Methods for avoiding stiction when the device is in use not provided for in groups B81C1/00968 - B81C1/00976

Industry

CPC
B81C1/00984

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C1/00Manufacture or treatment of devices or systems in or on a substrate

Current Industry

B81C1/00984Methods for avoiding stiction when the device is in use not provided for in groups B81C1/00968 - B81C1/00976

Industries

Patents Grantslast 30 patents

Information Patent Grant
Anti-stiction bottom cavity surface for micromachined ultrasonic tr...
- Patent number 11,883,845
- Issue date Jan 30, 2024
- BFLY OPERATIONS, INC.
- Lingyun Miao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical systems device having a mechanically robust...
- Patent number 11,814,283
- Issue date Nov 14, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Manufacturing method of semiconductor structure
- Patent number 11,708,262
- Issue date Jul 25, 2023
- Taiwan Semiconductor Manufacturing Company Ltd.
- Yi-Hsien Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Anti-stiction bottom cavity surface for micromachined ultrasonic tr...
- Patent number 11,571,711
- Issue date Feb 7, 2023
- BFLY OPERATIONS, INC.
- Lingyun Miao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS apparatus with anti-stiction layer
- Patent number 11,542,151
- Issue date Jan 3, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Manufacturing method of semiconductor structure
- Patent number 11,267,693
- Issue date Mar 8, 2022
- Taiwan Semiconductor Manufacturing Company Ltd.
- Yi-Hsien Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fence structure to prevent stiction in a MEMS motion sensor
- Patent number 11,261,083
- Issue date Mar 1, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for preparing silicon wafer with rough surface and silicon w...
- Patent number 11,192,782
- Issue date Dec 7, 2021
- AAC Acoustic Technologies (Shenzhen) Co., Ltd.
- Wooicheang Goh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical systems device having a mechanically robust...
- Patent number 11,040,870
- Issue date Jun 22, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and apparatus for reducing in-process and in-use stiction fo...
- Patent number 10,870,574
- Issue date Dec 22, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical systems (MEMS) device and method for fabri...
- Patent number 10,798,493
- Issue date Oct 6, 2020
- Solid State System Co., Ltd.
- Tsung-Min Hsieh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Rough anti-stiction layer for MEMS device
- Patent number 10,759,654
- Issue date Sep 1, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu-Jui Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of stiction prevention by patterned anti-stiction layer
- Patent number 10,745,268
- Issue date Aug 18, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of stiction prevention by patterned anti-stiction layer
- Patent number 10,654,707
- Issue date May 19, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fence structure to prevent stiction in a MEMS motion sensor
- Patent number 10,562,763
- Issue date Feb 18, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS devices and processes
- Patent number 10,450,189
- Issue date Oct 22, 2019
- Cirrus Logic, Inc.
- Tom Hanley
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Device including micromechanical components in cavities having diff...
- Patent number 10,384,932
- Issue date Aug 20, 2019
- Robert Bosch GmbH
- Achim Breitling
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Wafer level packaging for MEMS device
- Patent number 10,301,171
- Issue date May 28, 2019
- GLOBALFOUNDRIES Singapore Pte. Ltd.
- Siddharth Chakravarty
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and apparatus for reducing in-process and in-use stiction fo...
- Patent number 10,273,143
- Issue date Apr 30, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical systems (MEMS) device and method for fabri...
- Patent number 10,250,998
- Issue date Apr 2, 2019
- Solid State Systems Co., Ltd.
- Tsung-Min Hsieh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Manufacturing method of micro-electro-mechanical systems device
- Patent number 10,183,856
- Issue date Jan 22, 2019
- Sensortek Technology Corp.
- Hsin-Hung Huang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Rough anti-stiction layer for MEMS device
- Patent number 10,173,886
- Issue date Jan 8, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu-Jui Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device
- Patent number 10,112,822
- Issue date Oct 30, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd
- Kai-Fung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS structure with graphene component
- Patent number 10,053,358
- Issue date Aug 21, 2018
- Robert Bosch GmbH
- Gary Yama
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods for stiction reduction in MEMS sensors
- Patent number 9,926,192
- Issue date Mar 27, 2018
- Invensense, Inc.
- Cerina Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Rough anti-stiction layer for MEMS device
- Patent number 9,884,755
- Issue date Feb 6, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu-Jui Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for controlling surface roughness in MEMS structure
- Patent number 9,776,852
- Issue date Oct 3, 2017
- Taiwan Semiconductor Manufacturing Company Ltd.
- Yuan-Chih Hsieh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Movement microelectromechanical systems (MEMS) package
- Patent number 9,527,721
- Issue date Dec 27, 2016
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shyh-Wei Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Coatings for relatively movable surfaces
- Patent number 9,487,397
- Issue date Nov 8, 2016
- Texas Instruments Incorporated
- William Robert Morrison
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor devices and methods of forming thereof
- Patent number 9,458,009
- Issue date Oct 4, 2016
- Infineon Technologies AG
- Alfons Dehe
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
ANTI-STICTION BOTTOM CAVITY SURFACE FOR MICROMACHINED ULTRASONIC TR...
- Publication number 20240100566
- Publication date Mar 28, 2024
- BFLY OPERATIONS, INC.
- Lingyun Miao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL SYSTEMS DEVICE HAVING A MECHANICALLY ROBUST...
- Publication number 20230382712
- Publication date Nov 30, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ANTI-STICTION BOTTOM CAVITY SURFACE FOR MICROMACHINED ULTRASONIC TR...
- Publication number 20230149976
- Publication date May 18, 2023
- BFLY OPERATIONS, INC.
- Lingyun Miao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR STRUCTURE
- Publication number 20220185656
- Publication date Jun 16, 2022
- Taiwan Semiconductor Manufacturing company Ltd.
- YI-HSIEN CHANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FORMING A PASSIVATION COATING FOR MEMS DEVICES
- Publication number 20210371275
- Publication date Dec 2, 2021
- TEXAS INSTRUMENTS INCORPORATED
- Simon Joshua Jacobs
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL SYSTEMS DEVICE HAVING A MECHANICALLY ROBUST...
- Publication number 20210309508
- Publication date Oct 7, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL SYSTEMS DEVICE HAVING A MECHANICALLY ROBUST...
- Publication number 20210024348
- Publication date Jan 28, 2021
- Taiwan Semiconductor Manufacturing Co., LTD
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS APPARATUS WITH ANTI-STICTION LAYER
- Publication number 20200346919
- Publication date Nov 5, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ANTI-STICTION BOTTOM CAVITY SURFACE FOR MICROMACHINED ULTRASONIC TR...
- Publication number 20200156110
- Publication date May 21, 2020
- Butterfly Network, Inc.
- Lingyun Miao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FENCE STRUCTURE TO PREVENT STICTION IN A MEMS MOTION SENSOR
- Publication number 20200140265
- Publication date May 7, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF STICTION PREVENTION BY PATTERNED ANTI-STICTION LAYER
- Publication number 20200024124
- Publication date Jan 23, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND APPARATUS FOR REDUCING IN-PROCESS AND IN-USE STICTION FO...
- Publication number 20190241425
- Publication date Aug 8, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
WAFER LEVEL PACKAGING FOR MEMS DEVICE
- Publication number 20190144265
- Publication date May 16, 2019
- GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Siddharth CHAKRAVARTY
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FORMING A PASSIVATION COATING FOR MEMS DEVICES
- Publication number 20190127212
- Publication date May 2, 2019
- TEXAS INSTRUMENTS INCORPORATED
- Simon Joshua JACOBS
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) DEVICE AND METHOD FOR FABRI...
- Publication number 20190124452
- Publication date Apr 25, 2019
- SOLID STATE SYSTEM CO., LTD.
- Tsung-Min Hsieh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ROUGH ANTI-STICTION LAYER FOR MEMS DEVICE
- Publication number 20190119099
- Publication date Apr 25, 2019
- Taiwan Semiconductor Manufacturing Co., LTD
- Yu-Jui Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF STICTION PREVENTION BY PATTERNED ANTI-STICTION LAYER
- Publication number 20190002273
- Publication date Jan 3, 2019
- Taiwan Semiconductor Manufacturing Co., LTD
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Manufacturing Method of Micro-Electro-Mechanical System Device
- Publication number 20180201496
- Publication date Jul 19, 2018
- SensorTek technology Corp.
- Hsin-Hung Huang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ROUGH ANTI-STICTION LAYER FOR MEMS DEVICE
- Publication number 20180179047
- Publication date Jun 28, 2018
- Taiwan Semiconductor Manufacturing Co., LTD
- Yu-Jui Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICES AND PROCESSES
- Publication number 20180148315
- Publication date May 31, 2018
- Cirrus Logic International Semiconductor Ltd.
- Tom HANLEY
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS STRUCTURE WITH BILAYER STOPPER AND METHOD FOR FORMING THE SAME
- Publication number 20180127263
- Publication date May 10, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wen-Chuan TAI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) DEVICE AND METHOD FOR FABRI...
- Publication number 20180115836
- Publication date Apr 26, 2018
- SOLID STATE SYSTEM CO., LTD.
- Tsung-Min Hsieh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PRESSURE SENSOR, MANUFACTURING METHOD OF PRESSURE SENSOR, ALTIMETER...
- Publication number 20170217755
- Publication date Aug 3, 2017
- SEIKO EPSON CORPORATION
- Yusuke MATSUZAWA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR CONTROLLING SURFACE ROUGHNESS IN MEMS STRUCTURE
- Publication number 20170217756
- Publication date Aug 3, 2017
- Taiwan Semiconductor Manufacturing company Ltd.
- YUAN-CHIH HSIEH
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ROUGH ANTI-STICTION LAYER FOR MEMS DEVICE
- Publication number 20170210612
- Publication date Jul 27, 2017
- Taiwan Semiconductor Manufacturing Co., LTD
- Yu-Jui Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Movement Microelectromechanical Systems (MEMS) Package
- Publication number 20160332863
- Publication date Nov 17, 2016
- Taiwan Semiconductor Manufacturing Co., LTD
- Shyh-Wei Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COATINGS FOR RELATIVELY MOVABLE SURFACES
- Publication number 20160060108
- Publication date Mar 3, 2016
- TEXAS INSTRUMENTS INCORPORATED
- William Robert MORRISON
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS FOR STICTION REDUCTION IN MEMS SENSORS
- Publication number 20150353353
- Publication date Dec 10, 2015
- InvenSense, Inc.
- Cerina Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS FOR STICTION REDUCTION IN MEMS SENSORS
- Publication number 20140353774
- Publication date Dec 4, 2014
- Cerina Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COATINGS FOR RELATIVELY MOVABLE SURFACES
- Publication number 20140329392
- Publication date Nov 6, 2014
- William Robert MORRISON
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Methods for avoiding stiction when the device is in use not provided for in groups B81C1/00968 - B81C1/00976

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Anti-stiction bottom cavity surface for micromachined ultrasonic tr...

Microelectromechanical systems device having a mechanically robust...

Manufacturing method of semiconductor structure

Anti-stiction bottom cavity surface for micromachined ultrasonic tr...

MEMS apparatus with anti-stiction layer

Manufacturing method of semiconductor structure

Fence structure to prevent stiction in a MEMS motion sensor

Method for preparing silicon wafer with rough surface and silicon w...

Microelectromechanical systems device having a mechanically robust...

Method and apparatus for reducing in-process and in-use stiction fo...

Micro-electro-mechanical systems (MEMS) device and method for fabri...

Rough anti-stiction layer for MEMS device

Method of stiction prevention by patterned anti-stiction layer

Method of stiction prevention by patterned anti-stiction layer

Fence structure to prevent stiction in a MEMS motion sensor

MEMS devices and processes

Device including micromechanical components in cavities having diff...

Wafer level packaging for MEMS device

Method and apparatus for reducing in-process and in-use stiction fo...

Micro-electro-mechanical systems (MEMS) device and method for fabri...

Manufacturing method of micro-electro-mechanical systems device

Rough anti-stiction layer for MEMS device

Semiconductor device

MEMS structure with graphene component

Methods for stiction reduction in MEMS sensors

Rough anti-stiction layer for MEMS device

Method for controlling surface roughness in MEMS structure

Movement microelectromechanical systems (MEMS) package

Coatings for relatively movable surfaces

Semiconductor devices and methods of forming thereof

Patents Applicationslast 30 patents

ANTI-STICTION BOTTOM CAVITY SURFACE FOR MICROMACHINED ULTRASONIC TR...

MICROELECTROMECHANICAL SYSTEMS DEVICE HAVING A MECHANICALLY ROBUST...

ANTI-STICTION BOTTOM CAVITY SURFACE FOR MICROMACHINED ULTRASONIC TR...

MANUFACTURING METHOD OF SEMICONDUCTOR STRUCTURE

FORMING A PASSIVATION COATING FOR MEMS DEVICES

MICROELECTROMECHANICAL SYSTEMS DEVICE HAVING A MECHANICALLY ROBUST...

MICROELECTROMECHANICAL SYSTEMS DEVICE HAVING A MECHANICALLY ROBUST...

MEMS APPARATUS WITH ANTI-STICTION LAYER

ANTI-STICTION BOTTOM CAVITY SURFACE FOR MICROMACHINED ULTRASONIC TR...

FENCE STRUCTURE TO PREVENT STICTION IN A MEMS MOTION SENSOR

METHOD OF STICTION PREVENTION BY PATTERNED ANTI-STICTION LAYER

METHOD AND APPARATUS FOR REDUCING IN-PROCESS AND IN-USE STICTION FO...

WAFER LEVEL PACKAGING FOR MEMS DEVICE

FORMING A PASSIVATION COATING FOR MEMS DEVICES

MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) DEVICE AND METHOD FOR FABRI...

ROUGH ANTI-STICTION LAYER FOR MEMS DEVICE

METHOD OF STICTION PREVENTION BY PATTERNED ANTI-STICTION LAYER

Manufacturing Method of Micro-Electro-Mechanical System Device

ROUGH ANTI-STICTION LAYER FOR MEMS DEVICE

MEMS DEVICES AND PROCESSES

MEMS STRUCTURE WITH BILAYER STOPPER AND METHOD FOR FORMING THE SAME

MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) DEVICE AND METHOD FOR FABRI...

PRESSURE SENSOR, MANUFACTURING METHOD OF PRESSURE SENSOR, ALTIMETER...

METHOD FOR CONTROLLING SURFACE ROUGHNESS IN MEMS STRUCTURE

ROUGH ANTI-STICTION LAYER FOR MEMS DEVICE

Movement Microelectromechanical Systems (MEMS) Package

COATINGS FOR RELATIVELY MOVABLE SURFACES

METHODS FOR STICTION REDUCTION IN MEMS SENSORS

METHODS FOR STICTION REDUCTION IN MEMS SENSORS

COATINGS FOR RELATIVELY MOVABLE SURFACES