Noble gas ions

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HELECTRICITY H01Electric elements H01SDEVICES USING STIMULATED EMISSION H01S3/00Lasers

Current Industry

H01S3/2207Noble gas ions

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Laser
- Patent number 11,876,340
- Issue date Jan 16, 2024
- Shanghai Institute of Microsystem and Information Technology, Chinese Academy...
- Shan Qiao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optical compensation system for laser beam and excimer laser anneal...
- Patent number 11,721,947
- Issue date Aug 8, 2023
- CHONGQING BOE DISPLAY TECHNOLOGY CO., LTD.
- Sangho Jeon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Light source apparatus
- Patent number 11,128,097
- Issue date Sep 21, 2021
- Samsung Electronics Co., Ltd.
- Akihiro Komatsu
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
CO2 laser
- Patent number 10,797,466
- Issue date Oct 6, 2020
- Robert Neil Campbell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Line narrowed laser apparatus
- Patent number 10,283,927
- Issue date May 7, 2019
- Gigaphoton Inc.
- Hiroshi Furusato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for direct compression of laser pulses with large temporal r...
- Patent number 10,170,883
- Issue date Jan 1, 2019
- INNOVEN ENERGY LLC
- Robert O. Hunter
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and device for detecting flatness of a fluorescent wheel in...
- Patent number 10,132,751
- Issue date Nov 20, 2018
- HISENSE CO., LTD.
- Fei Zhao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System for reclaiming, rebalancing and recirculating laser gas mixt...
- Patent number 10,103,507
- Issue date Oct 16, 2018
- Matheson Tri-Gas, Inc.
- Joseph Vininski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas laser
- Patent number 9,948,055
- Issue date Apr 17, 2018
- Huazhong University of Science & Technology
- Hanyuan Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for automatic gas optimization in a two-chamber g...
- Patent number 9,831,628
- Issue date Nov 28, 2017
- Cymer, LLC
- Kevin O'Brien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System for reclaiming, rebalancing and recirculating laser gas mixt...
- Patent number 9,831,627
- Issue date Nov 28, 2017
- Maheson Tri-Gas, Inc.
- Joseph Vininski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dual channel method for pumping and cooling lasers and laser device
- Patent number 9,800,011
- Issue date Oct 24, 2017
- The Board of Trustees of the University of Illinois
- J. Gary Eden
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sub 200nm laser pumped homonuclear excimer lasers
- Patent number 9,735,534
- Issue date Aug 15, 2017
- KLA-Tencor Corporation
- Richard W. Solarz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Self-locking atomic emission laser with an intracavity atomic plasm...
- Patent number 9,653,873
- Issue date May 16, 2017
- Chemled Technologies, LLC
- Radoslaw M. Sobczynski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optically pumped micro-plasma
- Patent number 9,647,414
- Issue date May 9, 2017
- Physical Sciences, Inc.
- W. Terry Rawlins
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas laser oscillator capable of controlling gas pressure and gas co...
- Patent number 9,331,449
- Issue date May 3, 2016
- FANUC CORPORATION
- Munekazu Matsuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas laser oscillator capable of estimating sealability of gas conta...
- Patent number 9,252,552
- Issue date Feb 2, 2016
- FANUC CORPORATION
- Masahiro Honda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Timing control for two-chamber gas discharge laser system
- Patent number 7,852,899
- Issue date Dec 14, 2010
- Cymer, Inc.
- Alexander I. Ershov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Two-light flux interference exposure device, two-light flux interfe...
- Patent number 7,756,189
- Issue date Jul 13, 2010
- Meijo University
- Satoshi Kamiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Very narrow band, two chamber, high rep-rate gas discharge laser sy...
- Patent number 7,567,607
- Issue date Jul 28, 2009
- Cymer, Inc.
- David S. Knowles
- G01 - MEASURING TESTING
Information Patent Grant
Laser intra-cavity electronic wavelength tuner
- Patent number 7,564,880
- Issue date Jul 21, 2009
- The Boeing Company
- Steven E. Muenter
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser spectral engineering for lithographic process
- Patent number 7,382,815
- Issue date Jun 3, 2008
- Cymer, Inc.
- Ronald L. Spangler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
DUV light source optical element improvements
- Patent number 7,346,093
- Issue date Mar 18, 2008
- Cymer, Inc.
- Richard L. Sandstrom
- G01 - MEASURING TESTING
Information Patent Grant
Laser spectral engineering for lithographic process
- Patent number 7,298,770
- Issue date Nov 20, 2007
- Cymer, Inc.
- Ronald L. Spangler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas discharge MOPA laser spectral analysis module
- Patent number 7,292,343
- Issue date Nov 6, 2007
- Cymer, Inc.
- Rajasekhar M Rao
- G01 - MEASURING TESTING
Information Patent Grant
Line selected F2 two chamber laser system
- Patent number 7,218,661
- Issue date May 15, 2007
- Cymer, Inc.
- David S. Knowles
- G01 - MEASURING TESTING
Information Patent Grant
Timing control for two-chamber gas discharge laser system
- Patent number 7,203,216
- Issue date Apr 10, 2007
- Cymer Inc.
- Alexander I. Ershov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas discharge laser light source beam delivery unit
- Patent number 7,190,707
- Issue date Mar 13, 2007
- Cymer, Inc.
- Palash P. Das
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Annealed copper alloy electrodes for fluorine containing gas discha...
- Patent number 7,190,708
- Issue date Mar 13, 2007
- Cymer, Inc.
- Richard G. Morton
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Very high energy, high stability gas discharge laser surface treatm...
- Patent number 7,167,499
- Issue date Jan 23, 2007
- TCZ PTE. Ltd.
- Palash P. Das
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
GAS LASER APPARATUS, GAS LASER APPARATUS MAINTENANCE METHOD, AND EL...
- Publication number 20240154381
- Publication date May 9, 2024
- Gigaphoton Inc.
- Junichi FUJIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PACKED-BED FILTER FOR METAL FLUORIDE DUST TRAPPING IN LASER DISCHAR...
- Publication number 20230008480
- Publication date Jan 12, 2023
- CYMER, LLC
- Ulrich Niemann
- B03 - SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES O...
Information Patent Application
OPTICAL SYSTEM FOR INCREASING THE CONTRAST OF PULSED LASER RADIATIO...
- Publication number 20220399695
- Publication date Dec 15, 2022
- TRUMPF Scientific Lasers GmbH + Co. KG
- Thomas Metzger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER
- Publication number 20220255289
- Publication date Aug 11, 2022
- SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY, CHINESE ACADEMY...
- Shan QIAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTICAL COMPENSATION SYSTEM FOR LASER BEAM AND EXCIMER LASER ANNEAL...
- Publication number 20220102934
- Publication date Mar 31, 2022
- CHONGQING BOE DISPLAY TECHNOLOGY CO., LTD.
- Sangho JEON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIGHT SOURCE APPARATUS
- Publication number 20210036477
- Publication date Feb 4, 2021
- Samsung Electronics Co., Ltd.
- Akihiro Komatsu
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXCIMER LASER OSCILLATION DEVICE HAVING GAS RECYCLE FUNCTION
- Publication number 20180337510
- Publication date Nov 22, 2018
- L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
- Terumasa KOURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LINE NARROWED LASER APPARATUS
- Publication number 20180323568
- Publication date Nov 8, 2018
- Gigaphoton Inc.
- Hiroshi FURUSATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER GAS PURIFYING SYSTEM
- Publication number 20180191122
- Publication date Jul 5, 2018
- Gigaphoton Inc.
- Natsushi SUZUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM FOR RECLAIMING, REBALANCING AND RECIRCULATING LASER GAS MIXT...
- Publication number 20180097331
- Publication date Apr 5, 2018
- Matheson Tri-Gas, Inc.
- Joseph Vininski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS LASER
- Publication number 20170222389
- Publication date Aug 3, 2017
- HUAZHONG UNIVERSITY OF SCIENCE & TECHNOLOGY
- Hanyuan CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND DEVICE FOR DETECTING FLATNESS OF A FLUORESCENT WHEEL IN...
- Publication number 20170131205
- Publication date May 11, 2017
- HISENSE CO., LTD.
- Fei ZHAO
- G01 - MEASURING TESTING
Information Patent Application
GAS LASER OSCILLATOR CAPABLE OF ESTIMATING SEALABILITY OF GAS CONTA...
- Publication number 20150372441
- Publication date Dec 24, 2015
- FANUC CORPORATION
- Masahiro Honda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus for generating laser radiation
- Publication number 20080130700
- Publication date Jun 5, 2008
- Patrick Linder
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Two-light flux interference exposure device, two-light flux interfe...
- Publication number 20080123713
- Publication date May 29, 2008
- Meijo University
- Satoshi Kamiyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Laser intra-cavity electronic wavelength tuner
- Publication number 20070280310
- Publication date Dec 6, 2007
- The Boeing Company
- Steven E. Muenter
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Gas discharge laser light source beam delivery unit
- Publication number 20070160103
- Publication date Jul 12, 2007
- Cymer, Inc.
- Palash P. Das
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Timing control for two-chamber gas discharge laser system
- Publication number 20060251135
- Publication date Nov 9, 2006
- Alexander I. Ershov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Very narrow band, two chamber, high rep-rate gas discharge laser sy...
- Publication number 20060126697
- Publication date Jun 15, 2006
- Cymer, Inc.
- David S. Knowles
- G01 - MEASURING TESTING
Information Patent Application
VERY NARROW BAND, TWO CHAMBER, HIGH REP-RATE GAS DISCHARGE LASER SY...
- Publication number 20050271109
- Publication date Dec 8, 2005
- Cymer, Inc.
- David S. Knowles
- G01 - MEASURING TESTING
Information Patent Application
Gas discharge MOPA laser spectral analysis module
- Publication number 20050174576
- Publication date Aug 11, 2005
- Cymer, Inc.
- Rajasekhar M. Rao
- G01 - MEASURING TESTING
Information Patent Application
Laser spectral engineering for lithographic process
- Publication number 20050068997
- Publication date Mar 31, 2005
- Cymer, Inc.
- Ronald L. Spangler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
GAS DISCHARGE MOPA LASER SPECTRAL ANALYSIS MODULE
- Publication number 20050046856
- Publication date Mar 3, 2005
- Rajasekhar M. Rao
- G01 - MEASURING TESTING
Information Patent Application
Laser spectral engineering for lithographic process
- Publication number 20050041701
- Publication date Feb 24, 2005
- Ronald L. Spangler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Optical elements with protective undercoating
- Publication number 20050025882
- Publication date Feb 3, 2005
- William N. Partlo
- G02 - OPTICS
Information Patent Application
Discharge laser with porous insulating layer covering anode dischar...
- Publication number 20050018737
- Publication date Jan 27, 2005
- Richard G. Morton
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Timing control for two-chamber gas discharge laser system
- Publication number 20050018739
- Publication date Jan 27, 2005
- Alexander I. Ershov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Line selected F2 two chamber laser system
- Publication number 20040258122
- Publication date Dec 23, 2004
- David S. Knowles
- G01 - MEASURING TESTING
Information Patent Application
DUV light source optical element improvements
- Publication number 20040240506
- Publication date Dec 2, 2004
- Richard L. Sandstrom
- G01 - MEASURING TESTING
Information Patent Application
Diode-pumped alkali amplifier
- Publication number 20040218255
- Publication date Nov 4, 2004
- William F. Krupke
- H01 - BASIC ELECTRIC ELEMENTS

Noble gas ions

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Laser

Optical compensation system for laser beam and excimer laser anneal...

Light source apparatus

CO2 laser

Line narrowed laser apparatus

Method for direct compression of laser pulses with large temporal r...

Method and device for detecting flatness of a fluorescent wheel in...

System for reclaiming, rebalancing and recirculating laser gas mixt...

Gas laser

System and method for automatic gas optimization in a two-chamber g...

System for reclaiming, rebalancing and recirculating laser gas mixt...

Dual channel method for pumping and cooling lasers and laser device

Sub 200nm laser pumped homonuclear excimer lasers

Self-locking atomic emission laser with an intracavity atomic plasm...

Optically pumped micro-plasma

Gas laser oscillator capable of controlling gas pressure and gas co...

Gas laser oscillator capable of estimating sealability of gas conta...

Timing control for two-chamber gas discharge laser system

Two-light flux interference exposure device, two-light flux interfe...

Very narrow band, two chamber, high rep-rate gas discharge laser sy...

Laser intra-cavity electronic wavelength tuner

Laser spectral engineering for lithographic process

DUV light source optical element improvements

Laser spectral engineering for lithographic process

Gas discharge MOPA laser spectral analysis module

Line selected F2 two chamber laser system

Timing control for two-chamber gas discharge laser system

Gas discharge laser light source beam delivery unit

Annealed copper alloy electrodes for fluorine containing gas discha...

Very high energy, high stability gas discharge laser surface treatm...

Patents Applicationslast 30 patents

GAS LASER APPARATUS, GAS LASER APPARATUS MAINTENANCE METHOD, AND EL...

PACKED-BED FILTER FOR METAL FLUORIDE DUST TRAPPING IN LASER DISCHAR...

OPTICAL SYSTEM FOR INCREASING THE CONTRAST OF PULSED LASER RADIATIO...

LASER

OPTICAL COMPENSATION SYSTEM FOR LASER BEAM AND EXCIMER LASER ANNEAL...

LIGHT SOURCE APPARATUS

EXCIMER LASER OSCILLATION DEVICE HAVING GAS RECYCLE FUNCTION

LINE NARROWED LASER APPARATUS

LASER GAS PURIFYING SYSTEM

SYSTEM FOR RECLAIMING, REBALANCING AND RECIRCULATING LASER GAS MIXT...

GAS LASER

METHOD AND DEVICE FOR DETECTING FLATNESS OF A FLUORESCENT WHEEL IN...

GAS LASER OSCILLATOR CAPABLE OF ESTIMATING SEALABILITY OF GAS CONTA...

Apparatus for generating laser radiation

Two-light flux interference exposure device, two-light flux interfe...

Laser intra-cavity electronic wavelength tuner

Gas discharge laser light source beam delivery unit

Timing control for two-chamber gas discharge laser system

Very narrow band, two chamber, high rep-rate gas discharge laser sy...

VERY NARROW BAND, TWO CHAMBER, HIGH REP-RATE GAS DISCHARGE LASER SY...

Gas discharge MOPA laser spectral analysis module

Laser spectral engineering for lithographic process

GAS DISCHARGE MOPA LASER SPECTRAL ANALYSIS MODULE

Laser spectral engineering for lithographic process

Optical elements with protective undercoating

Discharge laser with porous insulating layer covering anode dischar...

Timing control for two-chamber gas discharge laser system

Line selected F2 two chamber laser system

DUV light source optical element improvements

Diode-pumped alkali amplifier