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B81C1/00396

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C1/00Manufacture or treatment of devices or systems in or on a substrate

Current Industry

B81C1/00396Mask characterised by its composition

Industries

Patents Grantslast 30 patents

Information Patent Grant
Wafer level packaging of MEMS
- Patent number 12,091,311
- Issue date Sep 17, 2024
- Texas Instruments Incorporated
- Stuart M. Jacobsen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Forming method of thin layer
- Patent number 11,780,728
- Issue date Oct 10, 2023
- Konica Minolta, Inc.
- Jinichi Kasuya
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of fabricating a microscale canopy wick structure having enh...
- Patent number 11,712,766
- Issue date Aug 1, 2023
- Toyota Motor Engineering & Manufacturing North America, Inc.
- Gaohua Zhu
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Single crystalline diamond part production method for stand alone s...
- Patent number 11,512,409
- Issue date Nov 29, 2022
- Ecole Polytechnique Federale de Lausanne
- Niels Quack
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Actuator layer patterning with topography
- Patent number 10,906,802
- Issue date Feb 2, 2021
- Invensense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of etching microelectronic mechanical system features in a s...
- Patent number 10,784,115
- Issue date Sep 22, 2020
- Toyota Motor Engineering & Manufacturing North America, Inc.
- Feng Zhou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fabrication process for a symmetrical MEMS accelerometer
- Patent number 10,647,570
- Issue date May 12, 2020
- Chinese Academy of Sciences Institute of Geology and Geophysics
- Lianzhong Yu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Multiple silicon trenches forming method for MEMS sealing cap wafer...
- Patent number 10,513,431
- Issue date Dec 24, 2019
- Hangzhou Silan Integrated Circuit Co., Ltd.
- Yongxiang Wen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods for providing lithography features on a substrate by self-a...
- Patent number 10,410,914
- Issue date Sep 10, 2019
- ASML Netherlands B.V.
- Sander Frederik Wuister
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electrically conductive patterns with wide line-width and methods f...
- Patent number 10,399,851
- Issue date Sep 3, 2019
- 3M Innovative Properties Company
- Chi-fan Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of etching microelectronic mechanical system features in a s...
- Patent number 10,395,940
- Issue date Aug 27, 2019
- Toyota Motor Engineering & Manufacturing North America, Inc.
- Feng Zhou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fabrication process for a symmetrical MEMS accelerometer
- Patent number 10,392,247
- Issue date Aug 27, 2019
- Chinese Academy of Sciences Institute of Geology and Geophysics
- Lianzhong Yu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Multiple silicon trenches forming method for MEMS sealing cap wafer...
- Patent number 10,081,541
- Issue date Sep 25, 2018
- Hangzhou Silan Integrated Circuit Co., Ltd.
- Yongxiang Wen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Composite cavity and forming method thereof
- Patent number 10,035,701
- Issue date Jul 31, 2018
- Advanced Semiconductor Manufacturing Co. Ltd.
- Yuanjun Xu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Neutral hard mask and its application to graphoepitaxy-based direct...
- Patent number 9,881,793
- Issue date Jan 30, 2018
- International Business Machines Corporation
- Sebastian U. Engelmann
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of forming a resonator
- Patent number 9,641,153
- Issue date May 2, 2017
- Infineon Technologies Dresden GmbH
- Thoralf Kautzsch
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Wafer level packaging of MEMS
- Patent number 9,630,835
- Issue date Apr 25, 2017
- Texas Instruments Incorporated
- Stuart M. Jacobsen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Graphoepitaxy directed self assembly
- Patent number 9,632,408
- Issue date Apr 25, 2017
- International Business Machines Corporation
- Hongyun Cottle
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing nanoimprint mold
- Patent number 9,586,343
- Issue date Mar 7, 2017
- Dai Nippon Printing Co., Ltd.
- Takeshi Sakamoto
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Method of manufacturing a MEMS structure and use of the method
- Patent number 9,556,021
- Issue date Jan 31, 2017
- Murata Manufacturing Co., Ltd.
- Altti Torkkeli
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Diblock copolymer, preparation method thereof, and method of formin...
- Patent number 9,493,588
- Issue date Nov 15, 2016
- LG Chem, Ltd.
- Yang-Kyoo Han
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for forming silicon oxide and metal nanopattern's, and magne...
- Patent number 9,495,991
- Issue date Nov 15, 2016
- LG Chem, Ltd.
- Yang Kyoo Han
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
System on a chip using integrated MEMS and CMOS devices
- Patent number 9,440,846
- Issue date Sep 13, 2016
- MCube, Inc.
- Xiao “Charles” Yang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Pressure difference sensor and method for its manufacture
- Patent number 9,442,033
- Issue date Sep 13, 2016
- Endress + GmbH + Co. KG
- Igor Getman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for forming pattern, and polysiloxane composition
- Patent number 9,434,609
- Issue date Sep 6, 2016
- JSR Corporation
- Satoshi Dei
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for making guiding lines with oxidized sidewalls for use in...
- Patent number 9,431,219
- Issue date Aug 30, 2016
- HGST Netherlands B.V.
- Julia Cushen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing a dielectric layer on a component
- Patent number 9,394,163
- Issue date Jul 19, 2016
- EPCOS AG
- Charles Binninger
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Lithium microbattery fabrication method
- Patent number 9,373,864
- Issue date Jun 21, 2016
- Commissariat a l'Energie Atomique et aux Energies Alternative
- Sami Oukassi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Pattern forming method
- Patent number 9,371,427
- Issue date Jun 21, 2016
- Kabushiki Kaisha Toshiba
- Katsutoshi Kobayashi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Silicon etching method
- Patent number 9,371,224
- Issue date Jun 21, 2016
- CSMC Technologies Fab1 Co., Ltd.
- Jiale Su
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MULTI-LEVEL MICROELECTROMECHANICAL SYSTEM STRUCTURE WITH NON-PHOTOD...
- Publication number 20230127477
- Publication date Apr 27, 2023
- TEXAS INSTRUMENTS INCORPORATED
- Christopher Murray BEARD
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE
- Publication number 20230037849
- Publication date Feb 9, 2023
- InvenSense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE
- Publication number 20230045257
- Publication date Feb 9, 2023
- InvenSense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS SPEAKER AND METHOD OF MICROFABRICATION OF SUCH A SPEAKER
- Publication number 20220266299
- Publication date Aug 25, 2022
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Romain LIETCHI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF FABRICATING A MICROSCALE CANOPY WICK STRUCTURE HAVING ENH...
- Publication number 20210370449
- Publication date Dec 2, 2021
- Toyota Motor Engineering & Manufacturing North America, Inc.
- Gaohua Zhu
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SINGLE CRYSTALLINE DIAMOND PART PRODUCTION METHOD FOR STAND ALONE S...
- Publication number 20200199780
- Publication date Jun 25, 2020
- ECOLE POLYTECHNIQUE FEDERALE DE LAUSANNE
- Niels QUACK
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACTUATOR LAYER PATTERNING WITH TOPOGRAPHY
- Publication number 20200131033
- Publication date Apr 30, 2020
- InvenSense, Inc.
- Daesung LEE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FABRICATION PROCESS FOR A SYMMETRICAL MEMS ACCELEROMETER
- Publication number 20190382264
- Publication date Dec 19, 2019
- Chinese Academy of Sciences Institute of Geology and Geophysics
- Lianzhong YU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF ETCHING MICROELECTRONIC MECHANICAL SYSTEM FEATURES IN A S...
- Publication number 20190333773
- Publication date Oct 31, 2019
- Toyota Motor Engineering & Manufacturing North America, Inc.
- Feng Zhou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF ETCHING MICROELECTRONIC MECHANICAL SYSTEM FEATURES IN A S...
- Publication number 20190287810
- Publication date Sep 19, 2019
- Toyota Motor Engineering & Manufacturing North America, Inc.
- Feng Zhou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FENCE STRUCTURE TO PREVENT STICTION IN A MEMS MOTION SENSOR
- Publication number 20190062153
- Publication date Feb 28, 2019
- Taiwan Semiconductor Manufacturing Co., LTD
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MULTIPLE SILICON TRENCHES FORMING METHOD FOR MEMS SEALING CAP WAFER...
- Publication number 20180362339
- Publication date Dec 20, 2018
- HANGZHOU SILAN INTEGRATED CIRCUIT CO., LTD
- Yongxiang Wen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTRICALLY CONDUCTIVE PATTERNS WITH WIDE LINE-WIDTH AND METHODS F...
- Publication number 20170217768
- Publication date Aug 3, 2017
- 3M Innovative Properties Company
- Chi-fan CHEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
A Suspended Structure Made of Inorganic Materials and a Method for...
- Publication number 20170205706
- Publication date Jul 20, 2017
- David BEN-BASSAT
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COMPOSITE CAVITY AND FORMING METHOD THEREOF
- Publication number 20170044006
- Publication date Feb 16, 2017
- ADVANCED SEMICONDUCTOR MANUFACTURING CO. LTD
- Yuanjun Xu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF MANUFACTURING A MEMS STRUCTURE
- Publication number 20150336793
- Publication date Nov 26, 2015
- MURATA MANUFACTURING CO., LTD.
- Altti TORKKELI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SYSTEM ON A CHIP USING INTEGRATED MEMS AND CMOS DEVICES
- Publication number 20150307347
- Publication date Oct 29, 2015
- MCube Inc.
- XIAO "CHARLES" YANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ALUMINUM NITRIDE (AlN) DEVICES WITH INFRARED ABSORPTION STRUCTURAL...
- Publication number 20150298965
- Publication date Oct 22, 2015
- InvenSense, Inc.
- Julius Ming-Lin Tsai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS OF FORMING MEMS DEVICE
- Publication number 20150259198
- Publication date Sep 17, 2015
- Shanghai Huahong Grace Semiconductor Manufacturing Corporation
- Zhenxing Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Pressure Difference Sensor and Method for its Manufacture
- Publication number 20150260598
- Publication date Sep 17, 2015
- Endress + Hauser GmbH + Co.KG
- Igor Getman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SILICON ETCHING METHOD
- Publication number 20150140823
- Publication date May 21, 2015
- CSMC TECHNOLOGIES FAB1 CO., LTD.
- Jiale Su
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR FORMING PATTERN, AND POLYSILOXANE COMPOSITION
- Publication number 20150048046
- Publication date Feb 19, 2015
- JSR Corporation
- Satoshi DEI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LOW TEMPERATURE CERAMIC MICROELECTROMECHANICAL STRUCTURES
- Publication number 20150008788
- Publication date Jan 8, 2015
- The Royal Institution for the Advancement of Learning / McGill University
- Mourad El-Gamal
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTRONIC DEVICE STRUCTURE AND METHOD OF MAKING ELECTRONIC DEVICES...
- Publication number 20140299967
- Publication date Oct 9, 2014
- U.S. ARMY RESEARCH LABORATORY ATTN: RDRL-LOC-I
- GABRIEL l. Smith
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL RESONATORS
- Publication number 20140266484
- Publication date Sep 18, 2014
- INFINEON TECHNOLOGIES DRESDEN GMBH
- Thoralf Kautzsch
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
NOVEL DIBLOCK COPOLYMER, PREPARATION METHOD THEREOF, AND METHOD OF...
- Publication number 20130248488
- Publication date Sep 26, 2013
- IUCF-HYU (INDUSTRY-UNIVERSITY COOPERATION FOUNDATION HANYANG UNIVERSITY)
- Yang-Kyoo Han
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL DEVICE AND METHODS TO FABRICATE SAME USING HARD MAS...
- Publication number 20130146948
- Publication date Jun 13, 2013
- International Business Machines Corporation
- Michael A. Guillorn
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for Producing a Dielectric Layer on a Component
- Publication number 20130126466
- Publication date May 23, 2013
- EPCOS AG
- Charles Binninger
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SHADOW MASK, METHOD OF MANUFACTURING THE SAME AND METHOD OF FORMING...
- Publication number 20130062310
- Publication date Mar 14, 2013
- Samsung Electronics Co., Ltd.
- Seok-whan Chung
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SILICON GERMANIUM MASK FOR DEEP SILICON ETCHING
- Publication number 20120225557
- Publication date Sep 6, 2012
- THE AMERICAN UNIVERSITY IN CAIRO
- Mohamed Serry
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Mask characterised by its composition

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Wafer level packaging of MEMS

Forming method of thin layer

Method of fabricating a microscale canopy wick structure having enh...

Single crystalline diamond part production method for stand alone s...

Actuator layer patterning with topography

Method of etching microelectronic mechanical system features in a s...

Fabrication process for a symmetrical MEMS accelerometer

Multiple silicon trenches forming method for MEMS sealing cap wafer...

Methods for providing lithography features on a substrate by self-a...

Electrically conductive patterns with wide line-width and methods f...

Method of etching microelectronic mechanical system features in a s...

Fabrication process for a symmetrical MEMS accelerometer

Multiple silicon trenches forming method for MEMS sealing cap wafer...

Composite cavity and forming method thereof

Neutral hard mask and its application to graphoepitaxy-based direct...

Method of forming a resonator

Wafer level packaging of MEMS

Graphoepitaxy directed self assembly

Method for producing nanoimprint mold

Method of manufacturing a MEMS structure and use of the method

Diblock copolymer, preparation method thereof, and method of formin...

Method for forming silicon oxide and metal nanopattern's, and magne...

System on a chip using integrated MEMS and CMOS devices

Pressure difference sensor and method for its manufacture

Method for forming pattern, and polysiloxane composition

Method for making guiding lines with oxidized sidewalls for use in...

Method for producing a dielectric layer on a component

Lithium microbattery fabrication method

Pattern forming method

Silicon etching method

Patents Applicationslast 30 patents

MULTI-LEVEL MICROELECTROMECHANICAL SYSTEM STRUCTURE WITH NON-PHOTOD...

METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE

METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE

MEMS SPEAKER AND METHOD OF MICROFABRICATION OF SUCH A SPEAKER

METHOD OF FABRICATING A MICROSCALE CANOPY WICK STRUCTURE HAVING ENH...

SINGLE CRYSTALLINE DIAMOND PART PRODUCTION METHOD FOR STAND ALONE S...

ACTUATOR LAYER PATTERNING WITH TOPOGRAPHY

FABRICATION PROCESS FOR A SYMMETRICAL MEMS ACCELEROMETER

METHOD OF ETCHING MICROELECTRONIC MECHANICAL SYSTEM FEATURES IN A S...

METHOD OF ETCHING MICROELECTRONIC MECHANICAL SYSTEM FEATURES IN A S...

FENCE STRUCTURE TO PREVENT STICTION IN A MEMS MOTION SENSOR

MULTIPLE SILICON TRENCHES FORMING METHOD FOR MEMS SEALING CAP WAFER...

ELECTRICALLY CONDUCTIVE PATTERNS WITH WIDE LINE-WIDTH AND METHODS F...

A Suspended Structure Made of Inorganic Materials and a Method for...

COMPOSITE CAVITY AND FORMING METHOD THEREOF

METHOD OF MANUFACTURING A MEMS STRUCTURE

SYSTEM ON A CHIP USING INTEGRATED MEMS AND CMOS DEVICES

ALUMINUM NITRIDE (AlN) DEVICES WITH INFRARED ABSORPTION STRUCTURAL...

METHODS OF FORMING MEMS DEVICE

Pressure Difference Sensor and Method for its Manufacture

SILICON ETCHING METHOD

METHOD FOR FORMING PATTERN, AND POLYSILOXANE COMPOSITION

LOW TEMPERATURE CERAMIC MICROELECTROMECHANICAL STRUCTURES

ELECTRONIC DEVICE STRUCTURE AND METHOD OF MAKING ELECTRONIC DEVICES...

MICROELECTROMECHANICAL RESONATORS

NOVEL DIBLOCK COPOLYMER, PREPARATION METHOD THEREOF, AND METHOD OF...

MICROMECHANICAL DEVICE AND METHODS TO FABRICATE SAME USING HARD MAS...

Method for Producing a Dielectric Layer on a Component

SHADOW MASK, METHOD OF MANUFACTURING THE SAME AND METHOD OF FORMING...

SILICON GERMANIUM MASK FOR DEEP SILICON ETCHING