Nitrides

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CPC
C23C16/34

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/34Nitrides

Industries

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Patents Grantslast 30 patents

Information Patent Grant
All-black crystalline silicon solar cell and preparation method the...
- Patent number 12,369,429
- Issue date Jul 22, 2025
- HENGDIAN GROUP DMEGC MAGNETICS CO., LTD
- Yong Ren
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of processing substrate, method of manufacturing semiconduct...
- Patent number 12,365,987
- Issue date Jul 22, 2025
- Kokusai Electric Corporation
- Hiroaki Hiramatsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Precursors and processes for deposition of Si-containing films usin...
- Patent number 12,368,042
- Issue date Jul 22, 2025
- L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
- Naoto Noda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition apparatus with pressure sensor and shower head on same p...
- Patent number 12,365,985
- Issue date Jul 22, 2025
- Tokyo Electron Limited
- Yuji Obata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing apparatus and exhaust system
- Patent number 12,365,982
- Issue date Jul 22, 2025
- Kokusai Electric Corporation
- Masanori Okuno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coated cutting tool
- Patent number 12,365,970
- Issue date Jul 22, 2025
- AB Sandvik Coromant
- Linus Von Fieandt
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Grant
Methods for forming a boron nitride film by a plasma enhanced atomi...
- Patent number 12,365,983
- Issue date Jul 22, 2025
- ASM IP Holding B.V.
- Atsuki Fukazawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coated cutting tool
- Patent number 12,358,055
- Issue date Jul 15, 2025
- AB Sandvik Coromant
- Linus Von Fieandt
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Deposition of oxides and nitrides
- Patent number 12,359,315
- Issue date Jul 15, 2025
- ASM IP Holding B.V.
- Henri Jussila
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing method and substrate processing apparatus
- Patent number 12,362,142
- Issue date Jul 15, 2025
- Tokyo Electron Limited
- Takashi Chiba
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for low temperature silicon nitride films
- Patent number 12,362,169
- Issue date Jul 15, 2025
- Applied Materials, Inc.
- Wenbo Yan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Optical diffuser and its method of manufacture
- Patent number 12,360,296
- Issue date Jul 15, 2025
- STMicroelectronics (Crolles 2) SAS
- Vincent Farys
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method, recording medium, and substrate proces...
- Patent number 12,351,908
- Issue date Jul 8, 2025
- Kokusai Electric Corporation
- Takeo Hanashima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
n-Type GaN crystal, GaN wafer, and GaN crystal, GaN wafer and nitri...
- Patent number 12,351,943
- Issue date Jul 8, 2025
- Mitsubishi Chemical Corporation
- Kenji Iso
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition of films using molybdenum precursors
- Patent number 12,351,914
- Issue date Jul 8, 2025
- Lam Research Corporation
- Joshua Collins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Silicon-based thin films from N-alkyl substituted perhydridocyclotr...
- Patent number 12,344,934
- Issue date Jul 1, 2025
- Gelest, Inc.
- Barry C. Arkles
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming plasma coating
- Patent number 12,347,652
- Issue date Jul 1, 2025
- Applied Materials, Inc.
- Lance A. Scudder
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for controlling contact resistance in cobalt-titanium struc...
- Patent number 12,347,695
- Issue date Jul 1, 2025
- Applied Materials, Inc.
- Takashi Kuratomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
SiN film embedding method
- Patent number 12,344,933
- Issue date Jul 1, 2025
- Tokyo Electron Limited
- Munehito Kagaya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-functional shutter disk for thin film deposition chamber
- Patent number 12,344,929
- Issue date Jul 1, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Wen-Hao Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor phase growth method using reflector with changeable pattern
- Patent number 12,338,543
- Issue date Jun 24, 2025
- NUFLARE TECHNOLOGY, INC.
- Yoshitaka Ishikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for patterning a silicon oxide-silicon nitride-silicon oxid...
- Patent number 12,334,333
- Issue date Jun 17, 2025
- Taiwan Semiconductor Manufacturing Company Limited
- Yi-Ren Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method and substrate processing device
- Patent number 12,331,403
- Issue date Jun 17, 2025
- Tokyo Electron Limited
- Munehito Kagaya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 12,334,401
- Issue date Jun 17, 2025
- Kokusai Electric Corporation
- Hideto Tateno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coated forming tools with enhanced performance and increased servic...
- Patent number 12,331,397
- Issue date Jun 17, 2025
- OERLIKON SURFACE SOLUTIONS AG, PFAFFIKON
- Juergen Crummenauer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Precursor delivery system and method for cyclic deposition
- Patent number 12,325,914
- Issue date Jun 10, 2025
- Eugenus, Inc.
- Martin J. Salinas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thin film deposition process
- Patent number 12,322,591
- Issue date Jun 3, 2025
- ASM IP Holding B.V.
- Naoki Inoue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Stimulus responsive polymer films and formulations
- Patent number 12,322,588
- Issue date Jun 3, 2025
- Lam Research Corporation
- Gregory Blachut
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pulsing plasma treatment for film densification
- Patent number 12,322,573
- Issue date Jun 3, 2025
- Applied Materials, Inc.
- Rui Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method and substrate processing device
- Patent number 12,312,683
- Issue date May 27, 2025
- Tokyo Electron Limited
- Munehito Kagaya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20250241039
- Publication date Jul 24, 2025
- Kokusai Electric Corporation
- Kimihiko NAKATANI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE PROCESSING COMPOSITION, COMPOUND, METHOD FOR P...
- Publication number 20250230321
- Publication date Jul 17, 2025
- FUJIFILM CORPORATION
- Naoya Shimoju
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
SEAM PERFORMANCE IMPROVEMENT FOR LARGE AREA GAPFILL
- Publication number 20250230540
- Publication date Jul 17, 2025
- Applied Materials, Inc.
- Supriya Ghosh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUSES FOR FILLING A GAP
- Publication number 20250226214
- Publication date Jul 10, 2025
- ASM IP HOLDING B.V.
- Ranjit Borude
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHOWERHEAD STRUCTURE AND APPARATUS FOR TREATING SUBSTRATE
- Publication number 20250223699
- Publication date Jul 10, 2025
- Samsung Electronics Co., Ltd.
- Tae Seung YU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITIONS COMPRISING SILACYCLOALKANES AND METHODS USING SAME FOR...
- Publication number 20250223466
- Publication date Jul 10, 2025
- VERSUM MATERIALS US, LLC
- RAYMOND N. VRTIS
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF PROCESSING...
- Publication number 20250218790
- Publication date Jul 3, 2025
- Kokusai Electric Corporation
- Kimihiko NAKATANI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20250215563
- Publication date Jul 3, 2025
- Kokusai Electric Corporation
- Takashi YOKOGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VANADIUM CONTAINING LAYERS AND METHODS AND SYSTEMS FOR DEPOSITING S...
- Publication number 20250215565
- Publication date Jul 3, 2025
- ASM IP HOLDING B.V.
- Jocelyn Kofi Brobbey
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TREATING SILICON NITRIDE BASED DIELECTRIC FILMS
- Publication number 20250218763
- Publication date Jul 3, 2025
- Applied Materials, Inc.
- Dongjoon KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20250218764
- Publication date Jul 3, 2025
- Kokusai Electric Corporation
- Hiroshi ASHIHARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND ASSEMBLIES FOR SELECTIVE DEPOSITION OF METAL-CONTAINING...
- Publication number 20250215555
- Publication date Jul 3, 2025
- ASM IP HOLDING B.V.
- Saima Ali
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TEMPERATURE CONTROL MODULE FOR A FURNACE REACTOR AND METHOD OF CONT...
- Publication number 20250210343
- Publication date Jun 26, 2025
- ASM IP HOLDING B.V.
- Marina Mariano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPOSITE FILM, PREPARATION METHOD THEREOF AND LIGHT-EMITTING DEVICE
- Publication number 20250212594
- Publication date Jun 26, 2025
- TCL TECHNOLOGY GROUP CORPORATION
- Xiongfeng LIN
- B82 - NANO-TECHNOLOGY
Information Patent Application
LOW-K DIELECTRIC PROTECTION DURING PLASMA DEPOSITION OF SILICON NIT...
- Publication number 20250197996
- Publication date Jun 19, 2025
- LAM RESEARCH CORPORATION
- Awnish Gupta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPONENT TO BE USED FOR PLASMA PROCESSING DEVICE, METHOD FOR MANUF...
- Publication number 20250201537
- Publication date Jun 19, 2025
- TOKYO ELECTRON LIMITED
- Taisei SEGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF DEPOSITING SILICON-CONTAINING DIELECTRIC LAYERS FOR SEMI...
- Publication number 20250201548
- Publication date Jun 19, 2025
- Applied Materials, Inc.
- Zhijie Chua
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD...
- Publication number 20250201584
- Publication date Jun 19, 2025
- Kokusai Electric Corporation
- Yusaku OKAJIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR DEPOSITING GAP FILLING FLUIDS AND RELATED SYSTEMS AND D...
- Publication number 20250201628
- Publication date Jun 19, 2025
- ASM IP HOLDING B.V.
- Timothee Blanquart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEED SUBSTRATE FOR HIGH CHARACTERISTIC EPITAXIAL GROWTH, METHOD FOR...
- Publication number 20250198049
- Publication date Jun 19, 2025
- Shin-Etsu Chemical Co., Ltd.
- Yoshihiro KUBOTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATINGS ON INNER SURFACES OF PARTICLE CONTAINMENT CHAMBERS
- Publication number 20250201529
- Publication date Jun 19, 2025
- Helion Energy, Inc.
- Brian Campbell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20250201551
- Publication date Jun 19, 2025
- Kokusai Electric Corporation
- Kazuyuki OKUDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SURFACE-COATED CUTTING TOOL
- Publication number 20250187080
- Publication date Jun 12, 2025
- MITSUBISHI MATERIALS CORPORATION
- Kosuke YANAGISAWA
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SELECTIVE NON-PLASMA DEPOSITION OF MASK PROTECTION MATERIAL
- Publication number 20250188608
- Publication date Jun 12, 2025
- TOKYO ELECTRON LIMITED
- Yu-Hao Tsai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Compositions and Methods Using Same for Deposition of Silicon-Conta...
- Publication number 20250188605
- Publication date Jun 12, 2025
- VERSUM MATERIALS US, LLC
- Jianheng Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHIELDING COMPOUND, METHOD OF FORMING THIN FILM USING SHIELDING COM...
- Publication number 20250188599
- Publication date Jun 12, 2025
- Soulbrain Co., LTD
- Seung Hyun LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BORON NITRIDE FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20250188604
- Publication date Jun 12, 2025
- TOKYO ELECTRON LIMITED
- Kazuki GOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ROBUST ONO FILMS AND METHODS OF MAKING THEREOF
- Publication number 20250185263
- Publication date Jun 5, 2025
- TEXAS INSTRUMENTS INCORPORATED
- Saiful Islam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING SILICON NITRIDE FILM AND FILM FORMING APPARATUS
- Publication number 20250179625
- Publication date Jun 5, 2025
- TOKYO ELECTRON LIMITED
- Munehito KAGAYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Smoothing Surface Roughness Using Atomic Layer Deposition
- Publication number 20250179631
- Publication date Jun 5, 2025
- Eagle Technology, LLC
- James THROCKMORTON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

All-black crystalline silicon solar cell and preparation method the...

Method of processing substrate, method of manufacturing semiconduct...

Precursors and processes for deposition of Si-containing films usin...

Deposition apparatus with pressure sensor and shower head on same p...

Processing apparatus and exhaust system

Coated cutting tool

Methods for forming a boron nitride film by a plasma enhanced atomi...

Coated cutting tool

Deposition of oxides and nitrides

Plasma processing method and substrate processing apparatus

Methods and apparatus for low temperature silicon nitride films

Optical diffuser and its method of manufacture

Substrate processing method, recording medium, and substrate proces...

n-Type GaN crystal, GaN wafer, and GaN crystal, GaN wafer and nitri...

Deposition of films using molybdenum precursors

Silicon-based thin films from N-alkyl substituted perhydridocyclotr...

Method for forming plasma coating

Methods for controlling contact resistance in cobalt-titanium struc...

SiN film embedding method

Multi-functional shutter disk for thin film deposition chamber

Vapor phase growth method using reflector with changeable pattern

Methods for patterning a silicon oxide-silicon nitride-silicon oxid...

Substrate processing method and substrate processing device

Substrate processing apparatus, method of manufacturing semiconduct...

Coated forming tools with enhanced performance and increased servic...

Precursor delivery system and method for cyclic deposition

Thin film deposition process

Stimulus responsive polymer films and formulations

Pulsing plasma treatment for film densification

Substrate processing method and substrate processing device

Patents Applicationslast 30 patents

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

SEMICONDUCTOR DEVICE PROCESSING COMPOSITION, COMPOUND, METHOD FOR P...

SEAM PERFORMANCE IMPROVEMENT FOR LARGE AREA GAPFILL

METHODS AND APPARATUSES FOR FILLING A GAP

SHOWERHEAD STRUCTURE AND APPARATUS FOR TREATING SUBSTRATE

COMPOSITIONS COMPRISING SILACYCLOALKANES AND METHODS USING SAME FOR...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF PROCESSING...

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

VANADIUM CONTAINING LAYERS AND METHODS AND SYSTEMS FOR DEPOSITING S...

TREATING SILICON NITRIDE BASED DIELECTRIC FILMS

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

METHODS AND ASSEMBLIES FOR SELECTIVE DEPOSITION OF METAL-CONTAINING...

TEMPERATURE CONTROL MODULE FOR A FURNACE REACTOR AND METHOD OF CONT...

COMPOSITE FILM, PREPARATION METHOD THEREOF AND LIGHT-EMITTING DEVICE

LOW-K DIELECTRIC PROTECTION DURING PLASMA DEPOSITION OF SILICON NIT...

COMPONENT TO BE USED FOR PLASMA PROCESSING DEVICE, METHOD FOR MANUF...

METHODS OF DEPOSITING SILICON-CONTAINING DIELECTRIC LAYERS FOR SEMI...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD...

METHODS FOR DEPOSITING GAP FILLING FLUIDS AND RELATED SYSTEMS AND D...

SEED SUBSTRATE FOR HIGH CHARACTERISTIC EPITAXIAL GROWTH, METHOD FOR...

COATINGS ON INNER SURFACES OF PARTICLE CONTAINMENT CHAMBERS

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SURFACE-COATED CUTTING TOOL

SELECTIVE NON-PLASMA DEPOSITION OF MASK PROTECTION MATERIAL

Compositions and Methods Using Same for Deposition of Silicon-Conta...

SHIELDING COMPOUND, METHOD OF FORMING THIN FILM USING SHIELDING COM...

BORON NITRIDE FILM FORMING METHOD AND FILM FORMING APPARATUS

ROBUST ONO FILMS AND METHODS OF MAKING THEREOF

METHOD OF FORMING SILICON NITRIDE FILM AND FILM FORMING APPARATUS

Smoothing Surface Roughness Using Atomic Layer Deposition