Micro-mirrors, not used as optical switches

Industry

CPC
B81B2201/042

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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81BMICRO-STRUCTURAL DEVICES OR SYSTEMS B81B2201/00Specific applications of micro-electromechanical systems

Current Industry

B81B2201/042Micro-mirrors, not used as optical switches

Industries

Patents Grantslast 30 patents

Information Patent Grant
MEMS package with shock and vibration protection
- Patent number 11,975,961
- Issue date May 7, 2024
- BEIJING VOYAGER TECHNOLOGY CO., LTD.
- Youmin Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Actuator device and method for manufacturing actuator device
- Patent number 11,970,389
- Issue date Apr 30, 2024
- Hamamatsu Photonics K.K.
- Daiki Suzuki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Light deflection device, distance measurement device, and mobile body
- Patent number 11,971,537
- Issue date Apr 30, 2024
- Ricoh Company, Ltd.
- Kazuhiko Adachi
- B60 - VEHICLES IN GENERAL
Information Patent Grant
Actuator device
- Patent number 11,952,265
- Issue date Apr 9, 2024
- Hamamatsu Photonics K.K.
- Sadaharu Takimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical system (MEMS) structure and method of formation
- Patent number 11,953,674
- Issue date Apr 9, 2024
- Texas Instruments Incorporated
- Jose A. Martinez
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical device with a structure tiltable by piezoele...
- Patent number 11,953,813
- Issue date Apr 9, 2024
- STMicroelectronics S.r.l.
- Nicolo' Boni
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical device production method
- Patent number 11,953,675
- Issue date Apr 9, 2024
- Hamamatsu Photonics K.K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical component and method for producing a micromechanica...
- Patent number 11,940,618
- Issue date Mar 26, 2024
- Robert Bosch GmbH
- Alexander Eberspaecher
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method with stealth dicing process for fabricating MEMS semiconduct...
- Patent number 11,939,216
- Issue date Mar 26, 2024
- Infineon Technologies AG
- Andre Brockmeier
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device manufacturing method, MEMS device, and shutter apparatu...
- Patent number 11,932,535
- Issue date Mar 19, 2024
- Sumitomo Precision Products Co., LTD
- Gen Matsuoka
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Resonant MEMS device having a tiltable, piezoelectrically controlle...
- Patent number 11,933,966
- Issue date Mar 19, 2024
- STMicroelectronics S.r.l.
- Roberto Carminati
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Isolated protrusion/recession features in microelectromechanical sy...
- Patent number 11,932,529
- Issue date Mar 19, 2024
- Texas Instruments Incorporated
- Patrick Ian Oden
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical systems micromirrors and micromirror arrays
- Patent number 11,927,741
- Issue date Mar 12, 2024
- PRECISELEY MICROTECHNOLOGY CORP.
- Tiansheng Zhou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Vibrating mirror element and optical scanner
- Patent number 11,919,768
- Issue date Mar 5, 2024
- Funai Electric Co., Ltd.
- Kenji Tanehashi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Vibrating element
- Patent number 11,921,283
- Issue date Mar 5, 2024
- Funai Electric Co., Ltd.
- Kenichi Fujita
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical device production method
- Patent number 11,906,727
- Issue date Feb 20, 2024
- Hamamatsu Photonics K.K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical device
- Patent number 11,899,199
- Issue date Feb 13, 2024
- Hamamatsu Photonics K.K.
- Daiki Suzuki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device with a three-layer comb actuator structure and a two-la...
- Patent number 11,892,619
- Issue date Feb 6, 2024
- Lumentum Operations LLC
- Wenlin Jin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Mirror unit and optical module
- Patent number 11,879,731
- Issue date Jan 23, 2024
- Hamamatsu Photonics K.K.
- Tomofumi Suzuki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Strain-based sensing of dual-axis mirror rotation
- Patent number 11,880,031
- Issue date Jan 23, 2024
- Apple Inc.
- Nadav Osiroff
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Actuator systems and methods
- Patent number 11,879,524
- Issue date Jan 23, 2024
- C. Anthony Hester
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-mirror MEMS system
- Patent number 11,874,457
- Issue date Jan 16, 2024
- MARADIN LTD.
- Matan Naftali
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromachined mirror assembly with asymmetric structure
- Patent number 11,822,069
- Issue date Nov 21, 2023
- BEIJING VOYAGER TECHNOLOGY CO., LTD.
- Youmin Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Mirror assembly for light steering with reduced finger thickness
- Patent number 11,815,627
- Issue date Nov 14, 2023
- BEIJING VOYAGER TECHNOLOGY CO., LTD.
- Youmin Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Encapsulant barrier
- Patent number 11,807,522
- Issue date Nov 7, 2023
- Texas Instruments Incorporated
- Jane Qian Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS actuation device with sparse pulses
- Patent number 11,802,042
- Issue date Oct 31, 2023
- STMicroelectronics S.r.l.
- Davide Terzi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Mirror assembly for light steering with flexible support structure
- Patent number 11,796,638
- Issue date Oct 24, 2023
- BEIJING VOYAGER TECHNOLOGY CO., LTD.
- Youmin Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Vertically-shifting electrostatic actuator and optical scanner empl...
- Patent number 11,789,254
- Issue date Oct 17, 2023
- KOREA OPTRON CORP.
- Yun Goo Kim
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Structures for piezoelectric actuator to increase displacement and...
- Patent number 11,768,367
- Issue date Sep 26, 2023
- BEIJING VOYAGER TECHNOLOGY CO., LTD.
- Sae Won Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS stress reduction structure embedded into package
- Patent number 11,760,627
- Issue date Sep 19, 2023
- Invensense, Inc.
- Roberto Brioschi
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MEMS MIRROR DEVICE AND DISTANCE MEASURING APPARATUS
- Publication number 20240142770
- Publication date May 2, 2024
- Mitsubishi Electric Corporation
- Yoshiaki HIRATA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OPTICAL DEVICE
- Publication number 20240126070
- Publication date Apr 18, 2024
- HAMAMATSU PHOTONICS K. K.
- Daiki SUZUKI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OPTO-MECHANICAL STRUCTURE AND ASSOCIATED MANUFACTURING METHODS
- Publication number 20240118533
- Publication date Apr 11, 2024
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Thomas FURCATTE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MIRROR UNIT AND OPTICAL MODULE
- Publication number 20240110779
- Publication date Apr 4, 2024
- HAMAMATSU PHOTONICS K. K.
- Tomofumi Suzuki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEMS MICROMIRRORS AND MICROMIRROR ARRAYS
- Publication number 20240111148
- Publication date Apr 4, 2024
- Preciseley Microtechnology Corp.
- Tiansheng ZHOU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Support Device for One or More MEMS Components
- Publication number 20240101412
- Publication date Mar 28, 2024
- ROBERT BOSCH GmbH
- Joachim Friedl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE
- Publication number 20240083741
- Publication date Mar 14, 2024
- Rohm Co., Ltd.
- Daisuke NISHINOHARA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS AND APPARATUS FOR MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) D...
- Publication number 20240067519
- Publication date Feb 29, 2024
- TEXAS INSTRUMENTS INCORPORATED
- John Wesley Hamlin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND APPARATUS FOR THE OPTICAL CONTACT BONDING OF COMPONENTS
- Publication number 20240036345
- Publication date Feb 1, 2024
- Carl Zeiss SMT GMBH
- Stefan SCHUETTER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTROMECHANICAL MICROSYSTEM
- Publication number 20240034616
- Publication date Feb 1, 2024
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Laurent MOLLARD
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MIRROR ARRAYS WITH REDUCED COUPLING BETWEEN MIRRORS
- Publication number 20240025733
- Publication date Jan 25, 2024
- Calient Technologies, Inc.
- Andrew HOCKING
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MIRROR DEVICE WITH PIEZOELECTRIC ACTUATION AND MANUFACTURING P...
- Publication number 20240019688
- Publication date Jan 18, 2024
- STMicroelectronics S.r.l
- Massimiliano MERLI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTROSTATIC MEMS MICROMIRROR
- Publication number 20240019687
- Publication date Jan 18, 2024
- Huawei Technologies Co., Ltd
- Xiaoshi Dong
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SCANNING MIRROR SYSTEMS AND METHODS OF MANUFACTURE
- Publication number 20240012237
- Publication date Jan 11, 2024
- Magic Leap, Inc.
- Julien Gamet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MOVABLE DEVICE, MEMS DEVICE AND OPTICAL SCANNING APPARATUS
- Publication number 20240004185
- Publication date Jan 4, 2024
- MITSUMI ELECTRIC CO., LTD.
- Tomohiro TAIRA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL MIRROR DEVICE WITH PIEZOELECTRIC ACTUATION A...
- Publication number 20230408808
- Publication date Dec 21, 2023
- STMicroelectronics S.r.l
- Nicolo' BONI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMIRROR RESONANCE SUPRESSION USING CONFIGURABLE FILTER
- Publication number 20230384582
- Publication date Nov 30, 2023
- Microsoft Technology Licensing, LLC
- Wenjun LIAO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Package and Method for Encapsulating an MEMS Structure
- Publication number 20230382722
- Publication date Nov 30, 2023
- Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
- Frank SENGER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ACTUATOR, IN PARTICULAR A MICROMIRROR, WITH INCREASED DEFLECTA...
- Publication number 20230373781
- Publication date Nov 23, 2023
- HAHN-SCHICKARD-GESELLSCHAFT FUR ANGEWANDTE FORSCHUNG E.V.
- Jan Rockstroh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FLIP CHIP MICROMIRROR TECHNOLOGY
- Publication number 20230375822
- Publication date Nov 23, 2023
- Microsoft Technology Licensing, LLC
- Xiao Chuan ONG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PIEZOELECTRIC DRIVE ELEMENT
- Publication number 20230356997
- Publication date Nov 9, 2023
- Panasonic Intellectual Property Management Co., Ltd.
- Ryouichi TAKAYAMA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACTUATOR DEVICE
- Publication number 20230341676
- Publication date Oct 26, 2023
- HAMAMATSU PHOTONICKS K.K.
- Daiki SUZUKI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
HERMETICALLY SEALED MEMS MIRROR AND METHOD OF MANUFACTURE
- Publication number 20230324678
- Publication date Oct 12, 2023
- STMicroelectronics S.r.l
- Giorgio Allegato
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL MIRROR DEVICE WITH PIEZOELECTRIC ACTUATION H...
- Publication number 20230324674
- Publication date Oct 12, 2023
- STMicroelectronics S.r.l
- Nicolo' BONI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OPTICAL SCANNING DEVICE, DRIVING METHOD OF OPTICAL SCANNING DEVICE,...
- Publication number 20230314793
- Publication date Oct 5, 2023
- FUJIFILM CORPORATION
- Shinichiro Sonoda
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SYSTEMS AND METHODS TO REDUCE STICTION IN MEMS DEVICES
- Publication number 20230305291
- Publication date Sep 28, 2023
- TEXAS INSTRUMENTS INCORPORATED
- Lisa Wesneski
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
3D DOME WAFER-LEVEL PACKAGE FOR OPTICAL MEMS MIRROR WITH REDUCED FO...
- Publication number 20230288695
- Publication date Sep 14, 2023
- INFINEON TECHNOLOGIES AG
- Andre BROCKMEIER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
BIAXIAL MICROELECTROMECHANICAL MIRROR DEVICE WITH PIEZOELECTRIC ACT...
- Publication number 20230288696
- Publication date Sep 14, 2023
- STMicroelectronics S.r.l
- Nicolo' BONI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
GRATING REFLECTOR
- Publication number 20230271824
- Publication date Aug 31, 2023
- DANMARKS TEKNISKE UNIVERSITET
- Kresten Yvind
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SYSTEM AND METHOD FOR MEMS DEVICES
- Publication number 20230273423
- Publication date Aug 31, 2023
- TEXAS INSTRUMENTS INCORPORATED
- Toby Linder
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Micro-mirrors, not used as optical switches

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

MEMS package with shock and vibration protection

Actuator device and method for manufacturing actuator device

Light deflection device, distance measurement device, and mobile body

Actuator device

Microelectromechanical system (MEMS) structure and method of formation

Microelectromechanical device with a structure tiltable by piezoele...

Optical device production method

Micromechanical component and method for producing a micromechanica...

Method with stealth dicing process for fabricating MEMS semiconduct...

MEMS device manufacturing method, MEMS device, and shutter apparatu...

Resonant MEMS device having a tiltable, piezoelectrically controlle...

Isolated protrusion/recession features in microelectromechanical sy...

Micro-electro-mechanical systems micromirrors and micromirror arrays

Vibrating mirror element and optical scanner

Vibrating element

Optical device production method

Optical device

MEMS device with a three-layer comb actuator structure and a two-la...

Mirror unit and optical module

Strain-based sensing of dual-axis mirror rotation

Actuator systems and methods

Micro-mirror MEMS system

Micromachined mirror assembly with asymmetric structure

Mirror assembly for light steering with reduced finger thickness

Encapsulant barrier

MEMS actuation device with sparse pulses

Mirror assembly for light steering with flexible support structure

Vertically-shifting electrostatic actuator and optical scanner empl...

Structures for piezoelectric actuator to increase displacement and...

MEMS stress reduction structure embedded into package

Patents Applicationslast 30 patents

MEMS MIRROR DEVICE AND DISTANCE MEASURING APPARATUS

OPTICAL DEVICE

OPTO-MECHANICAL STRUCTURE AND ASSOCIATED MANUFACTURING METHODS

MIRROR UNIT AND OPTICAL MODULE

MICRO-ELECTRO-MECHANICAL SYSTEMS MICROMIRRORS AND MICROMIRROR ARRAYS

Support Device for One or More MEMS Components

MEMS DEVICE

METHODS AND APPARATUS FOR MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) D...

METHOD AND APPARATUS FOR THE OPTICAL CONTACT BONDING OF COMPONENTS

ELECTROMECHANICAL MICROSYSTEM

MEMS MIRROR ARRAYS WITH REDUCED COUPLING BETWEEN MIRRORS

MEMS MIRROR DEVICE WITH PIEZOELECTRIC ACTUATION AND MANUFACTURING P...

ELECTROSTATIC MEMS MICROMIRROR

SCANNING MIRROR SYSTEMS AND METHODS OF MANUFACTURE

MOVABLE DEVICE, MEMS DEVICE AND OPTICAL SCANNING APPARATUS

MICROELECTROMECHANICAL MIRROR DEVICE WITH PIEZOELECTRIC ACTUATION A...

MICROMIRROR RESONANCE SUPRESSION USING CONFIGURABLE FILTER

MEMS Package and Method for Encapsulating an MEMS Structure

MEMS ACTUATOR, IN PARTICULAR A MICROMIRROR, WITH INCREASED DEFLECTA...

FLIP CHIP MICROMIRROR TECHNOLOGY

PIEZOELECTRIC DRIVE ELEMENT

ACTUATOR DEVICE

HERMETICALLY SEALED MEMS MIRROR AND METHOD OF MANUFACTURE

MICROELECTROMECHANICAL MIRROR DEVICE WITH PIEZOELECTRIC ACTUATION H...

OPTICAL SCANNING DEVICE, DRIVING METHOD OF OPTICAL SCANNING DEVICE,...

SYSTEMS AND METHODS TO REDUCE STICTION IN MEMS DEVICES

3D DOME WAFER-LEVEL PACKAGE FOR OPTICAL MEMS MIRROR WITH REDUCED FO...

BIAXIAL MICROELECTROMECHANICAL MIRROR DEVICE WITH PIEZOELECTRIC ACT...

GRATING REFLECTOR

SYSTEM AND METHOD FOR MEMS DEVICES