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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

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H01L21/3142of nano-laminates

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Patents Grantslast 30 patents

Information Patent Grant
Insulator, capacitor with the same and fabrication method thereof,...
- Patent number 10,916,419
- Issue date Feb 9, 2021
- KEY FOUNDRY CO., LTD.
- Kwan-Soo Kim
- B32 - LAYERED PRODUCTS
Information Patent Grant
Insulator, capacitor with the same and fabrication method thereof,...
- Patent number 10,199,214
- Issue date Feb 5, 2019
- MagnaChip Semiconductor, Ltd.
- Kwan-Soo Kim
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Methods of vapor deposition with multiple vapor sources
- Patent number 9,873,942
- Issue date Jan 23, 2018
- ASM IP Holding B.V.
- Christophe Pomarede
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Graded dielectric structures
- Patent number 9,627,501
- Issue date Apr 18, 2017
- Micron Technology, Inc.
- F. Daniel Gealy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gallium lanthanide oxide films
- Patent number 9,583,334
- Issue date Feb 28, 2017
- Micron Technology, Inc.
- Kie Y. Ahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Graphene resonator based mixer-first receiver on CMOS for digitally...
- Patent number 9,344,127
- Issue date May 17, 2016
- The Trustees of Columbia University In the City of New York
- James Hone
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Multiple vapor sources for vapor deposition
- Patent number 9,238,865
- Issue date Jan 19, 2016
- ASM IP Holding B.V.
- Christophe Pomarede
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Passivation layer for harsh environments and methods of fabrication...
- Patent number 9,233,842
- Issue date Jan 12, 2016
- Robert Bosch GmbH
- Ando Lars Feyh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Anisotropic conductor and method of fabrication thereof
- Patent number 9,187,314
- Issue date Nov 17, 2015
- Robert Bosch GmbH
- Ando Lars Feyh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Systems and methods for forming zirconium and/or hafnium-containing...
- Patent number 9,184,061
- Issue date Nov 10, 2015
- Micron Technology, Inc.
- Brian A. Vaartstra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gallium lathanide oxide films
- Patent number 9,129,961
- Issue date Sep 8, 2015
- Micron Technology, Inc.
- Kie Y. Ahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Insulator, capacitor with the same and fabrication method thereof,...
- Patent number 9,099,300
- Issue date Aug 4, 2015
- MagnaChip Semiconductor, Ltd.
- Kwan-Soo Kim
- B32 - LAYERED PRODUCTS
Information Patent Grant
Graded dielectric structures
- Patent number 8,951,903
- Issue date Feb 10, 2015
- Micron Technology, Inc.
- Dan Gealy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of fabricating integrated circuit capacitors having u-shape...
- Patent number 8,941,165
- Issue date Jan 27, 2015
- Samsung Electronics Co., Ltd.
- Sung-IL Cho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus having a dielectric containing scandium and gadolinium
- Patent number 8,933,449
- Issue date Jan 13, 2015
- Micron Technology, Inc.
- Kie Y. Ahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming lutetium and lanthanum dielectric structures
- Patent number 8,847,334
- Issue date Sep 30, 2014
- Micron Technology, Inc.
- Kie Y. Ahn
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method of fabricating a semiconductor device
- Patent number 8,796,087
- Issue date Aug 5, 2014
- Samsung Electronics Co., Ltd.
- Weon-Hong Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Zr-substituted BaTiO3 films
- Patent number 8,772,050
- Issue date Jul 8, 2014
- Micron Technology, Inc.
- Kie Y. Ahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hafnium tantalum oxynitride dielectric
- Patent number 8,759,170
- Issue date Jun 24, 2014
- Micron Technology, Inc.
- Leonard Forbes
- G11 - INFORMATION STORAGE
Information Patent Grant
Method of manufacturing a semiconductor device
- Patent number 8,741,731
- Issue date Jun 3, 2014
- Hitachi Kokusai Electric Inc.
- Yuji Takebayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Titanium based high-K dielectric films
- Patent number 8,737,036
- Issue date May 27, 2014
- Intermolecular, Inc.
- Hanhong Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hafnium tantalum titanium oxide films
- Patent number 8,685,815
- Issue date Apr 1, 2014
- Micron Technology, Inc.
- Kie Y. Ahn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus having a dielectric containing scandium and gadolinium
- Patent number 8,603,907
- Issue date Dec 10, 2013
- Micron Technology, Inc.
- Kie Y. Ahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of forming dielectric material-containing structures
- Patent number 8,603,877
- Issue date Dec 10, 2013
- Micron Technology, Inc.
- Noel Rocklein
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of forming strontium titanate films
- Patent number 8,592,058
- Issue date Nov 26, 2013
- Intermolecular, Inc.
- Laura M. Matz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Titanium-based high-K dielectric films
- Patent number 8,551,851
- Issue date Oct 8, 2013
- Intermolecular, Inc.
- Hanhong Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of forming an insulating metal oxide
- Patent number 8,541,276
- Issue date Sep 24, 2013
- Micron Technology, Inc.
- Kie Y. Ahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
ZrXHfYSn1-X-YO2 films as high K gate dielectrics
- Patent number 8,497,542
- Issue date Jul 30, 2013
- Micron Technology, Inc.
- Kie Y. Ahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device and method of fabricating the same
- Patent number 8,471,359
- Issue date Jun 25, 2013
- Samsung Electronics Co., Ltd.
- Weon-Hong Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hafnium tantalum oxynitride dielectric
- Patent number 8,466,016
- Issue date Jun 18, 2013
- Micron Technolgy, Inc.
- Leonard Forbes
- G11 - INFORMATION STORAGE

Patents Applicationslast 30 patents

Information Patent Application
ANISOTROPIC CONDUCTOR AND METHOD OF FABRICATION THEREOF
- Publication number 20140264900
- Publication date Sep 18, 2014
- ROBERT BOSCH GmbH
- Ando Lars Feyh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PASSIVATION LAYER FOR HARSH ENVIRONMENTS AND METHODS OF FABRICATION...
- Publication number 20140264781
- Publication date Sep 18, 2014
- ROBERT BOSCH GmbH
- Ando Lars Feyh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
APPARATUS HAVING A DIELECTRIC CONTAINING SCANDIUM AND GADOLINIUM
- Publication number 20140084355
- Publication date Mar 27, 2014
- Micron Technology, Inc.
- Kie Y. Ahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FABRICATING A SEMICONDUCTOR DEVICE
- Publication number 20130280881
- Publication date Oct 24, 2013
- Weon-Hong Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HAFNIUM TANTALUM OXYNITRIDE DIELECTRIC
- Publication number 20130279259
- Publication date Oct 24, 2013
- Leonard Forbes
- G11 - INFORMATION STORAGE
Information Patent Application
HAFNIUM TANTALUM TITANIUM OXIDE FILMS
- Publication number 20130224916
- Publication date Aug 29, 2013
- Micron Technology, Inc.
- Kie Y. Ahn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPLE VAPOR SOURCES FOR VAPOR DEPOSITION
- Publication number 20130203267
- Publication date Aug 8, 2013
- ASM IP HOLDING B.V.
- Christophe Pomarede
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Zr-SUBSTITUTED BaTiO3 FILMS
- Publication number 20130122609
- Publication date May 16, 2013
- Micron Technology, Inc.
- Kie Y. Ahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
- Publication number 20130122720
- Publication date May 16, 2013
- Hitachi Kokusai Electric Inc.
- Yuji TAKEBAYASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of forming strontium titanate films
- Publication number 20130059066
- Publication date Mar 7, 2013
- Intermolecular, Inc.
- Xiangxin Rui
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Titanium-Based High-K Dielectric Films
- Publication number 20130044404
- Publication date Feb 21, 2013
- Intermolecular, Inc.
- Hanhong Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods of Forming Dielectric Material-Containing Structures
- Publication number 20120220098
- Publication date Aug 30, 2012
- Micron Technology, Inc.
- Noel Rocklein
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GRADED DIELECTRIC STRUCTURES
- Publication number 20120202358
- Publication date Aug 9, 2012
- Dan Gealy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF FORMING AN INSULATING METAL OXIDE
- Publication number 20120196448
- Publication date Aug 2, 2012
- Kie Y. Ahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DOPED ZrO2 CAPACITOR MATERIALS AND STRUCTURES
- Publication number 20120127629
- Publication date May 24, 2012
- Advanced Technology Materials, Inc.
- Jeffrey F. Roeder
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
HAFNIUM TANTALUM OXYNITRIDE DIELECTRIC
- Publication number 20120094477
- Publication date Apr 19, 2012
- Leonard Forbes
- G11 - INFORMATION STORAGE
Information Patent Application
METHODS FOR THE DEPOSITION OF TERNARY OXIDE GATE DIELECTRICS AND ST...
- Publication number 20120091542
- Publication date Apr 19, 2012
- Mark R. Brazier
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF FORMING TITANIUM SILICON OXIDE
- Publication number 20120088373
- Publication date Apr 12, 2012
- Kie Y. Ahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING LUTETIUM AND LANTHANUM DIELECTRIC STRUCTURES
- Publication number 20120074480
- Publication date Mar 29, 2012
- Kie Y. Ahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS HAVING A DIELECTRIC CONTAINING SCANDIUM AND GADOLINIUM
- Publication number 20110300701
- Publication date Dec 8, 2011
- Kie Y. Ahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HAFNIUM TANTALUM TITANIUM OXIDE FILMS
- Publication number 20110298028
- Publication date Dec 8, 2011
- KIE Y. AHN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Zr-SUBSTITUTED BaTiO3 FILMS
- Publication number 20110275163
- Publication date Nov 10, 2011
- Kie Y. Ahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRETREATMENT PROCESSES WITHIN A BATCH ALD REACTOR
- Publication number 20110263137
- Publication date Oct 27, 2011
- Maitreyee Mahajani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GALLIUM LATHANIDE OXIDE FILMS
- Publication number 20110260215
- Publication date Oct 27, 2011
- Kie Y. Ahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TITANIUM-BASED HIGH-K DIELECTRIC FILMS
- Publication number 20110203085
- Publication date Aug 25, 2011
- Intermolecular, Inc.
- Hanhong Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE HAVING DIFFERENT METAL GATE STRUCTURES
- Publication number 20110193181
- Publication date Aug 11, 2011
- Samsung Electronics Co., Ltd.
- Hyung-suk JUNG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING MIXED RARE EARTH OXIDE AND ALUMINATE FILMS BY ATO...
- Publication number 20110165328
- Publication date Jul 7, 2011
- TOKYO ELECTRON LIMITED
- Robert D. Clark
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ZrXHfYSn1-X-YO2 FILMS AS HIGH K GATE DIELECTRICS
- Publication number 20110121378
- Publication date May 26, 2011
- Kie Y. Ahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEVICE HAVING COMPLEX OXIDE NANODOTS
- Publication number 20110062511
- Publication date Mar 17, 2011
- Micron Technology, Inc.
- Nirmal Ramaswamy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods of Forming Strontium Titanate Films
- Publication number 20110027960
- Publication date Feb 3, 2011
- Laura M. Matz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

of nano-laminates

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Insulator, capacitor with the same and fabrication method thereof,...

Insulator, capacitor with the same and fabrication method thereof,...

Methods of vapor deposition with multiple vapor sources

Graded dielectric structures

Gallium lanthanide oxide films

Graphene resonator based mixer-first receiver on CMOS for digitally...

Multiple vapor sources for vapor deposition

Passivation layer for harsh environments and methods of fabrication...

Anisotropic conductor and method of fabrication thereof

Systems and methods for forming zirconium and/or hafnium-containing...

Gallium lathanide oxide films

Insulator, capacitor with the same and fabrication method thereof,...

Graded dielectric structures

Methods of fabricating integrated circuit capacitors having u-shape...

Apparatus having a dielectric containing scandium and gadolinium

Method of forming lutetium and lanthanum dielectric structures

Method of fabricating a semiconductor device

Zr-substituted BaTiO3 films

Hafnium tantalum oxynitride dielectric

Method of manufacturing a semiconductor device

Titanium based high-K dielectric films

Hafnium tantalum titanium oxide films

Apparatus having a dielectric containing scandium and gadolinium

Methods of forming dielectric material-containing structures

Methods of forming strontium titanate films

Titanium-based high-K dielectric films

Methods of forming an insulating metal oxide

ZrXHfYSn1-X-YO2 films as high K gate dielectrics

Semiconductor device and method of fabricating the same

Hafnium tantalum oxynitride dielectric

Patents Applicationslast 30 patents

ANISOTROPIC CONDUCTOR AND METHOD OF FABRICATION THEREOF

PASSIVATION LAYER FOR HARSH ENVIRONMENTS AND METHODS OF FABRICATION...

APPARATUS HAVING A DIELECTRIC CONTAINING SCANDIUM AND GADOLINIUM

METHOD OF FABRICATING A SEMICONDUCTOR DEVICE

HAFNIUM TANTALUM OXYNITRIDE DIELECTRIC

HAFNIUM TANTALUM TITANIUM OXIDE FILMS

MULTIPLE VAPOR SOURCES FOR VAPOR DEPOSITION

Zr-SUBSTITUTED BaTiO3 FILMS

METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE

Method of forming strontium titanate films

Titanium-Based High-K Dielectric Films

Methods of Forming Dielectric Material-Containing Structures

GRADED DIELECTRIC STRUCTURES

METHODS OF FORMING AN INSULATING METAL OXIDE

DOPED ZrO2 CAPACITOR MATERIALS AND STRUCTURES

HAFNIUM TANTALUM OXYNITRIDE DIELECTRIC

METHODS FOR THE DEPOSITION OF TERNARY OXIDE GATE DIELECTRICS AND ST...

METHODS OF FORMING TITANIUM SILICON OXIDE

METHOD OF FORMING LUTETIUM AND LANTHANUM DIELECTRIC STRUCTURES

APPARATUS HAVING A DIELECTRIC CONTAINING SCANDIUM AND GADOLINIUM

HAFNIUM TANTALUM TITANIUM OXIDE FILMS

Zr-SUBSTITUTED BaTiO3 FILMS

PRETREATMENT PROCESSES WITHIN A BATCH ALD REACTOR

GALLIUM LATHANIDE OXIDE FILMS

TITANIUM-BASED HIGH-K DIELECTRIC FILMS

SEMICONDUCTOR DEVICE HAVING DIFFERENT METAL GATE STRUCTURES

METHOD OF FORMING MIXED RARE EARTH OXIDE AND ALUMINATE FILMS BY ATO...

ZrXHfYSn1-X-YO2 FILMS AS HIGH K GATE DIELECTRICS

DEVICE HAVING COMPLEX OXIDE NANODOTS

Methods of Forming Strontium Titanate Films