Measuring as part of the manufacturing process

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L22/00Testing or measuring during manufacture or treatment; Reliability measurements

Current Industry

H01L22/10Measuring as part of the manufacturing process

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method for ion implantation uniformity control
- Patent number 12,368,018
- Issue date Jul 22, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tien-Shun Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for spindle mechanism monitoring and maintenance in process...
- Patent number 12,362,157
- Issue date Jul 15, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yu-Hsiang Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for managing chip manufacturing equipment, apparatus, electr...
- Patent number 12,327,769
- Issue date Jun 10, 2025
- Saimeite Technology Co, Ltd.
- Wang Sheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Acoustic measurement of fabrication equipment clearance
- Patent number 12,320,782
- Issue date Jun 3, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Jun-Hao Deng
- B08 - CLEANING
Information Patent Grant
Method for forming a semiconductor structure using dehydrating chem...
- Patent number 12,317,576
- Issue date May 27, 2025
- Taiwan Semiconductor Manufacturing Company Ltd.
- Chung-Chieh Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Autonomous operation of plasma processing tool
- Patent number 12,300,477
- Issue date May 13, 2025
- Tokyo Electron Limited
- Jun Shinagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Evaluation method, substrate processing apparatus, manufacturing me...
- Patent number 12,292,368
- Issue date May 6, 2025
- Canon Kabushiki Kaisha
- Masami Yonekawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and methods for determining fluid dynamics of liquid film...
- Patent number 12,272,576
- Issue date Apr 8, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chung-Pin Chou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor manufacturing apparatus and method thereof
- Patent number 12,265,327
- Issue date Apr 1, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Ching-Hai Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing apparatus and method utilizing electrostat...
- Patent number 12,255,091
- Issue date Mar 18, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tsai-Hao Hung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Detection method for seized traveling lift pins in wafer processing...
- Patent number 12,249,534
- Issue date Mar 11, 2025
- ASM IP Holding B.V.
- Eric Shero
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for measurement of misregistration and ameliora...
- Patent number 12,222,199
- Issue date Feb 11, 2025
- KLA Corporation
- Roie Volkovich
- G01 - MEASURING TESTING
Information Patent Grant
Integrated circuit filler and method thereof
- Patent number 12,183,729
- Issue date Dec 31, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tseng Chin Lo
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Photoresist characteristics analysis method and characteristics ana...
- Patent number 12,174,113
- Issue date Dec 24, 2024
- FEMTO DEPLOYMENTS INC.
- Akira Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Adaptive modeling misregistration measurement system and method
- Patent number 12,165,930
- Issue date Dec 10, 2024
- KLA Corporation
- Amnon Manassen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Semiconductor apparatus and manufacturing method of semiconductor a...
- Patent number 12,119,227
- Issue date Oct 15, 2024
- Fuji Electric Co., Ltd.
- Kosuke Yoshida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Detection method of metal impurity in wafer
- Patent number 12,107,016
- Issue date Oct 1, 2024
- ZING SEMICONDUCTOR CORPORATION
- Lanlin Wen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Control of liquid delivery in auto-refill systems
- Patent number 12,084,771
- Issue date Sep 10, 2024
- Applied Materials, Inc.
- Zohreh Razavi Hesabi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for annealing die and wafer
- Patent number 12,051,603
- Issue date Jul 30, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Hsin-Hao Yeh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device and non-transitory com...
- Patent number 12,014,943
- Issue date Jun 18, 2024
- Kokusai Electric Corporation
- Akinori Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for processing a semiconductor substrate
- Patent number 11,972,935
- Issue date Apr 30, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yu-Hsiang Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Damage prevention during wafer edge trimming
- Patent number 11,951,569
- Issue date Apr 9, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Kuo-Ming Wu
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
System for non radial temperature control for rotating substrates
- Patent number 11,942,381
- Issue date Mar 26, 2024
- Applied Materials, Inc.
- Wolfgang R. Aderhold
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Emissive element harvest
- Patent number 11,929,356
- Issue date Mar 12, 2024
- eLux, Inc.
- Kenji Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manufacturing method of semiconductor device and semiconductor proc...
- Patent number 11,899,368
- Issue date Feb 13, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yu-Kai Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System, apparatus, and method for spectral filtering
- Patent number 11,885,682
- Issue date Jan 30, 2024
- Verity Instruments, Inc.
- Chris D. Pylant
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Test circuit and test method
- Patent number 11,876,021
- Issue date Jan 16, 2024
- Kabushiki Kaisha Toshiba
- Daiki Kiribuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System for the characterization of emissive elements
- Patent number 11,855,051
- Issue date Dec 26, 2023
- eLux, Inc.
- Kenji Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing apparatus and method utilizing electrostat...
- Patent number 11,854,860
- Issue date Dec 26, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tsai-Hao Hung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Robot arm device and method for transferring wafer
- Patent number 11,837,484
- Issue date Dec 5, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Wei-Hua Houng
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
INFORMATION PROCESSING METHOD, COMPUTER PROGRAM, AND INFORMATION PR...
- Publication number 20250231535
- Publication date Jul 17, 2025
- TOKYO ELECTRON LIMITED
- Yukiya SAITOU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONVEYANCE APPARATUS, CONVEYANCE METHOD, AND SEMICONDUCTOR APPARATU...
- Publication number 20250232996
- Publication date Jul 17, 2025
- JSW Aktina System Co., Ltd.
- Teruaki SHIMOJI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANALYSIS METHOD AND EVALUATION METHOD
- Publication number 20250232427
- Publication date Jul 17, 2025
- SCREEN Holdings Co., Ltd.
- Satoshi OKAMOTO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
EVALUATION METHOD, SUBSTRATE PROCESSING APPARATUS, MANUFACTURING ME...
- Publication number 20250216310
- Publication date Jul 3, 2025
- Canon Kabushiki Kaisha
- Masami Yonekawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR DETERMINING HEALTH INDEX OF SUBSTRATE PROCESSING APPARAT...
- Publication number 20250183100
- Publication date Jun 5, 2025
- EBARA CORPORATION
- Shaunak GHATPANDE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INK DROP MEASUREMENT PAD, INKJET PRINTER DEVICE HAVING SAME, AND ME...
- Publication number 20250065619
- Publication date Feb 27, 2025
- UNIJET CO., LTD.
- SEOG SOON KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND MECHANISMS TO IMPROVE MONITORING CAPABILITIES USING RAT...
- Publication number 20250035680
- Publication date Jan 30, 2025
- Applied Materials, Inc.
- Suketu Parikh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR APPARATUS AND MANUFACTURING METHOD OF SEMICONDUCTOR A...
- Publication number 20250029838
- Publication date Jan 23, 2025
- Fuji Electric Co., Ltd.
- Kosuke YOSHIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20250006525
- Publication date Jan 2, 2025
- TOKYO ELECTRON LIMITED
- Takeshi Tamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR DETECTING SEMICONDUCTOR PROCESSING ERROR
- Publication number 20240421005
- Publication date Dec 19, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Chen TSENG
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
APPARATUS AND METHODS FOR DETERMINING FLUID DYNAMICS OF LIQUID FILM...
- Publication number 20240387212
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chung-Pin CHOU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Acoustic Measurement of Fabrication Equipment Clearance
- Publication number 20240377364
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jun-Hao Deng
- B08 - CLEANING
Information Patent Application
METHOD FOR FORMING A SEMICONDUCTOR STRUCTURE USING DEHYDRATING CHEM...
- Publication number 20240379447
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing company Ltd.
- CHUNG-CHIEH LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE PACKAGE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20240379636
- Publication date Nov 14, 2024
- nD-HI Technologies Lab, Inc.
- HO-MING TONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTROL OF LIQUID DELIVERY IN AUTO-REFILL SYSTEMS
- Publication number 20240360561
- Publication date Oct 31, 2024
- Applied Materials, Inc.
- Zohreh Razavi Hesabi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR USING A SYSTEM FOR ANNEALING A WAFER AND SYSTEM FOR ANNE...
- Publication number 20240347355
- Publication date Oct 17, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hsin-Hao YEH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR CHARACTERIZING A SEMICONDUCTOR MANUFACTUR...
- Publication number 20240231233
- Publication date Jul 11, 2024
- ASML NETHERLANDS B.V.
- Niek Willem KLEIN KOERKAMP
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR PROCESSING A SEMICONDUCTOR SUBSTRATE
- Publication number 20240222097
- Publication date Jul 4, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu-Hsiang CHENG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DAMAGE PREVENTION DURING WAFER EDGE TRIMMING
- Publication number 20240198455
- Publication date Jun 20, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kuo-Ming Wu
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
PROBE HEAD AND METHOD OF PRODUCING TESTED SEMICONDUCTOR DIE AND VER...
- Publication number 20240175900
- Publication date May 30, 2024
- MPI Corporation
- CHIN-YI LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR CHARACTERIZING A SEMICONDUCTOR MANUFACTUR...
- Publication number 20240134283
- Publication date Apr 25, 2024
- ASML NETHERLANDS B.V.
- Niek Willem KLEIN KOERKAMP
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VERTICAL SEMICONDUCTOR COMPONENT ON THE BASIS OF GALLIUM NITRIDE W...
- Publication number 20240128133
- Publication date Apr 18, 2024
- ROBERT BOSCH GmbH
- Jens Baringhaus
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHOTORESIST CHARACTERISTICS ANALYSIS METHOD AND CHARACTERISTICS ANA...
- Publication number 20240102927
- Publication date Mar 28, 2024
- FEMTO Deployments Inc.
- Akira WATANABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING APPARATUS AND METHOD UTILIZING ELECTROSTAT...
- Publication number 20240087945
- Publication date Mar 14, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tsai-Hao HUNG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IC FABRICATION FLOW WITH CONTINUOUS DYNAMIC SAMPLING FOR AUTO-VISUA...
- Publication number 20240071837
- Publication date Feb 29, 2024
- TEXAS INSTRUMENTS INCORPORATED
- Bin Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
USING SEQUENCE MINING TO PREDICT QUALITY AND YIELD
- Publication number 20240047279
- Publication date Feb 8, 2024
- International Business Machines Corporation
- Robert Jeffrey Baseman
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CAPACITIVE SENSOR SYSTEM FOR PRECURSOR LEVEL MEASUREMENT AND METHOD...
- Publication number 20240035872
- Publication date Feb 1, 2024
- ASM IP HOLDING, B.V.
- Vincent Vandalon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MODEL-BASED PARAMETER ADJUSTMENTS FOR DEPOSITION PROCESSES
- Publication number 20230411222
- Publication date Dec 21, 2023
- Applied Materials, Inc.
- Sam K. Lee
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
SYSTEM FOR NON RADIAL TEMPERATURE CONTROL FOR ROTATING SUBSTRATES
- Publication number 20230402331
- Publication date Dec 14, 2023
- Applied Materials, Inc.
- Wolfgang R. ADERHOLD
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PACKAGES AND METHODS FOR FORMING THE SAME
- Publication number 20230378099
- Publication date Nov 23, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shau-Lin SHUE
- H01 - BASIC ELECTRIC ELEMENTS

Measuring as part of the manufacturing process

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method for ion implantation uniformity control

Methods for spindle mechanism monitoring and maintenance in process...

Method for managing chip manufacturing equipment, apparatus, electr...

Acoustic measurement of fabrication equipment clearance

Method for forming a semiconductor structure using dehydrating chem...

Autonomous operation of plasma processing tool

Evaluation method, substrate processing apparatus, manufacturing me...

Apparatus and methods for determining fluid dynamics of liquid film...

Semiconductor manufacturing apparatus and method thereof

Semiconductor processing apparatus and method utilizing electrostat...

Detection method for seized traveling lift pins in wafer processing...

Systems and methods for measurement of misregistration and ameliora...

Integrated circuit filler and method thereof

Photoresist characteristics analysis method and characteristics ana...

Adaptive modeling misregistration measurement system and method

Semiconductor apparatus and manufacturing method of semiconductor a...

Detection method of metal impurity in wafer

Control of liquid delivery in auto-refill systems

System and method for annealing die and wafer

Method of manufacturing semiconductor device and non-transitory com...

Methods for processing a semiconductor substrate

Damage prevention during wafer edge trimming

System for non radial temperature control for rotating substrates

Emissive element harvest

Manufacturing method of semiconductor device and semiconductor proc...

System, apparatus, and method for spectral filtering

Test circuit and test method

System for the characterization of emissive elements

Semiconductor processing apparatus and method utilizing electrostat...

Robot arm device and method for transferring wafer

Patents Applicationslast 30 patents

INFORMATION PROCESSING METHOD, COMPUTER PROGRAM, AND INFORMATION PR...

CONVEYANCE APPARATUS, CONVEYANCE METHOD, AND SEMICONDUCTOR APPARATU...

ANALYSIS METHOD AND EVALUATION METHOD

EVALUATION METHOD, SUBSTRATE PROCESSING APPARATUS, MANUFACTURING ME...

METHOD FOR DETERMINING HEALTH INDEX OF SUBSTRATE PROCESSING APPARAT...

INK DROP MEASUREMENT PAD, INKJET PRINTER DEVICE HAVING SAME, AND ME...

METHODS AND MECHANISMS TO IMPROVE MONITORING CAPABILITIES USING RAT...

SEMICONDUCTOR APPARATUS AND MANUFACTURING METHOD OF SEMICONDUCTOR A...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SYSTEM AND METHOD FOR DETECTING SEMICONDUCTOR PROCESSING ERROR

APPARATUS AND METHODS FOR DETERMINING FLUID DYNAMICS OF LIQUID FILM...

Acoustic Measurement of Fabrication Equipment Clearance

METHOD FOR FORMING A SEMICONDUCTOR STRUCTURE USING DEHYDRATING CHEM...

SEMICONDUCTOR DEVICE PACKAGE AND METHOD OF MANUFACTURING THE SAME

CONTROL OF LIQUID DELIVERY IN AUTO-REFILL SYSTEMS

METHOD FOR USING A SYSTEM FOR ANNEALING A WAFER AND SYSTEM FOR ANNE...

METHODS AND APPARATUS FOR CHARACTERIZING A SEMICONDUCTOR MANUFACTUR...

METHODS FOR PROCESSING A SEMICONDUCTOR SUBSTRATE

DAMAGE PREVENTION DURING WAFER EDGE TRIMMING

PROBE HEAD AND METHOD OF PRODUCING TESTED SEMICONDUCTOR DIE AND VER...

METHODS AND APPARATUS FOR CHARACTERIZING A SEMICONDUCTOR MANUFACTUR...

VERTICAL SEMICONDUCTOR COMPONENT ON THE BASIS OF GALLIUM NITRIDE W...

PHOTORESIST CHARACTERISTICS ANALYSIS METHOD AND CHARACTERISTICS ANA...

SEMICONDUCTOR PROCESSING APPARATUS AND METHOD UTILIZING ELECTROSTAT...

IC FABRICATION FLOW WITH CONTINUOUS DYNAMIC SAMPLING FOR AUTO-VISUA...

USING SEQUENCE MINING TO PREDICT QUALITY AND YIELD

CAPACITIVE SENSOR SYSTEM FOR PRECURSOR LEVEL MEASUREMENT AND METHOD...

MODEL-BASED PARAMETER ADJUSTMENTS FOR DEPOSITION PROCESSES

SYSTEM FOR NON RADIAL TEMPERATURE CONTROL FOR ROTATING SUBSTRATES

SEMICONDUCTOR PACKAGES AND METHODS FOR FORMING THE SAME