Membership
Tour
Register
Log in
Multilayer resist systems
Follow
Industry
CPC
G03F7/094
This industry / category may be too specific. Please go to a parent level for more data
Parent Industries
G
PHYSICS
G03
Photography
G03F
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES
G03F7/00
Photomechanical
Current Industry
G03F7/094
Multilayer resist systems
Industries
Overview
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Solvent compatible nozzle plate
Patent number
11,958,292
Issue date
Apr 16, 2024
Funai Electric Co., Ltd.
Sean T. Weaver
B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information
Patent Grant
Method for manufacturing semiconductor device
Patent number
11,948,797
Issue date
Apr 2, 2024
Mitsubishi Electric Corporation
Takahiro Ueno
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Coating compositions and methods of forming electronic devices
Patent number
11,940,732
Issue date
Mar 26, 2024
Rohm and Haas Electronic Materials LLC
Sheng Liu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Monomers, polymers and lithographic compositions comprising same
Patent number
11,932,713
Issue date
Mar 19, 2024
Rohm and Haas Electronic Materials LLC
Emad Aqad
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Fabricating a device using a multilayer stack
Patent number
11,935,748
Issue date
Mar 19, 2024
Google LLC
Anthony Edward Megrant
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sulfonium salt, photoacid generator, curable composition, and resis...
Patent number
11,926,581
Issue date
Mar 12, 2024
SAN-APRO LIMITED
Takuto Nakao
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Hard mask-forming composition and method for manufacturing electron...
Patent number
11,921,425
Issue date
Mar 5, 2024
Tokyo Ohka Kogyo Co., Ltd.
Junichi Tsuchiya
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Polyethylene film and dry film resist
Patent number
11,914,297
Issue date
Feb 27, 2024
TAMAPOLY CO., LTD.
Shinichi Oya
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Ethynyl derived composite, a composition comprising thereof, a meth...
Patent number
11,914,296
Issue date
Feb 27, 2024
Merck Patent GmbH
Shigemasa Nakasugi
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Material for forming underlayer film, resist underlayer film, metho...
Patent number
11,886,119
Issue date
Jan 30, 2024
Mitsui Chemicals, Inc.
Koji Inoue
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Grant
Material for forming organic film, substrate for manufacturing semi...
Patent number
11,886,118
Issue date
Jan 30, 2024
Shin-Etsu Chemical Co., Ltd.
Daisuke Kori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Film structure for electric field guided photoresist patterning pro...
Patent number
11,880,137
Issue date
Jan 23, 2024
Applied Materials, Inc.
Huixiong Dai
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Silicon-containing layer-forming composition, and method for produc...
Patent number
11,881,400
Issue date
Jan 23, 2024
Central Glass Company, Limited
Junya Nakatsuji
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for preparing indium pillar solder, chip substrate and chip
Patent number
11,869,861
Issue date
Jan 9, 2024
TENCENT TECHNOLOGY (SHENZHEN) COMPANY LIMITED
Wenlong Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-metal fill with self-aligned patterning and dielectric with v...
Patent number
11,860,550
Issue date
Jan 2, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Tai-I Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Imprint method, imprint apparatus, and film formation apparatus
Patent number
11,852,985
Issue date
Dec 26, 2023
Kioxia Corporation
Takeshi Higuchi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Material for forming organic film, patterning process, and polymer
Patent number
11,851,530
Issue date
Dec 26, 2023
Shin-Etsu Chemical Co., Ltd.
Daisuke Kori
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Multi-layer photo etching mask including organic and inorganic mate...
Patent number
11,830,736
Issue date
Nov 28, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Chung-Ting Ko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Material for forming organic film, method for forming organic film,...
Patent number
11,822,247
Issue date
Nov 21, 2023
Shin-Etsu Chemical Co., Ltd.
Takayoshi Nakahara
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Grant
Photoresist formulation
Patent number
11,815,812
Issue date
Nov 14, 2023
Funai Electric Co., Ltd.
David C. Graham
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Underlayer material for photoresist
Patent number
11,796,918
Issue date
Oct 24, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
An-Ren Zi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pattern formation methods and photoresist pattern overcoat composit...
Patent number
11,796,916
Issue date
Oct 24, 2023
Rohm and Haas Electronic Materials LLC
Xisen Hou
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Grant
Semiconductor resist composition, and method of forming patterns us...
Patent number
11,789,361
Issue date
Oct 17, 2023
Samsung SDI Co., Ltd.
Kyung Soo Moon
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of patterning a substrate using a sidewall spacer etch mask
Patent number
11,782,346
Issue date
Oct 10, 2023
Tokyo Electron Limited
Jodi Grzeskowiak
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Protective film forming composition having a diol structure
Patent number
11,768,436
Issue date
Sep 26, 2023
NISSAN CHEMICAL CORPORATION
Takafumi Endo
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Coating composition for photoresist underlayer
Patent number
11,762,294
Issue date
Sep 19, 2023
Rohm and Haas Electronic Materials LLC
Joshua Kaitz
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of forming semiconductor structure
Patent number
11,764,062
Issue date
Sep 19, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Ping-Hao Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Planarization method and photocurable composition
Patent number
11,752,519
Issue date
Sep 12, 2023
Canon Kabushiki Kaisha
Toshiki Ito
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Material for forming organic film, method for forming organic film,...
Patent number
11,720,023
Issue date
Aug 8, 2023
Shin-Etsu Chemical Co., Ltd.
Daisuke Kori
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Grant
Temperature controlling apparatus
Patent number
11,703,761
Issue date
Jul 18, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Chi-Hung Liao
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
PHOTORESIST UNDERLAYER COMPOSITION
Publication number
20240126172
Publication date
Apr 18, 2024
Rohm and Haas Electronic Materials L.L.C.
Anton CHAVEZ
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Compound For Forming Metal-Containing Film, Composition For Forming...
Publication number
20240116958
Publication date
Apr 11, 2024
Shin-Etsu Chemical Co., Ltd.
Naoki KOBAYASHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Methods for Making Probe Arrays Utilizing Deformed Templates
Publication number
20240094636
Publication date
Mar 21, 2024
Microfabrica Inc.
Onnik Yaglioglu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MULTI-METAL FILL WITH SELF-ALIGNED PATTERNING AND DIELECTRIC WITH V...
Publication number
20240085803
Publication date
Mar 14, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Tai-I YANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-LAYERED MOLECULAR FILM PHOTORESIST HAVING MOLECULAR LINE STRU...
Publication number
20240061330
Publication date
Feb 22, 2024
IUCF-HYU (INDUSTRY-UNIVERSITY COOPERATION FOUNDATION HANYANG UNIVERSITY)
Myung Mo SUNG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
Publication number
20240038584
Publication date
Feb 1, 2024
Institute of Microelectronics, Chinese Academy of Sciences
Libin Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for Forming an Interconnect Structure
Publication number
20240036470
Publication date
Feb 1, 2024
IMEC vzw
Waikin Li
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Composition For Forming Metal Oxide Film, Patterning Process, And M...
Publication number
20240019782
Publication date
Jan 18, 2024
Shin-Etsu Chemical Co., Ltd.
Naoki KOBAYASHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Structured Film and Method of Using Same to Form a Pattern on a Sub...
Publication number
20240004282
Publication date
Jan 4, 2024
3M Innovative Properties Company
Martin B. Wolk
G02 - OPTICS
Information
Patent Application
Resist Underlayer Film Material, Patterning Process, And Method For...
Publication number
20230400770
Publication date
Dec 14, 2023
Shin-Etsu Chemical Co., Ltd.
Takayoshi NAKAHARA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PHOTORESIST UNDERLAYER AND METHOD OF MANUFACTURING A SEMICONDUCTOR...
Publication number
20230393474
Publication date
Dec 7, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
An-Ren ZI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METALLIC PHOTORESIST PATTERNING AND DEFECT IMPROVEMENT
Publication number
20230393475
Publication date
Dec 7, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Chien-Chih CHEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Multi-Layer Photo Etching Mask Including Organic and Inorganic Mate...
Publication number
20230377887
Publication date
Nov 23, 2023
Taiwan Semiconductor Manufacturing Co.
Chung-Ting Ko
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PHOTOSENSITIVE RESIN MULTILAYER BODY
Publication number
20230375930
Publication date
Nov 23, 2023
Asahi Kasei Kabushiki Kaisha
Shinichi KUNIMATSU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF PATTERNING A SUBSTRATE USING A SIDEWALL SPACER ETCH MASK
Publication number
20230367217
Publication date
Nov 16, 2023
TOKYO ELECTRON LIMITED
Jodi GRZESKOWIAK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS FOR MAKING FLOW CELL SURFACES
Publication number
20230350297
Publication date
Nov 2, 2023
Illumina Cambridge Limited
Alexandra Szemjonov
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR SUBSTRATE AND COMPOSITION
Publication number
20230341778
Publication date
Oct 26, 2023
JSR Corporation
Naoya NOSAKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RESIN COMPOSITION, CURED FILM, METHOD FOR MANUFACTURING CURED FILM,...
Publication number
20230333468
Publication date
Oct 19, 2023
Central Glass Company, Limited
Takashi MASUBUCHI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PHOTOSENSITIVE RESIN PRINTING PLATE PRECURSOR, AND METHOD OF MANUFA...
Publication number
20230333473
Publication date
Oct 19, 2023
TORAY INDUSTRIES, INC.
Kenji Ido
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PLANARIZATION METHOD AND PHOTOCURABLE COMPOSITION
Publication number
20230330702
Publication date
Oct 19, 2023
Canon Kabushiki Kaisha
Toshiki Ito
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
METHOD FOR LITHOGRAPHY USING MIDDLE LAYER WITH POROUS TOP SURFACE
Publication number
20230314949
Publication date
Oct 5, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Yuan Chih LO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF FORMING PHOTO-SENSITIVE HYBRID FILMS
Publication number
20230314946
Publication date
Oct 5, 2023
LAM RESEARCH CORPORATION
Eric Calvin Hansen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PHOTORESIST, METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND MET...
Publication number
20230288807
Publication date
Sep 14, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
An-Ren ZI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SURFACE TREATMENT TO PHOTOSENSITIVE LAYER
Publication number
20230280653
Publication date
Sep 7, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Wei-Han LAI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD
Publication number
20230282475
Publication date
Sep 7, 2023
Samsung Electronics Co., Ltd.
Eun Hyea KO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PLANARIZING AGENT FOR FORMING ORGANIC FILM, COMPOSITION FOR FORMING...
Publication number
20230274936
Publication date
Aug 31, 2023
Shin-Etsu Chemical Co., Ltd.
Yasuyuki YAMAMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FORMING VARIABLE DEPTH STRUCTURES WITH LASER ABLATION
Publication number
20230251430
Publication date
Aug 10, 2023
Applied Materials, Inc.
Peter KURUNCZI
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Application
METHOD FOR FORMING SEMICONDUCTOR STRUCTURE
Publication number
20230251578
Publication date
Aug 10, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Li-Yen LIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PHOTOCURABLE COMPOSITION AND METHOD FOR PRODUCING SEMICONDUCTOR DEVICE
Publication number
20230244141
Publication date
Aug 3, 2023
NISSAN CHEMICAL CORPORATION
Hikaru TOKUNAGA
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
COMPOSITION FOR FORMING ORGANIC FILM, PATTERNING PROCESS, AND COMPO...
Publication number
20230244147
Publication date
Aug 3, 2023
Shin-Etsu Chemical Co., Ltd.
Daisuke KORI
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...