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H01J37/14
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H
ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00
Discharge tubes with provision for introducing objects or material to be exposed to the discharge
Current Industry
H01J37/14
magnetic
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Patents Grants
last 30 patents
Information
Patent Grant
Charged particle assessment tool, inspection method
Patent number
11,984,295
Issue date
May 14, 2024
ASML Netherlands B.V.
Marco Jan-Jaco Wieland
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device
Patent number
11,967,482
Issue date
Apr 23, 2024
HITACHI HIGH-TECH CORPORATION
Wen Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and techniques for angled etching using multielectrode ex...
Patent number
11,967,489
Issue date
Apr 23, 2024
Applied Materials, Inc.
Peter F. Kurunczi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device
Patent number
11,961,699
Issue date
Apr 16, 2024
HITACHI HIGH-TECH CORPORATION
Hideo Morishita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Replaceable module for a charged particle apparatus
Patent number
11,961,698
Issue date
Apr 16, 2024
ASML Netherlands B.V.
Christiaan Otten
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam writing apparatus, charged particle beam writ...
Patent number
11,961,708
Issue date
Apr 16, 2024
NuFlare Technology, Inc.
Haruyuki Nomura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus using charged particle beams
Patent number
11,961,697
Issue date
Apr 16, 2024
ASML Netherlands B.V.
Xuerang Hu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Geometry based three dimensional reconstruction of a semiconductor...
Patent number
11,953,316
Issue date
Apr 9, 2024
Applied Materials Israel Ltd.
Rafael Bistritzer
G01 - MEASURING TESTING
Information
Patent Grant
Transmission charged particle microscope with an electron energy lo...
Patent number
11,955,310
Issue date
Apr 9, 2024
FEI Company
Peter Christiaan Tiemeijer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and apparatuses for adjusting beam condition of charged par...
Patent number
11,948,772
Issue date
Apr 2, 2024
ASML Netherlands B.V.
Xuedong Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for real time stereo imaging using multiple ele...
Patent number
11,942,303
Issue date
Mar 26, 2024
ASML Netherlands B.V.
Yan Ren
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pulsed charged-particle beam system
Patent number
11,942,302
Issue date
Mar 26, 2024
ASML Netherlands B.V.
Arno Jan Bleeker
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sampling assembly and testing instrument
Patent number
11,933,668
Issue date
Mar 19, 2024
Rohde & Schwarz GmbH & Co. KG
Bernhard Sterzbach
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor wafer
Patent number
11,929,229
Issue date
Mar 12, 2024
MI2-FACTORY GMBH
Florian Krippendorf
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Ion implanter and ion implantation method
Patent number
11,923,167
Issue date
Mar 5, 2024
Sumitomo Heavy Industries Ion Technology Co., Ltd.
Hiroshi Matsushita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron beam application apparatus
Patent number
11,915,903
Issue date
Feb 27, 2024
HITACHI HIGH-TECH CORPORATION
Momoyo Enyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Conduction inspection method for multipole aberration corrector, an...
Patent number
11,915,902
Issue date
Feb 27, 2024
NuFlare Technology, Inc.
Atsushi Ando
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Scanning electron microscope device and electron beam inspection ap...
Patent number
11,908,658
Issue date
Feb 20, 2024
Zhongke Jingyuan Electron Limited
Qinglang Meng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Scanning electron microscope device and electron beam inspection ap...
Patent number
11,908,657
Issue date
Feb 20, 2024
Zhongke Jingyuan Electron Limited
Qinglang Meng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-charged-particle-beam writing apparatus and multi-charged-par...
Patent number
11,901,156
Issue date
Feb 13, 2024
NuFlare Technology, Inc.
Ryosuke Ueba
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Low-voltage electron beam control of conductive state at a complex-...
Patent number
11,894,162
Issue date
Feb 6, 2024
University of Pittsburgh—Of the Commonwealth System, of Higher Education
Jeremy Levy
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Ion milling device
Patent number
11,894,213
Issue date
Feb 6, 2024
HITACHI HIGH-TECH CORPORATION
Asako Kaneko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus of plural charged-particle beams
Patent number
11,887,807
Issue date
Jan 30, 2024
ASML Netherlands B.V.
Weiming Ren
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Infrastructure-scale additive manufacturing using mobile electron a...
Patent number
11,878,462
Issue date
Jan 23, 2024
Fermi Research Alliance, LLC
Aaron Sauers
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High throughput multi-electron beam system
Patent number
11,869,743
Issue date
Jan 9, 2024
KLA Corporation
Xinrong Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus of plural charged-particle beams
Patent number
RE49784
Issue date
Jan 2, 2024
ASML Netherlands B.V.
Weiming Ren
Information
Patent Grant
Multiple charged-particle beam apparatus and methods
Patent number
11,854,765
Issue date
Dec 26, 2023
ASML Netherlands B.V.
Weiming Ren
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam writing device and charged particle beam writ...
Patent number
11,854,764
Issue date
Dec 26, 2023
NuFlare Technology, Inc.
Junpei Yasuda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and systems for event modulated electron microscopy
Patent number
11,848,173
Issue date
Dec 19, 2023
INTEGRATED DYNAMIC ELECTRON SOLUTIONS, INC.
Bryan Walter Reed
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Objective lens system for fast scanning large FOV
Patent number
11,837,431
Issue date
Dec 5, 2023
ASML Netherlands B.V.
Shuai Li
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
ELECTRON BEAM APPLICATION DEVICE
Publication number
20240161997
Publication date
May 16, 2024
HITACHI HIGH-TECH CORPORATION
Takashi OHSHIMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DIRECT WRITING SYSTEM USED FOR ELECTRON BEAM LITHOGRAPHY
Publication number
20240161998
Publication date
May 16, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Cheng-Hsien Chou
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM AND METHOD FOR INSPECTION BY DEFLECTOR CONTROL IN A CHARGED...
Publication number
20240153732
Publication date
May 9, 2024
ASML NETHERLANDS B.V.
Datong ZHANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MANUFACTURING METHOD FOR ELECTROSTATIC DEFLECTOR AND ELECTROSTATIC...
Publication number
20240153731
Publication date
May 9, 2024
KYOCERA CORPORATION
Takeshi MUNEISHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE INSPECTION APPARATUS AND A METHOD OF INSPECTING A SUBSTRA...
Publication number
20240151664
Publication date
May 9, 2024
Samsung Electronics Co., Ltd.
Kwang-Eun KIM
G01 - MEASURING TESTING
Information
Patent Application
CHARGED PARTICLE APPARATUS AND METHOD
Publication number
20240145208
Publication date
May 2, 2024
ASML NETHERLANDS B.V.
Erwin SLOT
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OBJECTIVE LENS SYSTEM FOR FAST SCANNING LARGE FOV
Publication number
20240145209
Publication date
May 2, 2024
ASML NETHERLANDS B.V.
Shuai LI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Analyzing Method and Analyzer
Publication number
20240142395
Publication date
May 2, 2024
JEOL Ltd.
Koki Kato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BEAM BENDING SNOUT FOR MOBILE ELECTRON ACCELERATORS
Publication number
20240140025
Publication date
May 2, 2024
FERMI RESEARCH ALLIANCE, LLC
Aaron Sauers
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTIPLE CHARGED-PARTICLE BEAM APPARATUS AND METHODS
Publication number
20240145214
Publication date
May 2, 2024
ASML NETHERLANDS B.V.
Weiming REN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-BEAM PARTICLE BEAM SYSTEM
Publication number
20240136146
Publication date
Apr 25, 2024
Carl Zeiss MultiSEM GmbH
Dirk Zeidler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR CREATING A SMOOTH DIAGONAL SURFACE USING A FOCUSED ION B...
Publication number
20240136150
Publication date
Apr 25, 2024
APPLIED MATERIALS ISRAEL LTD.
Yehuda Zur
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE-OPTICAL DEVICE, CHARGED PARTICLE APPARATUS AND METHOD
Publication number
20240136147
Publication date
Apr 25, 2024
ASML NETHERLANDS B.V.
Erwin SLOT
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
Publication number
20240128044
Publication date
Apr 18, 2024
ASML NETHERLANDS B.V.
Weiming REN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE APPARATUS AND METHOD
Publication number
20240128043
Publication date
Apr 18, 2024
ASML NETHERLANDS B.V.
Jurgen VAN SOEST
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE ASSESSMENT SYSTEM AND METHOD OF ALIGNING A SAMPLE...
Publication number
20240128045
Publication date
Apr 18, 2024
ASML NETHERLANDS B.V.
Erwin SLOT
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REDUCTION OF POWER CONSUMPTION FOR A CHARGED PARTICLE SYSTEM
Publication number
20240120171
Publication date
Apr 11, 2024
FEI Company
Casper Smit
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON GUN AND ELECTRON BEAM APPLICATION APPARATUS
Publication number
20240120168
Publication date
Apr 11, 2024
Hitachi High-Tech Corporation
Takashi Ohshima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE MICROSCOPE HAVING VACUUM IN SPECIMEN CHAMBER
Publication number
20240112878
Publication date
Apr 4, 2024
FEI Company
Pleun Dona
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE ANALYSIS SYSTEM
Publication number
20240112881
Publication date
Apr 4, 2024
Samsung Electronics Co., Ltd.
Jonghyeok PARK
G01 - MEASURING TESTING
Information
Patent Application
HIGH FRAMERATE AND HIGH DYNAMIC RANGE ELECTRON MICROSCOPY
Publication number
20240105418
Publication date
Mar 28, 2024
Integrated Dynamic Electron Solutions, Inc.
Ruth BLOOM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ENHANCED DEPOSITION RATE BY APPLYING A NEGATIVE VOLTAGE TO A GAS IN...
Publication number
20240105421
Publication date
Mar 28, 2024
APPLIED MATERIALS ISRAEL LTD.
Yehuda Zur
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MULTI-BEAM CHARGED PARTICLE SOURCE WITH ALIGHMENT MEANS
Publication number
20240096585
Publication date
Mar 21, 2024
Technische Universiteit Delft
Pieter KRUIT
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DISTORTION OPTIMIZED MULTI-BEAM SCANNING SYSTEM
Publication number
20240096587
Publication date
Mar 21, 2024
Carl Zeiss MultiSEM GmbH
Dirk Zeidler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OPTIMIZED SADDLE NOZZLE DESIGN FOR GAS INJECTION SYSTEM
Publication number
20240096592
Publication date
Mar 21, 2024
APPLIED MATERIALS ISRAEL LTD.
Yehuda Zur
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MAGNETIC MULTIPOLE DEVICE, CHARGED PARTICLE BEAM APPARATUS, AND MET...
Publication number
20240087837
Publication date
Mar 14, 2024
ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
Benjamin Cook
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE OPTICAL DEVICE, OBJECTIVE LENS ASSEMBLY, DETECTOR,...
Publication number
20240087844
Publication date
Mar 14, 2024
ASML NETHERLANDS B.V.
Albertus Victor Gerardus MANGNUS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-ELECTRON BEAM IMAGE ACQUIRING APPARATUS AND MULTI-ELECTRON BE...
Publication number
20240079200
Publication date
Mar 7, 2024
NuFlare Technology, Inc.
Kazuhiko INOUE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-BEAM CHARGED PARTICLE SYSTEM AND METHOD OF CONTROLLING THE WO...
Publication number
20240079207
Publication date
Mar 7, 2024
Carl Zeiss MultiSEM GmbH
Michael Behnke
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS USING MULTIPLE BEAMS OF CHARGED PARTICLES
Publication number
20240071711
Publication date
Feb 29, 2024
ASML NETHERLANDS B.V.
Xuerang HU
H01 - BASIC ELECTRIC ELEMENTS