Measuring currents of particle-beams, currents from electron multipliers, photocurrents, ion currents; Measuring in plasmas

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G01R19/0061

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GPHYSICS G01Measuring instruments G01RMEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES G01R19/00Arrangements for measuring currents or voltages or for indicating presence or sign thereof

Current Industry

G01R19/0061Measuring currents of particle-beams, currents from electron multipliers, photocurrents, ion currents; Measuring in plasmas

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Patents Grantslast 30 patents

Information Patent Grant
Systems and methods for screening particle source manufacturing and...
- Patent number 11,719,727
- Issue date Aug 8, 2023
- National Technology & Engineering Solutions of Sandia, LLC
- Rosalie A. Multari
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Arc detector for detecting arcs, plasma system and method of detect...
- Patent number 11,674,981
- Issue date Jun 13, 2023
- TRUMPF Huettinger Sp. z o. o.
- Andrzej Klimczak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fast faraday cup for measuring the longitudinal distribution of par...
- Patent number 11,630,132
- Issue date Apr 18, 2023
- Fermi Research Alliance, LLC
- Ding Sun
- G01 - MEASURING TESTING
Information Patent Grant
Methods of evaluating performance of an atmospheric pressure ioniza...
- Patent number 11,610,767
- Issue date Mar 21, 2023
- PharmaCadence Analytical Services, LLC
- Richard C. King
- G01 - MEASURING TESTING
Information Patent Grant
Device and method for detecting the mass center of a beam of electr...
- Patent number 11,360,125
- Issue date Jun 14, 2022
- ENEA—AGENZIA NAZIONALE PER LE NUOVE TECNOLOGIE, L'ENERGIA E LO SVILUPPO ECONO...
- Marcello Artioli
- G01 - MEASURING TESTING
Information Patent Grant
Pulse system verification
- Patent number 11,209,478
- Issue date Dec 28, 2021
- Applied Materials, Inc.
- Sathyendra Ghantasala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of evaluating performance of an atmospheric pressure ioniza...
- Patent number 11,049,703
- Issue date Jun 29, 2021
- PharmaCadence Analytical Services, LLC
- Richard C. King
- G01 - MEASURING TESTING
Information Patent Grant
Fast Faraday cup for measuring the longitudinal distribution of par...
- Patent number 10,914,766
- Issue date Feb 9, 2021
- Fermi Research Alliance, LLC
- Ding Sun
- G01 - MEASURING TESTING
Information Patent Grant
Measuring flux, current, or integrated charge of low energy particles
- Patent number 10,901,010
- Issue date Jan 26, 2021
- International Business Machines Corporation
- Matthew W. Copel
- G01 - MEASURING TESTING
Information Patent Grant
Angled slit design for computed tomographic imaging of electron beams
- Patent number 10,888,284
- Issue date Jan 12, 2021
- Lawrence Livermore National Security, LLC
- John W. Elmer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Surface potential measurement of dielectric materials in plasma
- Patent number 10,852,265
- Issue date Dec 1, 2020
- University of Southern California
- Kevin Chou
- G01 - MEASURING TESTING
Information Patent Grant
Electronic amplification device, measurement apparatus and associat...
- Patent number 10,845,391
- Issue date Nov 24, 2020
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Hassen Hamrita
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
RF voltage sensor incorporating multiple voltage dividers for detec...
- Patent number 10,784,083
- Issue date Sep 22, 2020
- Lam Research Corporation
- Maolin Long
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process condition sensing device and method for plasma chamber
- Patent number 10,777,393
- Issue date Sep 15, 2020
- KLA-Tencor Corporation
- Earl Jensen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dielectric barrier discharge ionization detector
- Patent number 10,739,309
- Issue date Aug 11, 2020
- Shimadzu Corporation
- Kei Shinada
- G01 - MEASURING TESTING
Information Patent Grant
Current measurement device
- Patent number 10,613,120
- Issue date Apr 7, 2020
- Yokogawa Electric Corporation
- Kazuma Takenaka
- G01 - MEASURING TESTING
Information Patent Grant
Dielectric barrier discharge ionization detector
- Patent number 10,545,118
- Issue date Jan 28, 2020
- Shimadzu Corporation
- Kei Shinada
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Dielectric barrier discharge ionization detector
- Patent number 10,436,750
- Issue date Oct 8, 2019
- Shimadzu Corporation
- Kei Shinada
- G01 - MEASURING TESTING
Information Patent Grant
Dielectric barrier discharge ionization detector
- Patent number 10,436,751
- Issue date Oct 8, 2019
- Shimadzu Corporation
- Kei Shinada
- G01 - MEASURING TESTING
Information Patent Grant
Measuring flux, current, or integrated charge of low energy particles
- Patent number 10,416,199
- Issue date Sep 17, 2019
- International Business Machines Corporation
- Matthew W. Copel
- G01 - MEASURING TESTING
Information Patent Grant
Using modeling to determine wafer bias associated with a plasma system
- Patent number 10,340,127
- Issue date Jul 2, 2019
- Lam Research Corporation
- John C. Valcore
- G01 - MEASURING TESTING
Information Patent Grant
Beam current measuring device and charged particle beam irradiation...
- Patent number 10,222,400
- Issue date Mar 5, 2019
- NISSIN ION EQUIPMENT CO., LTD.
- Hideyasu Une
- G01 - MEASURING TESTING
Information Patent Grant
High thermal conductivity insulated metal substrates produced by pl...
- Patent number 10,208,393
- Issue date Feb 19, 2019
- Keronite International Limited
- James Andrew Curran
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Monitoring a discharge in a plasma process
- Patent number 10,181,392
- Issue date Jan 15, 2019
- TRUMPF Huettinger GmbH + Co. KG
- Daniel Leypold
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for controlling plasma magnetic field
- Patent number 9,967,963
- Issue date May 8, 2018
- General Fusion Inc.
- Ryan Walter Zindler
- G01 - MEASURING TESTING
Information Patent Grant
Current-measurement device
- Patent number 9,835,654
- Issue date Dec 5, 2017
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Robert Boden
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Voltage measuring device
- Patent number 9,810,728
- Issue date Nov 7, 2017
- KAPTEOS
- Lionel Duvillaret
- G01 - MEASURING TESTING
Information Patent Grant
Discharge ionization current detector
- Patent number 9,791,410
- Issue date Oct 17, 2017
- Shimadzu Corporation
- Kei Shinada
- G01 - MEASURING TESTING
Information Patent Grant
Measurement of electrical variables on a DC furnace
- Patent number 9,784,500
- Issue date Oct 10, 2017
- Mintek
- Ian James Barker
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Monitoring device, ion implantation device, and monitoring method
- Patent number 9,741,534
- Issue date Aug 22, 2017
- Lapis Semiconductor Co., Ltd.
- Makoto Ishida
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA MEASUREMENT METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20240274417
- Publication date Aug 15, 2024
- TOKYO ELECTRON LIMITED
- Mitsutoshi ASHIDA
- G01 - MEASURING TESTING
Information Patent Application
Circuit, Device and Method for Optical Characteristic Inspection
- Publication number 20240118167
- Publication date Apr 11, 2024
- Nippon Telegraph and Telephone Corporation
- Yoshiho Maeda
- G02 - OPTICS
Information Patent Application
HIGH BANDWIDTH ARCHITECTURE FOR CENTRALIZED COHERENT CONTROL AT THE...
- Publication number 20230360885
- Publication date Nov 9, 2023
- Applied Materials, Inc.
- David Coumou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NOVEL METHODS OF EVALUATING PERFORMANCE OF AN ATMOSPHERIC PRESSURE...
- Publication number 20220139688
- Publication date May 5, 2022
- RICHARD C. KING
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ARC DETECTOR FOR DETECTING ARCS, PLASMA SYSTEM AND METHOD OF DETECT...
- Publication number 20210156893
- Publication date May 27, 2021
- TRUMPF Huettinger Sp. z o. o.
- Andrzej Klimczak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FAST FARADAY CUP FOR MEASURING THE LONGITUDINAL DISTRIBUTION OF PAR...
- Publication number 20210141005
- Publication date May 13, 2021
- FERMI RESEARCH ALLIANCE, LLC
- Ding Sun
- G01 - MEASURING TESTING
Information Patent Application
DEVICE AND METHOD FOR DETECTING THE MASS CENTER OF A BEAM OF ELECTR...
- Publication number 20210072291
- Publication date Mar 11, 2021
- ENEA - Agenzia Nazionale Per Le Nuove Tecnologie, L'energia E Lo Sviluppo Eco...
- Marcello ARTIOLI
- G01 - MEASURING TESTING
Information Patent Application
ANGLED SLIT DESIGN FOR COMPUTED TOMOGRAPHIC IMAGING OF ELECTRON BEAMS
- Publication number 20200297290
- Publication date Sep 24, 2020
- LAWRENCE LIVERMORE NATIONAL SECURITY, LLC
- John W. Elmer
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
FAST FARADAY CUP FOR MEASURING THE LONGITUDINAL DISTRIBUTION OF PAR...
- Publication number 20200049740
- Publication date Feb 13, 2020
- Ding Sun
- G01 - MEASURING TESTING
Information Patent Application
PULSE SYSTEM VERIFICATION
- Publication number 20190302174
- Publication date Oct 3, 2019
- Applied Materials, Inc.
- Sathyendra Ghantasala
- G01 - MEASURING TESTING
Information Patent Application
MEASURING FLUX, CURRENT, OR INTEGRATED CHARGE OF LOW ENERGY PARTICLES
- Publication number 20190293690
- Publication date Sep 26, 2019
- International Business Machines Corporation
- Matthew W. Copel
- G01 - MEASURING TESTING
Information Patent Application
ELECTRONIC AMPLIFICATION DEVICE, MEASUREMENT APPARATUS AND ASSOCIAT...
- Publication number 20190204360
- Publication date Jul 4, 2019
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Hassen Hamrita
- G01 - MEASURING TESTING
Information Patent Application
MEASURING FLUX, CURRENT, OR INTEGRATED CHARGE OF LOW ENERGY PARTICLES
- Publication number 20180203045
- Publication date Jul 19, 2018
- International Business Machines Corporation
- Matthew W. Copel
- G01 - MEASURING TESTING
Information Patent Application
VOLTAGE BUFFER FOR CURRENT SENSOR
- Publication number 20180149680
- Publication date May 31, 2018
- QUALCOMM Incorporated
- Bo SUN
- C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...
Information Patent Application
PROCESS CONDITION SENSING DEVICE AND METHOD FOR PLASMA CHAMBER
- Publication number 20180114681
- Publication date Apr 26, 2018
- KLA-Tencor Corporation
- Earl Jensen
- G01 - MEASURING TESTING
Information Patent Application
BEAM CURRENT MEASURING DEVICE AND CHARGED PARTICLE BEAM IRRADIATION...
- Publication number 20180080959
- Publication date Mar 22, 2018
- NISSIN ION EQUIPMENT CO., LTD.
- Hideyasu UNE
- G01 - MEASURING TESTING
Information Patent Application
DIELECTRIC BARRIER DISCHARGE IONIZATION DETECTOR
- Publication number 20180067079
- Publication date Mar 8, 2018
- Shimadzu Corporation
- Kei SHINADA
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM AND METHOD FOR CONTROLLING PLASMA MAGNETIC FIELD
- Publication number 20170303380
- Publication date Oct 19, 2017
- General Fusion Inc.
- Ryan Walter Zindler
- G01 - MEASURING TESTING
Information Patent Application
CURRENT-MEASUREMENT DEVICE
- Publication number 20170254837
- Publication date Sep 7, 2017
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Robert BODEN
- G01 - MEASURING TESTING
Information Patent Application
USING MODELING TO DETERMINE WAFER BIAS ASSOCIATED WITH A PLASMA SYSTEM
- Publication number 20170032945
- Publication date Feb 2, 2017
- LAM RESEARCH CORPORATION
- John C. Valcore
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR ESTIMATING LIFETIME OF CATHODE IN ELECTRON BEAM LITHOGRA...
- Publication number 20160238636
- Publication date Aug 18, 2016
- NuFlare Technology, Inc.
- MASAYUKI ITO
- G01 - MEASURING TESTING
Information Patent Application
Monitoring a Discharge in a Plasma Process
- Publication number 20160217975
- Publication date Jul 28, 2016
- TRUMPF Huettinger GmbH + Co. KG
- Daniel Leypold
- G01 - MEASURING TESTING
Information Patent Application
MULTI-BEAM CURRENT QUANTITY MEASURING METHOD, MULTI-CHARGED PARTICL...
- Publication number 20160211114
- Publication date Jul 21, 2016
- NuFlare Technology, Inc.
- Hideyuki IWATA
- G01 - MEASURING TESTING
Information Patent Application
ASSESSMENT AND CALIBRATION OF A HIGH ENERGY BEAM
- Publication number 20160124026
- Publication date May 5, 2016
- Howmedica Osteonics Corp.
- Lewis Mullen
- G01 - MEASURING TESTING
Information Patent Application
BEAM IMAGING SENSOR AND METHOD FOR USING SAME
- Publication number 20150129774
- Publication date May 14, 2015
- Michael D. McAninch
- G01 - MEASURING TESTING
Information Patent Application
CONTROL MODULE FOR AN ION IMPLANTER
- Publication number 20140353525
- Publication date Dec 4, 2014
- ION BEAM SERVICES
- Frank Torregrosa
- G01 - MEASURING TESTING
Information Patent Application
Ionization Monitoring Device and Method
- Publication number 20140333331
- Publication date Nov 13, 2014
- Siarhei V. Savich
- G01 - MEASURING TESTING
Information Patent Application
Radio-Frequency Ion Channel Antenna
- Publication number 20140253153
- Publication date Sep 11, 2014
- Wisconsin Alumni Research Foundation
- Robert H. Blick
- G01 - MEASURING TESTING
Information Patent Application
MEASUREMENT OF PLURAL RF SENSOR DEVICES IN A PULSED RF PLASMA REACTOR
- Publication number 20140232374
- Publication date Aug 21, 2014
- Applied Materials, Inc.
- Gary Leray
- G01 - MEASURING TESTING
Information Patent Application
DISCHARGE IONIZATION CURRENT DETECTOR
- Publication number 20140145724
- Publication date May 29, 2014
- Kei Shinada
- G01 - MEASURING TESTING

Measuring currents of particle-beams, currents from electron multipliers, photocurrents, ion currents; Measuring in plasmas

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Systems and methods for screening particle source manufacturing and...

Arc detector for detecting arcs, plasma system and method of detect...

Fast faraday cup for measuring the longitudinal distribution of par...

Methods of evaluating performance of an atmospheric pressure ioniza...

Device and method for detecting the mass center of a beam of electr...

Pulse system verification

Methods of evaluating performance of an atmospheric pressure ioniza...

Fast Faraday cup for measuring the longitudinal distribution of par...

Measuring flux, current, or integrated charge of low energy particles

Angled slit design for computed tomographic imaging of electron beams

Surface potential measurement of dielectric materials in plasma

Electronic amplification device, measurement apparatus and associat...

RF voltage sensor incorporating multiple voltage dividers for detec...

Process condition sensing device and method for plasma chamber

Dielectric barrier discharge ionization detector

Current measurement device

Dielectric barrier discharge ionization detector

Dielectric barrier discharge ionization detector

Dielectric barrier discharge ionization detector

Measuring flux, current, or integrated charge of low energy particles

Using modeling to determine wafer bias associated with a plasma system

Beam current measuring device and charged particle beam irradiation...

High thermal conductivity insulated metal substrates produced by pl...

Monitoring a discharge in a plasma process

System and method for controlling plasma magnetic field

Current-measurement device

Voltage measuring device

Discharge ionization current detector

Measurement of electrical variables on a DC furnace

Monitoring device, ion implantation device, and monitoring method

Patents Applicationslast 30 patents

PLASMA MEASUREMENT METHOD AND PLASMA PROCESSING APPARATUS

Circuit, Device and Method for Optical Characteristic Inspection

HIGH BANDWIDTH ARCHITECTURE FOR CENTRALIZED COHERENT CONTROL AT THE...

NOVEL METHODS OF EVALUATING PERFORMANCE OF AN ATMOSPHERIC PRESSURE...

ARC DETECTOR FOR DETECTING ARCS, PLASMA SYSTEM AND METHOD OF DETECT...

FAST FARADAY CUP FOR MEASURING THE LONGITUDINAL DISTRIBUTION OF PAR...

DEVICE AND METHOD FOR DETECTING THE MASS CENTER OF A BEAM OF ELECTR...

ANGLED SLIT DESIGN FOR COMPUTED TOMOGRAPHIC IMAGING OF ELECTRON BEAMS

FAST FARADAY CUP FOR MEASURING THE LONGITUDINAL DISTRIBUTION OF PAR...

PULSE SYSTEM VERIFICATION

MEASURING FLUX, CURRENT, OR INTEGRATED CHARGE OF LOW ENERGY PARTICLES

ELECTRONIC AMPLIFICATION DEVICE, MEASUREMENT APPARATUS AND ASSOCIAT...

MEASURING FLUX, CURRENT, OR INTEGRATED CHARGE OF LOW ENERGY PARTICLES

VOLTAGE BUFFER FOR CURRENT SENSOR

PROCESS CONDITION SENSING DEVICE AND METHOD FOR PLASMA CHAMBER

BEAM CURRENT MEASURING DEVICE AND CHARGED PARTICLE BEAM IRRADIATION...

DIELECTRIC BARRIER DISCHARGE IONIZATION DETECTOR

SYSTEM AND METHOD FOR CONTROLLING PLASMA MAGNETIC FIELD

CURRENT-MEASUREMENT DEVICE

USING MODELING TO DETERMINE WAFER BIAS ASSOCIATED WITH A PLASMA SYSTEM

METHOD FOR ESTIMATING LIFETIME OF CATHODE IN ELECTRON BEAM LITHOGRA...

Monitoring a Discharge in a Plasma Process

MULTI-BEAM CURRENT QUANTITY MEASURING METHOD, MULTI-CHARGED PARTICL...

ASSESSMENT AND CALIBRATION OF A HIGH ENERGY BEAM

BEAM IMAGING SENSOR AND METHOD FOR USING SAME

CONTROL MODULE FOR AN ION IMPLANTER

Ionization Monitoring Device and Method

Radio-Frequency Ion Channel Antenna

MEASUREMENT OF PLURAL RF SENSOR DEVICES IN A PULSED RF PLASMA REACTOR

DISCHARGE IONIZATION CURRENT DETECTOR