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H01J37/32192
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H
ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00
Discharge tubes with provision for introducing objects or material to be exposed to the discharge
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H01J37/32192
Microwave generated discharge
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last 30 patents
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Patent Grant
Cylindrical cavity with impedance shifting by irises in a power-sup...
Patent number
11,972,930
Issue date
Apr 30, 2024
Applied Materials, Inc.
Satoru Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for parts cleaning
Patent number
11,967,491
Issue date
Apr 23, 2024
Semes Co., Ltd.
Soon-Cheon Cho
B08 - CLEANING
Information
Patent Grant
Substrate processing apparatus having electrostatic chuck and subst...
Patent number
11,929,251
Issue date
Mar 12, 2024
ASM IP Holding B.V.
Toshihisa Nozawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Temperature-controlled chemical processing reactor
Patent number
11,923,176
Issue date
Mar 5, 2024
LytEn, Inc.
Michael W. Stowell
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for a treatment to deposit a barrier coating
Patent number
11,898,241
Issue date
Feb 13, 2024
INNOVATIVE SYSTEMS ET TECHNOLOGIES (ISYTECH)
Nasser Beldi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Gas supply apparatus and gas supply method
Patent number
11,866,825
Issue date
Jan 9, 2024
Tokyo Electron Limited
Hiroyuki Hayashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Semiconductor manufacturing apparatus and manufacturing method of s...
Patent number
11,859,286
Issue date
Jan 2, 2024
Kioxia Corporation
Yuya Matsubara
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods and apparatus for microwave plasma assisted chemical vapor...
Patent number
11,854,775
Issue date
Dec 26, 2023
Board of Trustees of Michigan State University
Timothy A. Grotjohn
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Spheroidal dehydrogenated metals and metal alloy particles
Patent number
11,839,919
Issue date
Dec 12, 2023
6K Inc.
Kamal Hadidi
B22 - CASTING POWDER METALLURGY
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
11,842,885
Issue date
Dec 12, 2023
HITACHI HIGH-TECH CORPORATION
Tooru Aramaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for the fabrication of diamond by shockwaves
Patent number
11,802,053
Issue date
Oct 31, 2023
Daniel Hodes
C01 - INORGANIC CHEMISTRY
Information
Patent Grant
DC bulk conductive ceramic with low RF and microwave loss
Patent number
11,773,026
Issue date
Oct 3, 2023
Euclid Techlabs, LLC
Alexei Kanareykin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma observation system and plasma observation method
Patent number
11,749,511
Issue date
Sep 5, 2023
Tokyo Electron Limited
Ryoji Yamazaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Modular microwave source with local lorentz force
Patent number
11,721,532
Issue date
Aug 8, 2023
Applied Materials, Inc.
Philip Allan Kraus
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods and apparatus for microwave plasma assisted chemical vapor...
Patent number
11,702,749
Issue date
Jul 18, 2023
Board of Trustees of Michigan State University
Jes Asmussen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing device
Patent number
11,682,542
Issue date
Jun 20, 2023
HITACHI HIGH-TECH CORPORATION
Tooru Aramaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus
Patent number
11,658,011
Issue date
May 23, 2023
HITACHI HIGH-TECH CORPORATION
Yoshiharu Inoue
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Thin film formation apparatus and method using plasma
Patent number
11,646,203
Issue date
May 9, 2023
Samsung Electronics Co., Ltd.
Junyeong Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Producing method for producing magnesium hydride, power generation...
Patent number
11,643,704
Issue date
May 9, 2023
SE CORPORATION
Tsutomu Takizawa
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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Patent Grant
Systems and methods for processing gases
Patent number
11,634,323
Issue date
Apr 25, 2023
Transform Materials LLC
David S. Soane
C10 - PETROLEUM, GAS OR COKE INDUSTRIES TECHNICAL GASES CONTAINING CARBON MON...
Information
Patent Grant
Systems and methods for processing gases
Patent number
11,634,324
Issue date
Apr 25, 2023
Transform Materials LLC
David S. Soane
C10 - PETROLEUM, GAS OR COKE INDUSTRIES TECHNICAL GASES CONTAINING CARBON MON...
Information
Patent Grant
Inline microwave batch degas chamber
Patent number
11,629,409
Issue date
Apr 18, 2023
Applied Materials, Inc.
Ribhu Gautam
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Complex modality reactor for materials production and synthesis
Patent number
11,623,197
Issue date
Apr 11, 2023
LytEn, Inc.
Michael W. Stowell
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma device using coaxial waveguide, and substrate treatment method
Patent number
11,605,528
Issue date
Mar 14, 2023
ASM IP Holding B.V.
Jun Yoshikawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus, data processing apparatus and data pro...
Patent number
11,605,530
Issue date
Mar 14, 2023
HITACHI HIGH-TECH CORPORATION
Seiichi Watanabe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Spheroidal titanium metallic powders with custom microstructures
Patent number
11,577,314
Issue date
Feb 14, 2023
6K Inc.
Kamal Hadidi
B22 - CASTING POWDER METALLURGY
Information
Patent Grant
Atmospheric cold plasma jet coating and surface treatment
Patent number
11,560,627
Issue date
Jan 24, 2023
Starfire Industries LLC
Brian Edward Jurczyk
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma processing apparatus
Patent number
11,508,556
Issue date
Nov 22, 2022
Tokyo Electron Limited
Taro Ikeda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Microwave plasma reactor for manufacturing synthetic diamond material
Patent number
11,488,805
Issue date
Nov 1, 2022
Element Six Technologies Limited
John Robert Brandon
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Cleaning method
Patent number
11,488,813
Issue date
Nov 1, 2022
Tokyo Electron Limited
Satoshi Itoh
B08 - CLEANING
Patents Applications
last 30 patents
Information
Patent Application
MODULAR MICROWAVE SOURCE WITH INTEGRATED OPTICAL SENSORS
Publication number
20240153795
Publication date
May 9, 2024
Applied Materials, Inc.
Adam Fischbach
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20240120183
Publication date
Apr 11, 2024
Tokyo Electron Limited
Makoto WADA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20240047194
Publication date
Feb 8, 2024
Tokyo Electron Limited
Kenichi KOTE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SYSTEMS AND METHODS FOR PROCESSING GASES
Publication number
20240010492
Publication date
Jan 11, 2024
TRANSFORM MATERIALS LLC
David S. Soane
C01 - INORGANIC CHEMISTRY
Information
Patent Application
METHOD AND DEVICE FOR THE OUTER-WALL AND/OR INNER-WALL COATING OF H...
Publication number
20230323529
Publication date
Oct 12, 2023
RHEINISCH-WESTFÄLISCHE TECHNISCHE HOCHSCHULE (RWTH) AACHEN KÖRPERSCHAFT DES Ö...
Montgomery JARITZ
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Apparatus And Method Of Treating Substrate
Publication number
20230298860
Publication date
Sep 21, 2023
SEMES CO., LTD.
Seungjun OH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING DEVICE AND PLASMA PROCESSING METHOD
Publication number
20230290623
Publication date
Sep 14, 2023
ULVAC, Inc.
Kenta Doi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20230282491
Publication date
Sep 7, 2023
HITACHI HIGH-TECH CORPORATION
Naoyuki KOFUJI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DIAMONDS HAVING ARTIFICIALLY EMBEDDED INCLUSIONS
Publication number
20230210231
Publication date
Jul 6, 2023
EllansaLabs Inc.
Omar Besim HAKIM
A44 - HABERDASHERY JEWELLERY
Information
Patent Application
SPHEROIDAL TITANIUM METALLIC POWDERS WITH CUSTOM MICROSTRUCTURES
Publication number
20230211407
Publication date
Jul 6, 2023
6K Inc.
Kamal Hadidi
B22 - CASTING POWDER METALLURGY
Information
Patent Application
METHOD OF TREATING SUBSTRATE
Publication number
20230207290
Publication date
Jun 29, 2023
SEMES CO., LTD.
Sang Lim KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COMPLEX MODALITY REACTOR FOR MATERIALS PRODUCTION AND SYNTHESIS
Publication number
20230201788
Publication date
Jun 29, 2023
Lyten, Inc.
Michael W. Stowell
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VAPOR-PHASE PRECURSOR SEEDING FOR DIAMOND FILM DEPOSITION
Publication number
20230175120
Publication date
Jun 8, 2023
Applied Materials, Inc.
Sze Chieh Tan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ATMOSPHERIC COLD PLASMA JET COATING AND SURFACE TREATMENT
Publication number
20230160067
Publication date
May 25, 2023
Starfire Industires, LLC
Brian Edward Jurczyk
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
OPTICAL SYSTEM FOR MONITORING PLASMA REACTIONS AND REACTORS
Publication number
20230110414
Publication date
Apr 13, 2023
RECARBON, INC.
Curtis Peter Tom
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
ATMOSPHERIC PRESSURE REMOTE PLASMA CVD DEVICE, FILM FORMATION METHO...
Publication number
20230110364
Publication date
Apr 13, 2023
Suntory Holdings Limited
Masanori Nishiyama
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
Publication number
20230061151
Publication date
Mar 2, 2023
TOKYO ELECTRON LIMITED
Hideki YUASA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA PROCESSING APPARATUS AND LID MEMBER
Publication number
20230058928
Publication date
Feb 23, 2023
TOKYO ELECTRON LIMITED
Hiroshi KONDO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FILM FORMATION METHOD AND FILM FORMATION APPARATUS
Publication number
20230042099
Publication date
Feb 9, 2023
Tokyo Electron Limited
Makoto WADA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
APPARATUS AND METHOD FOR TREATING SUBSTRATE
Publication number
20230005715
Publication date
Jan 5, 2023
SEMES CO., LTD.
Jin Woo CHOI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
Publication number
20220406611
Publication date
Dec 22, 2022
KIOXIA Corporation
Atsushi TAKAHASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MODULAR MICROWAVE PLASMA SOURCE
Publication number
20220344131
Publication date
Oct 27, 2022
Applied Materials, Inc.
Philip Allan KRAUS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MICROWAVE PLASMA PROCESSING APPARATUS
Publication number
20220277935
Publication date
Sep 1, 2022
TOKYO ELECTRON LIMITED
Taro IKEDA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD AND APPARATUS OF LOW TEMPERATURE PLASMA ENHANCED CHEMICAL VA...
Publication number
20220254641
Publication date
Aug 11, 2022
Applied Materials, Inc.
Thai Cheng Chua
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
Publication number
20220235462
Publication date
Jul 28, 2022
TOKYO ELECTRON LIMITED
Hirokazu UEDA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SPHEROIDAL DEHYDROGENATED METALS AND METAL ALLOY PARTICLES
Publication number
20220118517
Publication date
Apr 21, 2022
6K Inc.
Kamal Hadidi
B22 - CASTING POWDER METALLURGY
Information
Patent Application
TREATMENT METHOD AND DEVICE FOR DEPOSITING A BARRIER-EFFECT COATING
Publication number
20220112595
Publication date
Apr 14, 2022
INNOVATIVE SYSTEMS ET TECHNOLOGIES (ISYTECH)
Nasser BELDI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CYLINDRICAL CAVITY WITH IMPEDANCE SHIFTING BY IRISES IN A POWER-SUP...
Publication number
20220093364
Publication date
Mar 24, 2022
Applied Materials, Inc.
Satoru Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DC BULK CONDUCTIVE CERAMIC WITH LOW RF AND MICROWAVE LOSS
Publication number
20220081366
Publication date
Mar 17, 2022
Euclid TechLabs, LLC
Alexei Kanareykin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR PROCESSING GASES
Publication number
20220041439
Publication date
Feb 10, 2022
TRANSFORM MATERIALS LLC
David S. Soane
C07 - ORGANIC CHEMISTRY