Micro-structural systems; Auxiliary parts of micro-structural devices or systems

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81BMICRO-STRUCTURAL DEVICES OR SYSTEMS

B81B7/00Micro-structural systems; Auxiliary parts of micro-structural devices or systems

B81B7/0003MEMS mechanisms for assembling automatically hinged components, self-assembly devices B81B7/0006Interconnects B81B7/0009Structural features, others than packages, for protecting a device against environmental influences B81B7/0012Protection against reverse engineering, unauthorised use, use in unintended manner, wrong insertion or pin assignment B81B7/0016Protection against shocks or vibrations B81B7/0019Protection against thermal alteration or destruction B81B7/0022Protection against electrostatic discharge B81B7/0025Protection against chemical alteration B81B7/0029Protection against environmental influences not provided for in groups B81B7/0012 - B81B7/0025 B81B7/0032Packages or encapsulation B81B7/0035for maintaining a controlled atmosphere inside of the chamber containing the MEMS B81B7/0038using materials for controlling the level of pressure, contaminants or moisture inside of the package B81B7/0041maintaining a controlled atmosphere with techniques not provided for in B81B7/0038 B81B7/0045for reducing stress inside of the package structure B81B7/0048between the MEMS die and the substrate B81B7/0051between the package lid and the substrate B81B7/0054between other parts not provided for in B81B7/0048 - B81B7/0051 B81B7/0058for protecting against damages due to external chemical or mechanical influences B81B7/0061suitable for fluid transfer from the MEMS out of the package or vice-versa B81B7/0064for protecting against electromagnetic or electrostatic interferences B81B7/0067for controlling the passage of optical signals through the package B81B7/007Interconnections between the MEMS and external electrical signals B81B7/00743D packaging B81B7/0077Other packages not provided for in groups B81B7/0035 - B81B7/0074 B81B7/008MEMS characterised by an electronic circuit specially adapted for controlling or driving the same B81B7/0083Temperature control B81B7/0087On-device systems and sensors for controlling, regulating or monitoring B81B7/009Maintaining a constant temperature by heating or cooling B81B7/0093by cooling B81B7/0096by heating B81B7/02containing distinct electrical or optical devices of particular relevance for their function B81B7/04Networks or arrays of similar micro-structural devices