM APPARATUS, DEFLECTING SYSTEM,...
Publication number
20250166958
Publication date
May 22, 2025
ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
Pavel Adamec
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HIGH BANDWIDTH VARIABLE DOSE ION IMPLANTATION SYSTEM AND METHOD
Publication number
20250166959
Publication date
May 22, 2025
Axcelis Technologies, Inc.
Andy Ray
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and System for Imaging a Sample
Publication number
20250166963
Publication date
May 22, 2025
Milos Malínský
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION ANGLE SENSOR
Publication number
20250157784
Publication date
May 15, 2025
Applied Materials, Inc.
Chuang-Chia Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR OPERATING A PARTICLE BEAM APPARATUS, COMPUTER PROGRAM PR...
Publication number
20250157781
Publication date
May 15, 2025
CARL ZEISS MICROSCOPY GMBH
Bjoern Gamm
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS USING MULTIPLE BEAMS OF CHARGED PARTICLES
Publication number
20250157783
Publication date
May 15, 2025
ASML NETHERLANDS B.V.
Xuerang HU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MINIMIZATION OF ENERGY SPREAD IN FOCUSED ION BEAM (FIB) SYSTEMS
Publication number
20250157779
Publication date
May 15, 2025
FEI Company
Radovan VaĊĦina
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR OPERATING A PARTICLE BEAM APPARATUS, COMPUTER PROGRAM PR...
Publication number
20250157782
Publication date
May 15, 2025
CARL ZEISS MICROSCOPY GMBH
Bjoern Gamm
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTIPLE-BEAM IMAGE ACQUISITION APPARATUS AND MULTIPLE-BEAM IMAGE A...
Publication number
20250149290
Publication date
May 8, 2025
NuFlare Technology, Inc.
Koichi ISHII
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF CHARACTERIZING A DETECTION PATH OF A CHARGED PARTICLE BEA...
Publication number
20250140511
Publication date
May 1, 2025
ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
John Breuer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LOCALIZED STRESS MODULATION BY IMPLANT TO BACK OF WAFER
Publication number
20250140569
Publication date
May 1, 2025
Applied Materials, Inc.
Sony Varghese
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-ELECTRON BEAM IMAGE ACQUISITION APPARATUS, MULTI-ELECTRON BEA...
Publication number
20250132119
Publication date
Apr 24, 2025
NuFlare Technology, Inc.
Kazuhiko INOUE
H01 - BASIC ELECTRIC ELEMENTS