other processes for film patterning not provided for in B81C2201/0149 - B81C2201/015

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B81C2201/0154

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C2201/00Manufacture or treatment of micro-structural devices or systems

Current Industry

B81C2201/0154other processes for film patterning not provided for in B81C2201/0149 - B81C2201/015

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Undercut-free patterned aluminum nitride structure and methods for...
- Patent number 12,134,824
- Issue date Nov 5, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Yuan-Chih Hsieh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Undercut-free patterned aluminum nitride structure and methods for...
- Patent number 11,371,133
- Issue date Jun 28, 2022
- Taiwan Semiconductor Manufacturing Company Limited
- Yuan-Chih Hsieh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of depositing electrodes and electrolyte on microelectromech...
- Patent number 11,169,110
- Issue date Nov 9, 2021
- Honeywell International Inc.
- Keith Francis Edwin Pratt
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
CMOS-MEMS structure and method of forming the same
- Patent number 11,148,936
- Issue date Oct 19, 2021
- Taiwan Semiconductor Manufacturing Company Ltd.
- Jung-Huei Peng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Manufacturing method for a micromechanical window structure and cor...
- Patent number 11,124,412
- Issue date Sep 21, 2021
- Robert Bosch GmbH
- Joerg Muchow
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing MEMS switches with reduced switching voltage
- Patent number 10,941,036
- Issue date Mar 9, 2021
- International Business Machines Corporation
- Stephen E. Luce
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing MEMS switches with reduced switching voltage
- Patent number 10,836,632
- Issue date Nov 17, 2020
- International Business Machines Corporation
- Stephen E. Luce
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing a switch
- Patent number 10,745,273
- Issue date Aug 18, 2020
- International Business Machines Corporation
- Stephen E. Luce
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods of manufacture for MEMS switches with reduced switching vol...
- Patent number 10,647,569
- Issue date May 12, 2020
- International Business Machines Corporation
- Stephen E. Luce
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods of manufacturing for MEMS switches with reduced switching v...
- Patent number 10,640,373
- Issue date May 5, 2020
- International Business Machines Corporation
- Stephen E. Luce
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
CMOS-MEMS structure and method of forming the same
- Patent number 10,508,027
- Issue date Dec 17, 2019
- Taiwan Semiconductor Manufacturing Company Ltd.
- Jung-Huei Peng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Three-dimensional article and method of making the same
- Patent number 10,434,686
- Issue date Oct 8, 2019
- 3M Innovative Properties Company
- Evan Koon Lun Yuuji Hajime
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
CMOS-MEMS structure and method of forming the same
- Patent number 10,046,965
- Issue date Aug 14, 2018
- Taiwan Semiconductor Manufacturing Company Ltd.
- Jung-Huei Peng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing MEMS switches with reduced switching voltage
- Patent number 10,017,383
- Issue date Jul 10, 2018
- International Business Machines Corporation
- Stephen E. Luce
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacture MEMS switches with reduced voltage
- Patent number 9,944,518
- Issue date Apr 17, 2018
- International Business Machines Corporation
- Stephen E. Luce
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing MEMS switches with reduced switching volume
- Patent number 9,944,517
- Issue date Apr 17, 2018
- International Business Machines Corporation
- Stephen E. Luce
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing MEMS switches with reduced voltage
- Patent number 9,824,834
- Issue date Nov 21, 2017
- International Business Machines Corporation
- Stephen E. Luce
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing a switch
- Patent number 9,718,681
- Issue date Aug 1, 2017
- International Business Machines Corporation
- Stephen E. Luce
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor structure and fabrication method thereof
- Patent number 9,718,682
- Issue date Aug 1, 2017
- Semiconductor Manufacturing International (Shanghai) Corporation
- Peng Ren
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Inorganic nanostructure reactive direct-write and growth
- Patent number 9,153,437
- Issue date Oct 6, 2015
- University of Washington through its Center for Commercialization
- Marco Rolandi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for functionalising fluid lines contained in a micromechanic...
- Patent number 8,968,673
- Issue date Mar 3, 2015
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Vincent Agache
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Silicon pen nanolithography
- Patent number 8,961,853
- Issue date Feb 24, 2015
- Northwestern University
- Chad A. Mirkin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Magnetic patterning method and system
- Patent number 8,859,059
- Issue date Oct 14, 2014
- Yeda Research and Development Co., Ltd.
- Ron Naaman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS switches with reduced switching voltage and methods of manufac...
- Patent number 8,451,077
- Issue date May 28, 2013
- International Business Machines Corporation
- Stephen E. Luce
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Ultra thin alignment walls for di-block copolymer
- Patent number 8,187,480
- Issue date May 29, 2012
- Seagate Technology, LLC
- Kim Yang Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing localized patterns
- Patent number 8,048,712
- Issue date Nov 1, 2011
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Mohamed Benwadih
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Direct nanoscale patterning of metals using polymer electrolytes
- Patent number 7,998,330
- Issue date Aug 16, 2011
- The Board of Trustees of the University of Illinois
- Nicholas X. Fang
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Shape controlled growth of nanostructured films and objects
- Patent number 7,976,815
- Issue date Jul 12, 2011
- Massachusetts Institute of Technology
- Anastasios John Hart
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
System and methods of laser assisted field induced oxide nanopatter...
- Patent number 7,976,765
- Issue date Jul 12, 2011
- Northwestern University
- Mark C. Hersam
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for nanostructuring of the surface of a substrate
- Patent number 7,655,578
- Issue date Feb 2, 2010
- Commissariat a l'Energie Atomique
- Frank Fournel
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
UNDERCUT-FREE PATTERNED ALUMINUM NITRIDE STRUCTURE AND METHODS FOR...
- Publication number 20240368746
- Publication date Nov 7, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Yuan-Chih Hsieh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE WITH MEMBRANE COMPRISING LASER STRUCTURED NANOSTRUCTURE...
- Publication number 20240253977
- Publication date Aug 1, 2024
- INFINEON TECHNOLOGIES AG
- Hutomo Suryo Wasisto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MICROPHONE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20230382714
- Publication date Nov 30, 2023
- DB HITEK CO., LTD.
- Min Hyun JUNG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS SENSOR PACKAGE AND ITS MANUFACTURING METHOD
- Publication number 20230365396
- Publication date Nov 16, 2023
- TDK Corporation
- Toyotaka KOBAYASHI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PRODUCING A MICROELECTRONIC DEVICE
- Publication number 20230065179
- Publication date Mar 2, 2023
- ROBERT BOSCH GmbH
- Jochen Tomaschko
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
UNDERCUT-FREE PATTERNED ALUMINUM NITRIDE STRUCTURE AND METHODS FOR...
- Publication number 20220325396
- Publication date Oct 13, 2022
- Taiwan Semiconductor Manufacturing Company Limited
- Yuan-Chih Hsieh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
UNDERCUT-FREE PATTERNED ALUMINUM NITRIDE STRUCTURE AND METHODS FOR...
- Publication number 20220018009
- Publication date Jan 20, 2022
- Taiwan Semiconductor Manufacturing Company Limited
- Yuan-Chih Hsieh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CMOS-MEMS STRUCTURE AND METHOD OF FORMING THE SAME
- Publication number 20200140266
- Publication date May 7, 2020
- Taiwan Semiconductor Manufacturing company Ltd.
- JUNG-HUEI PENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROSTRUCTURED SURFACE HAVING DISCRETE TOUCH AESTHETICS
- Publication number 20190062155
- Publication date Feb 28, 2019
- Hoowaki, LLC
- Ralph A. Hulseman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
THREE-DIMENSIONAL ARTICLE AND METHOD OF MAKING THE SAME
- Publication number 20180370084
- Publication date Dec 27, 2018
- 3M Innovative Properties Company
- Evan Koon Lun Yuuji Hajime
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CMOS-MEMS STRUCTURE AND METHOD OF FORMING THE SAME
- Publication number 20180362335
- Publication date Dec 20, 2018
- Taiwan Semiconductor Manufacturing company Ltd.
- JUNG-HUEI PENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MANUFACTURING METHOD FOR A MICROMECHANICAL WINDOW STRUCTURE AND COR...
- Publication number 20180194616
- Publication date Jul 12, 2018
- ROBERT BOSCH GmbH
- Joerg Muchow
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF MANUFACTURING MEMS SWITCHES WITH REDUCED SWITCHING VOLTAGE
- Publication number 20180093884
- Publication date Apr 5, 2018
- International Business Machines Corporation
- Stephen E. LUCE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF MANUFACTURING MEMS SWITCHES WITH REDUCED SWITCHING VOLTAGE
- Publication number 20180065847
- Publication date Mar 8, 2018
- International Business Machines Corporation
- Stephen E. LUCE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS SWITCHES WITH REDUCED SWITCHING VOLTAGE AND METHODS OF MANUFAC...
- Publication number 20180016137
- Publication date Jan 18, 2018
- International Business Machines Corporation
- Stephen E. LUCE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS SWITCHES WITH REDUCED SWITCHING VOLTAGE AND METHODS OF MANUFAC...
- Publication number 20180016138
- Publication date Jan 18, 2018
- International Business Machines Corporation
- Stephen E. LUCE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CMOS-MEMS STRUCTURE AND METHOD OF FORMING THE SAME
- Publication number 20170183222
- Publication date Jun 29, 2017
- Taiwan Semiconductor Manufacturing company Ltd.
- JUNG-HUEI PENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE, SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE...
- Publication number 20170081176
- Publication date Mar 23, 2017
- HANGZHOU SILAN MICROELECTRONICS CO., LTD.
- Feng JI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR STRUCTURE AND FABRICATION METHOD THEREOF
- Publication number 20170029272
- Publication date Feb 2, 2017
- Semiconductor Manufacturing International (Shanghai) Corporation
- PENG REN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS SWITCHES WITH REDUCED SWITCHING VOLTAGE AND METHODS OF MANUFAC...
- Publication number 20160145097
- Publication date May 26, 2016
- International Business Machines Corporation
- Stephen E. LUCE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MAGNETIC PATTERNING METHOD AND SYSTEM
- Publication number 20140315293
- Publication date Oct 23, 2014
- Ron NAAMAN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INORGANIC NANOSTRUCTURE REACTIVE DIRECT-WRITE AND GROWTH
- Publication number 20140162436
- Publication date Jun 12, 2014
- University of Washington through its Center for Commercialization
- Marco Rolandi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS SWITCHES WITH REDUCED SWITCHING VOLTAGE AND METHODS OF MANUFAC...
- Publication number 20130192964
- Publication date Aug 1, 2013
- International Business Machines Corporation
- Stephen E. LUCE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for Functionalising Fluid Lines Contained in a Micromechanic...
- Publication number 20130149196
- Publication date Jun 13, 2013
- Commissariat a L' Energie Atomique et aux Engergies Alternatives
- Vincent Agache
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SILICON PEN NANOLITHOGRAPHY
- Publication number 20120167262
- Publication date Jun 28, 2012
- Northwestern University
- Chad A. Mirkin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MAGNETIC PATTERNING METHOD AND SYSTEM
- Publication number 20110236948
- Publication date Sep 29, 2011
- Yeda Research and Development Company Ltd.
- Ron Naaman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PRODUCING LOCALIZED PATTERNS
- Publication number 20110076797
- Publication date Mar 31, 2011
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Mohamed BENWADIH
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
STRUCTURED LAYER DEPOSITION ON PROCESSED WAFERS USED IN MICROSYSTEM...
- Publication number 20100311248
- Publication date Dec 9, 2010
- X-FAB SEMICONDUCTOR FOUNDRIES AG.
- Roy Knechtel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ULTRA THIN ALIGNMENT WALLS FOR DI-BLOCK COPOLYMER
- Publication number 20100119778
- Publication date May 13, 2010
- Seagate Technology LLC
- Kim Yang Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Mems Switches With Reduced Switching Voltage and Methods of Manufac...
- Publication number 20090260961
- Publication date Oct 22, 2009
- Stephen E. Luce
- B81 - MICRO-STRUCTURAL TECHNOLOGY

other processes for film patterning not provided for in B81C2201/0149 - B81C2201/015

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Undercut-free patterned aluminum nitride structure and methods for...

Undercut-free patterned aluminum nitride structure and methods for...

Method of depositing electrodes and electrolyte on microelectromech...

CMOS-MEMS structure and method of forming the same

Manufacturing method for a micromechanical window structure and cor...

Method of manufacturing MEMS switches with reduced switching voltage

Method of manufacturing MEMS switches with reduced switching voltage

Method of manufacturing a switch

Methods of manufacture for MEMS switches with reduced switching vol...

Methods of manufacturing for MEMS switches with reduced switching v...

CMOS-MEMS structure and method of forming the same

Three-dimensional article and method of making the same

CMOS-MEMS structure and method of forming the same

Method of manufacturing MEMS switches with reduced switching voltage

Method of manufacture MEMS switches with reduced voltage

Method of manufacturing MEMS switches with reduced switching volume

Method of manufacturing MEMS switches with reduced voltage

Method of manufacturing a switch

Semiconductor structure and fabrication method thereof

Inorganic nanostructure reactive direct-write and growth

Method for functionalising fluid lines contained in a micromechanic...

Silicon pen nanolithography

Magnetic patterning method and system

MEMS switches with reduced switching voltage and methods of manufac...

Ultra thin alignment walls for di-block copolymer

Method for producing localized patterns

Direct nanoscale patterning of metals using polymer electrolytes

Shape controlled growth of nanostructured films and objects

System and methods of laser assisted field induced oxide nanopatter...

Method for nanostructuring of the surface of a substrate

Patents Applicationslast 30 patents

UNDERCUT-FREE PATTERNED ALUMINUM NITRIDE STRUCTURE AND METHODS FOR...

MEMS DEVICE WITH MEMBRANE COMPRISING LASER STRUCTURED NANOSTRUCTURE...

MEMS MICROPHONE AND METHOD OF MANUFACTURING THE SAME

MEMS SENSOR PACKAGE AND ITS MANUFACTURING METHOD

METHOD FOR PRODUCING A MICROELECTRONIC DEVICE

UNDERCUT-FREE PATTERNED ALUMINUM NITRIDE STRUCTURE AND METHODS FOR...

UNDERCUT-FREE PATTERNED ALUMINUM NITRIDE STRUCTURE AND METHODS FOR...

CMOS-MEMS STRUCTURE AND METHOD OF FORMING THE SAME

MICROSTRUCTURED SURFACE HAVING DISCRETE TOUCH AESTHETICS

THREE-DIMENSIONAL ARTICLE AND METHOD OF MAKING THE SAME

CMOS-MEMS STRUCTURE AND METHOD OF FORMING THE SAME

MANUFACTURING METHOD FOR A MICROMECHANICAL WINDOW STRUCTURE AND COR...

METHOD OF MANUFACTURING MEMS SWITCHES WITH REDUCED SWITCHING VOLTAGE

METHOD OF MANUFACTURING MEMS SWITCHES WITH REDUCED SWITCHING VOLTAGE

MEMS SWITCHES WITH REDUCED SWITCHING VOLTAGE AND METHODS OF MANUFAC...

MEMS SWITCHES WITH REDUCED SWITCHING VOLTAGE AND METHODS OF MANUFAC...

CMOS-MEMS STRUCTURE AND METHOD OF FORMING THE SAME

MEMS DEVICE, SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE...

SEMICONDUCTOR STRUCTURE AND FABRICATION METHOD THEREOF

MEMS SWITCHES WITH REDUCED SWITCHING VOLTAGE AND METHODS OF MANUFAC...

MAGNETIC PATTERNING METHOD AND SYSTEM

INORGANIC NANOSTRUCTURE REACTIVE DIRECT-WRITE AND GROWTH

MEMS SWITCHES WITH REDUCED SWITCHING VOLTAGE AND METHODS OF MANUFAC...

Method for Functionalising Fluid Lines Contained in a Micromechanic...

SILICON PEN NANOLITHOGRAPHY

MAGNETIC PATTERNING METHOD AND SYSTEM

METHOD FOR PRODUCING LOCALIZED PATTERNS

STRUCTURED LAYER DEPOSITION ON PROCESSED WAFERS USED IN MICROSYSTEM...

ULTRA THIN ALIGNMENT WALLS FOR DI-BLOCK COPOLYMER

Mems Switches With Reduced Switching Voltage and Methods of Manufac...