only mechanical cleaning

Industry

CPC
H01L21/02096

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/02096only mechanical cleaning

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Substrate cleaning device and substrate cleaning method
- Patent number 12,002,688
- Issue date Jun 4, 2024
- Ebara Corporation
- Haiyang Xu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning device and substrate cleaning method
- Patent number 11,996,303
- Issue date May 28, 2024
- Ebara Corporation
- Haiyang Xu
- B24 - GRINDING POLISHING
Information Patent Grant
Laminate of aluminum nitride single-crystal substrate
- Patent number 11,952,677
- Issue date Apr 9, 2024
- Tokuyama Corporation
- Masao Ariyuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor fabricating system having hybrid brush assembly
- Patent number 11,908,681
- Issue date Feb 20, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Hsuan-Ying Mai
- B08 - CLEANING
Information Patent Grant
Substrate cleaning method and substrate cleaning apparatus
- Patent number 11,817,311
- Issue date Nov 14, 2023
- Ebara Corporation
- Tomoatsu Ishibashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning equipment, substrate treatment system including...
- Patent number 11,791,173
- Issue date Oct 17, 2023
- Samsung Electronics Co., Ltd.
- Seung Hoon Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Treating a silicon on insulator wafer in preparation for manufactur...
- Patent number 11,749,558
- Issue date Sep 5, 2023
- QUANTUM SILICON INC.
- Bruno Vieira Da Cunha Martins
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hybrid material post-CMP brushes and methods for forming the same
- Patent number 11,684,144
- Issue date Jun 27, 2023
- Illinois Tool Works Inc.
- Bradley Scott Withers
- B08 - CLEANING
Information Patent Grant
Device and method for cleaning a printing device
- Patent number 11,575,064
- Issue date Feb 7, 2023
- Applied Materials Italia S.R.L.
- Davide Colla
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for cleaning semiconductor wafer backside surface by hybrid...
- Patent number 11,417,512
- Issue date Aug 16, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Hsuan-Ying Mai
- B08 - CLEANING
Information Patent Grant
Cleaning apparatus of cleaning tool, substrate processing apparatus...
- Patent number 11,367,629
- Issue date Jun 21, 2022
- Ebara Corporation
- Hideaki Tanaka
- B08 - CLEANING
Information Patent Grant
Method of producing a component of a device, and the resulting comp...
- Patent number 11,335,551
- Issue date May 17, 2022
- 3M Innovative Properties Company
- William R. Dudley
- B08 - CLEANING
Information Patent Grant
Substrate processing method
- Patent number 11,264,236
- Issue date Mar 1, 2022
- Tokyo Electron Limited
- Toru Hisamatsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Treating a silicon on insulator wafer in preparation for manufactur...
- Patent number 11,232,976
- Issue date Jan 25, 2022
- National Research Council of Canada
- Bruno Vieira Da Cunha Martins
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for cleaning contact elements and support hardwar...
- Patent number 11,211,242
- Issue date Dec 28, 2021
- INTERNATIONAL TEST SOLUTIONS, LLC
- Alan E. Humphrey
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning device and substrate cleaning method
- Patent number 11,164,757
- Issue date Nov 2, 2021
- Ebara Corporation
- Haiyang Xu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,114,302
- Issue date Sep 7, 2021
- SCREEN Holdings Co., Ltd.
- Shotaro Tsuda
- B08 - CLEANING
Information Patent Grant
Buff processing device and substrate processing device
- Patent number 11,103,972
- Issue date Aug 31, 2021
- Ebara Corporation
- Hideo Aizawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing method and rec...
- Patent number 11,084,072
- Issue date Aug 10, 2021
- Tokyo Electron Limited
- Shogo Fukui
- B08 - CLEANING
Information Patent Grant
Automated particle removal system
- Patent number 11,017,996
- Issue date May 25, 2021
- ASM Technology Singapore Pte. Ltd.
- Gang Shu
- G01 - MEASURING TESTING
Information Patent Grant
Drying high aspect ratio features
- Patent number 10,971,354
- Issue date Apr 6, 2021
- Applied Materials, Inc.
- Eric J. Bergman
- B08 - CLEANING
Information Patent Grant
Cleaning sponge and cleaning method
- Patent number 10,870,132
- Issue date Dec 22, 2020
- AION CO., LTD
- Yuuichi Shimazaki
- B08 - CLEANING
Information Patent Grant
Polishing method, polishing apparatus, and substrate processing system
- Patent number 10,854,473
- Issue date Dec 1, 2020
- Ebara Corporation
- Yu Ishii
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Nodule ratios for targeted enhanced cleaning performance
- Patent number 10,790,167
- Issue date Sep 29, 2020
- Entegris, Inc.
- Chintan Patel
- B24 - GRINDING POLISHING
Information Patent Grant
Cleaning method and laminate of aluminum nitride single-crystal sub...
- Patent number 10,753,011
- Issue date Aug 25, 2020
- Tokuyama Corporation
- Masao Ariyuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate cleaning apparatus and substrate processing apparatus
- Patent number 10,707,103
- Issue date Jul 7, 2020
- Ebara Corporation
- Hideaki Tanaka
- B08 - CLEANING
Information Patent Grant
Manufacturing method of gallium nitride substrate
- Patent number 10,600,645
- Issue date Mar 24, 2020
- Samsung Electronics Co., Ltd.
- Mi Hyun Kim
- B08 - CLEANING
Information Patent Grant
Cleaning apparatus and substrate processing apparatus
- Patent number 10,573,509
- Issue date Feb 25, 2020
- Ebara Corporation
- Koji Maeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system
- Patent number 10,518,382
- Issue date Dec 31, 2019
- KCTECH CO., LTD.
- Young Kyu Kweon
- B08 - CLEANING
Information Patent Grant
Substrate treatment method and substrate treatment device
- Patent number 10,453,674
- Issue date Oct 22, 2019
- SCREEN Holdings Co., Ltd.
- Kazuki Nakamura
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS AND METHOD OF BRUSH CLEANING USING PERIODIC CHEMICAL TREA...
- Publication number 20240332037
- Publication date Oct 3, 2024
- Applied Materials, Inc.
- Brian J. BROWN
- B08 - CLEANING
Information Patent Application
SUBSTRATE TREATING METHOD AND SUBSTRATE TREATING APPARATUS
- Publication number 20240258098
- Publication date Aug 1, 2024
- SCREEN Holdings Co., Ltd.
- Wataru YANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR FABRICATING SYSTEM HAVING HYBRID BRUSH ASSEMBLY
- Publication number 20240177988
- Publication date May 30, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Hsuan-Ying MAI
- B08 - CLEANING
Information Patent Application
Laminates for Cleaning Substrate Surfaces and Methods of Use Thereof
- Publication number 20240110084
- Publication date Apr 4, 2024
- 3M Innovative Properties Company
- Uma Rames Krishna Lagudu
- B08 - CLEANING
Information Patent Application
BRUSHES, SYSTEMS, AND METHODS FOR DISPENSING MULTIPLE FLUIDS DURING...
- Publication number 20240112925
- Publication date Apr 4, 2024
- Illinois Tool Works Inc.
- Bradley Scott Withers
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF SEPARATING SEMICONDUCTOR DIES
- Publication number 20240071828
- Publication date Feb 29, 2024
- TEXAS INSTRUMENTS INCORPORATED
- Michael Todd Wyant
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EPITAXIAL WAFER CLEANING METHOD
- Publication number 20230411143
- Publication date Dec 21, 2023
- Shin-Etsu Handotai Co., Ltd.
- Norimichi TANAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD
- Publication number 20230326770
- Publication date Oct 12, 2023
- EBARA CORPORATION
- Haiyang Xu
- B08 - CLEANING
Information Patent Application
SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD
- Publication number 20230307259
- Publication date Sep 28, 2023
- EBARA CORPORATION
- Haiyang Xu
- B08 - CLEANING
Information Patent Application
SEMICONDUCTOR FABRICATING SYSTEM HAVIND HYBRID BURSH ASSEMBLY
- Publication number 20220351957
- Publication date Nov 3, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Hsuan-Ying MAI
- B08 - CLEANING
Information Patent Application
MACHINE LEARNING DEVICE, SUBSTRATE PROCESSING DEVICE, TRAINED MODEL...
- Publication number 20220344164
- Publication date Oct 27, 2022
- EBARA CORPORATION
- Akira NAKAMURA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD
- Publication number 20220139699
- Publication date May 5, 2022
- SCREEN Holdings Co., Ltd.
- Hiroaki ISHII
- B08 - CLEANING
Information Patent Application
TREATING A SILICON ON INSULATOR WAFER IN PREPARATION FOR MANUFACTUR...
- Publication number 20220102197
- Publication date Mar 31, 2022
- Quantum Silicon Inc.
- Bruno Vieira Da Cunha Martins
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR CLEANING CONTACT ELEMENTS AND SUPPORT HARDWAR...
- Publication number 20220093394
- Publication date Mar 24, 2022
- INTERNATIONAL TEST SOLUTIONS, LLC
- Alan E. Humphrey
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT APPARATUS
- Publication number 20220037149
- Publication date Feb 3, 2022
- SHIBAURA MECHATRONICS CORPORATION
- Yuji NAGASHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD
- Publication number 20220020610
- Publication date Jan 20, 2022
- EBARA CORPORATION
- Haiyang Xu
- B08 - CLEANING
Information Patent Application
METHOD FOR CLEANING SEMICONDUCTOR WAFER BACKSIDE SURFACE BY HYBRID...
- Publication number 20210249253
- Publication date Aug 12, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Hsuan-Ying MAI
- B08 - CLEANING
Information Patent Application
TREATING A SILICON ON INSULATOR WAFER IN PREPARATION FOR MANUFACTUR...
- Publication number 20210159116
- Publication date May 27, 2021
- Quantum Silicon Inc.
- Bruno Vieira Da Cunha Martins
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR CLEANING CONTACT ELEMENTS AND SUPPORT HARDWAR...
- Publication number 20210151317
- Publication date May 20, 2021
- INTERNATIONAL TEST SOLUTIONS
- Alan E. Humphrey
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE AND METHOD FOR CLEANING A PRINTING DEVICE
- Publication number 20210020804
- Publication date Jan 21, 2021
- Applied Materials Italia S.R.L.
- Davide COLLA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Cleaning Method and Laminate of Aluminum Nitride Single-Crystal Sub...
- Publication number 20200347514
- Publication date Nov 5, 2020
- Tokuyama Corporation
- Masao Ariyuki
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
AUTOMATED PARTICLE REMOVAL SYSTEM
- Publication number 20200321211
- Publication date Oct 8, 2020
- ASM Technology Singapore Pte Ltd
- Gang SHU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CLEANING EQUIPMENT, SUBSTRATE TREATMENT SYSTEM INCLUDING...
- Publication number 20200303218
- Publication date Sep 24, 2020
- Samsung Electronics Co., Ltd.
- SEUNG HOON CHOI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HYBRID MATERIAL POST-CMP BRUSHES AND METHODS FOR FORMING THE SAME
- Publication number 20200288857
- Publication date Sep 17, 2020
- Illinois Tool Works Inc.
- Bradley Scott Withers
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
SUBSTRATE CLEANING METHOD AND SUBSTRATE CLEANING APPARATUS
- Publication number 20200258737
- Publication date Aug 13, 2020
- EBARA CORPORATION
- Tomoatsu Ishibashi
- B08 - CLEANING
Information Patent Application
CLEANING APPARATUS OF CLEANING TOOL, SUBSTRATE PROCESSING APPARATUS...
- Publication number 20200243351
- Publication date Jul 30, 2020
- EBARA CORPORATION
- Hideaki TANAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BACKSIDE BRUSH FOR CLEANING WAFER AND CLEANING APPARATUS HAVING THE...
- Publication number 20200203192
- Publication date Jun 25, 2020
- XIA TAI XIN SEMICONDUCTOR (QING DAO) LTD.
- YONG-SEOK RO
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20200194257
- Publication date Jun 18, 2020
- TOKYO ELECTRON LIMITED
- Toru HISAMATSU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PRODUCING A COMPONENT OF A DEVICE, AND THE RESULTING COMP...
- Publication number 20200058493
- Publication date Feb 20, 2020
- 3M Innovative Properties Company
- William R. Dudley
- B08 - CLEANING
Information Patent Application
SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD
- Publication number 20200013640
- Publication date Jan 9, 2020
- EBARA CORPORATION
- Haiyang Xu
- B08 - CLEANING

only mechanical cleaning

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Substrate cleaning device and substrate cleaning method

Substrate cleaning device and substrate cleaning method

Laminate of aluminum nitride single-crystal substrate

Semiconductor fabricating system having hybrid brush assembly

Substrate cleaning method and substrate cleaning apparatus

Substrate cleaning equipment, substrate treatment system including...

Treating a silicon on insulator wafer in preparation for manufactur...

Hybrid material post-CMP brushes and methods for forming the same

Device and method for cleaning a printing device

Method for cleaning semiconductor wafer backside surface by hybrid...

Cleaning apparatus of cleaning tool, substrate processing apparatus...

Method of producing a component of a device, and the resulting comp...

Substrate processing method

Treating a silicon on insulator wafer in preparation for manufactur...

System and method for cleaning contact elements and support hardwar...

Substrate cleaning device and substrate cleaning method

Substrate processing apparatus and substrate processing method

Buff processing device and substrate processing device

Substrate processing apparatus, substrate processing method and rec...

Automated particle removal system

Drying high aspect ratio features

Cleaning sponge and cleaning method

Polishing method, polishing apparatus, and substrate processing system

Nodule ratios for targeted enhanced cleaning performance

Cleaning method and laminate of aluminum nitride single-crystal sub...

Substrate cleaning apparatus and substrate processing apparatus

Manufacturing method of gallium nitride substrate

Cleaning apparatus and substrate processing apparatus

Substrate processing system

Substrate treatment method and substrate treatment device

Patents Applicationslast 30 patents

APPARATUS AND METHOD OF BRUSH CLEANING USING PERIODIC CHEMICAL TREA...

SUBSTRATE TREATING METHOD AND SUBSTRATE TREATING APPARATUS

SEMICONDUCTOR FABRICATING SYSTEM HAVING HYBRID BRUSH ASSEMBLY

Laminates for Cleaning Substrate Surfaces and Methods of Use Thereof

BRUSHES, SYSTEMS, AND METHODS FOR DISPENSING MULTIPLE FLUIDS DURING...

METHODS OF SEPARATING SEMICONDUCTOR DIES

EPITAXIAL WAFER CLEANING METHOD

SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD

SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD

SEMICONDUCTOR FABRICATING SYSTEM HAVIND HYBRID BURSH ASSEMBLY

MACHINE LEARNING DEVICE, SUBSTRATE PROCESSING DEVICE, TRAINED MODEL...

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD

TREATING A SILICON ON INSULATOR WAFER IN PREPARATION FOR MANUFACTUR...

SYSTEM AND METHOD FOR CLEANING CONTACT ELEMENTS AND SUPPORT HARDWAR...

SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT APPARATUS

SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD

METHOD FOR CLEANING SEMICONDUCTOR WAFER BACKSIDE SURFACE BY HYBRID...

TREATING A SILICON ON INSULATOR WAFER IN PREPARATION FOR MANUFACTUR...

SYSTEM AND METHOD FOR CLEANING CONTACT ELEMENTS AND SUPPORT HARDWAR...

DEVICE AND METHOD FOR CLEANING A PRINTING DEVICE

Cleaning Method and Laminate of Aluminum Nitride Single-Crystal Sub...

AUTOMATED PARTICLE REMOVAL SYSTEM

SUBSTRATE CLEANING EQUIPMENT, SUBSTRATE TREATMENT SYSTEM INCLUDING...

HYBRID MATERIAL POST-CMP BRUSHES AND METHODS FOR FORMING THE SAME

SUBSTRATE CLEANING METHOD AND SUBSTRATE CLEANING APPARATUS

CLEANING APPARATUS OF CLEANING TOOL, SUBSTRATE PROCESSING APPARATUS...

BACKSIDE BRUSH FOR CLEANING WAFER AND CLEANING APPARATUS HAVING THE...

SUBSTRATE PROCESSING METHOD

METHOD OF PRODUCING A COMPONENT OF A DEVICE, AND THE RESULTING COMP...

SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD