Mixing in close vicinity to the substrate

Industry

CPC
C23C16/45514

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/45514Mixing in close vicinity to the substrate

Industries

Patents Grantslast 30 patents

Information Patent Grant
High pressure spatial chemical vapor deposition system and related...
- Patent number 11,885,018
- Issue date Jan 30, 2024
- Lehigh University
- Siddha Pimputkar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heteroalkylcyclopentadienyl indium-containing precursors and proces...
- Patent number 11,859,283
- Issue date Jan 2, 2024
- L'Air Liquide Societe Anonyme pour l'Etude et l'Exploitation des Procedes Geo...
- Antoine Bruneau
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metal chalcogenide film and method and device for manufacturing the...
- Patent number 11,708,633
- Issue date Jul 25, 2023
- Samsung Electronics Co., Ltd.
- Kyung-Eun Byun
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Metal oxide film formation method
- Patent number 11,555,245
- Issue date Jan 17, 2023
- TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL SYSTEMS CORPORATION
- Takahiro Hiramatsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma source and surface treatment method
- Patent number 11,352,696
- Issue date Jun 7, 2022
- Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
- Yves Lodewijk Maria Creyghton
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fluid distributing device for a thin-film deposition apparatus, rel...
- Patent number 10,982,325
- Issue date Apr 20, 2021
- Picosun Oy
- Juhana Kostamo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus including metallized-ceramic tubes for radio-frequency an...
- Patent number 10,964,545
- Issue date Mar 30, 2021
- Lam Research Corporation
- Ramkishan Rao Lingampalli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and system for the localized deposit of metal on a surface
- Patent number 10,865,477
- Issue date Dec 15, 2020
- Illinois Tool Works Inc.
- Zhigang Xiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas distribution showerhead for semiconductor processing
- Patent number 10,829,855
- Issue date Nov 10, 2020
- Applied Materials, Inc.
- Anh N. Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hard titanium aluminum nitride coating, hard-coated tool, and their...
- Patent number 10,767,258
- Issue date Sep 8, 2020
- MITSUBISHI HITACHI TOOL ENGINEERING, LTD.
- Yuuzoh Fukunaga
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Module including metallized ceramic tubes for RF and gas delivery
- Patent number 10,431,467
- Issue date Oct 1, 2019
- Lam Research Corporation
- Ramkishan Rao Lingampalli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fabrication of thermally stable nanocavities and particle-in-cavity...
- Patent number 10,400,322
- Issue date Sep 3, 2019
- The University of Florida Research Foundation, Inc.
- Cheng Xu
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Gas mixing device and substrate processing apparatus
- Patent number 10,266,945
- Issue date Apr 23, 2019
- Tokyo Electron Limited
- Jun Yamashita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for forming a film on a substrate using multi-port injectio...
- Patent number 10,262,859
- Issue date Apr 16, 2019
- ASM IP Holding B.V.
- Joe Margetis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate pedestal module including metallized ceramic tubes for RF...
- Patent number 10,147,610
- Issue date Dec 4, 2018
- Lam Research Corporation
- Ramkishan Rao Lingampalli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation device
- Patent number 10,121,931
- Issue date Nov 6, 2018
- Toshiba Mitsubishi-Electric Industrial Systems Corporation
- Hiroyuki Orita
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Film forming apparatus
- Patent number 10,118,191
- Issue date Nov 6, 2018
- TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL SYSTEMS CORPORATION
- Takahiro Shirahata
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Film forming method using reversible decomposition reaction
- Patent number 9,976,217
- Issue date May 22, 2018
- Tokyo Electron Limited
- Atsushi Gomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-gas straight channel showerhead
- Patent number 9,644,267
- Issue date May 9, 2017
- Applied Materials, Inc.
- Brian H. Burrows
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor manufacturing apparatus and method for cleaning same
- Patent number 9,566,620
- Issue date Feb 14, 2017
- Kabushiki Kaisha Toshiba
- Kenichiro Toratani
- B08 - CLEANING
Information Patent Grant
Apparatus for depositing thin film coatings and method of depositio...
- Patent number 9,540,277
- Issue date Jan 10, 2017
- Pilkington Group Limited
- Douglas M. Nelson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas showerhead, method for making the same and thin film growth rea...
- Patent number 9,534,724
- Issue date Jan 3, 2017
- ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
- Yong Jiang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus of chemical vapor deposition with a showerhead regulating...
- Patent number 9,476,121
- Issue date Oct 25, 2016
- Piezonics Co., Ltd.
- Chul Soo Byun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus of chemical vapor deposition with a showerhead regulating...
- Patent number 9,469,900
- Issue date Oct 18, 2016
- PIEZONICS Co., Ltd.; Korea Institute of Industrial Technology
- Chul Soo Byun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Shower head, plasma processing apparatus and plasma processing method
- Patent number 9,466,468
- Issue date Oct 11, 2016
- Tokyo Electron Limited
- Nobuyuki Okayama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-gas centrally cooled showerhead design
- Patent number 9,449,859
- Issue date Sep 20, 2016
- Applied Materials, Inc.
- Eddy J. Song
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-channel gas-delivery system
- Patent number 9,441,295
- Issue date Sep 13, 2016
- SolarCity Corporation
- Yan Rozenzon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor reaction chamber with plasma capabilities
- Patent number 9,412,564
- Issue date Aug 9, 2016
- ASM IP Holding B.V.
- Robert Brennan Milligan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Surface treatment and deposition for reduced outgassing
- Patent number 9,404,178
- Issue date Aug 2, 2016
- Applied Materials, Inc.
- Jingmei Liang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for combinatorial gas distribution through a m...
- Patent number 9,175,391
- Issue date Nov 3, 2015
- Intermolecular, Inc.
- Richard Endo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
HIGH PRESSURE SPATIAL CHEMICAL VAPOR DEPOSITION SYSTEM AND RELATED...
- Publication number 20240209502
- Publication date Jun 27, 2024
- LEHIGH UNIVERSITY
- Siddha PIMPUTKAR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF DEPOSITING A TRANSITION METAL DICHALCOGENIDE
- Publication number 20240124975
- Publication date Apr 18, 2024
- IMEC vzw
- Benjamin GROVEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHODS FOR COMBINATORIAL MATERIAL SCREENING AND DISC...
- Publication number 20240052485
- Publication date Feb 15, 2024
- The University of British Columbia
- Konrad WALUS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL CHALCOGENIDE FILM AND METHOD AND DEVICE FOR MANUFACTURING THE...
- Publication number 20230313365
- Publication date Oct 5, 2023
- Samsung Electronics Co., Ltd.
- Kyung-Eun BYUN
- B22 - CASTING POWDER METALLURGY
Information Patent Application
GAS INJECTION APPARATUS FOR LAYER DEPOSITION
- Publication number 20230295806
- Publication date Sep 21, 2023
- Hanwha Corporation
- Sang Bo KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HYBRID CHEMICAL AND PHYSICAL VAPOR DEPOSITION OF TRANSITION-METAL-A...
- Publication number 20230200245
- Publication date Jun 22, 2023
- UNIVERSITY OF HOUSTON SYSTEM
- Jae-Hyun Ryou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS INJECTOR FOR A VERTICAL FURNACE
- Publication number 20230111229
- Publication date Apr 13, 2023
- ASM IP HOLDING B.V.
- Theodorus G.M. Oosterlaken
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SURFACE ENGINEERED METAL SUBSTRATES AND RELATED METHODS
- Publication number 20220275507
- Publication date Sep 1, 2022
- Novelis Inc.
- Thomas J. Beck
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HETEROALKYLCYCLOPENTADIENYL INDIUM-CONTAINING PRECURSORS AND PROCES...
- Publication number 20220033966
- Publication date Feb 3, 2022
- L'Air Liquide, Societe Anonyme pour I'Etude et I'Exploitation des procedes Ge...
- Antoine BRUNEAU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH PRESSURE SPATIAL CHEMICAL VAPOR DEPOSITION SYSTEM AND RELATED...
- Publication number 20210371980
- Publication date Dec 2, 2021
- LEHIGH UNIVERSITY
- Siddha PIMPUTKAR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND SYSTEM FOR THE LOCALIZED DEPOSIT OF METAL ON A SURFACE
- Publication number 20210115558
- Publication date Apr 22, 2021
- Illinois Tool Works Inc.
- Zhigang Xiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FLUID DISTRIBUTING DEVICE FOR A THIN-FILM DEPOSITION APPARATUS, REL...
- Publication number 20210087682
- Publication date Mar 25, 2021
- Picosun Oy
- Juhana KOSTAMO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
- Publication number 20200149168
- Publication date May 14, 2020
- TOKYO ELECTRON LIMITED
- Manabu HONMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CORROSION RESISTANT METAL AND METAL ALLOY COATINGS CONTAINING SUPER...
- Publication number 20200080199
- Publication date Mar 12, 2020
- University of Virginia Patent Foundation
- Haydn N. G. Wadley
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MODULE INCLUDING METALLIZED CERAMIC TUBES FOR RF AND GAS DELIVERY
- Publication number 20200051822
- Publication date Feb 13, 2020
- LAM RESEARCH CORPORATION
- Ramkishan Rao Lingampalli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MODULE INCLUDING METALLIZED CERAMIC TUBES FOR RF AND GAS DELIVERY
- Publication number 20190109008
- Publication date Apr 11, 2019
- LAM RESEARCH CORPORATION
- Ramkishan Rao Lingampalli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20190093224
- Publication date Mar 28, 2019
- Kokusai Electric Corporation
- Ryosuke YOSHIDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PEDESTAL MODULE INCLUDING METALLIZED CERAMIC TUBES FOR RF...
- Publication number 20180350610
- Publication date Dec 6, 2018
- LAM RESEARCH CORPORATION
- Ramkishan Rao Lingampalli
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HARD TITANIUM ALUMINUM NITRIDE COATING, HARD-COATED TOOL, AND THEIR...
- Publication number 20180305811
- Publication date Oct 25, 2018
- Mitsubishi Hitachi Tool Engineering, Ltd.
- Yuuzoh Fukunaga
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
EPITAXIAL CHAMBER WITH CUSTOMIZABLE FLOW INJECTION
- Publication number 20180209043
- Publication date Jul 26, 2018
- SHU-KWAN LAU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RADIAL AND THICKNESS CONTROL VIA BIASED MULTI-PORT INJECTION SETTINGS
- Publication number 20180151358
- Publication date May 31, 2018
- ASM IP HOLDING B.V.
- Joe Margetis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VORTICAL ATOMIZING NOZZLE ASSEMBLY, VAPORIZER, AND RELATED METHODS...
- Publication number 20180066363
- Publication date Mar 8, 2018
- TOKYO ELECTRON LIMITED
- Ronald Nasman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Gas Mixing Device and Substrate Processing Apparatus
- Publication number 20170362704
- Publication date Dec 21, 2017
- TOKYO ELECTRON LIMITED
- Jun YAMASHITA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA SOURCE AND SURFACE TREATMENT METHOD
- Publication number 20170137939
- Publication date May 18, 2017
- NEDERLANDSE ORGANISATIE VOOR TOEGEPAST- NATUURWETENSCHAPPELIJK ONDERZOEK TNO
- Yves Lodewijk Maria Creyghton
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Manufacturing Semiconductor Device
- Publication number 20170067159
- Publication date Mar 9, 2017
- Hitachi Kokusai Electric Inc.
- Noriyuki ISOBE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR MANUFACTURING SILICON CARBIDE SUBSTRATE
- Publication number 20160348274
- Publication date Dec 1, 2016
- Sumitomo Electric Industries, Ltd.
- Jun GENBA
- C30 - CRYSTAL GROWTH
Information Patent Application
GAS DISTRIBUTION SYSTEM FOR A REACTION CHAMBER
- Publication number 20160115592
- Publication date Apr 28, 2016
- ECOSOLIFER AG
- Zsolt Vadadi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CORROSION RESISTANT METAL AND METAL ALLOY COATINGS CONTAINING SUPER...
- Publication number 20160068957
- Publication date Mar 10, 2016
- University of Virginia Patent Foundation
- Haydn N.G. Wadley
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20160024659
- Publication date Jan 28, 2016
- Hitachi Kokusai Electric Inc.
- Satoshi SHIMAMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF LOW TEMPERATURE DEPOSITION OF CERAMIC THIN FILMS
- Publication number 20150329965
- Publication date Nov 19, 2015
- Prasad Narhar Gadgil
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Mixing in close vicinity to the substrate

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

High pressure spatial chemical vapor deposition system and related...

Heteroalkylcyclopentadienyl indium-containing precursors and proces...

Metal chalcogenide film and method and device for manufacturing the...

Metal oxide film formation method

Plasma source and surface treatment method

Fluid distributing device for a thin-film deposition apparatus, rel...

Apparatus including metallized-ceramic tubes for radio-frequency an...

Method and system for the localized deposit of metal on a surface

Gas distribution showerhead for semiconductor processing

Hard titanium aluminum nitride coating, hard-coated tool, and their...

Module including metallized ceramic tubes for RF and gas delivery

Fabrication of thermally stable nanocavities and particle-in-cavity...

Gas mixing device and substrate processing apparatus

Process for forming a film on a substrate using multi-port injectio...

Substrate pedestal module including metallized ceramic tubes for RF...

Film formation device

Film forming apparatus

Film forming method using reversible decomposition reaction

Multi-gas straight channel showerhead

Semiconductor manufacturing apparatus and method for cleaning same

Apparatus for depositing thin film coatings and method of depositio...

Gas showerhead, method for making the same and thin film growth rea...

Apparatus of chemical vapor deposition with a showerhead regulating...

Apparatus of chemical vapor deposition with a showerhead regulating...

Shower head, plasma processing apparatus and plasma processing method

Multi-gas centrally cooled showerhead design

Multi-channel gas-delivery system

Semiconductor reaction chamber with plasma capabilities

Surface treatment and deposition for reduced outgassing

Apparatus and method for combinatorial gas distribution through a m...

Patents Applicationslast 30 patents

HIGH PRESSURE SPATIAL CHEMICAL VAPOR DEPOSITION SYSTEM AND RELATED...

METHOD OF DEPOSITING A TRANSITION METAL DICHALCOGENIDE

APPARATUS AND METHODS FOR COMBINATORIAL MATERIAL SCREENING AND DISC...

METAL CHALCOGENIDE FILM AND METHOD AND DEVICE FOR MANUFACTURING THE...

GAS INJECTION APPARATUS FOR LAYER DEPOSITION

HYBRID CHEMICAL AND PHYSICAL VAPOR DEPOSITION OF TRANSITION-METAL-A...

GAS INJECTOR FOR A VERTICAL FURNACE

SURFACE ENGINEERED METAL SUBSTRATES AND RELATED METHODS

HETEROALKYLCYCLOPENTADIENYL INDIUM-CONTAINING PRECURSORS AND PROCES...

HIGH PRESSURE SPATIAL CHEMICAL VAPOR DEPOSITION SYSTEM AND RELATED...

METHOD AND SYSTEM FOR THE LOCALIZED DEPOSIT OF METAL ON A SURFACE

FLUID DISTRIBUTING DEVICE FOR A THIN-FILM DEPOSITION APPARATUS, REL...

FILM FORMING APPARATUS AND FILM FORMING METHOD

CORROSION RESISTANT METAL AND METAL ALLOY COATINGS CONTAINING SUPER...

MODULE INCLUDING METALLIZED CERAMIC TUBES FOR RF AND GAS DELIVERY

MODULE INCLUDING METALLIZED CERAMIC TUBES FOR RF AND GAS DELIVERY

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

SUBSTRATE PEDESTAL MODULE INCLUDING METALLIZED CERAMIC TUBES FOR RF...

HARD TITANIUM ALUMINUM NITRIDE COATING, HARD-COATED TOOL, AND THEIR...

EPITAXIAL CHAMBER WITH CUSTOMIZABLE FLOW INJECTION

RADIAL AND THICKNESS CONTROL VIA BIASED MULTI-PORT INJECTION SETTINGS

VORTICAL ATOMIZING NOZZLE ASSEMBLY, VAPORIZER, AND RELATED METHODS...

Gas Mixing Device and Substrate Processing Apparatus

PLASMA SOURCE AND SURFACE TREATMENT METHOD

Method of Manufacturing Semiconductor Device

METHOD AND APPARATUS FOR MANUFACTURING SILICON CARBIDE SUBSTRATE

GAS DISTRIBUTION SYSTEM FOR A REACTION CHAMBER

CORROSION RESISTANT METAL AND METAL ALLOY COATINGS CONTAINING SUPER...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

METHODS OF LOW TEMPERATURE DEPOSITION OF CERAMIC THIN FILMS