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ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2237/00
Discharge tubes exposing object to beam
Current Industry
H01J2237/182
Obtaining or maintaining desired pressure
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Patents Grants
last 30 patents
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Patent Grant
Vacuum chamber arrangement for charged particle beam generator
Patent number
11,961,627
Issue date
Apr 16, 2024
ASML Netherlands B.V.
Alexander Hendrik Vincent Van Veen
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
High density carbon films for patterning applications
Patent number
11,842,897
Issue date
Dec 12, 2023
Applied Materials, Inc.
Eswaranand Venkatasubramanian
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
System for evacuating a chamber
Patent number
11,830,701
Issue date
Nov 28, 2023
ASML Netherlands B.V.
Fangfu Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Processing apparatus and processing method, and gas cluster generat...
Patent number
11,772,138
Issue date
Oct 3, 2023
Tokyo Electron Limited
Kazuya Dobashi
B08 - CLEANING
Information
Patent Grant
Vacuum pump protection against deposition byproduct buildup
Patent number
11,710,623
Issue date
Jul 25, 2023
Lam Research Corporation
John Stephen Drewery
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Vacuum chamber arrangement for charged particle beam generator
Patent number
11,705,252
Issue date
Jul 18, 2023
ASML Netherlands B.V.
Alexander Hendrik Vincent Van Veen
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Coupling for connecting analytical systems with vibrational isolation
Patent number
11,699,582
Issue date
Jul 11, 2023
FEI Company
Alexander Makarov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Refillable ion chamber with automated purging system
Patent number
11,651,931
Issue date
May 16, 2023
Varian Medical Systems, Inc.
Amir Shojaei
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus
Patent number
11,569,068
Issue date
Jan 31, 2023
Tokyo Electron Limited
Kazushi Kaneko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Low-pressure plasma chamber, low-pressure plasma installation and m...
Patent number
11,532,465
Issue date
Dec 20, 2022
Christof-Herbert Diener
B28 - WORKING CEMENT, CLAY, OR STONE
Information
Patent Grant
Ion implanter toxic gas delivery system
Patent number
11,527,380
Issue date
Dec 13, 2022
Taiwan Semiconductor Manufacturing Co., Ltd
Ying-Chieh Meng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Enhanced electron beam generation
Patent number
11,517,975
Issue date
Dec 6, 2022
Arcam AB
Mattias Fager
B22 - CASTING POWDER METALLURGY
Information
Patent Grant
Plasma processing apparatus
Patent number
11,387,083
Issue date
Jul 12, 2022
Shibaura Mechatronics Corporation
Hidehito Azumano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus
Patent number
11,387,082
Issue date
Jul 12, 2022
Shibaura Mechatronics Corporation
Hidehito Azumano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device
Patent number
11,380,515
Issue date
Jul 5, 2022
HITACHI HIGH-TECH CORPORATION
Keiichiro Hosobuchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Aberration correction in charged particle system
Patent number
11,348,756
Issue date
May 31, 2022
ASML Netherlands B.V.
Alexander Hendrik Vincent Van Veen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam apparatus and adjustment method for charged p...
Patent number
11,309,161
Issue date
Apr 19, 2022
Jeol Ltd.
Kazuya Yamazaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Processing system and processing method
Patent number
11,302,521
Issue date
Apr 12, 2022
Tokyo Electron Limited
Kenji Matsumoto
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma processing apparatus and operating method of plasma processi...
Patent number
11,244,803
Issue date
Feb 8, 2022
HITACHI HIGH-TECH CORPORATION
Keisuke Akinaga
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etching apparatus and methods of cleaning thereof
Patent number
11,222,805
Issue date
Jan 11, 2022
Taiwan Semiconductor Manufacturing Co., Ltd
Yu-Chi Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma polymerization apparatus and plasma polymerization method us...
Patent number
11,133,159
Issue date
Sep 28, 2021
Ming Chi University of Technology
Jang-Hsing Hsieh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum chamber arrangement for charged particle beam generator
Patent number
11,094,426
Issue date
Aug 17, 2021
ASML Netherlands B.V.
Alexander Hendrik Vincent Van Veen
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Vacuum cooling apparatus and ion milling apparatus
Patent number
11,043,355
Issue date
Jun 22, 2021
Jeol Ltd.
Tsutomu Negishi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum pump protection against deposition byproduct buildup
Patent number
11,031,215
Issue date
Jun 8, 2021
Lam Research Corporation
John Stephen Drewery
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Charge neutralizer and plasma generator
Patent number
10,984,989
Issue date
Apr 20, 2021
KASUGA DENKI, INC.
Nobuo Nomura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System for evacuating a chamber
Patent number
10,943,761
Issue date
Mar 9, 2021
ASML Netherlands B.V.
Fangfu Li
F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information
Patent Grant
Plasma processing apparatus and prediction method of the condition...
Patent number
10,886,110
Issue date
Jan 5, 2021
HITACHI HIGH-TECH CORPORATION
Yoshito Kamaji
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Pump assembly for creating vacuum in wafer processing chamber
Patent number
10,879,054
Issue date
Dec 29, 2020
Taiwan Semiconductor Manufacturing Co., Ltd
Shian-Hung Su
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Charged particle beam system, opto-electro simultaneous detection s...
Patent number
10,879,036
Issue date
Dec 29, 2020
Focus-eBeam Technology (Beijing) Co., Ltd.
Wei He
G02 - OPTICS
Information
Patent Grant
Plasma etching method and plasma etching apparatus
Patent number
10,872,779
Issue date
Dec 22, 2020
HITACHI HIGH-TECH CORPORATION
Nobuya Miyoshi
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SEMICONDUCTOR MANUFACTURING FACILITY AND METHOD OF OPERATING THE SAME
Publication number
20240128065
Publication date
Apr 18, 2024
LOT CES CO., LTD.
Jin Ho BAE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20240120183
Publication date
Apr 11, 2024
Tokyo Electron Limited
Makoto WADA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
IN-SITU CARBON LINER FOR HIGH ASPECT RATIO FEATURES
Publication number
20240096641
Publication date
Mar 21, 2024
Applied Materials, Inc.
Hailong Zhou
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20240047194
Publication date
Feb 8, 2024
Tokyo Electron Limited
Kenichi KOTE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS, SYSTEMS, AND APPARATUS FOR FORMING LAYERS HAVING SINGLE CR...
Publication number
20240035195
Publication date
Feb 1, 2024
Applied Materials, Inc.
Qinghua ZHAO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
NEUTRAL BEAM ANNEALING APPARATUS AND METHOD OF MANUFACTURING DISPLA...
Publication number
20240030043
Publication date
Jan 25, 2024
SAMSUNG DISPLAY CO., LTD.
Takayuki FUKASAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR SELECTIVE DEPOSITION OF SILICON NITRIDE AND STRUCTURE IN...
Publication number
20240014030
Publication date
Jan 11, 2024
ASM IP HOLDING B.V.
Agung Setiadi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Vacuum Treatment Apparatus and Vacuum Treatment Method
Publication number
20230402248
Publication date
Dec 14, 2023
Hitachi High-Tech Corporation
Akito TANOKUCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PRECLEAN SYSTEM FOR CLUSTER TOOL
Publication number
20230402268
Publication date
Dec 14, 2023
Applied Materials, Inc.
Songjae LEE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD, PRESSURE VAL...
Publication number
20230395360
Publication date
Dec 7, 2023
TOKYO ELECTRON LIMITED
Kota SHIHOMMATSU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VACUUM CHAMBER ARRANGEMENT FOR CHARGED PARTICLE BEAM GENERATOR
Publication number
20230386696
Publication date
Nov 30, 2023
ASML NETHERLANDS B.V.
Alexander Hendrik Vincent VAN VEEN
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Publication number
20230377844
Publication date
Nov 23, 2023
TOKYO ELECTRON LIMITED
Shingo TAKAHASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LOW TEMPERATURE CARBON GAPFILL
Publication number
20230360924
Publication date
Nov 9, 2023
Applied Materials, Inc.
Supriya Ghosh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND DEVICE FOR THE OUTER-WALL AND/OR INNER-WALL COATING OF H...
Publication number
20230323529
Publication date
Oct 12, 2023
RHEINISCH-WESTFÄLISCHE TECHNISCHE HOCHSCHULE (RWTH) AACHEN KÖRPERSCHAFT DES Ö...
Montgomery JARITZ
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
VACUUM PUMP PROTECTION AGAINST DEPOSITION BYPRODUCT BUILDUP
Publication number
20230317437
Publication date
Oct 5, 2023
LAM RESEARCH CORPORATION
John Stephen Drewery
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CARRIER FOR END EFFECTOR, TRANSPORTATION APPARATUS INCLUDING THE SA...
Publication number
20230317434
Publication date
Oct 5, 2023
SEMES CO., LTD.
Jae Won SHIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEVICE AND METHOD FOR SPUTTERING AND DEPOSITING METAL ON SURFACE OF...
Publication number
20230317429
Publication date
Oct 5, 2023
Bin ZHANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FOCUSED ION BEAM SYSTEM
Publication number
20230307205
Publication date
Sep 28, 2023
V Technology Co., LTD.
Michinobu MIZUMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR ETCHING LITHIUM NIOBATE AND METHOD FOR FORMING LITHIUM N...
Publication number
20230307214
Publication date
Sep 28, 2023
Korea Institute of Science and Technology
Ho Joong JUNG
B08 - CLEANING
Information
Patent Application
PLASMA TREATMENT APPARATUS AND PLASMA TREATMENT METHOD
Publication number
20230307215
Publication date
Sep 28, 2023
TOKYO ELECTRON LIMITED
Tatsuo MATSUDO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ULTRATHIN ATOMIC LAYER DEPOSITION FILM ACCURACY THICKNESS CONTROL
Publication number
20230298884
Publication date
Sep 21, 2023
LAM RESEARCH CORPORATION
Jun Qian
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA TREATMENT APPARATUS AND PLASMA TREATMENT METHOD
Publication number
20230298868
Publication date
Sep 21, 2023
KIOXIA Corporation
Yusuke KONDO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR PROCESSING SYSTEM WITH GAS LINE FOR TRANSPORTING EXCI...
Publication number
20230290613
Publication date
Sep 14, 2023
ASM IP HOLDING B.V.
Varun Sharma
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REFILLABLE ION CHAMBER WITH AUTOMATED PURGING SYSTEM
Publication number
20230260738
Publication date
Aug 17, 2023
Varian Medical Systems, Inc.
Amir Shojaei
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DELIVERY OF HIGH CONCENTRATIONS OF MOLECULAR HYDROGEN AND OTHER GAS...
Publication number
20230245862
Publication date
Aug 3, 2023
LAM RESEARCH CORPORATION
Anthony John RICCI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TREATMENT APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURIN...
Publication number
20230238226
Publication date
Jul 27, 2023
Samsung Electronics Co., Ltd.
Woo Hyun LEE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DEPOSITION APPARATUS AND METHOD OF CLEANSING THE SAME
Publication number
20230227971
Publication date
Jul 20, 2023
SAMSUNG DISPLAY CO., LTD.
JONGBUN HAN
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20230230818
Publication date
Jul 20, 2023
Kokusai Electric Corporation
Tetsuaki Inada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INTERMITTENT STAGNANT FLOW
Publication number
20230230820
Publication date
Jul 20, 2023
LAM RESEARCH CORPORATION
Douglas L. KEIL
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
HIGH DIELECTRIC FILMS AND SEMICONDUCTOR OR CAPACITOR DEVICES COMPRI...
Publication number
20230223166
Publication date
Jul 13, 2023
THE INDUSTRY & ACADEMIC COOPERATION IN CHUNGNAM NATIONAL UNIVERSITY (IAC)
Eui-Tae KIM
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...