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Means for producing, introducing, or replenishing gas or vapour during operation of the lamp
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H01J61/28
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ELECTRICITY
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Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J61/00
Gas- or vapour-discharge lamps
Current Industry
H01J61/28
Means for producing, introducing, or replenishing gas or vapour during operation of the lamp
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Patents Grants
last 30 patents
Information
Patent Grant
Arc lamp with forming gas for thermal processing systems
Patent number
12,119,216
Issue date
Oct 15, 2024
Beijing E-Town Semiconductor Technology Co., Ltd.
Michael X. Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Laser-sustained plasma source based on colliding liquid jets
Patent number
12,033,845
Issue date
Jul 9, 2024
KLA Corporation
John Szilagyi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Swirler for laser-sustained plasma light source with reverse vortex...
Patent number
11,978,620
Issue date
May 7, 2024
KLA Corporation
Ilya Bezel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Arc lamp with forming gas for thermal processing systems
Patent number
11,721,539
Issue date
Aug 8, 2023
Beijing E-Town Semiconductor Technology Co., Ltd.
Michael X. Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Extreme ultraviolet light source apparatus and plasma position adju...
Patent number
11,631,579
Issue date
Apr 18, 2023
USHIO DENKI KABUSHIKI KAISHA
Noritaka Ashizawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Lamp device, exposure apparatus, and method of manufacturing article
Patent number
11,521,845
Issue date
Dec 6, 2022
Canon Kabushiki Kaisha
Hideki Matsumoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Laser sustained plasma light source with high pressure flow
Patent number
11,450,521
Issue date
Sep 20, 2022
KLA Corporation
Anatoly Shchemelinin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Mercury discharge lamp
Patent number
11,437,228
Issue date
Sep 6, 2022
Photoscience Japan Corporation
Akihiro Inoue
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and device for the reduction of contaminants in a plasma rea...
Patent number
11,322,344
Issue date
May 3, 2022
Plasma Investment Sp. z o.o.
Ihar Yelkin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Extreme ultraviolet light generation apparatus and extreme ultravio...
Patent number
11,211,239
Issue date
Dec 28, 2021
Gigaphoton Inc.
Atsushi Ueda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gaseous-phase ionizing radiation generator
Patent number
10,841,989
Issue date
Nov 17, 2020
Inovl, Inc.
Frank E Gordon
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Lighting device with dispenser for a reactive substance
Patent number
10,663,116
Issue date
May 26, 2020
SIGNIFY HOLDING B.V.
Dirk Veldman
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Fast start fluorescent light bulb
Patent number
10,529,551
Issue date
Jan 7, 2020
Lucidity Lights, Inc.
Harris Miller
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Line-narrowed KrF excimer laser apparatus
Patent number
10,502,623
Issue date
Dec 10, 2019
Gigaphoton Inc.
Masato Moriya
G01 - MEASURING TESTING
Information
Patent Grant
Laser driven sealed beam lamp with improved stability
Patent number
10,497,555
Issue date
Dec 3, 2019
Excelitas Technologies Corp.
Rudi Blondia
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gas discharge lamp and a device for controlling the temperature the...
Patent number
10,269,552
Issue date
Apr 23, 2019
ZED ZIEGLER ELECTRONIC DEVICES GMBH
Karin Ziegler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dimmable induction RF fluorescent lamp with reduced electromagnetic...
Patent number
10,128,101
Issue date
Nov 13, 2018
Lucidity Lights, Inc.
John R. Goscha
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Laser driven sealed beam lamp with improved stability
Patent number
10,008,378
Issue date
Jun 26, 2018
Excelitas Technologies Corp.
Rudi Blondia
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and system for controlling convective flow in a light-sustai...
Patent number
9,887,076
Issue date
Feb 6, 2018
KLA-Tencor Corporation
Ilya Bezel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Radiation source assembly
Patent number
9,533,060
Issue date
Jan 3, 2017
Trojan Technologies Inc.
Douglas Penhale
A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information
Patent Grant
Fast start RF induction lamp
Patent number
9,524,861
Issue date
Dec 20, 2016
Lucidity Lights, Inc.
John R. Goscha
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Induction RF fluorescent lamp with load control for external dimmin...
Patent number
9,460,907
Issue date
Oct 4, 2016
Lucidity Lights, Inc.
John R. Goscha
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Combination of materials for mercury-dispensing devices and devices...
Patent number
9,406,476
Issue date
Aug 2, 2016
Saes Getters S.p.A.
Alessio Corazza
C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information
Patent Grant
Laser sustained plasma light source with electrically induced gas flow
Patent number
9,390,892
Issue date
Jul 12, 2016
KLA-Tencor Corporation
Anatoly Shchemelinin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Amalgam spheres for energy-saving lamps and their production
Patent number
9,324,555
Issue date
Apr 26, 2016
Umicore AG & Co. KG
Georg Ptaschek
C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information
Patent Grant
Plasma cell for laser-sustained plasma light source
Patent number
9,318,311
Issue date
Apr 19, 2016
KLA-Tencor Corporation
Anant Chimmalgi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Resistive thin layer heating of fluorescent lamp
Patent number
9,117,649
Issue date
Aug 25, 2015
General Electric Company
Lajos Csibi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Laser-sustained plasma light source
Patent number
9,099,292
Issue date
Aug 4, 2015
KLA-Tencor Corporation
Ilya Bezel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for operating an amalgam lamp
Patent number
9,048,083
Issue date
Jun 2, 2015
Heraeus Noblelight GmbH
Alex Voronov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Induction fluorescent lamp with amalgam chamber
Patent number
9,030,088
Issue date
May 12, 2015
John Yeh
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
FRICTIONLESS DESIGN OF HIGH-PRESSURE RECIRCULATION THERMO-PUMP
Publication number
20240110549
Publication date
Apr 4, 2024
KLA Corporation
Anatoly Shchemelinin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Arc Lamp With Forming Gas For Thermal Processing Systems
Publication number
20230352294
Publication date
Nov 2, 2023
Beijing E-Town Semiconductor Technology Co., Ltd.
Michael X. Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LASER-SUSTAINED PLASMA SOURCE BASED ON COLLIDING LIQUID JETS
Publication number
20230335389
Publication date
Oct 19, 2023
KLA Corporation
John Szilagyi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LOW-PRESSURE MERCURY VAPOUR DISCHARGE LAMP AND LAMP SYSTEM
Publication number
20230115738
Publication date
Apr 13, 2023
HERAEUS NOBLELIGHT GMBH
Anna Maria SHARMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SWIRLER FOR LASER-SUSTAINED PLASMA LIGHT SOURCE WITH REVERSE VORTEX...
Publication number
20230053035
Publication date
Feb 16, 2023
Ilya Bezel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Arc Lamp With Forming Gas For Thermal Processing Systems
Publication number
20220165561
Publication date
May 26, 2022
Mattson Technology, Inc.
Michael X. Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MERCURY DISCHARGE LAMP
Publication number
20220059339
Publication date
Feb 24, 2022
PHOTOSCIENCE JAPAN CORPORATION
Akihiro INOUE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS AND PLASMA POSITION ADJU...
Publication number
20210327701
Publication date
Oct 21, 2021
Ushio Denki Kabushiki Kaisha
Noritaka ASHIZAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LASER SUSTAINED PLASMA LIGHT SOURCE WITH HIGH PRESSURE FLOW
Publication number
20210242009
Publication date
Aug 5, 2021
KLA Corporation
Anatoly Shchemelinin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND DEVICE FOR THE REDUCTION OF CONTAMINANTS IN A PLASMA REA...
Publication number
20210183640
Publication date
Jun 17, 2021
Plasma Investment Sp. z o.o
Ihar YELKIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LAMP DEVICE, EXPOSURE APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
Publication number
20210082682
Publication date
Mar 18, 2021
Canon Kabushiki Kaisha
Hideki Matsumoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND EXTREME ULTRAVIO...
Publication number
20200185212
Publication date
Jun 11, 2020
Gigaphoton Inc.
Atsushi UEDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FAST START DIMMABLE RF INDUCTION LAMP
Publication number
20200090922
Publication date
Mar 19, 2020
Lucidity Lights, Inc.
John R. Goscha
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Application
GASEOUS-PHASE IONIZING RADIATION GENERATOR
Publication number
20200068690
Publication date
Feb 27, 2020
FRANK E GORDON
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
LINE-NARROWED KrF EXCIMER LASER APPARATUS
Publication number
20190107438
Publication date
Apr 11, 2019
Gigaphoton Inc.
Masato MORIYA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Laser Driven Sealed Beam Lamp With Improved Stability
Publication number
20180301330
Publication date
Oct 18, 2018
EXCELITAS TECHNOLOGIES CORP.
Rudi Blondia
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LIGHTING DEVICE WITH DISPENSER FOR A REACTIVE SUBSTANCE
Publication number
20180128428
Publication date
May 10, 2018
PHILIPS LIGHTING HOLDING B.V.
Dirk VELDMAN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FAST START FLUORESCENT LIGHT BULB
Publication number
20170358441
Publication date
Dec 14, 2017
Lucidity Lights, Inc.
Tenzin Wangjor Nanchung
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Application
Laser Driven Sealed Beam Lamp With Improved Stability
Publication number
20160336168
Publication date
Nov 17, 2016
EXCELITAS TECHNOLOGIES CORP.
Rudi Blondia
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HIGH INTENSITY DISCHARGE LAMPS WITH DOSING AID
Publication number
20150357178
Publication date
Dec 10, 2015
GENERAL ELECTRIC COMPANY
Agoston Boroczki
C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information
Patent Application
METAL HALIDE LAMP HAVING IMPROVED LUMEN MAINTENANCE
Publication number
20150318164
Publication date
Nov 5, 2015
GENERAL ELECTRIC COMPANY
Agoston BOROCZKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESSOR-BASED FAST START INDUCTION RF FLUORESCENT LAMP
Publication number
20140320008
Publication date
Oct 30, 2014
John R. Goscha
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESSOR-BASED DIMMABLE INDUCTION RF FLUORESCENT LAMP
Publication number
20140320009
Publication date
Oct 30, 2014
John R. Goscha
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and System for Controlling Convective Flow in a Light-Sustai...
Publication number
20140291546
Publication date
Oct 2, 2014
KLA-Tencor Corporation
Ilya Bezel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MERCURY VAPOR DISCHARGE LAMP AND METHOD FOR ITS MANUFACTURE
Publication number
20140265825
Publication date
Sep 18, 2014
HERAEUS NOBLELIGHT GMBH
Burkard JUNG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MERCURY DOSING COMPOSITION
Publication number
20140217883
Publication date
Aug 7, 2014
Alessio Corazza
C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information
Patent Application
RESISTIVE THIN LAYER HEATING OF FLUORESCENT LAMP
Publication number
20140159574
Publication date
Jun 12, 2014
GENERAL ELECTRIC COMPANY
Lajos Csibi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HIGH FREQUENCY INDUCTION RF FLUORESCENT LAMP WITH REDUCED ELECTROMA...
Publication number
20140145599
Publication date
May 29, 2014
Lucidity Lights, Inc.
John R. Goscha
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HIGH FREQUENCY INDUCTION RF FLUORESCENT LAMP
Publication number
20140145606
Publication date
May 29, 2014
Lucidity Lights, Inc.
John R. Goscha
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INDUCTION RF FLUORESCENT LIGHT BULB WITH SYNCHRONIZED BURST-MODE DI...
Publication number
20140145637
Publication date
May 29, 2014
Lucidity Lights, Inc.
John R. Goscha
H01 - BASIC ELECTRIC ELEMENTS