Optical MEMS not provided for in B81B2201/042 - B81B2201/045

Industry

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B81B2201/047

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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81BMICRO-STRUCTURAL DEVICES OR SYSTEMS B81B2201/00Specific applications of micro-electromechanical systems

Current Industry

B81B2201/047Optical MEMS not provided for in B81B2201/042 - B81B2201/045

Industries

Patents Grantslast 30 patents

Information Patent Grant
Lidar projection apparatus
- Patent number 12,164,033
- Issue date Dec 10, 2024
- Artilux, Inc.
- Tim K. Shia
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS optical device comprising a lens and an actuator for controlli...
- Patent number 12,164,101
- Issue date Dec 10, 2024
- poLight ASA
- Enri Duqi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS actuator package architecture
- Patent number 12,132,420
- Issue date Oct 29, 2024
- MEMS DRIVE (NANJING) CO., LTD.
- Xiaolei Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Device for sensing a motion of a deflective surface
- Patent number 12,133,050
- Issue date Oct 29, 2024
- Infineon Technologies AG
- Darragh Francis Corrigan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMs phased-array for LiDAR applications
- Patent number 12,117,606
- Issue date Oct 15, 2024
- SCREEN Holdings Co., Ltd.
- Yuki Ashida
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Capacitive angle sensing of electrostatic MEMS mirrors
- Patent number 12,072,485
- Issue date Aug 27, 2024
- Google LLC
- Sangtak Park
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microstructure and method of producing a microstructure
- Patent number 12,071,341
- Issue date Aug 27, 2024
- ams International AG
- Peter Heeb
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Low-height optoelectronic modules and packages
- Patent number 12,037,238
- Issue date Jul 16, 2024
- ams Sensors Singapore Pte. Ltd.
- Javier Miguel Sànchez
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS image forming element with built-in voltage generator
- Patent number 12,030,772
- Issue date Jul 9, 2024
- ASML Netherlands B.V.
- Yongxin Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical MEMS based monitoring system
- Patent number 11,999,612
- Issue date Jun 4, 2024
- Naiqian Han
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Dual-layer micro-ribbon MEMS light modulator
- Patent number 11,958,738
- Issue date Apr 16, 2024
- Silicon Light Machines Corporation
- Olav Solgaard
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS sensors and systems
- Patent number 11,959,806
- Issue date Apr 16, 2024
- OBSIDIAN SENSORS, INC.
- John Hong
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
System and method of continuous, vibration-less, and bi-directional...
- Patent number 11,905,165
- Issue date Feb 20, 2024
- O-NET TECHNOLOGIES (GROUP) LTD.
- Kevin Boyd
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-opto-mechanical system sensor, arrangement and manufacturing...
- Patent number 11,898,899
- Issue date Feb 13, 2024
- MIRAEX SA
- Mitchell Anderson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Ultrafast photonic micro-systems
- Patent number 11,866,322
- Issue date Jan 9, 2024
- Jin Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device comprising a membrane and an actuator
- Patent number 11,807,517
- Issue date Nov 7, 2023
- STMicroelectronics S.r.l.
- Dario Paci
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated optical transducer and method for detecting dynamic pres...
- Patent number 11,808,654
- Issue date Nov 7, 2023
- ams International AG
- Goran Stojanovic
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS optical device comprising a lens and an actuator for controlli...
- Patent number 11,747,608
- Issue date Sep 5, 2023
- Enri Duqi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS-tunable optical ring resonator
- Patent number 11,722,120
- Issue date Aug 8, 2023
- National Technology & Engineering Solutions of Sandia, LLC
- Michael Wood
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Asymmetric deformable diffractive grating modulator
- Patent number 11,681,155
- Issue date Jun 20, 2023
- Teledyne Micralyne Inc.
- Glen Fitzpatrick
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS sensors and systems
- Patent number 11,624,657
- Issue date Apr 11, 2023
- OBSIDIAN SENSORS, INC.
- John Hong
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Piezoelectric MEMS actuator for compensating unwanted movements and...
- Patent number 11,614,634
- Issue date Mar 28, 2023
- STMicroelectronics S.r.l.
- Domenico Giusti
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical sensing in MEMS package for LiDAR system
- Patent number 11,614,518
- Issue date Mar 28, 2023
- BEIJING VOYAGER TECHNOLOGY CO., LTD.
- Youmin Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS mirror structure with backside skeleton
- Patent number 11,592,533
- Issue date Feb 28, 2023
- BEIJING VOYAGER TECHNOLOGY CO., LTD.
- Youmin Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Scanning mirror assembly with a scanning mirror elevated above a ME...
- Patent number 11,543,650
- Issue date Jan 3, 2023
- BEIJING VOYAGER TECHNOLOGY CO., LTD.
- Sergio Fabian Almeida Loya
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Post-processing techniques on mems foundry fabricated devices for l...
- Patent number 11,535,511
- Issue date Dec 27, 2022
- United States of America as represented by the Secretary of the Air Force
- LaVern A Starman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Production method for a micromechanical device having inclined opti...
- Patent number 11,479,461
- Issue date Oct 25, 2022
- Robert Bosch GmbH
- Stefan Pinter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Piezoelectric MEMS device having a suspended diaphragm and manufact...
- Patent number 11,427,463
- Issue date Aug 30, 2022
- STMicroelectronics S.r.l.
- Dario Paci
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Flexible membrane
- Patent number 11,174,150
- Issue date Nov 16, 2021
- Cirrus Logic, Inc.
- Tsjerk Hans Hoekstra
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for forming hermetic seals in MEMS devices
- Patent number 11,161,737
- Issue date Nov 2, 2021
- Elbit Systems of America, LLC
- Arlynn W. Smith
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MEMS OPTICAL MICROPHONE
- Publication number 20240101410
- Publication date Mar 28, 2024
- AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) CO., LTD
- Taimoor Ali
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS OPTICAL MICROPHONE
- Publication number 20240101411
- Publication date Mar 28, 2024
- AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) CO., LTD
- Taimoor Ali
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS OPTICAL DEVICE COMPRISING A LENS AND AN ACTUATOR FOR CONTROLLI...
- Publication number 20240061236
- Publication date Feb 22, 2024
- Polight ASA
- Enri DUQI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
TWO-LAYER OPTICAL BEAM STEERING DEVICE, SYSTEM, METHOD OF UTILIZATI...
- Publication number 20230418049
- Publication date Dec 28, 2023
- Carillon Technologies Management Corporation
- John R. Sanford
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INTEGRATED OPTICAL MICROELECTRONIC MECHANICAL SYSTEMS DEVICES AND M...
- Publication number 20230358975
- Publication date Nov 9, 2023
- NIHARIKA KOHLI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS SENSORS AND SYSTEMS
- Publication number 20230314228
- Publication date Oct 5, 2023
- Obsidian Sensors, Inc.
- John HONG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COMPACT, EASY-TO-PRODUCE MEMS PACKAGE WITH IMPROVED PROTECTIVE PROP...
- Publication number 20230242394
- Publication date Aug 3, 2023
- HAHN-SCHICKARD-GESELLSCHAFT FUR ANGEWANDTE FORSCHUNG E.V.
- Achim Bittner
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PIEZOELECTRIC MEMS ACTUATOR FOR COMPENSATING UNWANTED MOVEMENTS AND...
- Publication number 20230204974
- Publication date Jun 29, 2023
- STMicroelectronics S.r.l
- Domenico GIUSTI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INFRARED RADIATOR ELEMENT AND METHODS
- Publication number 20230131181
- Publication date Apr 27, 2023
- 4K-MEMS SÀRL
- Matthias IMBODEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MIRROR SYSTEM WITH SLOW LIGHT BEAM DEFLECTION USING FAST RESON...
- Publication number 20230067823
- Publication date Mar 2, 2023
- INFINEON TECHNOLOGIES AG
- Boris KIRILLOV
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SCANNING MIRROR ASSEMBLY WITH A SCANNING MIRROR ELEVATED ABOVE A ME...
- Publication number 20230041830
- Publication date Feb 9, 2023
- Beijing Voyager Technology Co., Ltd.
- Sergio Fabian Almeida Loya
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Dual-Layer Micro-ribbon MEMS Light Modulator
- Publication number 20230022807
- Publication date Jan 26, 2023
- SILICON LIGHT MACHINES CORPORATION
- Olav Solgaard
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SCANNING MIRROR ASSEMBLY WITH A SCANNING MIRROR ELEVATED ABOVE A ME...
- Publication number 20220342200
- Publication date Oct 27, 2022
- Beijing Voyager Technology Co., Ltd.
- Sergio Fabian Almeida Loya
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROSTRUCTURE AND METHOD OF PRODUCING A MICROSTRUCTURE
- Publication number 20220298006
- Publication date Sep 22, 2022
- ams International AG
- Peter HEEB
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
TECHNIQUE TO DETECT THE ROTATIONAL DIRECTION OF RESONANT MEMS MIRRO...
- Publication number 20220269069
- Publication date Aug 25, 2022
- Google LLC
- Sangtak Park
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CAPACITIVE ANGLE SENSING OF ELECTROSTATIC MEMS MIRRORS
- Publication number 20220269070
- Publication date Aug 25, 2022
- Google LLC
- Sangtak Park
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Laser Marking System and Method
- Publication number 20220250188
- Publication date Aug 11, 2022
- SILICON LIGHT MACHINES CORPORATION
- Gregory Jacob
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
OPTICAL MEMS BASED INTRACRANIAL PRESSURE AND INTRACRANIAL TEMPERATU...
- Publication number 20220153571
- Publication date May 19, 2022
- Naiqian Han
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FEEDBACK SENSOR FOR MEMS MIRROR
- Publication number 20220120945
- Publication date Apr 21, 2022
- GM GLOBAL TECHNOLOGY OPERATIONS LLC
- Steven A. Del Gaizo
- B60 - VEHICLES IN GENERAL
Information Patent Application
System and method of continuous, vibration-less, and bi-directional...
- Publication number 20220098028
- Publication date Mar 31, 2022
- O-Net Technologies (Group) Ltd..
- Kevin Boyd
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INTEGRATED OPTICAL TRANSDUCER AND METHOD FOR DETECTING DYNAMIC PRES...
- Publication number 20210404897
- Publication date Dec 30, 2021
- ams International AG
- Goran Stojanovic
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OPTICAL SENSING IN MEMS PACKAGE FOR LIDAR SYSTEM
- Publication number 20210396844
- Publication date Dec 23, 2021
- Beijing Voyager Technology Co., Ltd.
- Youmin Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LIDAR PROJECTION APPARATUS
- Publication number 20210333405
- Publication date Oct 28, 2021
- Artilux, Inc.
- Tim K. SHIA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE, DISPLAY UNIT, AND ELECTRONIC APPARATUS
- Publication number 20210286170
- Publication date Sep 16, 2021
- Sony Semiconductor Solutions Corporation
- KUNIHIKO MORI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ULTRAFAST PHOTONIC MICRO-SYSTEMS
- Publication number 20210284526
- Publication date Sep 16, 2021
- UChicago Argonne, LLC
- Jin Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-OPTO-MECHANICAL SYSTEM SENSOR, ARRANGEMENT AND MANUFACTURING...
- Publication number 20210255031
- Publication date Aug 19, 2021
- MIRAEX SA
- Mitchell ANDERSON
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE COMPRISING A MEMBRANE AND AN ACTUATOR
- Publication number 20210206625
- Publication date Jul 8, 2021
- STMicroelectronics S.r.l.
- Dario PACI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS SENSORS AND SYSTEMS
- Publication number 20210164839
- Publication date Jun 3, 2021
- Obsidian Sensors, Inc.
- John HONG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMs Phased-Array for LiDAR Applications
- Publication number 20210072531
- Publication date Mar 11, 2021
- SCREEN Holdings Co., Ltd.
- Yuki Ashida
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
GENERATING A MEMS DEVICE WITH GLASS COVER AND MEMS DEVICE
- Publication number 20200385264
- Publication date Dec 10, 2020
- INFINEON TECHNOLOGIES AG
- Andre BROCKMEIER
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Optical MEMS not provided for in B81B2201/042 - B81B2201/045

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Lidar projection apparatus

MEMS optical device comprising a lens and an actuator for controlli...

MEMS actuator package architecture

Device for sensing a motion of a deflective surface

MEMs phased-array for LiDAR applications

Capacitive angle sensing of electrostatic MEMS mirrors

Microstructure and method of producing a microstructure

Low-height optoelectronic modules and packages

MEMS image forming element with built-in voltage generator

Optical MEMS based monitoring system

Dual-layer micro-ribbon MEMS light modulator

MEMS sensors and systems

System and method of continuous, vibration-less, and bi-directional...

Micro-opto-mechanical system sensor, arrangement and manufacturing...

Ultrafast photonic micro-systems

MEMS device comprising a membrane and an actuator

Integrated optical transducer and method for detecting dynamic pres...

MEMS optical device comprising a lens and an actuator for controlli...

MEMS-tunable optical ring resonator

Asymmetric deformable diffractive grating modulator

MEMS sensors and systems

Piezoelectric MEMS actuator for compensating unwanted movements and...

Optical sensing in MEMS package for LiDAR system

MEMS mirror structure with backside skeleton

Scanning mirror assembly with a scanning mirror elevated above a ME...

Post-processing techniques on mems foundry fabricated devices for l...

Production method for a micromechanical device having inclined opti...

Piezoelectric MEMS device having a suspended diaphragm and manufact...

Flexible membrane

Method for forming hermetic seals in MEMS devices

Patents Applicationslast 30 patents

MEMS OPTICAL MICROPHONE

MEMS OPTICAL MICROPHONE

MEMS OPTICAL DEVICE COMPRISING A LENS AND AN ACTUATOR FOR CONTROLLI...

TWO-LAYER OPTICAL BEAM STEERING DEVICE, SYSTEM, METHOD OF UTILIZATI...

INTEGRATED OPTICAL MICROELECTRONIC MECHANICAL SYSTEMS DEVICES AND M...

MEMS SENSORS AND SYSTEMS

COMPACT, EASY-TO-PRODUCE MEMS PACKAGE WITH IMPROVED PROTECTIVE PROP...

PIEZOELECTRIC MEMS ACTUATOR FOR COMPENSATING UNWANTED MOVEMENTS AND...

INFRARED RADIATOR ELEMENT AND METHODS

MEMS MIRROR SYSTEM WITH SLOW LIGHT BEAM DEFLECTION USING FAST RESON...

SCANNING MIRROR ASSEMBLY WITH A SCANNING MIRROR ELEVATED ABOVE A ME...

Dual-Layer Micro-ribbon MEMS Light Modulator

SCANNING MIRROR ASSEMBLY WITH A SCANNING MIRROR ELEVATED ABOVE A ME...

MICROSTRUCTURE AND METHOD OF PRODUCING A MICROSTRUCTURE

TECHNIQUE TO DETECT THE ROTATIONAL DIRECTION OF RESONANT MEMS MIRRO...

CAPACITIVE ANGLE SENSING OF ELECTROSTATIC MEMS MIRRORS

Laser Marking System and Method

OPTICAL MEMS BASED INTRACRANIAL PRESSURE AND INTRACRANIAL TEMPERATU...

FEEDBACK SENSOR FOR MEMS MIRROR

System and method of continuous, vibration-less, and bi-directional...

INTEGRATED OPTICAL TRANSDUCER AND METHOD FOR DETECTING DYNAMIC PRES...

OPTICAL SENSING IN MEMS PACKAGE FOR LIDAR SYSTEM

LIDAR PROJECTION APPARATUS

SEMICONDUCTOR DEVICE, DISPLAY UNIT, AND ELECTRONIC APPARATUS

ULTRAFAST PHOTONIC MICRO-SYSTEMS

MICRO-OPTO-MECHANICAL SYSTEM SENSOR, ARRANGEMENT AND MANUFACTURING...

MEMS DEVICE COMPRISING A MEMBRANE AND AN ACTUATOR

MEMS SENSORS AND SYSTEMS

MEMs Phased-Array for LiDAR Applications

GENERATING A MEMS DEVICE WITH GLASS COVER AND MEMS DEVICE