On-device systems and sensors for controlling, regulating or monitoring

Industry

CPC
B81B7/0087

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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81BMICRO-STRUCTURAL DEVICES OR SYSTEMS B81B7/00Micro-structural systems; Auxiliary parts of micro-structural devices or systems

Current Industry

B81B7/0087On-device systems and sensors for controlling, regulating or monitoring

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Systems and methods for temperature sensor access in die stacks
- Patent number 12,297,098
- Issue date May 13, 2025
- Micron Technology, Inc.
- Gary L. Howe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensor system, method for operating a sensor system
- Patent number 12,270,824
- Issue date Apr 8, 2025
- Robert Bosch GmbH
- Wolfram Geiger
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromirror arrays
- Patent number 12,259,546
- Issue date Mar 25, 2025
- ASML Netherlands B.V.
- Alexandre Halbach
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensor with integrated heater
- Patent number 12,180,067
- Issue date Dec 31, 2024
- Invensense, Inc.
- Pei-Wen Yen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electrooptical systems having heating elements
- Patent number 12,105,277
- Issue date Oct 1, 2024
- Innoviz Technologies Ltd.
- Yair Alpern
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Systems and methods for thermally regulating sensor operation
- Patent number 12,078,653
- Issue date Sep 3, 2024
- SZ DJI Technology Co., Ltd
- Guoxiu Pan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Isotachophoresis for purification of nucleic acids
- Patent number 12,006,496
- Issue date Jun 11, 2024
- Purigen Biosystems, Inc.
- Lewis A. Marshall
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Dual-output microelectromechanical resonator and method of manufact...
- Patent number 11,932,530
- Issue date Mar 19, 2024
- STATHERA IP HOLDINGS INC.
- George Xereas
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Systems and methods for operating a mems device based on sensed tem...
- Patent number 11,738,994
- Issue date Aug 29, 2023
- Invensense, Inc.
- David deKoninck
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Systems and methods for thermally regulating sensor operation
- Patent number 11,703,522
- Issue date Jul 18, 2023
- SZ DJI Technology Co., Ltd
- Guoxiu Pan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Isotachophoresis for purification of nucleic acids
- Patent number 11,674,132
- Issue date Jun 13, 2023
- Purigen Biosystems, Inc.
- Lewis A. Marshall
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for detecting contamination of a MEMS sensor element
- Patent number 11,629,047
- Issue date Apr 18, 2023
- Robert Bosch GmbH
- Robert Kuells
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Dual-output microelectromechanical resonator and method of manufact...
- Patent number 11,584,635
- Issue date Feb 21, 2023
- STATHERA IP HOLDINGS INC.
- George Xereas
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Systems and methods for operating a MEMS device based on sensed tem...
- Patent number 11,548,780
- Issue date Jan 10, 2023
- Invensense, Inc.
- David deKoninck
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS gas sensor
- Patent number 11,480,538
- Issue date Oct 25, 2022
- TDK Corporation
- Matthias König
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Hydrogen sensor on medium or low temperature solid micro heating pl...
- Patent number 11,440,793
- Issue date Sep 13, 2022
- Shanghai Jiaotong University
- Guifu Ding
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Gas detector and gas detection method
- Patent number 11,385,195
- Issue date Jul 12, 2022
- Figaro Engineering Inc.
- Kenichi Yoshioka
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS microphone with integrated resistor heater
- Patent number 11,368,794
- Issue date Jun 21, 2022
- Knowles Electronics, LLC
- Michael Pedersen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensing thermal gradients within a microelectromechanical device
- Patent number 11,312,621
- Issue date Apr 26, 2022
- Invensense, Inc.
- Gavin Ho
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Dual-output microelectromechanical resonator and method of manufact...
- Patent number 11,305,981
- Issue date Apr 19, 2022
- STATHERA IP HOLDINGS INC.
- George Xereas
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS heater or emitter structure for fast heating and cooling cycles
- Patent number 11,245,064
- Issue date Feb 8, 2022
- Infineon Technologies AG
- Christoph Glacer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Aircraft air contaminant analyzer and method of use
- Patent number 11,243,145
- Issue date Feb 8, 2022
- Pall Corporation
- Richard Mlcak
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensor with integrated heater
- Patent number 11,225,409
- Issue date Jan 18, 2022
- Invensense, Inc.
- Pei-Wen Yen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Systems and methods for operating a MEMS device based on sensed tem...
- Patent number 11,186,479
- Issue date Nov 30, 2021
- Invensense, Inc.
- David deKoninck
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Package level thermal gradient sensing
- Patent number 11,174,153
- Issue date Nov 16, 2021
- Invensense, Inc.
- Ilya Gurin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and device for thermal insulation of micro-reactors
- Patent number 11,052,387
- Issue date Jul 6, 2021
- Imec VZW
- Ben Jones
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
CMOS thermal fluid flow sensing device employing a flow sensor and...
- Patent number 11,035,709
- Issue date Jun 15, 2021
- Cambridge Enterprise Limited
- Andrea De Luca
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electronic system comprising a microelectromechanical system and a...
- Patent number 10,994,988
- Issue date May 4, 2021
- Thales
- Bertrand Leverrier
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Aircraft air contaminant analyzer and method of use
- Patent number 10,955,318
- Issue date Mar 23, 2021
- Pall Corporation
- Richard Mlcak
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for operating an integrated MEMS microphone device and integ...
- Patent number 10,959,002
- Issue date Mar 23, 2021
- ams AG
- Naoaki Nishimura
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
TEMPERATURE STABILIZATION OF MICRO ELECTROMECHANICAL SYSTEM SENSORS...
- Publication number 20250066187
- Publication date Feb 27, 2025
- VIAVI SOLUTIONS INC.
- Thomas SEVILLA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR DETECTING CONTAMINATION OF A MEMS SENSOR
- Publication number 20250059025
- Publication date Feb 20, 2025
- ROBERT BOSCH GmbH
- Martin Kittel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SENSOR DEVICE
- Publication number 20250011164
- Publication date Jan 9, 2025
- INFINEON TECHNOLOGIES AG
- Klaus ELIAN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
TEMPERATURE-CONTROL ARRANGEMENT FOR A MICROELECTRIC SYSTEM
- Publication number 20240375941
- Publication date Nov 14, 2024
- ROBERT BOSCH GmbH
- Udo Schulz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTROOPTICAL SYSTEMS HAVING HEAT ELEMENTS
- Publication number 20240361587
- Publication date Oct 31, 2024
- Innoviz Technologies Ltd.
- Yair ALPERN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Isotachophoresis for Purification of Nucleic Acids
- Publication number 20240301395
- Publication date Sep 12, 2024
- Purigen Biosystems, Inc.
- Lewis A. Marshall
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DUAL-OUTPUT MICROELECTROMECHANICAL RESONATOR AND METHOD OF MANUFACT...
- Publication number 20240253975
- Publication date Aug 1, 2024
- Stathera IP Holdings Inc.
- George Xereas
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SYSTEMS AND METHODS FOR THERMALLY REGULATING SENSOR OPERATION
- Publication number 20230358781
- Publication date Nov 9, 2023
- SZ DJI Technology Co., Ltd.
- Guoxiu PAN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DUAL-OUTPUT MICROELECTROMECHANICAL RESONATOR AND METHOD OF MANUFACT...
- Publication number 20230183057
- Publication date Jun 15, 2023
- Stathera IP Holdings Inc.
- George Xereas
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SINGLE-AXIS INERTIAL SENSOR MODULE WITH INTERPOSER
- Publication number 20230133753
- Publication date May 4, 2023
- TELEDYNE SCIENTIFIC & IMAGING, LLC
- Jeffrey F. DeNatale
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SYSTEMS AND METHODS FOR OPERATING A MEMS DEVICE BASED ON SENSED TEM...
- Publication number 20230107211
- Publication date Apr 6, 2023
- InvenSense, Inc.
- David deKoninck
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ENHANCED MEMS SENSOR EMBEDDED HEATER
- Publication number 20230061188
- Publication date Mar 2, 2023
- Apple Inc.
- Gregory B. ARNDT
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL HEATING DEVICE
- Publication number 20220267143
- Publication date Aug 25, 2022
- INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- Ming-Fa CHEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Dual-Output Microelectromechanical Resonator and Method of Manufact...
- Publication number 20220227619
- Publication date Jul 21, 2022
- Stathera IP Holdings Inc.
- George Xereas
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ARRAY OF HEATING RESISTORS FOR MEMS MIRRORS
- Publication number 20220204339
- Publication date Jun 30, 2022
- Beijing Voyager Technology Co., Ltd.
- Sae Won Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SENSOR WITH INTEGRATED HEATER
- Publication number 20220098030
- Publication date Mar 31, 2022
- InvenSense, Inc.
- Pei-Wen Yen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SENSOR COMPONENT INCLUDING A MICROELECTROMECHANICAL Z INERTIAL SENS...
- Publication number 20220091155
- Publication date Mar 24, 2022
- ROBERT BOSCH GmbH
- Martin Rambach
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SYSTEMS AND METHODS FOR OPERATING A MEMS DEVICE BASED ON SENSED TEM...
- Publication number 20220048760
- Publication date Feb 17, 2022
- InvenSense, Inc.
- David deKoninck
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTROOPTICAL SYSTEMS HAVING HEATING ELEMENTS
- Publication number 20210341729
- Publication date Nov 4, 2021
- Innoviz Technologies Ltd.
- Yair ALPERN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR DETECTING CONTAMINATION OF A MEMS SENSOR ELEMENT
- Publication number 20210300751
- Publication date Sep 30, 2021
- ROBERT BOSCH GmbH
- Robert Kuells
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
A MEMS Package
- Publication number 20210276859
- Publication date Sep 9, 2021
- IGNITE, Inc.
- Fusao Ishii
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Dual-Output Microelectromechanical Resonator and Method of Manufact...
- Publication number 20210276858
- Publication date Sep 9, 2021
- Stathera IP Holdings Inc.
- George Xereas
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MOUNTS FOR MICRO-MIRRORS
- Publication number 20210252602
- Publication date Aug 19, 2021
- Hewlett-Packard Development Company, L.P.
- Seongsik Chang
- B22 - CASTING POWDER METALLURGY
Information Patent Application
MEMS MICROPHONE WITH INTEGRATED RESISTOR HEATER
- Publication number 20210204071
- Publication date Jul 1, 2021
- KNOWLES ELECTRONICS, LLC
- Michael Pedersen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
AIRCRAFT AIR CONTAMINANT ANALYZER AND METHOD OF USE
- Publication number 20210181070
- Publication date Jun 17, 2021
- PALL CORPORATION
- Richard MLCAK
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Hybrid Metal and Carbon or Glassy Carbon MEMS u-ECOG Electrode and...
- Publication number 20210122627
- Publication date Apr 29, 2021
- San Diego State University Research Foundation
- Samuel Kassegne
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SYSTEMS AND METHODS FOR OPERATING A MEMS DEVICE BASED ON SENSED TEM...
- Publication number 20210053819
- Publication date Feb 25, 2021
- InvenSense, Inc.
- David deKoninck
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PACKAGE LEVEL THERMAL GRADIENT SENSING
- Publication number 20210053820
- Publication date Feb 25, 2021
- InvenSense, Inc.
- Ilya Gurin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR OPERATING AN INTEGRATED MEMS MICROPHONE DEVICE AND INTEG...
- Publication number 20200275178
- Publication date Aug 27, 2020
- ams AG
- Naoaki NISHIMURA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Gas Sensor
- Publication number 20200240943
- Publication date Jul 30, 2020
- TDK Corporation
- Matthias König
- B81 - MICRO-STRUCTURAL TECHNOLOGY

On-device systems and sensors for controlling, regulating or monitoring

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Systems and methods for temperature sensor access in die stacks

Sensor system, method for operating a sensor system

Micromirror arrays

Sensor with integrated heater

Electrooptical systems having heating elements

Systems and methods for thermally regulating sensor operation

Isotachophoresis for purification of nucleic acids

Dual-output microelectromechanical resonator and method of manufact...

Systems and methods for operating a mems device based on sensed tem...

Systems and methods for thermally regulating sensor operation

Isotachophoresis for purification of nucleic acids

Method for detecting contamination of a MEMS sensor element

Dual-output microelectromechanical resonator and method of manufact...

Systems and methods for operating a MEMS device based on sensed tem...

MEMS gas sensor

Hydrogen sensor on medium or low temperature solid micro heating pl...

Gas detector and gas detection method

MEMS microphone with integrated resistor heater

Sensing thermal gradients within a microelectromechanical device

Dual-output microelectromechanical resonator and method of manufact...

MEMS heater or emitter structure for fast heating and cooling cycles

Aircraft air contaminant analyzer and method of use

Sensor with integrated heater

Systems and methods for operating a MEMS device based on sensed tem...

Package level thermal gradient sensing

Method and device for thermal insulation of micro-reactors

CMOS thermal fluid flow sensing device employing a flow sensor and...

Electronic system comprising a microelectromechanical system and a...

Aircraft air contaminant analyzer and method of use

Method for operating an integrated MEMS microphone device and integ...

Patents Applicationslast 30 patents

TEMPERATURE STABILIZATION OF MICRO ELECTROMECHANICAL SYSTEM SENSORS...

METHOD FOR DETECTING CONTAMINATION OF A MEMS SENSOR

SENSOR DEVICE

TEMPERATURE-CONTROL ARRANGEMENT FOR A MICROELECTRIC SYSTEM

ELECTROOPTICAL SYSTEMS HAVING HEAT ELEMENTS

Isotachophoresis for Purification of Nucleic Acids

DUAL-OUTPUT MICROELECTROMECHANICAL RESONATOR AND METHOD OF MANUFACT...

SYSTEMS AND METHODS FOR THERMALLY REGULATING SENSOR OPERATION

DUAL-OUTPUT MICROELECTROMECHANICAL RESONATOR AND METHOD OF MANUFACT...

SINGLE-AXIS INERTIAL SENSOR MODULE WITH INTERPOSER

SYSTEMS AND METHODS FOR OPERATING A MEMS DEVICE BASED ON SENSED TEM...

ENHANCED MEMS SENSOR EMBEDDED HEATER

MICROELECTROMECHANICAL HEATING DEVICE

Dual-Output Microelectromechanical Resonator and Method of Manufact...

ARRAY OF HEATING RESISTORS FOR MEMS MIRRORS

SENSOR WITH INTEGRATED HEATER

SENSOR COMPONENT INCLUDING A MICROELECTROMECHANICAL Z INERTIAL SENS...

SYSTEMS AND METHODS FOR OPERATING A MEMS DEVICE BASED ON SENSED TEM...

ELECTROOPTICAL SYSTEMS HAVING HEATING ELEMENTS

METHOD FOR DETECTING CONTAMINATION OF A MEMS SENSOR ELEMENT

A MEMS Package

Dual-Output Microelectromechanical Resonator and Method of Manufact...

MOUNTS FOR MICRO-MIRRORS

MEMS MICROPHONE WITH INTEGRATED RESISTOR HEATER

AIRCRAFT AIR CONTAMINANT ANALYZER AND METHOD OF USE

Hybrid Metal and Carbon or Glassy Carbon MEMS u-ECOG Electrode and...

SYSTEMS AND METHODS FOR OPERATING A MEMS DEVICE BASED ON SENSED TEM...

PACKAGE LEVEL THERMAL GRADIENT SENSING

METHOD FOR OPERATING AN INTEGRATED MEMS MICROPHONE DEVICE AND INTEG...

MEMS Gas Sensor