Mask characterised by its behaviour during the etching process

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B81C1/00412

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C1/00Manufacture or treatment of devices or systems in or on a substrate

Current Industry

B81C1/00412Mask characterised by its behaviour during the etching process

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Managing trench depth in integrated systems
- Patent number 11,227,790
- Issue date Jan 18, 2022
- Ciena Corporation
- Benoît Filion
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of etching microelectronic mechanical system features in a s...
- Patent number 10,784,115
- Issue date Sep 22, 2020
- Toyota Motor Engineering & Manufacturing North America, Inc.
- Feng Zhou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical-systems processing method, and micro-elect...
- Patent number 10,662,059
- Issue date May 26, 2020
- Hitachi, Ltd.
- Keiji Watanabe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of etching microelectronic mechanical system features in a s...
- Patent number 10,395,940
- Issue date Aug 27, 2019
- Toyota Motor Engineering & Manufacturing North America, Inc.
- Feng Zhou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Wafer processing equipment having exposable sensing layers
- Patent number 9,975,758
- Issue date May 22, 2018
- Applied Materials, Inc.
- Leonard Tedeschi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Systems and methods for mask reduction techniques
- Patent number 9,919,920
- Issue date Mar 20, 2018
- Invensense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Wafer processing equipment having exposable sensing layers
- Patent number 9,725,302
- Issue date Aug 8, 2017
- Applied Materials, Inc.
- Leonard Tedeschi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing a micromechanical component, and corresponding...
- Patent number 9,593,012
- Issue date Mar 14, 2017
- Robert Bosch GmbH
- Friedjof Heuck
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing a MEMS structure and use of the method
- Patent number 9,556,021
- Issue date Jan 31, 2017
- Murata Manufacturing Co., Ltd.
- Altti Torkkeli
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for fabrication of a micromechanical and/or nanomechanical...
- Patent number 9,527,729
- Issue date Dec 27, 2016
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Eric Ollier
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Lithium microbattery fabrication method
- Patent number 9,373,864
- Issue date Jun 21, 2016
- Commissariat a l'Energie Atomique et aux Energies Alternative
- Sami Oukassi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing a MEMS structure
- Patent number 9,334,160
- Issue date May 10, 2016
- Murata Manufacturing Co., Ltd.
- Altti Torkkeli
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for forming a microfabricated structure
- Patent number 9,302,905
- Issue date Apr 5, 2016
- Innovative Micro Technology
- Suresh K Sampath
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for selectively covering a micro machined surface
- Patent number 7,255,799
- Issue date Aug 14, 2007
- Telecom Italia S.p.A.
- Renato Conta
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for forming a cavity structure on SOI substrate and cavity s...
- Patent number 6,930,366
- Issue date Aug 16, 2005
- Valtion Teknillinen Tutkimuskeskus
- Jyrki Kiihamäki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Anisotropic dry etching technique for deep bulk silicon etching
- Patent number 6,790,779
- Issue date Sep 14, 2004
- Lockheed Martin Corporation
- James H. Schermerhorn
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of producing structured wafers
- Patent number 6,723,250
- Issue date Apr 20, 2004
- Robert Bosch GmbH
- Joerg Schaefer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing three-dimensional structures by means of an et...
- Patent number 6,663,784
- Issue date Dec 16, 2003
- Robert Bosch GmbH
- Nils Kummer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of forming a groove in a surface of a mother substrate
- Patent number 6,276,992
- Issue date Aug 21, 2001
- Murata Manufacturing Co., Ltd.
- Masuyoshi Houda
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of etching a wafer layer using a sacrificial wall to form ve...
- Patent number 6,242,363
- Issue date Jun 5, 2001
- ADC Telecommunications, Inc.
- Nan Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR ETCHING GAPS OF UNEQUAL WIDTH
- Publication number 20220340415
- Publication date Oct 27, 2022
- Murata Manufacturing Co., Ltd.
- Petteri KILPINEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF ETCHING MICROELECTRONIC MECHANICAL SYSTEM FEATURES IN A S...
- Publication number 20190333773
- Publication date Oct 31, 2019
- Toyota Motor Engineering & Manufacturing North America, Inc.
- Feng Zhou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF ETCHING MICROELECTRONIC MECHANICAL SYSTEM FEATURES IN A S...
- Publication number 20190287810
- Publication date Sep 19, 2019
- Toyota Motor Engineering & Manufacturing North America, Inc.
- Feng Zhou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL-SYSTEMS PROCESSING METHOD, AND MICRO-ELECT...
- Publication number 20190062157
- Publication date Feb 28, 2019
- Hitachi, Ltd
- Keiji WATANABE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
WAFER PROCESSING EQUIPMENT HAVING EXPOSABLE SENSING LAYERS
- Publication number 20180057356
- Publication date Mar 1, 2018
- Applied Materials, Inc.
- Leonard Tedeschi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE AND FABRICATION METHOD THEREOF
- Publication number 20170057816
- Publication date Mar 2, 2017
- Semiconductor Manufacturing International (Shanghai) Corporation
- CHAO ZHENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Photolithography Structures and Methods
- Publication number 20160096729
- Publication date Apr 7, 2016
- Pixtronix, Inc.
- Javier Villarreal
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
REDUCING MEMS STICTION BY DEPOSITION OF NANOCLUSTERS
- Publication number 20160031698
- Publication date Feb 4, 2016
- Robert F. Steimle
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for Producing a Micromechanical Component, and Corresponding...
- Publication number 20160023895
- Publication date Jan 28, 2016
- ROBERT BOSCH GmbH
- Friedjof Heuck
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF MANUFACTURING A MEMS STRUCTURE AND USE OF THE METHOD
- Publication number 20150336794
- Publication date Nov 26, 2015
- Murata Manufacturing Co., Ltd.
- Altti TORKKELI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESS FOR FABRICATION OF A MICROMECHANICAL AND/OR NANOMECHANICAL...
- Publication number 20150274516
- Publication date Oct 1, 2015
- COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENE. ALT.
- Eric OLLIER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for selectively covering a micro machined surface
- Publication number 20050224453
- Publication date Oct 13, 2005
- OLIVETTI I-JET S.p.A.
- Renato Conta
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Equipment and process for creating a custom sloped etch in a substrate
- Publication number 20050133479
- Publication date Jun 23, 2005
- Dan W. Youngner
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for forming a cavity structure on soi substrate and cavity s...
- Publication number 20040248376
- Publication date Dec 9, 2004
- Jyrki Kiihamaki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ANISOTROPIC DRY ETCHING TECHNIQUE FOR DEEP BULK SILICON ETCHING
- Publication number 20040018734
- Publication date Jan 29, 2004
- Lockheed Martin Corporation
- James H. Schermerhorn
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method of etching a wafer layer using a sacrificial wall and struct...
- Publication number 20010009777
- Publication date Jul 26, 2001
- ADC Telecommunications, Inc.
- Nan Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Mask characterised by its behaviour during the etching process

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Managing trench depth in integrated systems

Method of etching microelectronic mechanical system features in a s...

Micro-electro-mechanical-systems processing method, and micro-elect...

Method of etching microelectronic mechanical system features in a s...

Wafer processing equipment having exposable sensing layers

Systems and methods for mask reduction techniques

Wafer processing equipment having exposable sensing layers

Method for producing a micromechanical component, and corresponding...

Method of manufacturing a MEMS structure and use of the method

Process for fabrication of a micromechanical and/or nanomechanical...

Lithium microbattery fabrication method

Method of manufacturing a MEMS structure

Method for forming a microfabricated structure

Method for selectively covering a micro machined surface

Method for forming a cavity structure on SOI substrate and cavity s...

Anisotropic dry etching technique for deep bulk silicon etching

Method of producing structured wafers

Method for producing three-dimensional structures by means of an et...

Method of forming a groove in a surface of a mother substrate

Method of etching a wafer layer using a sacrificial wall to form ve...

Patents Applicationslast 30 patents

METHOD FOR ETCHING GAPS OF UNEQUAL WIDTH

METHOD OF ETCHING MICROELECTRONIC MECHANICAL SYSTEM FEATURES IN A S...

METHOD OF ETCHING MICROELECTRONIC MECHANICAL SYSTEM FEATURES IN A S...

MICRO-ELECTRO-MECHANICAL-SYSTEMS PROCESSING METHOD, AND MICRO-ELECT...

WAFER PROCESSING EQUIPMENT HAVING EXPOSABLE SENSING LAYERS

MEMS DEVICE AND FABRICATION METHOD THEREOF

Photolithography Structures and Methods

REDUCING MEMS STICTION BY DEPOSITION OF NANOCLUSTERS

Method for Producing a Micromechanical Component, and Corresponding...

METHOD OF MANUFACTURING A MEMS STRUCTURE AND USE OF THE METHOD

PROCESS FOR FABRICATION OF A MICROMECHANICAL AND/OR NANOMECHANICAL...

Method for selectively covering a micro machined surface

Equipment and process for creating a custom sloped etch in a substrate

Method for forming a cavity structure on soi substrate and cavity s...

ANISOTROPIC DRY ETCHING TECHNIQUE FOR DEEP BULK SILICON ETCHING

Method of etching a wafer layer using a sacrificial wall and struct...