Nitrides

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CPC
C23C16/34

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/34Nitrides

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Thin film deposition process
- Patent number 12,322,591
- Issue date Jun 3, 2025
- ASM IP Holding B.V.
- Naoki Inoue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Stimulus responsive polymer films and formulations
- Patent number 12,322,588
- Issue date Jun 3, 2025
- Lam Research Corporation
- Gregory Blachut
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pulsing plasma treatment for film densification
- Patent number 12,322,573
- Issue date Jun 3, 2025
- Applied Materials, Inc.
- Rui Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method and substrate processing device
- Patent number 12,312,683
- Issue date May 27, 2025
- Tokyo Electron Limited
- Munehito Kagaya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of reducing titanium nitride etching during tungsten film fo...
- Patent number 12,305,278
- Issue date May 20, 2025
- Applied Materials, Inc.
- Kedi Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Conformal and smooth titanium nitride layers and methods of forming...
- Patent number 12,308,226
- Issue date May 20, 2025
- Eugenus, Inc.
- Sung-Hoon Jung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Silylcyclodisilazane compound and method for manufacturing silicon-...
- Patent number 12,304,924
- Issue date May 20, 2025
- DNF Co., Ltd.
- Se Jin Jang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Immersion exposure tool
- Patent number 12,306,542
- Issue date May 20, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yung-Yao Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coated cutting tool
- Patent number 12,305,293
- Issue date May 20, 2025
- AB Sandvik Coromant
- Linus Von Fieandt
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Grant
Scanning mirror and manufacturing method for scanning mirror
- Patent number 12,298,494
- Issue date May 13, 2025
- TOHOKU UNIVERSITY
- Kazuhiro Hane
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
UV cure for local stress modulation
- Patent number 12,300,489
- Issue date May 13, 2025
- Lam Research Corporation
- Anirvan Sircar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Scrubber, ALD process system including the scrubber and method for...
- Patent number 12,290,778
- Issue date May 6, 2025
- Samsung Electronics Co., Ltd.
- Seo Young Maeng
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Compound, thin-film forming raw material, and method of producing t...
- Patent number 12,291,541
- Issue date May 6, 2025
- Adeka Corporation
- Akio Saito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing gap filling fluids and related systems and d...
- Patent number 12,293,942
- Issue date May 6, 2025
- ASM IP Holding B.V.
- Timothee Blanquart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Optical element having a movable reflective cover comprising a 2-di...
- Patent number 12,287,476
- Issue date Apr 29, 2025
- Santiago Jose Cartamil Bueno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for producing nitride semiconductor photoelectrode
- Patent number 12,286,718
- Issue date Apr 29, 2025
- Nippon Telegraph and Telephone Corporation
- Yuya Uzumaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method
- Patent number 12,283,479
- Issue date Apr 22, 2025
- ASM IP Holding B.V.
- JaeOk Ko
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 12,283,476
- Issue date Apr 22, 2025
- Kokusai Electric Corporation
- Hiroshi Ashihara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Conformal and smooth titanium nitride layers and methods of forming...
- Patent number 12,283,486
- Issue date Apr 22, 2025
- Eugenus, Inc.
- Hyunchol Cho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for coating short fibres
- Patent number 12,269,780
- Issue date Apr 8, 2025
- SAFRAN CERAMICS
- Arnaud Delehouze
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ionization detector and detection method
- Patent number 12,272,512
- Issue date Apr 8, 2025
- KETEK GmbH Halbleiter-und Reinraumtechnik
- Michael Bachmann
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cutting tool
- Patent number 12,270,102
- Issue date Apr 8, 2025
- Sumitomo Electric Hardmetal Corp.
- Susumu Okuno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Station-to-station control of backside bow compensation deposition
- Patent number 12,272,608
- Issue date Apr 8, 2025
- Lam Research Corporation
- Yanhui Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cutting tool
- Patent number 12,269,098
- Issue date Apr 8, 2025
- Sumitomo Electric Hardmetal Corp.
- Susumu Okuno
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Continuous multiple tow coating reactor
- Patent number 12,270,107
- Issue date Apr 8, 2025
- Raytheon Technologies Corporation
- Ying She
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Conformal and smooth titanium nitride layers and methods of forming...
- Patent number 12,272,599
- Issue date Apr 8, 2025
- Eugenus, Inc.
- Hyunchol Cho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 12,266,522
- Issue date Apr 1, 2025
- Kokusai Electric Corporation
- Kazuyuki Okuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Silicon precursor compounds and method for forming silicon-containi...
- Patent number 12,264,392
- Issue date Apr 1, 2025
- Entegris, Inc.
- Sungsil Cho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Compositions comprising silacycloalkanes and methods using same for...
- Patent number 12,264,258
- Issue date Apr 1, 2025
- VERSUM MATERIALS US, LLC
- Raymond N. Vrtis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gapfill of variable aspect ratio features with a composite PEALD an...
- Patent number 12,261,038
- Issue date Mar 25, 2025
- Lam Research Corporation
- Hu Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF FORMING SILICON NITRIDE FILM AND FILM FORMING APPARATUS
- Publication number 20250179625
- Publication date Jun 5, 2025
- TOKYO ELECTRON LIMITED
- Munehito KAGAYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ROBUST ONO FILMS AND METHODS OF MAKING THEREOF
- Publication number 20250185263
- Publication date Jun 5, 2025
- TEXAS INSTRUMENTS INCORPORATED
- Saiful Islam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Smoothing Surface Roughness Using Atomic Layer Deposition
- Publication number 20250179631
- Publication date Jun 5, 2025
- Eagle Technology, LLC
- James THROCKMORTON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH QUALITY NITRIDE AND OXIDE FABRICATION AND SYSTEM
- Publication number 20250174455
- Publication date May 29, 2025
- TEXAS INSTRUMENTS INCORPORATED
- Saiful Islam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TITANIUM ALUMINUM AND TANTALUM ALUMINUM THIN FILMS
- Publication number 20250176248
- Publication date May 29, 2025
- ASM IP HOLDING B.V.
- Suvi Haukka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR FORMING MOLYBDENUM SURFACES WITH INCREASED DIFFUSION BA...
- Publication number 20250163573
- Publication date May 22, 2025
- Applied Materials, Inc.
- Zhijun CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DIFFUSION BARRIER INCLUDING METAL SILICIDE AND TITANIUM SILICON NIT...
- Publication number 20250167044
- Publication date May 22, 2025
- EUGENUS, INC.
- Ajit Dhamdhere
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRECURSOR FOR FORMING METAL THIN FILM, MANUFACTURING METHOD USING T...
- Publication number 20250154648
- Publication date May 15, 2025
- Samsung Electronics Co., Ltd.
- Hyunwoo KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SILICON NITRIDE FILM FORMATION METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20250154649
- Publication date May 15, 2025
- TOKYO ELECTRON LIMITED
- Kenichi KOTE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20250157811
- Publication date May 15, 2025
- ASM IP HOLDING B.V.
- Jeonghoon Jang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ENGINEERED SUBSTRATE STRUCTURES FOR POWER AND RF APPLICATIONS
- Publication number 20250149332
- Publication date May 8, 2025
- QROMIS, Inc.
- Vladimir Odnoblyudov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING SOLUTION, METHOD FOR PROCESSING SUBSTRATE, AND METHOD FO...
- Publication number 20250140548
- Publication date May 1, 2025
- Tokyo Ohka Kogyo Co., Ltd.
- Jun IIOKA
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
PROCESSING SOLUTION, METHOD FOR PROCESSING SUBSTRATE, AND METHOD FO...
- Publication number 20250140549
- Publication date May 1, 2025
- Tokyo Ohka Kogyo Co., Ltd.
- Jun IIOKA
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
METHOD FOR FORMING A RARE-EARTH-CONTAINING LAYER, APPARATUS, AND ST...
- Publication number 20250137127
- Publication date May 1, 2025
- ASM IP HOLDING B.V.
- Rochelle Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ENGINEERED SUBSTRATE STRUCTURES FOR POWER AND RF APPLICATIONS
- Publication number 20250132152
- Publication date Apr 24, 2025
- QROMIS,INC.
- Vladimir Odnoblyudov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF CLEANING A PLASMA PROCESSING DEVICE
- Publication number 20250122615
- Publication date Apr 17, 2025
- SPTS TECHNOLOGIES LIMITED
- Matthew EDMONDS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and system for filling a gap
- Publication number 20250122610
- Publication date Apr 17, 2025
- ASM IP HOLDING B.V.
- René Henricus Jozef Vervuurt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ARC REDUCTION AND RF CONTROL FOR ELECTROSTATIC CHUCKS IN SEMICONDUC...
- Publication number 20250116001
- Publication date Apr 10, 2025
- Applied Materials, Inc.
- Allison Yau
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FABRICATION METHODS FOR 3D STRUCTURES BASED ON ROLLING-UP KIRIGAMI...
- Publication number 20250109487
- Publication date Apr 3, 2025
- City University of Hong Kong
- Lixin Dong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE DEPOSITION
- Publication number 20250109490
- Publication date Apr 3, 2025
- ASM IP HOLDING B.V.
- Krzysztof Kamil Kachel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE TREATMENT METHOD
- Publication number 20250109489
- Publication date Apr 3, 2025
- Jusung Engineering Co., Ltd.
- Jae Wuk SO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CYCLIC PEALD/PECVD THIN FILM ENCAPSULATION BARRIER
- Publication number 20250113718
- Publication date Apr 3, 2025
- Applied Materials, Inc.
- Wenhui LI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MODIFIED STACKS FOR 3D NAND
- Publication number 20250101578
- Publication date Mar 27, 2025
- Applied Materials, Inc.
- Xinhai Han
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
UNDERCOATING COVERAGE AND RESISTANCE CONTROL FOR ESCS OF SUBSTRATE...
- Publication number 20250101580
- Publication date Mar 27, 2025
- LAM RESEARCH CORPORATION
- Tu HONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HALIDE-FUNCTIONALIZED CYCLOTRISILAZANES AS PRECURSORS FOR DEPOSITIO...
- Publication number 20250101586
- Publication date Mar 27, 2025
- VERSUM MATERIALS US, LLC
- Manchao Xiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20250101583
- Publication date Mar 27, 2025
- Kokusai Electric Corporation
- Hidetoshi Mimura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CYCLIC LOW TEMPERATURE FILM GROWTH PROCESSES
- Publication number 20250095983
- Publication date Mar 20, 2025
- TOKYO ELECTRON LIMITED
- Jianping Zhao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR DEPOSITING A MOLYBDENUM NITRIDE FILM ON A SURFACE OF A...
- Publication number 20250092513
- Publication date Mar 20, 2025
- ASM IP HOLDING B.V.
- Eric Christopher Stevens
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TIN OXIDE MANDRELS IN PATTERNING
- Publication number 20250087498
- Publication date Mar 13, 2025
- LAM RESEARCH CORPORATION
- Jengyi Yu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-REGION DIFFUSION BARRIER CONTAINING TITANIUM, SILICON AND NIT...
- Publication number 20250087534
- Publication date Mar 13, 2025
- EUGENUS, INC.
- Vinayak Veer Vats
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Thin film deposition process

Stimulus responsive polymer films and formulations

Pulsing plasma treatment for film densification

Substrate processing method and substrate processing device

Method of reducing titanium nitride etching during tungsten film fo...

Conformal and smooth titanium nitride layers and methods of forming...

Silylcyclodisilazane compound and method for manufacturing silicon-...

Immersion exposure tool

Coated cutting tool

Scanning mirror and manufacturing method for scanning mirror

UV cure for local stress modulation

Scrubber, ALD process system including the scrubber and method for...

Compound, thin-film forming raw material, and method of producing t...

Methods for depositing gap filling fluids and related systems and d...

Optical element having a movable reflective cover comprising a 2-di...

Method for producing nitride semiconductor photoelectrode

Substrate processing method

Method of manufacturing semiconductor device, substrate processing...

Conformal and smooth titanium nitride layers and methods of forming...

Method for coating short fibres

Ionization detector and detection method

Cutting tool

Station-to-station control of backside bow compensation deposition

Cutting tool

Continuous multiple tow coating reactor

Conformal and smooth titanium nitride layers and methods of forming...

Substrate processing apparatus, method of manufacturing semiconduct...

Silicon precursor compounds and method for forming silicon-containi...

Compositions comprising silacycloalkanes and methods using same for...

Gapfill of variable aspect ratio features with a composite PEALD an...

Patents Applicationslast 30 patents

METHOD OF FORMING SILICON NITRIDE FILM AND FILM FORMING APPARATUS

ROBUST ONO FILMS AND METHODS OF MAKING THEREOF

Smoothing Surface Roughness Using Atomic Layer Deposition

HIGH QUALITY NITRIDE AND OXIDE FABRICATION AND SYSTEM

TITANIUM ALUMINUM AND TANTALUM ALUMINUM THIN FILMS

METHODS FOR FORMING MOLYBDENUM SURFACES WITH INCREASED DIFFUSION BA...

DIFFUSION BARRIER INCLUDING METAL SILICIDE AND TITANIUM SILICON NIT...

PRECURSOR FOR FORMING METAL THIN FILM, MANUFACTURING METHOD USING T...

SILICON NITRIDE FILM FORMATION METHOD AND PLASMA PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD

ENGINEERED SUBSTRATE STRUCTURES FOR POWER AND RF APPLICATIONS

PROCESSING SOLUTION, METHOD FOR PROCESSING SUBSTRATE, AND METHOD FO...

PROCESSING SOLUTION, METHOD FOR PROCESSING SUBSTRATE, AND METHOD FO...

METHOD FOR FORMING A RARE-EARTH-CONTAINING LAYER, APPARATUS, AND ST...

ENGINEERED SUBSTRATE STRUCTURES FOR POWER AND RF APPLICATIONS

METHOD OF CLEANING A PLASMA PROCESSING DEVICE

Method and system for filling a gap

ARC REDUCTION AND RF CONTROL FOR ELECTROSTATIC CHUCKS IN SEMICONDUC...

FABRICATION METHODS FOR 3D STRUCTURES BASED ON ROLLING-UP KIRIGAMI...

SELECTIVE DEPOSITION

SUBSTRATE TREATMENT METHOD

CYCLIC PEALD/PECVD THIN FILM ENCAPSULATION BARRIER

MODIFIED STACKS FOR 3D NAND

UNDERCOATING COVERAGE AND RESISTANCE CONTROL FOR ESCS OF SUBSTRATE...

HALIDE-FUNCTIONALIZED CYCLOTRISILAZANES AS PRECURSORS FOR DEPOSITIO...

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

CYCLIC LOW TEMPERATURE FILM GROWTH PROCESSES

METHODS FOR DEPOSITING A MOLYBDENUM NITRIDE FILM ON A SURFACE OF A...

TIN OXIDE MANDRELS IN PATTERNING

MULTI-REGION DIFFUSION BARRIER CONTAINING TITANIUM, SILICON AND NIT...