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PERFORMING OPERATIONS TRANSPORTING
B81
Micro-structural technology
B81C
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
B81C2201/00
Manufacture or treatment of micro-structural devices or systems
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B81C2201/0178
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Patents Grants
last 30 patents
Information
Patent Grant
Curved cantilever design to reduce stress in MEMS actuator
Patent number
12,180,064
Issue date
Dec 31, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Ting-Jung Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Sharp, vertically aligned nanowire electrode arrays, high-yield fab...
Patent number
12,157,666
Issue date
Dec 3, 2024
The Regents of the University of California
Shadi Dayeh
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
CMUT transducer with motion-stopping structure and CMUT transducer...
Patent number
12,145,838
Issue date
Nov 19, 2024
Vermon S.A.
Cyril Meynier
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Capacitive micromachined ultrasonic transducer and method of fabric...
Patent number
11,944,998
Issue date
Apr 2, 2024
Korea Institute of Science and Technology
Byung Chul Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Curved cantilever design to reduce stress in MEMS actuator
Patent number
11,932,531
Issue date
Mar 19, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Ting-Jung Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Pulse train excitation for capacitive micromachined ultrasonic tran...
Patent number
11,731,164
Issue date
Aug 22, 2023
The Board of Trustees of the Leland Stanford Junior University
Bo Ma
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microfluidic devices with electrodes formed as physically separated...
Patent number
11,673,798
Issue date
Jun 13, 2023
International Business Machines Corporation
Gabriel Fernando Puebla Hellmann
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for fabricating semiconductor device
Patent number
11,667,524
Issue date
Jun 6, 2023
HYUNDAI KEFICO CORPORATION
Jun Hwan Choi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro check valve and system with multiple micro check valves and m...
Patent number
11,428,345
Issue date
Aug 30, 2022
MICROFAB SERVICE GMBH
Marco Cordelair
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectromechanical electroacoustic transducer with piezoelectri...
Patent number
11,418,888
Issue date
Aug 16, 2022
STMicroelectronics S.r.l.
Fabrizio Cerini
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing MEMS microphone
Patent number
11,405,737
Issue date
Aug 2, 2022
AAC Acoustic Technologies (Shenzhen) Co., Ltd.
Zhenkui Meng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Contoured electrode for capacitive micromachined ultrasonic transducer
Patent number
11,260,424
Issue date
Mar 1, 2022
The Board of Trustees of the Leland Stanford Junior University
Bo Ma
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing a micromechanical sensor
Patent number
11,111,137
Issue date
Sep 7, 2021
Robert Bosch GmbH
Johannes Classen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for sealing an access opening to a cavity and MEMS component...
Patent number
10,913,656
Issue date
Feb 9, 2021
Infineon Technologies AG
Gerhard Metzger-Brueckl
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MOx-based gas sensor and manufacturing method thereof
Patent number
10,871,462
Issue date
Dec 22, 2020
STMicroelectronics S.r.l.
Alessandra Alberti
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Small wafer area MEMs switch
Patent number
10,173,888
Issue date
Jan 8, 2019
International Business Machines Corporation
Bucknell C. Webb
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Small wafer are MEMS switch
Patent number
10,160,634
Issue date
Dec 25, 2018
International Business Machines Corporation
Bucknell C. Webb
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Process for producing an electromechanical device
Patent number
10,112,827
Issue date
Oct 30, 2018
Commissariat a l'Energie Atomique et Aux Energies Alternatives
Vincent Agache
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Pseudo SOI process
Patent number
10,053,360
Issue date
Aug 21, 2018
Kionix, Inc.
Martin Heller
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Small wafer area MEMS switch
Patent number
9,758,366
Issue date
Sep 12, 2017
International Business Machines Corporation
Bucknell C. Webb
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Use of metal native oxide to control stress gradient and bending mo...
Patent number
9,656,860
Issue date
May 23, 2017
Texas Instruments Incorporated
Earl Vedere Atnip
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for making a reinforced silicon micromechanical part
Patent number
8,992,784
Issue date
Mar 31, 2015
Montres Breguet SA
Nakis Karapatis
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
High aspect ratio MEMS devices and methods for forming the same
Patent number
8,828,772
Issue date
Sep 9, 2014
Taiwan Semiconductor Manufacturing Co., Ltd.
Te-Hao Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Oxide microchannel with controllable diameter
Patent number
8,716,050
Issue date
May 6, 2014
The Hong Kong University of Science and Technology
Man Wong
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for fabricating a fixed structure defining a volume receivin...
Patent number
8,685,777
Issue date
Apr 1, 2014
Commissariat a l'Energie Atomique et Aux Energies Alternatives
Christel Dieppedale
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Constrained oxidation of suspended micro- and nano-structures
Patent number
8,415,220
Issue date
Apr 9, 2013
International Business Machines Corporation
Tymon Barwicz
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Membrane structure element and method for manufacturing same
Patent number
8,057,882
Issue date
Nov 15, 2011
Kobe Steel, Ltd.
Takayuki Hirano
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for producing insulation structures
Patent number
7,862,731
Issue date
Jan 4, 2011
Conti Temic microelectronic GmbH
Matthias Aikele
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micromechanical component and corresponding production method
Patent number
7,833,405
Issue date
Nov 16, 2010
Robert Bosch GmbH
Hubert Benzel
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micromechanical sensor
Patent number
7,435,991
Issue date
Oct 14, 2008
Robert Bosch GmbH
Hans-Peter Baer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
LOW VOLTAGE CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER (CMUT) D...
Publication number
20240425365
Publication date
Dec 26, 2024
SENSONICS TRANSDUCERS PRIVATE LIMITED
Brishbhan Singh PANWAR
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
EMBEDDED PERMEABLE POLYSILICON LAYER IN MEMS DEVICE FOR MULTIPLE CA...
Publication number
20240199415
Publication date
Jun 20, 2024
STMicroelectronics International N.V.
Federico VERCESI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CURVED CANTILEVER DESIGN TO REDUCE STRESS IN MEMS ACTUATOR
Publication number
20240182292
Publication date
Jun 6, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Ting-Jung Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
FAILURE DETECTION METHOD, FAILURE DETECTION SYSTEM, AND ELECTROSPRA...
Publication number
20240182291
Publication date
Jun 6, 2024
Hitachi, Ltd
Shun Kumano
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PULSE TRAIN EXCITATION FOR CAPACITIVE MICROMACHINED ULTRASONIC TRAN...
Publication number
20240165663
Publication date
May 23, 2024
The Board of Trustees of the Leland Stanford Junior University
Bo Ma
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS Device and Method for Manufacturing a MEMS Device
Publication number
20240017986
Publication date
Jan 18, 2024
INFINEON TECHNOLOGIES AG
Stefan Barzen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE AND METHOD OF MANUFACTURING MEMS DEVICE
Publication number
20240017989
Publication date
Jan 18, 2024
Rohm Co., Ltd.
Martin Wilfried HELLER
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) DEVICE and fabrication metho...
Publication number
20230348259
Publication date
Nov 2, 2023
Vanguard International Semiconductor Corporation
WAI MUN CHONG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS SENSOR WITH A THIN REGION
Publication number
20230312334
Publication date
Oct 5, 2023
Skyworks Solutions, Inc.
Siarhei Dmitrievich Barsukou
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CURVED CANTILEVER DESIGN TO REDUCE STRESS IN MEMS ACTUATOR
Publication number
20230219806
Publication date
Jul 13, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Ting-Jung Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR STRUCTURAL LAYER FABRICATION IN MICROMECHANICAL DEVICES
Publication number
20230192480
Publication date
Jun 22, 2023
Murata Manufacturing Co., Ltd.
Altti TORKKELI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ELECTROSTATICALLY GATED NANOFLUIDIC MEMBRANES FOR CONTROL OF MOLECU...
Publication number
20230043407
Publication date
Feb 9, 2023
The Methodist Hospital System
Alessandro Grattoni
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROFLUIDIC DEVICES WITH ELECTRODES FORMED AS PHYSICALLY SEPARATED...
Publication number
20220135399
Publication date
May 5, 2022
International Business Machines Corporation
Gabriel Fernando Puebla Hellmann
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
GAS SENSOR AND MANUFACTURING METHOD THEREOF
Publication number
20220128498
Publication date
Apr 28, 2022
ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
Seungeon MOON
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Preparation Method Of Miniature Solid Silicon Needle
Publication number
20210395078
Publication date
Dec 23, 2021
Zhu Hongfei
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CONTOURED ELECTRODE FOR CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER
Publication number
20210220873
Publication date
Jul 22, 2021
The Board of Trustees of the Leland Stanford Junior University
Bo Ma
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRONEEDLE COATED WITH DRUG AND MANUFACTURING METHOD FOR SAME
Publication number
20210196899
Publication date
Jul 1, 2021
SR BIOTEK INC.
Byung Ho SONG
A45 - HAND OR TRAVELLING ARTICLES
Information
Patent Application
METHOD FOR FABRICATING SEMICONDUCTOR DEVICE
Publication number
20210188628
Publication date
Jun 24, 2021
HYUNDAI KEFICO CORPORATION
Jun Hwan Choi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SHARP, VERTICALLY ALIGNED NANOWIRE ELECTRODE ARRAYS, HIGH-YIELD FAB...
Publication number
20210093246
Publication date
Apr 1, 2021
The Regents of the University of California
Shadi DAYEH
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER AND METHOD OF FABRIC...
Publication number
20200298275
Publication date
Sep 24, 2020
Korea Institute of Science and Technology
Byung Chul LEE
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROELECTROMECHANICAL ELECTROACOUSTIC TRANSDUCER WITH PIEZOELECTRI...
Publication number
20200236470
Publication date
Jul 23, 2020
STMicroelectronics S.r.l
Fabrizio CERINI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method for Manufacturing MEMS Microphone
Publication number
20200213797
Publication date
Jul 2, 2020
AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) CO., LTD
Zhenkui Meng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO CHECK VALVE AND SYSTEM WITH MULTIPLE MICRO CHECK VALVES AND M...
Publication number
20200166156
Publication date
May 28, 2020
MICROFAB SERVICE GMBH
Marco CORDELAIR
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER AND METHOD OF MANUFA...
Publication number
20200156111
Publication date
May 21, 2020
VERMON S.A.
Dominique GROSS
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR PROCESSING SILICON WAFER WITH THROUGH CAVITY STRUCTURE
Publication number
20190233280
Publication date
Aug 1, 2019
Shenyang Silicon Technology Co., Ltd.
Xiang LI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR MANUFACTURING A MICROMECHANICAL SENSOR
Publication number
20190161347
Publication date
May 30, 2019
ROBERT BOSCH GmbH
Johannes CLASSEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MOX-BASED GAS SENSOR AND MANUFACTURING METHOD THEREOF
Publication number
20190128830
Publication date
May 2, 2019
STMicroelectronics S.r.l.
Alessandra ALBERTI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
AMORPHOUS THIN METAL FILM
Publication number
20190119101
Publication date
Apr 25, 2019
Hewlett-Packard Development Company, L.P.
James Elmer Abbott
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PROCESS FOR PRODUCING AN ELECTROMECHANICAL DEVICE
Publication number
20180148328
Publication date
May 31, 2018
Commissariat A L'Energie Atomique et Aux Energies Alternatives
Vincent AGACHE
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SMALL WAFER AREA MEMS SWITCH
Publication number
20170341931
Publication date
Nov 30, 2017
Bucknell C. Webb
B81 - MICRO-STRUCTURAL TECHNOLOGY