Methods for avoiding stiction when the device is in use not provided for in groups B81C1/00968 - B81C1/00976

Industry

CPC
B81C1/00984

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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C1/00Manufacture or treatment of devices or systems in or on a substrate

Current Industry

B81C1/00984Methods for avoiding stiction when the device is in use not provided for in groups B81C1/00968 - B81C1/00976

Industries

Patents Grantslast 30 patents

Information Patent Grant
Microelectromechanical systems device having a mechanically robust...
- Patent number 12,151,932
- Issue date Nov 26, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Anti-stiction bottom cavity surface for micromachined ultrasonic tr...
- Patent number 11,883,845
- Issue date Jan 30, 2024
- BFLY OPERATIONS, INC.
- Lingyun Miao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical systems device having a mechanically robust...
- Patent number 11,814,283
- Issue date Nov 14, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Manufacturing method of semiconductor structure
- Patent number 11,708,262
- Issue date Jul 25, 2023
- Taiwan Semiconductor Manufacturing Company Ltd.
- Yi-Hsien Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Anti-stiction bottom cavity surface for micromachined ultrasonic tr...
- Patent number 11,571,711
- Issue date Feb 7, 2023
- BFLY OPERATIONS, INC.
- Lingyun Miao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS apparatus with anti-stiction layer
- Patent number 11,542,151
- Issue date Jan 3, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Manufacturing method of semiconductor structure
- Patent number 11,267,693
- Issue date Mar 8, 2022
- Taiwan Semiconductor Manufacturing Company Ltd.
- Yi-Hsien Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fence structure to prevent stiction in a MEMS motion sensor
- Patent number 11,261,083
- Issue date Mar 1, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for preparing silicon wafer with rough surface and silicon w...
- Patent number 11,192,782
- Issue date Dec 7, 2021
- AAC Acoustic Technologies (Shenzhen) Co., Ltd.
- Wooicheang Goh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical systems device having a mechanically robust...
- Patent number 11,040,870
- Issue date Jun 22, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and apparatus for reducing in-process and in-use stiction fo...
- Patent number 10,870,574
- Issue date Dec 22, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical systems (MEMS) device and method for fabri...
- Patent number 10,798,493
- Issue date Oct 6, 2020
- Solid State System Co., Ltd.
- Tsung-Min Hsieh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Rough anti-stiction layer for MEMS device
- Patent number 10,759,654
- Issue date Sep 1, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu-Jui Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of stiction prevention by patterned anti-stiction layer
- Patent number 10,745,268
- Issue date Aug 18, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of stiction prevention by patterned anti-stiction layer
- Patent number 10,654,707
- Issue date May 19, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fence structure to prevent stiction in a MEMS motion sensor
- Patent number 10,562,763
- Issue date Feb 18, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS devices and processes
- Patent number 10,450,189
- Issue date Oct 22, 2019
- Cirrus Logic, Inc.
- Tom Hanley
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Device including micromechanical components in cavities having diff...
- Patent number 10,384,932
- Issue date Aug 20, 2019
- Robert Bosch GmbH
- Achim Breitling
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Wafer level packaging for MEMS device
- Patent number 10,301,171
- Issue date May 28, 2019
- GLOBALFOUNDRIES Singapore Pte. Ltd.
- Siddharth Chakravarty
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and apparatus for reducing in-process and in-use stiction fo...
- Patent number 10,273,143
- Issue date Apr 30, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical systems (MEMS) device and method for fabri...
- Patent number 10,250,998
- Issue date Apr 2, 2019
- Solid State Systems Co., Ltd.
- Tsung-Min Hsieh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Manufacturing method of micro-electro-mechanical systems device
- Patent number 10,183,856
- Issue date Jan 22, 2019
- Sensortek Technology Corp.
- Hsin-Hung Huang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Rough anti-stiction layer for MEMS device
- Patent number 10,173,886
- Issue date Jan 8, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu-Jui Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device
- Patent number 10,112,822
- Issue date Oct 30, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd
- Kai-Fung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS structure with graphene component
- Patent number 10,053,358
- Issue date Aug 21, 2018
- Robert Bosch GmbH
- Gary Yama
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods for stiction reduction in MEMS sensors
- Patent number 9,926,192
- Issue date Mar 27, 2018
- Invensense, Inc.
- Cerina Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Rough anti-stiction layer for MEMS device
- Patent number 9,884,755
- Issue date Feb 6, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu-Jui Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for controlling surface roughness in MEMS structure
- Patent number 9,776,852
- Issue date Oct 3, 2017
- Taiwan Semiconductor Manufacturing Company Ltd.
- Yuan-Chih Hsieh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Movement microelectromechanical systems (MEMS) package
- Patent number 9,527,721
- Issue date Dec 27, 2016
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shyh-Wei Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Coatings for relatively movable surfaces
- Patent number 9,487,397
- Issue date Nov 8, 2016
- Texas Instruments Incorporated
- William Robert Morrison
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
FORMING A PASSIVATION COATING FOR MEMS DEVICES
- Publication number 20250002334
- Publication date Jan 2, 2025
- TEXAS INSTRUMENTS INCORPORATED
- Simon Joshua Jacobs
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DOUBLE LAYER MEMS DEVICES
- Publication number 20240286890
- Publication date Aug 29, 2024
- Murata Manufacturing Co., Ltd.
- Altti TORKKELI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE, METHOD FOR MANUFACTURING MEMS DEVICE AND ELECTRONIC DE...
- Publication number 20240262678
- Publication date Aug 8, 2024
- Beijing BOE Technology Development Co., Ltd.
- Jingwen GUO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ANTI-STICTION BOTTOM CAVITY SURFACE FOR MICROMACHINED ULTRASONIC TR...
- Publication number 20240100566
- Publication date Mar 28, 2024
- BFLY OPERATIONS, INC.
- Lingyun Miao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL SYSTEMS DEVICE HAVING A MECHANICALLY ROBUST...
- Publication number 20230382712
- Publication date Nov 30, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ANTI-STICTION BOTTOM CAVITY SURFACE FOR MICROMACHINED ULTRASONIC TR...
- Publication number 20230149976
- Publication date May 18, 2023
- BFLY OPERATIONS, INC.
- Lingyun Miao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR STRUCTURE
- Publication number 20220185656
- Publication date Jun 16, 2022
- Taiwan Semiconductor Manufacturing company Ltd.
- YI-HSIEN CHANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FORMING A PASSIVATION COATING FOR MEMS DEVICES
- Publication number 20210371275
- Publication date Dec 2, 2021
- TEXAS INSTRUMENTS INCORPORATED
- Simon Joshua Jacobs
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL SYSTEMS DEVICE HAVING A MECHANICALLY ROBUST...
- Publication number 20210309508
- Publication date Oct 7, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL SYSTEMS DEVICE HAVING A MECHANICALLY ROBUST...
- Publication number 20210024348
- Publication date Jan 28, 2021
- Taiwan Semiconductor Manufacturing Co., LTD
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS APPARATUS WITH ANTI-STICTION LAYER
- Publication number 20200346919
- Publication date Nov 5, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ANTI-STICTION BOTTOM CAVITY SURFACE FOR MICROMACHINED ULTRASONIC TR...
- Publication number 20200156110
- Publication date May 21, 2020
- Butterfly Network, Inc.
- Lingyun Miao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FENCE STRUCTURE TO PREVENT STICTION IN A MEMS MOTION SENSOR
- Publication number 20200140265
- Publication date May 7, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF STICTION PREVENTION BY PATTERNED ANTI-STICTION LAYER
- Publication number 20200024124
- Publication date Jan 23, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND APPARATUS FOR REDUCING IN-PROCESS AND IN-USE STICTION FO...
- Publication number 20190241425
- Publication date Aug 8, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
WAFER LEVEL PACKAGING FOR MEMS DEVICE
- Publication number 20190144265
- Publication date May 16, 2019
- GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Siddharth CHAKRAVARTY
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FORMING A PASSIVATION COATING FOR MEMS DEVICES
- Publication number 20190127212
- Publication date May 2, 2019
- TEXAS INSTRUMENTS INCORPORATED
- Simon Joshua JACOBS
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) DEVICE AND METHOD FOR FABRI...
- Publication number 20190124452
- Publication date Apr 25, 2019
- SOLID STATE SYSTEM CO., LTD.
- Tsung-Min Hsieh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ROUGH ANTI-STICTION LAYER FOR MEMS DEVICE
- Publication number 20190119099
- Publication date Apr 25, 2019
- Taiwan Semiconductor Manufacturing Co., LTD
- Yu-Jui Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF STICTION PREVENTION BY PATTERNED ANTI-STICTION LAYER
- Publication number 20190002273
- Publication date Jan 3, 2019
- Taiwan Semiconductor Manufacturing Co., LTD
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Manufacturing Method of Micro-Electro-Mechanical System Device
- Publication number 20180201496
- Publication date Jul 19, 2018
- SensorTek technology Corp.
- Hsin-Hung Huang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ROUGH ANTI-STICTION LAYER FOR MEMS DEVICE
- Publication number 20180179047
- Publication date Jun 28, 2018
- Taiwan Semiconductor Manufacturing Co., LTD
- Yu-Jui Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICES AND PROCESSES
- Publication number 20180148315
- Publication date May 31, 2018
- Cirrus Logic International Semiconductor Ltd.
- Tom HANLEY
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS STRUCTURE WITH BILAYER STOPPER AND METHOD FOR FORMING THE SAME
- Publication number 20180127263
- Publication date May 10, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wen-Chuan TAI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) DEVICE AND METHOD FOR FABRI...
- Publication number 20180115836
- Publication date Apr 26, 2018
- SOLID STATE SYSTEM CO., LTD.
- Tsung-Min Hsieh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PRESSURE SENSOR, MANUFACTURING METHOD OF PRESSURE SENSOR, ALTIMETER...
- Publication number 20170217755
- Publication date Aug 3, 2017
- SEIKO EPSON CORPORATION
- Yusuke MATSUZAWA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR CONTROLLING SURFACE ROUGHNESS IN MEMS STRUCTURE
- Publication number 20170217756
- Publication date Aug 3, 2017
- Taiwan Semiconductor Manufacturing company Ltd.
- YUAN-CHIH HSIEH
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ROUGH ANTI-STICTION LAYER FOR MEMS DEVICE
- Publication number 20170210612
- Publication date Jul 27, 2017
- Taiwan Semiconductor Manufacturing Co., LTD
- Yu-Jui Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Movement Microelectromechanical Systems (MEMS) Package
- Publication number 20160332863
- Publication date Nov 17, 2016
- Taiwan Semiconductor Manufacturing Co., LTD
- Shyh-Wei Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COATINGS FOR RELATIVELY MOVABLE SURFACES
- Publication number 20160060108
- Publication date Mar 3, 2016
- TEXAS INSTRUMENTS INCORPORATED
- William Robert MORRISON
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Methods for avoiding stiction when the device is in use not provided for in groups B81C1/00968 - B81C1/00976

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Microelectromechanical systems device having a mechanically robust...

Anti-stiction bottom cavity surface for micromachined ultrasonic tr...

Microelectromechanical systems device having a mechanically robust...

Manufacturing method of semiconductor structure

Anti-stiction bottom cavity surface for micromachined ultrasonic tr...

MEMS apparatus with anti-stiction layer

Manufacturing method of semiconductor structure

Fence structure to prevent stiction in a MEMS motion sensor

Method for preparing silicon wafer with rough surface and silicon w...

Microelectromechanical systems device having a mechanically robust...

Method and apparatus for reducing in-process and in-use stiction fo...

Micro-electro-mechanical systems (MEMS) device and method for fabri...

Rough anti-stiction layer for MEMS device

Method of stiction prevention by patterned anti-stiction layer

Method of stiction prevention by patterned anti-stiction layer

Fence structure to prevent stiction in a MEMS motion sensor

MEMS devices and processes

Device including micromechanical components in cavities having diff...

Wafer level packaging for MEMS device

Method and apparatus for reducing in-process and in-use stiction fo...

Micro-electro-mechanical systems (MEMS) device and method for fabri...

Manufacturing method of micro-electro-mechanical systems device

Rough anti-stiction layer for MEMS device

Semiconductor device

MEMS structure with graphene component

Methods for stiction reduction in MEMS sensors

Rough anti-stiction layer for MEMS device

Method for controlling surface roughness in MEMS structure

Movement microelectromechanical systems (MEMS) package

Coatings for relatively movable surfaces

Patents Applicationslast 30 patents

FORMING A PASSIVATION COATING FOR MEMS DEVICES

DOUBLE LAYER MEMS DEVICES

MEMS DEVICE, METHOD FOR MANUFACTURING MEMS DEVICE AND ELECTRONIC DE...

ANTI-STICTION BOTTOM CAVITY SURFACE FOR MICROMACHINED ULTRASONIC TR...

MICROELECTROMECHANICAL SYSTEMS DEVICE HAVING A MECHANICALLY ROBUST...

ANTI-STICTION BOTTOM CAVITY SURFACE FOR MICROMACHINED ULTRASONIC TR...

MANUFACTURING METHOD OF SEMICONDUCTOR STRUCTURE

FORMING A PASSIVATION COATING FOR MEMS DEVICES

MICROELECTROMECHANICAL SYSTEMS DEVICE HAVING A MECHANICALLY ROBUST...

MICROELECTROMECHANICAL SYSTEMS DEVICE HAVING A MECHANICALLY ROBUST...

MEMS APPARATUS WITH ANTI-STICTION LAYER

ANTI-STICTION BOTTOM CAVITY SURFACE FOR MICROMACHINED ULTRASONIC TR...

FENCE STRUCTURE TO PREVENT STICTION IN A MEMS MOTION SENSOR

METHOD OF STICTION PREVENTION BY PATTERNED ANTI-STICTION LAYER

METHOD AND APPARATUS FOR REDUCING IN-PROCESS AND IN-USE STICTION FO...

WAFER LEVEL PACKAGING FOR MEMS DEVICE

FORMING A PASSIVATION COATING FOR MEMS DEVICES

MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) DEVICE AND METHOD FOR FABRI...

ROUGH ANTI-STICTION LAYER FOR MEMS DEVICE

METHOD OF STICTION PREVENTION BY PATTERNED ANTI-STICTION LAYER

Manufacturing Method of Micro-Electro-Mechanical System Device

ROUGH ANTI-STICTION LAYER FOR MEMS DEVICE

MEMS DEVICES AND PROCESSES

MEMS STRUCTURE WITH BILAYER STOPPER AND METHOD FOR FORMING THE SAME

MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) DEVICE AND METHOD FOR FABRI...

PRESSURE SENSOR, MANUFACTURING METHOD OF PRESSURE SENSOR, ALTIMETER...

METHOD FOR CONTROLLING SURFACE ROUGHNESS IN MEMS STRUCTURE

ROUGH ANTI-STICTION LAYER FOR MEMS DEVICE

Movement Microelectromechanical Systems (MEMS) Package

COATINGS FOR RELATIVELY MOVABLE SURFACES