of wafers or semiconductor substrates

Industry

CPC
G01J5/0007

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Parent Industries

GPHYSICS G01Measuring instruments G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT COLORIMETRY RADIATION PYROMETRY G01J5/00Radiation pyrometry

Current Industry

G01J5/0007of wafers or semiconductor substrates

Industries

Patents Grantslast 30 patents

Information Patent Grant
Heat treatment method and heat treatment apparatus
- Patent number 12,125,723
- Issue date Oct 22, 2024
- SCREEN Holdings Co., Ltd.
- Oma Nakajima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal imaging sensor for integration into track system
- Patent number 12,123,778
- Issue date Oct 22, 2024
- Tokyo Electron Limited
- Michael Carcasi
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Workpiece processing apparatus with thermal processing systems
- Patent number 12,046,489
- Issue date Jul 23, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Rolf Bremensdorfer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of forming structures, semiconductor processing systems, an...
- Patent number 11,959,173
- Issue date Apr 16, 2024
- ASM IP Holding B.V.
- Amir Kajbafvala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Combined near and mid infrared sensor in a chip scale package
- Patent number 11,953,380
- Issue date Apr 9, 2024
- NEXTINPUT, INC.
- Ali Foughi
- G01 - MEASURING TESTING
Information Patent Grant
Temperature calibration with deposition and etch process
- Patent number 11,948,818
- Issue date Apr 2, 2024
- Applied Materials, Inc.
- Zhepeng Cong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treatment method and heat treatment apparatus of light irradia...
- Patent number 11,876,006
- Issue date Jan 16, 2024
- SCREEN Holdings Co., Ltd.
- Tomohiro Ueno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device including temperature sensing circuit
- Patent number 11,860,045
- Issue date Jan 2, 2024
- SK Hynix Inc.
- Dahoo Kim
- G01 - MEASURING TESTING
Information Patent Grant
Reflector plate for substrate processing
- Patent number 11,828,656
- Issue date Nov 28, 2023
- Applied Materials, Inc.
- Wolfgang R. Aderhold
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Continuous spectra transmission pyrometry
- Patent number 11,703,391
- Issue date Jul 18, 2023
- Applied Materials, Inc.
- Samuel C. Howells
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for measuring temperature
- Patent number 11,662,253
- Issue date May 30, 2023
- Applied Materials, Inc.
- Joseph M. Ranish
- G01 - MEASURING TESTING
Information Patent Grant
Heat treatment apparatus and temperature control method
- Patent number 11,656,126
- Issue date May 23, 2023
- Tokyo Electron Limited
- Kazuteru Obara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for heating a wide bandgap substrate by providing a resistiv...
- Patent number 11,629,401
- Issue date Apr 18, 2023
- SILANNA UV TECHNOLOGIES PTE LTD
- Petar Atanackovic
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and device for failure analysis using RF-based thermometry
- Patent number 11,551,956
- Issue date Jan 10, 2023
- Intel Corporation
- Chandrashekara Shashank Kaira
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for calibration of substrate temperature using...
- Patent number 11,543,296
- Issue date Jan 3, 2023
- Applied Materials, Inc.
- Eric D. Wilson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for determining a surface temperature
- Patent number 11,515,184
- Issue date Nov 29, 2022
- Wacker Chemie AG
- Olaf Seifarth
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for measuring the surface temperature of a sub...
- Patent number 11,454,543
- Issue date Sep 27, 2022
- LASER SYSTEMS & SOLUTIONS OF EUROPE
- Sylvain Perrot
- G01 - MEASURING TESTING
Information Patent Grant
Real time chuck temperature monitoring
- Patent number 11,435,398
- Issue date Sep 6, 2022
- Texas Instruments Incorporated
- Guan Da Lee
- G01 - MEASURING TESTING
Information Patent Grant
Deposition apparatus having particular arrangement of raw material...
- Patent number 11,424,147
- Issue date Aug 23, 2022
- Showa Denko K.K.
- Keisuke Fukada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Contactless workpiece temperature sensor
- Patent number 11,415,463
- Issue date Aug 16, 2022
- Applied Materials, Inc.
- Paul E. Pergande
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device and method for measuring film longitudinal temperature field...
- Patent number 11,410,849
- Issue date Aug 9, 2022
- University of Electronic Science and Technology of China
- Chao Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal imaging for within wafer variability feedforward or feedbac...
- Patent number 11,353,364
- Issue date Jun 7, 2022
- Lam Research Corporation
- William Dean Thompson
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Laser noise elimination in transmission thermometry
- Patent number 11,292,079
- Issue date Apr 5, 2022
- Applied Materials, Inc.
- Jiping Li
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Purged viewport for quartz dome in epitaxy reactor
- Patent number 11,189,508
- Issue date Nov 30, 2021
- Applied Materials, Inc.
- Ji-Dih Hu
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for measuring temperature
- Patent number 11,162,845
- Issue date Nov 2, 2021
- APPLIED MATERIALS, INC.
- Joseph M. Ranish
- G01 - MEASURING TESTING
Information Patent Grant
Radiation thermometer
- Patent number 11,150,138
- Issue date Oct 19, 2021
- HORIBA ADVANCED TECHNO, CO., LTD.
- Sho Fujino
- G01 - MEASURING TESTING
Information Patent Grant
Inspection system
- Patent number 11,067,624
- Issue date Jul 20, 2021
- Tokyo Electron Limited
- Kentaro Konishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
In-situ temperature measurement for inside of process chamber
- Patent number 11,069,547
- Issue date Jul 20, 2021
- Applied Materials, Inc.
- Xue Yang Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal radiation detectors with carbon-nanotube-based optical abso...
- Patent number 11,054,311
- Issue date Jul 6, 2021
- Institut National D'Optique
- Hassane Oulachgar
- G01 - MEASURING TESTING
Information Patent Grant
Substrate temperature monitoring
- Patent number 11,053,592
- Issue date Jul 6, 2021
- Applied Materials, Inc.
- Sanjay D. Yadav
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
CHAMBER KITS, SYSTEMS, AND METHODS FOR CALIBRATING TEMPERATURE SENS...
- Publication number 20250003806
- Publication date Jan 2, 2025
- Applied Materials, Inc.
- Zhepeng CONG
- C30 - CRYSTAL GROWTH
Information Patent Application
Workpiece Processing Apparatus with Thermal Processing Systems
- Publication number 20240347356
- Publication date Oct 17, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Rolf Bremensdorfer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS, APPARATUS, AND METHODS FOR MONITORING PLATE TEMPERATURE FO...
- Publication number 20240337537
- Publication date Oct 10, 2024
- Applied Materials, Inc.
- Zhepeng CONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF FORMING STRUCTURES, SEMICONDUCTOR PROCESSING SYSTEMS, AN...
- Publication number 20240209510
- Publication date Jun 27, 2024
- ASM IP HOLDING B.V.
- Amir Kajbafvala
- G01 - MEASURING TESTING
Information Patent Application
REFLECTOR PLATE FOR SUBSTRATE PROCESSING
- Publication number 20240175753
- Publication date May 30, 2024
- Applied Materials, Inc.
- Wolfgang R. ADERHOLD
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RADIATION TEMPERATURE MEASUREMENT DEVICE AND RADIATION TEMPERATURE...
- Publication number 20240110834
- Publication date Apr 4, 2024
- HORIBA, LTD.
- Sho FUJINO
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE HEAT-TREATING APPARATUS USING LASER LIGHT-EMITTING DEVICE
- Publication number 20240071787
- Publication date Feb 29, 2024
- Viatron Co., Ltd.
- Hyoung June Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYNCHRONIZATION BETWEEN TEMPERATURE MEASUREMENT DEVICE AND RADIATIO...
- Publication number 20240014052
- Publication date Jan 11, 2024
- Benjamin BROSILOW
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR EMISSIVITY-CORRECTED PYROMETRY
- Publication number 20230374664
- Publication date Nov 23, 2023
- AIXTRON SE
- Karsten ROJEK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PYROMETER CONTROLLED MULTI-WAFER CLEANING PROCESS
- Publication number 20230324227
- Publication date Oct 12, 2023
- ASM IP HOLDING, B.V.
- Ernesto Suarez
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Temperature Sensor Arrangement in Semiconductor Module
- Publication number 20230326823
- Publication date Oct 12, 2023
- Andre Arens
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE MEASUREMENT METHOD AND HEAT TREATMENT APPARATUS
- Publication number 20230274959
- Publication date Aug 31, 2023
- SCREEN Holdings Co., Ltd.
- Takahiro KITAZAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND SYSTEMS FOR HEATING A WIDE BANDGAP SUBSTRATE
- Publication number 20230203643
- Publication date Jun 29, 2023
- Silanna UV Technologies Pte Ltd
- Petar Atanackovic
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RADIATION THERMOMETER
- Publication number 20230194350
- Publication date Jun 22, 2023
- HORIBA, LTD.
- Yu TAKIGUCHI
- G01 - MEASURING TESTING
Information Patent Application
TEMPERATURE CALIBRATION WITH DEPOSITION AND ETCH PROCESS
- Publication number 20230187240
- Publication date Jun 15, 2023
- Applied Materials, Inc.
- Zhepeng CONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for heating a wide bandgap substrate by providing a resistiv...
- Publication number 20230131472
- Publication date Apr 27, 2023
- Silanna UV Technologies Pte Ltd
- Petar Atanackovic
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THERMOREFLECTANCE ENHANCEMENT COATINGS AND METHODS OF MAKING AND US...
- Publication number 20220404204
- Publication date Dec 22, 2022
- Georgia Tech Research Corporation
- Riley Hanus
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
METHODS OF FORMING STRUCTURES, SEMICONDUCTOR PROCESSING SYSTEMS, AN...
- Publication number 20220298643
- Publication date Sep 22, 2022
- ASM IP HOLDING B.V.
- Amir Kajbafvala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER TEMPERATURE GRADIENT CONTROL TO SUPPRESS SLIP FORMATION IN HI...
- Publication number 20220298672
- Publication date Sep 22, 2022
- ASM IP HOLDING B.V.
- Hichem M'Saad
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TEMPERATURE MEASUREMENT METHOD, OPTICAL HEATING METHOD, AND OPTICAL...
- Publication number 20220260421
- Publication date Aug 18, 2022
- Ushio Denki Kabushiki Kaisha
- Takahiro INOUE
- G01 - MEASURING TESTING
Information Patent Application
COMBINED NEAR AND MID INFRARED SENSOR IN A CHIP SCALE PACKAGE
- Publication number 20220214223
- Publication date Jul 7, 2022
- Ali FOUGHI
- G01 - MEASURING TESTING
Information Patent Application
REAL TIME CHUCK TEMPERATURE MONITORING
- Publication number 20220178993
- Publication date Jun 9, 2022
- TEXAS INSTRUMENTS INCORPORATED
- Guan Da Lee
- G01 - MEASURING TESTING
Information Patent Application
REFLECTOR PLATE FOR SUBSTRATE PROCESSING
- Publication number 20220163394
- Publication date May 26, 2022
- Applied Materials, Inc.
- Wolfgang R. ADERHOLD
- G01 - MEASURING TESTING
Information Patent Application
TEMPERATURE PROFILE MEASUREMENT AND SYNCHRONIZED CONTROL ON SUBSTRA...
- Publication number 20220155148
- Publication date May 19, 2022
- Applied Materials, Inc.
- Zuoming ZHU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR MEASURING TEMPERATURE
- Publication number 20220057268
- Publication date Feb 24, 2022
- Applied Materials, Inc.
- Joseph M. RANISH
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR CONTROLLING THE TEMPERATURE OF A SEMICONDU...
- Publication number 20220034708
- Publication date Feb 3, 2022
- METRYX LIMITED
- Gregor ELLIOTT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND DEVICE FOR FAILURE ANALYSIS USING RF-BASED THERMOMETRY
- Publication number 20210407833
- Publication date Dec 30, 2021
- Intel Corporation
- Chandrashekara Shashank Kaira
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Thermal Imaging Sensor for Integration into Track System
- Publication number 20210285822
- Publication date Sep 16, 2021
- TOKYO ELECTRON LIMITED
- Michael Carcasi
- G01 - MEASURING TESTING
Information Patent Application
THERMAL IMAGING FOR WITHIN WAFER VARIABILITY FEEDFORWARD OR FEEDBAC...
- Publication number 20210270673
- Publication date Sep 2, 2021
- LAM RESEARCH CORPORATION
- William Dean Thompson
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
HEAT TREATMENT METHOD AND HEAT TREATMENT APPARATUS
- Publication number 20210272827
- Publication date Sep 2, 2021
- SCREEN Holdings Co., Ltd.
- Oma NAKAJIMA
- G01 - MEASURING TESTING

of wafers or semiconductor substrates

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Heat treatment method and heat treatment apparatus

Thermal imaging sensor for integration into track system

Workpiece processing apparatus with thermal processing systems

Methods of forming structures, semiconductor processing systems, an...

Combined near and mid infrared sensor in a chip scale package

Temperature calibration with deposition and etch process

Heat treatment method and heat treatment apparatus of light irradia...

Semiconductor device including temperature sensing circuit

Reflector plate for substrate processing

Continuous spectra transmission pyrometry

Method and apparatus for measuring temperature

Heat treatment apparatus and temperature control method

Method for heating a wide bandgap substrate by providing a resistiv...

Method and device for failure analysis using RF-based thermometry

Method and apparatus for calibration of substrate temperature using...

Method for determining a surface temperature

Apparatus and method for measuring the surface temperature of a sub...

Real time chuck temperature monitoring

Deposition apparatus having particular arrangement of raw material...

Contactless workpiece temperature sensor

Device and method for measuring film longitudinal temperature field...

Thermal imaging for within wafer variability feedforward or feedbac...

Laser noise elimination in transmission thermometry

Purged viewport for quartz dome in epitaxy reactor

Method and apparatus for measuring temperature

Radiation thermometer

Inspection system

In-situ temperature measurement for inside of process chamber

Thermal radiation detectors with carbon-nanotube-based optical abso...

Substrate temperature monitoring

Patents Applicationslast 30 patents

CHAMBER KITS, SYSTEMS, AND METHODS FOR CALIBRATING TEMPERATURE SENS...

Workpiece Processing Apparatus with Thermal Processing Systems

SYSTEMS, APPARATUS, AND METHODS FOR MONITORING PLATE TEMPERATURE FO...

METHODS OF FORMING STRUCTURES, SEMICONDUCTOR PROCESSING SYSTEMS, AN...

REFLECTOR PLATE FOR SUBSTRATE PROCESSING

RADIATION TEMPERATURE MEASUREMENT DEVICE AND RADIATION TEMPERATURE...

SUBSTRATE HEAT-TREATING APPARATUS USING LASER LIGHT-EMITTING DEVICE

SYNCHRONIZATION BETWEEN TEMPERATURE MEASUREMENT DEVICE AND RADIATIO...

METHOD FOR EMISSIVITY-CORRECTED PYROMETRY

PYROMETER CONTROLLED MULTI-WAFER CLEANING PROCESS

Temperature Sensor Arrangement in Semiconductor Module

TEMPERATURE MEASUREMENT METHOD AND HEAT TREATMENT APPARATUS

METHODS AND SYSTEMS FOR HEATING A WIDE BANDGAP SUBSTRATE

RADIATION THERMOMETER

TEMPERATURE CALIBRATION WITH DEPOSITION AND ETCH PROCESS

Method for heating a wide bandgap substrate by providing a resistiv...

THERMOREFLECTANCE ENHANCEMENT COATINGS AND METHODS OF MAKING AND US...

METHODS OF FORMING STRUCTURES, SEMICONDUCTOR PROCESSING SYSTEMS, AN...

WAFER TEMPERATURE GRADIENT CONTROL TO SUPPRESS SLIP FORMATION IN HI...

TEMPERATURE MEASUREMENT METHOD, OPTICAL HEATING METHOD, AND OPTICAL...

COMBINED NEAR AND MID INFRARED SENSOR IN A CHIP SCALE PACKAGE

REAL TIME CHUCK TEMPERATURE MONITORING

REFLECTOR PLATE FOR SUBSTRATE PROCESSING

TEMPERATURE PROFILE MEASUREMENT AND SYNCHRONIZED CONTROL ON SUBSTRA...

METHOD AND APPARATUS FOR MEASURING TEMPERATURE

METHOD AND APPARATUS FOR CONTROLLING THE TEMPERATURE OF A SEMICONDU...

METHOD AND DEVICE FOR FAILURE ANALYSIS USING RF-BASED THERMOMETRY

Thermal Imaging Sensor for Integration into Track System

THERMAL IMAGING FOR WITHIN WAFER VARIABILITY FEEDFORWARD OR FEEDBAC...

HEAT TREATMENT METHOD AND HEAT TREATMENT APPARATUS