Micro-engines and actuators not provided for in B81B2201/031 - B81B2201/037

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81BMICRO-STRUCTURAL DEVICES OR SYSTEMS B81B2201/00Specific applications of micro-electromechanical systems

Current Industry

B81B2201/038Micro-engines and actuators not provided for in B81B2201/031 - B81B2201/037

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Passive microfluidic valves
- Patent number 11,725,749
- Issue date Aug 15, 2023
- The Regents of the University of California
- Michael Wehner
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor structure and manufacturing method thereof
- Patent number 11,661,333
- Issue date May 30, 2023
- Taiwan Semiconductor Manufacturing Company Ltd.
- Wei-Jhih Mao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Piezoelectric actuator having a deformation sensor and fabrication...
- Patent number 11,600,765
- Issue date Mar 7, 2023
- STMicroelectronics S.r.l.
- Domenico Giusti
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Tunable photonic device with liquid crystal elastomer microactuator...
- Patent number 11,377,345
- Issue date Jul 5, 2022
- Wisconsin Alumni Research Foundation
- Hongrui Jiang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microfluidic MEMS device for fluid ejection with piezoelectric actu...
- Patent number 11,242,242
- Issue date Feb 8, 2022
- STMicroelectronics S.r.l.
- Domenico Giusti
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Three-dimensional micro devices and method for their production
- Patent number 11,208,321
- Issue date Dec 28, 2021
- Leibniz-Institut fuer Festkoerper-und Werkstoffforschung Dresden e.V.
- Daniil Karnaushenko
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and apparatus for evaluating electrostatic or nonlinear devices
- Patent number 11,192,779
- Issue date Dec 7, 2021
- The Board of Trustees of the Leland Stanford Junior University
- Sandra Manosalvas-Kjono
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS and method of manufacturing the same
- Patent number 11,186,478
- Issue date Nov 30, 2021
- Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
- Sergiu Langa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electromechanical device having a soft magnetic material elec...
- Patent number 11,174,159
- Issue date Nov 16, 2021
- International Business Machines Corporation
- William J. Gallagher
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of actuating a shape changeable member, shape changeable mem...
- Patent number 11,031,160
- Issue date Jun 8, 2021
- Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V.
- Wenqi Hu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Coupling a magnet with a MEMS device
- Patent number 11,022,792
- Issue date Jun 1, 2021
- Intel Corporation
- Kyle Yazzie
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical component and method for producing same
- Patent number 10,974,958
- Issue date Apr 13, 2021
- Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
- Felix Schiebel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electrostatic actuator with tri-electrode topology
- Patent number 10,693,393
- Issue date Jun 23, 2020
- University of Manitoba
- Cyrus Shafai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microfabricated ultrasonic transducers and related apparatus and me...
- Patent number 10,672,974
- Issue date Jun 2, 2020
- Butterfly Network, Inc.
- Jonathan M. Rothberg
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electrostatic actuator and method for producing the same
- Patent number 10,256,748
- Issue date Apr 9, 2019
- Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Nicolas Lange
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for manufacturing a microelectromechanical interaction syst...
- Patent number 10,221,066
- Issue date Mar 5, 2019
- STMicroelectronics S.r.l.
- Giuseppe Barillaro
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical module
- Patent number 10,221,061
- Issue date Mar 5, 2019
- Hamamatsu Photonics K.K.
- Yoshihisa Warashina
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for manufacturing a microelectromechanical interaction syst...
- Patent number 10,196,262
- Issue date Feb 5, 2019
- STMicroelectronics S.r.l.
- Giuseppe Barillaro
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microfabricated ultrasonic transducers and related apparatus and me...
- Patent number 10,196,261
- Issue date Feb 5, 2019
- Butterfly Network, Inc.
- Jonathan M. Rothberg
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
In-plane-strain-actuated out-of-plane actuator
- Patent number 10,150,665
- Issue date Dec 11, 2018
- The Board of Trustees of the Leland Stanford Junior University
- Rebecca Elizabeth Taylor
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical system with spring for magnet placement
- Patent number 10,125,013
- Issue date Nov 13, 2018
- Intel Corporation
- Robert Starkston
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Liquid-driven nano-porous actuator and the application thereof
- Patent number 9,945,399
- Issue date Apr 17, 2018
- INSTITUTE OF METAL RESEARCH, CHINESE ACADEMY OF SCIENCES
- Xinglong Ye
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Compliant micro device transfer head
- Patent number 9,895,902
- Issue date Feb 20, 2018
- Apple Inc.
- Andreas Bibl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Wideband power attenuators in RF-MEMS technology
- Patent number 9,847,801
- Issue date Dec 19, 2017
- Fondazione Bruno Kessler
- Jacopo Iannacci
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electromagnetic actuator for optical device to reduce temperature a...
- Patent number 9,467,034
- Issue date Oct 11, 2016
- Intel Corporation
- Julien Gamet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Surface mount actuator
- Patent number 9,414,495
- Issue date Aug 9, 2016
- DigitalOptics Corporation MEMS
- Roman C. Gutierrez
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Compliant micro device transfer head
- Patent number 9,370,864
- Issue date Jun 21, 2016
- Apple Inc.
- Andreas Bibl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Forming magnetic microelectromechanical inductive components
- Patent number 9,321,634
- Issue date Apr 26, 2016
- International Business Machines Corporation
- William J. Gallagher
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Motion conversion mechanisms
- Patent number 9,303,737
- Issue date Apr 5, 2016
- Technion Research and Development Foundation Ltd.
- David Elata
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Display apparatus incorporating corrugated beam actuators
- Patent number 9,299,275
- Issue date Mar 29, 2016
- Pixtronix, Inc.
- Tyler Dunn
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MICROELECTROMECHANICAL SYSTEMS (MEMS) ACTUATOR WITH MAGNETIC LATCHI...
- Publication number 20240351860
- Publication date Oct 24, 2024
- Atomic Machines, Inc.
- William A. Boettcher
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS SOUND TRANSDUCER
- Publication number 20240048899
- Publication date Feb 8, 2024
- Fraunhofer-Gesellschaft zur foerderung der Angewandten Forschung e.V.
- Malte Florian NIEKIEL
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACTUATOR COMPRISING ELECTRICALLY CONDUCTIVE POROUS MATERIAL
- Publication number 20240026865
- Publication date Jan 25, 2024
- HydroGraph Clean Power Inc.
- Ranjith Divigalpitiya
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ATOMIC-SMOOTH DEVICE WITH MICROSTRUCTURE, AND METHOD FOR PREPARING...
- Publication number 20230271825
- Publication date Aug 31, 2023
- RESEARCH INSTITUTE OF TSINGHUA UNIVERSITY IN SHENZHEN
- Quanshui ZHENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PRODUCING A MICROELECTRONIC DEVICE
- Publication number 20230065179
- Publication date Mar 2, 2023
- ROBERT BOSCH GmbH
- Jochen Tomaschko
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PIEZOELECTRIC ACTUATOR STACK WITH TAPERED SIDEWALL
- Publication number 20220371880
- Publication date Nov 24, 2022
- Microsoft Technology Licensing, LLC
- Risto Heikki MUTIKAINEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF ASSEMBLING MOBILE MICRO-MACHINES AND A MOBILE MICRO-MACHINE
- Publication number 20220340414
- Publication date Oct 27, 2022
- Max-Planck-Gesellschaft zur Forderung der Wissenschaften e.V.
- Berk M. Yigit
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PASSIVE MICROFLUIDIC VALVES
- Publication number 20220136618
- Publication date May 5, 2022
- The Regents of the University of California
- Michael Wehner
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF
- Publication number 20220112074
- Publication date Apr 14, 2022
- Taiwan Semiconductor Manufacturing company Ltd.
- WEI-JHIH MAO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND APPARATUS FOR EVALUATING ELECTROSTATIC OR NONLINEAR DEVICES
- Publication number 20220089432
- Publication date Mar 24, 2022
- The Board of Trustees of the Leland Stanford Junior University
- Sandra Manosalvas-Kjono
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF ACTUATING A SHAPE CHANGEABLE MEMBER, SHAPE CHANGEABLE MEM...
- Publication number 20200035390
- Publication date Jan 30, 2020
- Max-Planck-Gesellschaft zur Forderung der Wissenschaften e.V.
- Wenqi Hu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COUPLING A MAGNET WITH A MEMS DEVICE
- Publication number 20190391386
- Publication date Dec 26, 2019
- Intel Corporation
- Kyle Yazzie
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS AND METHOD OF MANUFACTURING THE SAME
- Publication number 20190382257
- Publication date Dec 19, 2019
- Sergiu LANGA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROFLUIDIC MEMS DEVICE FOR FLUID EJECTION WITH PIEZOELECTRIC ACTU...
- Publication number 20190367357
- Publication date Dec 5, 2019
- STMicroelectronics S.r.l.
- Domenico GIUSTI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND APPARATUS FOR EVALUATING ELECTROSTATIC OR NONLINEAR DEVICES
- Publication number 20190241427
- Publication date Aug 8, 2019
- The Board of Trustees of the Leland Stanford Junior University
- Sandra Manosalvas-Kjono
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROFABRICATED ULTRASONIC TRANSDUCERS AND RELATED APPARATUS AND ME...
- Publication number 20190047850
- Publication date Feb 14, 2019
- Butterfly Network, Inc.
- Jonathan M. Rothberg
- B06 - GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
Information Patent Application
Electrostatic Actuator with Tri-Electrode Topology
- Publication number 20190036463
- Publication date Jan 31, 2019
- University of Manitoba
- Cyrus Shafai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROFABRICATED ULTRASONIC TRANSDUCERS AND RELATED APPARATUS AND ME...
- Publication number 20180257927
- Publication date Sep 13, 2018
- Butterfly Network, Inc.
- Jonathan M. Rothberg
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INTEGRATION OF LAMINATE MEMS IN BBUL CORELESS PACKAGE
- Publication number 20170225946
- Publication date Aug 10, 2017
- Intel Corporation
- Weng Hong TEH
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING SAME
- Publication number 20170210621
- Publication date Jul 27, 2017
- Fraunhofer Gesellschaft zur Forderung der angewandten Forschung e.V.
- Felix Schiebel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OPTICAL MODULE
- Publication number 20160244320
- Publication date Aug 25, 2016
- Hamamatsu Photonics K. K.
- Yoshihisa WARASHINA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ENVIRONMENTALLY RESPONSIVE OPTICAL MICROSTRUCTURED HYBRID ACTUATOR...
- Publication number 20160209642
- Publication date Jul 21, 2016
- President and Fellows of Harvard College
- Joanna AIZENBERG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTROMAGNETIC MEMS DEVICE
- Publication number 20160124214
- Publication date May 5, 2016
- Intel Corporation
- Barak Freedman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTRONIC DEVICE WITH SUSPENDED MASS
- Publication number 20160107879
- Publication date Apr 21, 2016
- INFINEON TECHNOLOGIES AG
- Thoralf Kautzsch
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACTUATOR
- Publication number 20140354085
- Publication date Dec 4, 2014
- Julien Gamet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FORMING MAGNETIC MICROELECTROMECHANICAL INDUCTIVE COMPONENTS
- Publication number 20140273283
- Publication date Sep 18, 2014
- International Business Machines Corporation
- William J. Gallagher
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FORMING MAGNETIC MICROELECTROMECHANICAL INDUCTIVE COMPONENTS
- Publication number 20140264676
- Publication date Sep 18, 2014
- International Business Machines Corporation
- William J. Gallagher
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MOTION CONVERSION MECHANISMS
- Publication number 20140069232
- Publication date Mar 13, 2014
- David ELATA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SURFACE MOUNT ACTUATOR
- Publication number 20140055971
- Publication date Feb 27, 2014
- DigitalOptics Corporation MEMS
- Roman C. Gutierrez
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ENVIRONMENTALLY RESPONSIVE OPTICAL MICROSTRUCTURED HYBRID ACTUATOR...
- Publication number 20140016177
- Publication date Jan 16, 2014
- President and Fellows of Harvard College
- Joanna Aizenberg
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Micro-engines and actuators not provided for in B81B2201/031 - B81B2201/037

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Passive microfluidic valves

Semiconductor structure and manufacturing method thereof

Piezoelectric actuator having a deformation sensor and fabrication...

Tunable photonic device with liquid crystal elastomer microactuator...

Microfluidic MEMS device for fluid ejection with piezoelectric actu...

Three-dimensional micro devices and method for their production

Method and apparatus for evaluating electrostatic or nonlinear devices

MEMS and method of manufacturing the same

Micro-electromechanical device having a soft magnetic material elec...

Method of actuating a shape changeable member, shape changeable mem...

Coupling a magnet with a MEMS device

Micromechanical component and method for producing same

Electrostatic actuator with tri-electrode topology

Microfabricated ultrasonic transducers and related apparatus and me...

Electrostatic actuator and method for producing the same

Process for manufacturing a microelectromechanical interaction syst...

Optical module

Process for manufacturing a microelectromechanical interaction syst...

Microfabricated ultrasonic transducers and related apparatus and me...

In-plane-strain-actuated out-of-plane actuator

Microelectromechanical system with spring for magnet placement

Liquid-driven nano-porous actuator and the application thereof

Compliant micro device transfer head

Wideband power attenuators in RF-MEMS technology

Electromagnetic actuator for optical device to reduce temperature a...

Surface mount actuator

Compliant micro device transfer head

Forming magnetic microelectromechanical inductive components

Motion conversion mechanisms

Display apparatus incorporating corrugated beam actuators

Patents Applicationslast 30 patents

MICROELECTROMECHANICAL SYSTEMS (MEMS) ACTUATOR WITH MAGNETIC LATCHI...

MEMS SOUND TRANSDUCER

ACTUATOR COMPRISING ELECTRICALLY CONDUCTIVE POROUS MATERIAL

ATOMIC-SMOOTH DEVICE WITH MICROSTRUCTURE, AND METHOD FOR PREPARING...

METHOD FOR PRODUCING A MICROELECTRONIC DEVICE

PIEZOELECTRIC ACTUATOR STACK WITH TAPERED SIDEWALL

METHOD OF ASSEMBLING MOBILE MICRO-MACHINES AND A MOBILE MICRO-MACHINE

PASSIVE MICROFLUIDIC VALVES

SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF

METHOD AND APPARATUS FOR EVALUATING ELECTROSTATIC OR NONLINEAR DEVICES

METHOD OF ACTUATING A SHAPE CHANGEABLE MEMBER, SHAPE CHANGEABLE MEM...

COUPLING A MAGNET WITH A MEMS DEVICE

MEMS AND METHOD OF MANUFACTURING THE SAME

MICROFLUIDIC MEMS DEVICE FOR FLUID EJECTION WITH PIEZOELECTRIC ACTU...

METHOD AND APPARATUS FOR EVALUATING ELECTROSTATIC OR NONLINEAR DEVICES

MICROFABRICATED ULTRASONIC TRANSDUCERS AND RELATED APPARATUS AND ME...

Electrostatic Actuator with Tri-Electrode Topology

MICROFABRICATED ULTRASONIC TRANSDUCERS AND RELATED APPARATUS AND ME...

INTEGRATION OF LAMINATE MEMS IN BBUL CORELESS PACKAGE

MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING SAME

OPTICAL MODULE

ENVIRONMENTALLY RESPONSIVE OPTICAL MICROSTRUCTURED HYBRID ACTUATOR...

ELECTROMAGNETIC MEMS DEVICE

ELECTRONIC DEVICE WITH SUSPENDED MASS

ACTUATOR

FORMING MAGNETIC MICROELECTROMECHANICAL INDUCTIVE COMPONENTS

FORMING MAGNETIC MICROELECTROMECHANICAL INDUCTIVE COMPONENTS

MOTION CONVERSION MECHANISMS

SURFACE MOUNT ACTUATOR

ENVIRONMENTALLY RESPONSIVE OPTICAL MICROSTRUCTURED HYBRID ACTUATOR...