Oxidation

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CPC
B81C2201/0178

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C2201/00Manufacture or treatment of micro-structural devices or systems

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B81C2201/0178Oxidation

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Curved cantilever design to reduce stress in MEMS actuator
- Patent number 12,180,064
- Issue date Dec 31, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ting-Jung Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sharp, vertically aligned nanowire electrode arrays, high-yield fab...
- Patent number 12,157,666
- Issue date Dec 3, 2024
- The Regents of the University of California
- Shadi Dayeh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
CMUT transducer with motion-stopping structure and CMUT transducer...
- Patent number 12,145,838
- Issue date Nov 19, 2024
- Vermon S.A.
- Cyril Meynier
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Capacitive micromachined ultrasonic transducer and method of fabric...
- Patent number 11,944,998
- Issue date Apr 2, 2024
- Korea Institute of Science and Technology
- Byung Chul Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Curved cantilever design to reduce stress in MEMS actuator
- Patent number 11,932,531
- Issue date Mar 19, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ting-Jung Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Pulse train excitation for capacitive micromachined ultrasonic tran...
- Patent number 11,731,164
- Issue date Aug 22, 2023
- The Board of Trustees of the Leland Stanford Junior University
- Bo Ma
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microfluidic devices with electrodes formed as physically separated...
- Patent number 11,673,798
- Issue date Jun 13, 2023
- International Business Machines Corporation
- Gabriel Fernando Puebla Hellmann
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for fabricating semiconductor device
- Patent number 11,667,524
- Issue date Jun 6, 2023
- HYUNDAI KEFICO CORPORATION
- Jun Hwan Choi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro check valve and system with multiple micro check valves and m...
- Patent number 11,428,345
- Issue date Aug 30, 2022
- MICROFAB SERVICE GMBH
- Marco Cordelair
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical electroacoustic transducer with piezoelectri...
- Patent number 11,418,888
- Issue date Aug 16, 2022
- STMicroelectronics S.r.l.
- Fabrizio Cerini
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing MEMS microphone
- Patent number 11,405,737
- Issue date Aug 2, 2022
- AAC Acoustic Technologies (Shenzhen) Co., Ltd.
- Zhenkui Meng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Contoured electrode for capacitive micromachined ultrasonic transducer
- Patent number 11,260,424
- Issue date Mar 1, 2022
- The Board of Trustees of the Leland Stanford Junior University
- Bo Ma
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a micromechanical sensor
- Patent number 11,111,137
- Issue date Sep 7, 2021
- Robert Bosch GmbH
- Johannes Classen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for sealing an access opening to a cavity and MEMS component...
- Patent number 10,913,656
- Issue date Feb 9, 2021
- Infineon Technologies AG
- Gerhard Metzger-Brueckl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MOx-based gas sensor and manufacturing method thereof
- Patent number 10,871,462
- Issue date Dec 22, 2020
- STMicroelectronics S.r.l.
- Alessandra Alberti
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Small wafer area MEMs switch
- Patent number 10,173,888
- Issue date Jan 8, 2019
- International Business Machines Corporation
- Bucknell C. Webb
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Small wafer are MEMS switch
- Patent number 10,160,634
- Issue date Dec 25, 2018
- International Business Machines Corporation
- Bucknell C. Webb
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for producing an electromechanical device
- Patent number 10,112,827
- Issue date Oct 30, 2018
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Vincent Agache
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Pseudo SOI process
- Patent number 10,053,360
- Issue date Aug 21, 2018
- Kionix, Inc.
- Martin Heller
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Small wafer area MEMS switch
- Patent number 9,758,366
- Issue date Sep 12, 2017
- International Business Machines Corporation
- Bucknell C. Webb
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Use of metal native oxide to control stress gradient and bending mo...
- Patent number 9,656,860
- Issue date May 23, 2017
- Texas Instruments Incorporated
- Earl Vedere Atnip
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for making a reinforced silicon micromechanical part
- Patent number 8,992,784
- Issue date Mar 31, 2015
- Montres Breguet SA
- Nakis Karapatis
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
High aspect ratio MEMS devices and methods for forming the same
- Patent number 8,828,772
- Issue date Sep 9, 2014
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Te-Hao Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Oxide microchannel with controllable diameter
- Patent number 8,716,050
- Issue date May 6, 2014
- The Hong Kong University of Science and Technology
- Man Wong
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for fabricating a fixed structure defining a volume receivin...
- Patent number 8,685,777
- Issue date Apr 1, 2014
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Christel Dieppedale
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Constrained oxidation of suspended micro- and nano-structures
- Patent number 8,415,220
- Issue date Apr 9, 2013
- International Business Machines Corporation
- Tymon Barwicz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Membrane structure element and method for manufacturing same
- Patent number 8,057,882
- Issue date Nov 15, 2011
- Kobe Steel, Ltd.
- Takayuki Hirano
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing insulation structures
- Patent number 7,862,731
- Issue date Jan 4, 2011
- Conti Temic microelectronic GmbH
- Matthias Aikele
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical component and corresponding production method
- Patent number 7,833,405
- Issue date Nov 16, 2010
- Robert Bosch GmbH
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical sensor
- Patent number 7,435,991
- Issue date Oct 14, 2008
- Robert Bosch GmbH
- Hans-Peter Baer
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
CURVED CANTILEVER DESIGN TO REDUCE STRESS IN MEMS ACTUATOR
- Publication number 20250074763
- Publication date Mar 6, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ting-Jung Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LOW VOLTAGE CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER (CMUT) D...
- Publication number 20240425365
- Publication date Dec 26, 2024
- SENSONICS TRANSDUCERS PRIVATE LIMITED
- Brishbhan Singh PANWAR
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
EMBEDDED PERMEABLE POLYSILICON LAYER IN MEMS DEVICE FOR MULTIPLE CA...
- Publication number 20240199415
- Publication date Jun 20, 2024
- STMicroelectronics International N.V.
- Federico VERCESI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CURVED CANTILEVER DESIGN TO REDUCE STRESS IN MEMS ACTUATOR
- Publication number 20240182292
- Publication date Jun 6, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ting-Jung Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FAILURE DETECTION METHOD, FAILURE DETECTION SYSTEM, AND ELECTROSPRA...
- Publication number 20240182291
- Publication date Jun 6, 2024
- Hitachi, Ltd
- Shun Kumano
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PULSE TRAIN EXCITATION FOR CAPACITIVE MICROMACHINED ULTRASONIC TRAN...
- Publication number 20240165663
- Publication date May 23, 2024
- The Board of Trustees of the Leland Stanford Junior University
- Bo Ma
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Device and Method for Manufacturing a MEMS Device
- Publication number 20240017986
- Publication date Jan 18, 2024
- INFINEON TECHNOLOGIES AG
- Stefan Barzen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE AND METHOD OF MANUFACTURING MEMS DEVICE
- Publication number 20240017989
- Publication date Jan 18, 2024
- Rohm Co., Ltd.
- Martin Wilfried HELLER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) DEVICE and fabrication metho...
- Publication number 20230348259
- Publication date Nov 2, 2023
- Vanguard International Semiconductor Corporation
- WAI MUN CHONG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS SENSOR WITH A THIN REGION
- Publication number 20230312334
- Publication date Oct 5, 2023
- Skyworks Solutions, Inc.
- Siarhei Dmitrievich Barsukou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CURVED CANTILEVER DESIGN TO REDUCE STRESS IN MEMS ACTUATOR
- Publication number 20230219806
- Publication date Jul 13, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ting-Jung Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR STRUCTURAL LAYER FABRICATION IN MICROMECHANICAL DEVICES
- Publication number 20230192480
- Publication date Jun 22, 2023
- Murata Manufacturing Co., Ltd.
- Altti TORKKELI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTROSTATICALLY GATED NANOFLUIDIC MEMBRANES FOR CONTROL OF MOLECU...
- Publication number 20230043407
- Publication date Feb 9, 2023
- The Methodist Hospital System
- Alessandro Grattoni
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROFLUIDIC DEVICES WITH ELECTRODES FORMED AS PHYSICALLY SEPARATED...
- Publication number 20220135399
- Publication date May 5, 2022
- International Business Machines Corporation
- Gabriel Fernando Puebla Hellmann
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
GAS SENSOR AND MANUFACTURING METHOD THEREOF
- Publication number 20220128498
- Publication date Apr 28, 2022
- ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- Seungeon MOON
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Preparation Method Of Miniature Solid Silicon Needle
- Publication number 20210395078
- Publication date Dec 23, 2021
- Zhu Hongfei
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CONTOURED ELECTRODE FOR CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER
- Publication number 20210220873
- Publication date Jul 22, 2021
- The Board of Trustees of the Leland Stanford Junior University
- Bo Ma
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRONEEDLE COATED WITH DRUG AND MANUFACTURING METHOD FOR SAME
- Publication number 20210196899
- Publication date Jul 1, 2021
- SR BIOTEK INC.
- Byung Ho SONG
- A45 - HAND OR TRAVELLING ARTICLES
Information Patent Application
METHOD FOR FABRICATING SEMICONDUCTOR DEVICE
- Publication number 20210188628
- Publication date Jun 24, 2021
- HYUNDAI KEFICO CORPORATION
- Jun Hwan Choi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SHARP, VERTICALLY ALIGNED NANOWIRE ELECTRODE ARRAYS, HIGH-YIELD FAB...
- Publication number 20210093246
- Publication date Apr 1, 2021
- The Regents of the University of California
- Shadi DAYEH
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER AND METHOD OF FABRIC...
- Publication number 20200298275
- Publication date Sep 24, 2020
- Korea Institute of Science and Technology
- Byung Chul LEE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL ELECTROACOUSTIC TRANSDUCER WITH PIEZOELECTRI...
- Publication number 20200236470
- Publication date Jul 23, 2020
- STMicroelectronics S.r.l
- Fabrizio CERINI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for Manufacturing MEMS Microphone
- Publication number 20200213797
- Publication date Jul 2, 2020
- AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) CO., LTD
- Zhenkui Meng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO CHECK VALVE AND SYSTEM WITH MULTIPLE MICRO CHECK VALVES AND M...
- Publication number 20200166156
- Publication date May 28, 2020
- MICROFAB SERVICE GMBH
- Marco CORDELAIR
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER AND METHOD OF MANUFA...
- Publication number 20200156111
- Publication date May 21, 2020
- VERMON S.A.
- Dominique GROSS
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PROCESSING SILICON WAFER WITH THROUGH CAVITY STRUCTURE
- Publication number 20190233280
- Publication date Aug 1, 2019
- Shenyang Silicon Technology Co., Ltd.
- Xiang LI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING A MICROMECHANICAL SENSOR
- Publication number 20190161347
- Publication date May 30, 2019
- ROBERT BOSCH GmbH
- Johannes CLASSEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MOX-BASED GAS SENSOR AND MANUFACTURING METHOD THEREOF
- Publication number 20190128830
- Publication date May 2, 2019
- STMicroelectronics S.r.l.
- Alessandra ALBERTI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
AMORPHOUS THIN METAL FILM
- Publication number 20190119101
- Publication date Apr 25, 2019
- Hewlett-Packard Development Company, L.P.
- James Elmer Abbott
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESS FOR PRODUCING AN ELECTROMECHANICAL DEVICE
- Publication number 20180148328
- Publication date May 31, 2018
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Vincent AGACHE
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Curved cantilever design to reduce stress in MEMS actuator

Sharp, vertically aligned nanowire electrode arrays, high-yield fab...

CMUT transducer with motion-stopping structure and CMUT transducer...

Capacitive micromachined ultrasonic transducer and method of fabric...

Curved cantilever design to reduce stress in MEMS actuator

Pulse train excitation for capacitive micromachined ultrasonic tran...

Microfluidic devices with electrodes formed as physically separated...

Method for fabricating semiconductor device

Micro check valve and system with multiple micro check valves and m...

Microelectromechanical electroacoustic transducer with piezoelectri...

Method for manufacturing MEMS microphone

Contoured electrode for capacitive micromachined ultrasonic transducer

Method for manufacturing a micromechanical sensor

Method for sealing an access opening to a cavity and MEMS component...

MOx-based gas sensor and manufacturing method thereof

Small wafer area MEMs switch

Small wafer are MEMS switch

Process for producing an electromechanical device

Pseudo SOI process

Small wafer area MEMS switch

Use of metal native oxide to control stress gradient and bending mo...

Method for making a reinforced silicon micromechanical part

High aspect ratio MEMS devices and methods for forming the same

Oxide microchannel with controllable diameter

Method for fabricating a fixed structure defining a volume receivin...

Constrained oxidation of suspended micro- and nano-structures

Membrane structure element and method for manufacturing same

Method for producing insulation structures

Micromechanical component and corresponding production method

Micromechanical sensor

Patents Applicationslast 30 patents

CURVED CANTILEVER DESIGN TO REDUCE STRESS IN MEMS ACTUATOR

LOW VOLTAGE CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER (CMUT) D...

EMBEDDED PERMEABLE POLYSILICON LAYER IN MEMS DEVICE FOR MULTIPLE CA...

CURVED CANTILEVER DESIGN TO REDUCE STRESS IN MEMS ACTUATOR

FAILURE DETECTION METHOD, FAILURE DETECTION SYSTEM, AND ELECTROSPRA...

PULSE TRAIN EXCITATION FOR CAPACITIVE MICROMACHINED ULTRASONIC TRAN...

MEMS Device and Method for Manufacturing a MEMS Device

MEMS DEVICE AND METHOD OF MANUFACTURING MEMS DEVICE

MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) DEVICE and fabrication metho...

MEMS SENSOR WITH A THIN REGION

CURVED CANTILEVER DESIGN TO REDUCE STRESS IN MEMS ACTUATOR

METHOD FOR STRUCTURAL LAYER FABRICATION IN MICROMECHANICAL DEVICES

ELECTROSTATICALLY GATED NANOFLUIDIC MEMBRANES FOR CONTROL OF MOLECU...

MICROFLUIDIC DEVICES WITH ELECTRODES FORMED AS PHYSICALLY SEPARATED...

GAS SENSOR AND MANUFACTURING METHOD THEREOF

Preparation Method Of Miniature Solid Silicon Needle

CONTOURED ELECTRODE FOR CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER

MICRONEEDLE COATED WITH DRUG AND MANUFACTURING METHOD FOR SAME

METHOD FOR FABRICATING SEMICONDUCTOR DEVICE

SHARP, VERTICALLY ALIGNED NANOWIRE ELECTRODE ARRAYS, HIGH-YIELD FAB...

CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER AND METHOD OF FABRIC...

MICROELECTROMECHANICAL ELECTROACOUSTIC TRANSDUCER WITH PIEZOELECTRI...

Method for Manufacturing MEMS Microphone

MICRO CHECK VALVE AND SYSTEM WITH MULTIPLE MICRO CHECK VALVES AND M...

CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER AND METHOD OF MANUFA...

METHOD FOR PROCESSING SILICON WAFER WITH THROUGH CAVITY STRUCTURE

METHOD FOR MANUFACTURING A MICROMECHANICAL SENSOR

MOX-BASED GAS SENSOR AND MANUFACTURING METHOD THEREOF

AMORPHOUS THIN METAL FILM

PROCESS FOR PRODUCING AN ELECTROMECHANICAL DEVICE